From shott at stanford.edu Tue Jul 8 18:33:29 2008 From: shott at stanford.edu (John Shott) Date: Tue, 08 Jul 2008 15:33:29 -0700 Subject: [labnetwork] Vespel wafer clamp for 4" P5000 etch chamber? Message-ID: <4873EB39.4000004@stanford.edu> Labnetwork community: Does anyone have a source of the vespel wafer clamp for 4-inch wafers for a P5000 etch chamber. Officially, this is known as AMAT part number 0020-03673. In addition to Applied at one point we could get them from M.E.C Tech .... but that appears to no longer be the case. If anyone has alternative sources, I'd be anxious to hear of them. Or if you've upgraded from 4" to 6" wafers and have spares sitting on your shelf, I'd be happy to hear from you. Thanks for your help, John From spb1699 at rit.edu Thu Jul 10 19:32:12 2008 From: spb1699 at rit.edu (Scott Blondell) Date: Thu, 10 Jul 2008 19:32:12 -0400 Subject: [labnetwork] PDF MFCs available Message-ID: <734CF9840B67444BB02D9C11DCA9CDF405225572@svits11.main.ad.rit.edu> If anyone is currently using Precision Flow Devices mass flow controllers and is interested in obtaining more, please contact me for information. We have over a dozen of model PFD-101, in various ranges and gases. They are complete, out of calibration and the operational condition is unknown. Coastal Instruments has supported these MFCs for us in the past. Regards, Scott P. Blondell Facilities Manager Rochester Institute of Technology Semiconductor and Microsystems Fabrication Laboratory 82 Lomb Memorial Dr. Rochester, New York 14623 585-738-4073 C 585-475-2171 O 585-475-5041 F http://smfl.microe.rit.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From gcure at ece.arizona.edu Thu Jul 24 14:54:17 2008 From: gcure at ece.arizona.edu (Gregg D. Cure`) Date: Thu, 24 Jul 2008 11:54:17 -0700 (MST) Subject: [labnetwork] Request for repair info, 4 point probe Message-ID: <1818.150.135.217.55.1216925657.squirrel@ece.arizona.edu> Hello all: We have a 10 year old Superior Electronics model AFPP300upg 4 point probe, vintage 1998. It has performed reliably for us for these ten years but has recently failed. Our in-house efforts to diagnose and repair are limited and the company itself has long vanished into the ether. Does anyone know of a 3rd party entity who can diagnose and repair these types of instruments? Any inputs would be greatly appreciated. Thanks you and regards, -- Gregg D. Cure` The University of Arizona Micro/Nano Fabrication Center Electrical and Computer Engineering 1230 E. Speedway Blvd. P.O. Box 210104 Tucson, AZ 85721-0104 Office: 520.626.1987 Cell: 520.307.2760 Fax: 520.626.7877 Website: http://mfc.engr.arizona.edu