From ocola at anl.gov  Wed Dec  1 15:11:20 2010
From: ocola at anl.gov (Leonidas E Ocola)
Date: Wed, 01 Dec 2010 14:11:20 -0600
Subject: [labnetwork] NEB-31 vendor
In-Reply-To: <4CF5332D.2020207@seas.upenn.edu>
References: <4CF5332D.2020207@seas.upenn.edu>
Message-ID: <4CF6ABE8.2060400@cnm.anl.gov>

We are waiting for our order as well. We were told that they need to 
accumulate
enough orders so they can make a batch. It is a crummy deal.

Leo

Iulian Codreanu wrote:
> Hi.
>
> Is there another US distributor of NEB-31 besides Sumika Electronic 
> Materials, Inc?  I placed an order with them in early August and I 
> still have not received the resist.
>
> Thank you very much.
>
> Iulian

-- 
Leonidas E. Ocola, PhD
Nanofabrication Group

Center for Nanoscale Materials
Argonne National Laboratory
9700 South Cass Ave, Bldg 440, Rm A129
Argonne, IL 60439

Email: ocola at cnm.anl.gov
Phone: 630-252-6613
Fax :  630-252-5739
Web:   nano.anl.gov
http://nano.anl.gov/docs/people/ocola.pdf





From bbaker at eng.utah.edu  Thu Dec  2 13:42:45 2010
From: bbaker at eng.utah.edu (Brian Baker)
Date: Thu, 2 Dec 2010 11:42:45 -0700
Subject: [labnetwork] hotplates
In-Reply-To: <B8E8659D-AB4A-471F-B80F-A0A364E432EC@eng.utah.edu>
References: <01F47D4EDEEC64488C10B767D15E485808967AAEFA@MBCLUSTER.xchange.nist.gov>
	<B8E8659D-AB4A-471F-B80F-A0A364E432EC@eng.utah.edu>
Message-ID: <001b01cb9250$b8f69d80$2ae3d880$@utah.edu>

Hi all,

If anyone is interested in a good quality wafer baking hot plate for cheap:

We recently purchased a few used 8" wafer baking hot plates (not for
chemical use) for $200 each.  They were originally part of a wafer track
system. We have installed and tested them and they are in excellent shape
and have very good temperature uniformity.  We also slightly modified them
so we could raise and lower the wafer off the hotplate using a switch. I can
provide information on how we did that if anyone is interested.

They don't have these listed on their website but the salesperson told me
they have dozens:

http://www.outbackequipment.com/

C73304 Wafer Coating Track Hot Plate

-Brian Baker
U of U Nanofab


From: "Luciani, Vincent" <vincent.luciani at nist.gov>
Date: November 24, 2010 10:04:50 AM MST
To: "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] hotplates

Hello,
I have also found that hotplates inside a fume hood have a very short life.
The best solution I have experienced is when the hotplate is remoted from
the controls with the controls outside the hood.  We also combined this with
sealing around the underside of the ceramic hotplate with the orange high
temperature RTV.  The stuff made for engine head gaskets, you can get it at
any auto parts store.  It is very chemical and heat resistant. Even on the
non-remote style, you can extend the life of the hotplate by taking it apart
and adding this RTV to seal up all the electronics, including the heater
wiring feedthroughs and the joint around the perimeter on underside of the
heated plate.  You want to keep fumes and liquids from reaching the heating
elements.  Good luck.

Vince




-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of John Shott
Sent: Wednesday, November 24, 2010 9:24 AM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] hotplates

Oops, I see that I responded to Mathieu directly, but failed to also 
include my comments to the mailing list.  So, I will repeat those 
comments here.

Matt:

I hate hot plates too!  My biggest concern, however, is the safety risk 
that they pose.  As you likely know, the most-common Corning hot plates 
can reach 500 Centigrade.  I think that it is not inaccurate to say that 
hot plates have caused more cleanroom fires over the years than any of 
the other hazards with which we deal.

We've tried a number of things but, to my knowledge, we haven't really 
come up with things that we are perfectly happy with.  In fact, for 
heating significant volumes of chemicals (1-2 liters and up) we still 
use the 10" by 10" Corning ceramic tops with remote controls.  The one 
thing that we have done on those which helps with safety a bit, is to 
machine some custom stop rings that fit behind the knob on the D-shaft.  
In that way, if we decided that a particular hot plate should not be 
used at a setting higher than 4, for example, we can insure that this 
cannot happen by having a mechanical stop that prevents the knob from 
being turned past 4.

Particularly for resist bake applications, we've used a variety of 
digital hot plates including the Thermo Scientific Super-Nuova Series.  
Some of these feature an independently settable maximum surface 
temperature and come in either milled aluminun or ceramic coated 
versions for either wafer baking or chemical heating applications, 
respectively.  Torrey Pines Scientific also offer some nice digital hot 
plates that can do things like reasonably well controlled ramp rates 
that offer another useful option for resist baking and similar 
applications.  I'm not sure that we have a favorite, but I'm hopeful 
that others will add their experiences to this discussion.

Good luck,

John



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork





From gregg.cure at gmail.com  Thu Dec 16 17:43:51 2010
From: gregg.cure at gmail.com (Gregg Cure)
Date: Thu, 16 Dec 2010 15:43:51 -0700
Subject: [labnetwork] 3rd party repair/calibration of legacy metrology
Message-ID: <AANLkTikA8gzYy9HCaFoUh=pF0wbKoktWtkuRZjP+FgOd@mail.gmail.com>

We have an older (about 1992 or so) Particle Measuring Systems model
HSLIS-M50 liquid in-situ monitor and particle counter. It has stopped
working.
A conversation with PMS yielded no joy (they no longer support legacy
metrology of this vintage).

Does anyone know of a 3rd party company who repairs and calibrates older
laboratory metrology?

Thanks in advance,
Regards,

-- 
Gregg D. Cure`
The University of Arizona
Arizona Research Laboratories
Nano Fabrication and Processing Center
1230 E. Speedway Blvd.
P.O. Box 210104
Tucson, AZ 85721-0104
Office: 520.626.1987
Cell: 520.307.2760
Fax: 520.626.7877
Website: http://mfc.engr.arizona.edu
Website: http://www.arl.arizona.edu/
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From shott at stanford.edu  Thu Dec 16 20:19:34 2010
From: shott at stanford.edu (John Shott)
Date: Thu, 16 Dec 2010 17:19:34 -0800
Subject: [labnetwork] 3rd party repair/calibration of legacy metrology
In-Reply-To: <AANLkTikA8gzYy9HCaFoUh=pF0wbKoktWtkuRZjP+FgOd@mail.gmail.com>
References: <AANLkTikA8gzYy9HCaFoUh=pF0wbKoktWtkuRZjP+FgOd@mail.gmail.com>
Message-ID: <4D0ABAA6.1060301@stanford.edu>

Gregg:

This may be a long shot, but Tektronix Service Solutions claims to 
calibrate this instrument and on a closely related page under "Support" 
also claim that the repair instruments from a a broad range of 
non-Tektronix manufacturers.

It may at least be worth contacting them to see ... Here is the link:

http://service-solutions.tektronix.com/PMS/HSLIS-M50-4-DI-PARTICLE-COUNT-CALIBRATION/product/ir/2100063127

I've never used Tektronix Service Solutions for either calibration or 
repair so have no first hand experience with them to share.

Good luck,

John




From kuhn1 at purdue.edu  Fri Dec 17 08:31:52 2010
From: kuhn1 at purdue.edu (Kuhn, Jeffrey G)
Date: Fri, 17 Dec 2010 08:31:52 -0500
Subject: [labnetwork] 3rd party repair/calibration of legacy metrology
In-Reply-To: <AANLkTikA8gzYy9HCaFoUh=pF0wbKoktWtkuRZjP+FgOd@mail.gmail.com>
References: <AANLkTikA8gzYy9HCaFoUh=pF0wbKoktWtkuRZjP+FgOd@mail.gmail.com>
Message-ID: <D14ADF941D26CD4E9015A15C62B395566C3FAF534E@VPEXCH06.purdue.lcl>

Gregg,

If repair is not possible, I found a link to one that is for sale in China. Looks like the CRT and flow meter are included:

http://www.netchina.net/finddate_e/ptshow.php?number=40085

I had two HSLIS M50's when I was in the private sector, but they were sent to a sister location when my plant closed back in '05. Even back then, PMS no longer supported that model.

