[labnetwork] Safety question on AlGaAs wet oxidation AsH3 byproduct

[weidong zhou]

Sorry to bother you all

We plan to do AlGaAs wet oxidation (typ. sample size is <1cm2) around 300-500 degree. Any one know the exhaust requirement from safety point of view, i.e. what is needed to handle the by-product AsH3? What is the possible ppm for this by-product in the exhaust tube and in the oxidation tube?

Any info/regulations related to the safety of this setup is highly appreciated.

Weidong

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