[labnetwork] information on Cressington 108 sputter coater
fred lacy
fredlacy at engr.subr.edu
Fri Mar 6 10:56:08 EST 2009
Greetings. Not sure if anyone can help me with this, but I have a
Cressington 108 sputtering machine and I need the following information:
target voltage
substrate bias (or voltage)
substrate temperature
I checked the website http://www.cressington.com/spec_108.html , and I
could not find what I needed. Any information that anyone can provide,
I would greatly appreciate it. Thanks in advance.
Fred Lacy, Ph.D.
Associate Professor
Electrical Engineering Department
Southern University
College of Engineering
Pinchback Hall, Room 415
Baton Rouge, LA 70813
(225) 771-4094 [direct]
(225) 771-5292 [secretary]
(225) 775-9828 [fax]
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