From Yong.Shi at stevens.edu Mon Jan 7 10:23:11 2008 From: Yong.Shi at stevens.edu (Yong Shi) Date: Mon, 07 Jan 2008 10:23:11 -0500 Subject: [labnetwork] PECVD/RIE system In-Reply-To: <200712072149.lB7LnAkK016149@smtp.washington.edu> References: <200712072149.lB7LnAkK016149@smtp.washington.edu> Message-ID: <006501c85141$36c9ad50$c860f69b@me.stevenstech.edu> Could anyone please recommend a new PECVD/RIE system? We are looking for such a system. Thanks a lot! Yong Shi, Ph.D Assistant Professor E207 Mechanical Engineering Department Stevens Institute of Technology Castle Point on the Hudson Hoboken, NJ 07030 Tel: (201) 216-5594 Fax: (201) 216-8315 From gaevskim at Princeton.EDU Fri Jan 11 16:39:18 2008 From: gaevskim at Princeton.EDU (Mikhail Gaevski) Date: Fri, 11 Jan 2008 16:39:18 -0500 Subject: [labnetwork] Bosch ICP etcher Message-ID: <4787E206.9080406@princeton.edu> We are planning to buy Bosch ICP etcher for deep silicon etching. It will be great to use the same etcher also for deep SiO2 etching. The rest of the vendors honestly told us that the machine has to be dedicated to the Bosch process only. But STS company claims that their relatively new STS LpX Pro HRM System can be switched between these two different processes relatively easy and without time consuming recalibration and cleaning. Does anyone on LabNet have an experience with switching between the Bosch process and oxide etching on a similar etching system? Thank you for your opinions, Mikhail Gaevski Mikhail Gaevski, PhD Interim Director of the Micro/Nanofabrication Laboratory J301 E-Quad, PRISM, Princeton University Olden Street, Princeton, NJ 08544 Phone: (609) 258 8234 FAX: (609) 258 1954 e-mail: gaevskim at princeton.edu From philippe.fluckiger at epfl.ch Sat Jan 12 15:42:49 2008 From: philippe.fluckiger at epfl.ch (Philippe Fluckiger) Date: Sat, 12 Jan 2008 21:42:49 +0100 Subject: [labnetwork] Bosch ICP etcher In-Reply-To: <4787E206.9080406@princeton.edu> References: <4787E206.9080406@princeton.edu> Message-ID: <000c01c8555b$b23dd240$16b976c0$@fluckiger@epfl.ch> Dear Mikhail, Deep SiO2 etching and deep silicon etching are running very well together on our Alcatel AMS 200 etcher. More info at: http://cmi.epfl.ch/etch/AMS200.htm Contact person: cyrille.hibert at epfl.ch With my very best regards, Philippe ________________________________________________________________________ Dr Philippe Fl?ckiger Director of Operations EPFL Center of MicroNanoTechnology Phone: +41 21 693 6695 Fax: +41 21 693 5770 Email: philippe.fluckiger at epfl.ch Biography: http://people.epfl.ch/philippe.fluckiger CMI: http://cmi.epfl.ch/ Faculty: http://sti.epfl.ch/ Campus: http://www.epfl.ch/ Postal address: BM 1.125 (BM Building) Station 17 1015 Lausanne Switzerland GPS Coordinates: N 46? 31' 16.32" E 06? 33' 55.08" / Alt. 397m Access Map: http://map.epfl.ch/?room=bm1125 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mikhail Gaevski Sent: vendredi, 11. janvier 2008 22:39 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Bosch ICP etcher We are planning to buy Bosch ICP etcher for deep silicon etching. It will be great to use the same etcher also for deep SiO2 etching. The rest of the vendors honestly told us that the machine has to be dedicated to the Bosch process only. But STS company claims that their relatively new STS LpX Pro HRM System can be switched between these two different processes relatively easy and without time consuming recalibration and cleaning. Does anyone on LabNet have an experience with switching between the Bosch process and oxide etching on a similar etching system? Thank you for your opinions, Mikhail Gaevski Mikhail Gaevski, PhD Interim Director of the Micro/Nanofabrication Laboratory J301 E-Quad, PRISM, Princeton University Olden Street, Princeton, NJ 08544 Phone: (609) 258 8234 FAX: (609) 258 1954 e-mail: gaevskim at princeton.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork