[labnetwork] Cadmium Telluride sputtering target exchange problems
Keith Bradshaw
bradshaw at utdallas.edu
Fri Jun 19 13:30:26 EDT 2009
We are getting a strong smell from the chamber and instant oxidation and
flaking of product deposited on the chimney of our Sputtering system when
changing the Cad-Tel target.
What is done to avoid this?
Is this smell harmful?
The flakes are very dark and seem to form when we open the system up to
atmosphere. It is load locked so normally it doesn't see air.
Keith Bradshaw
972-883-2099
RL 10
University of Texas at Dallas Clean Room
NSERL building
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