Good luck!

Jeff Kuhn
Facility Engineer
Birck Nanotechnology Center
Purdue University
1205 W. State St.
West Lafayette, IN 47907
Ph:  (765) 496-8329
Fax: (765) 496-2018




From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Gregg Cure
Sent: Thursday, December 16, 2010 5:44 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] 3rd party repair/calibration of legacy metrology

We have an older (about 1992 or so) Particle Measuring Systems model HSLIS-M50 liquid in-situ monitor and particle counter. It has stopped working.
A conversation with PMS yielded no joy (they no longer support legacy metrology of this vintage).

Does anyone know of a 3rd party company who repairs and calibrates older laboratory metrology?

Thanks in advance,
Regards,

--
Gregg D. Cure`
The University of Arizona
Arizona Research Laboratories
Nano Fabrication and Processing Center
1230 E. Speedway Blvd.
P.O. Box 210104
Tucson, AZ 85721-0104
Office: 520.626.1987
Cell: 520.307.2760
Fax: 520.626.7877
Website: http://mfc.engr.arizona.edu
Website: http://www.arl.arizona.edu/
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From ocola at anl.gov  Wed Dec 22 15:45:28 2010
From: ocola at anl.gov (Leonidas E Ocola)
Date: Wed, 22 Dec 2010 14:45:28 -0600
Subject: [labnetwork] Help ... Please !!! ... our safety guys have not clue
 about gas cabinets ...
Message-ID: <4D126368.10804@cnm.anl.gov>


All,

Can anyone tell me if you shut the valves of the gas bottles in your 
cleanroom
during winter break ? Our safety guys are under the impression that it is
hazardous to leave them open. They will only listen to me that they are 
wrong
if other labs leave them as is.

(We have gas cabinets with gas alarms, shutoff valves, manifolds, etc. They
are hooked up to our RIE tool with 12 sticks for different gases)

I do not want to shut all the gas bottles for winter break because I 
believe it is
unnecessary and in some cases could introduce air bubbles into the line
which could affect my RIE recipes if I do not flush the line.

If you can reply within the next few hours I would appreciate it.

Thanks

Leo

-- 
Leonidas E. Ocola, PhD
Nanofabrication Group

Center for Nanoscale Materials
Argonne National Laboratory
9700 South Cass Ave, Bldg 440, Rm A129
Argonne, IL 60439

Email: ocola at cnm.anl.gov
Phone: 630-252-6613
Fax :  630-252-5739
Web:   nano.anl.gov
http://nano.anl.gov/docs/people/ocola.pdf





From gregg.cure at gmail.com  Wed Dec 22 16:49:21 2010
From: gregg.cure at gmail.com (Gregg Cure)
Date: Wed, 22 Dec 2010 14:49:21 -0700
Subject: [labnetwork] Help ... Please !!! ... our safety guys have not
 clue about gas cabinets ...
In-Reply-To: <4D126368.10804@cnm.anl.gov>
References: <4D126368.10804@cnm.anl.gov>
Message-ID: <AANLkTimsbpWxoL3jfP3Y=uN+cyi+kduuSogKQ+3N-vT3@mail.gmail.com>

Hi Leo -

We have older Air Products GG450 cabs (circa 1993), running DCS, SiH4 and
15% PH3/balance SiH4. We have the safe safety infrastructure in place as you
do, plus global SiH4 detection. We leave the bottles open at the bottle
valves all the time, but the cabinets are safed. We usually perform a line
purge prior to a facility shutdown but that's about it.

You certainly can close the bottle valves at the pigtails, but it's really
not necessary.

Regards,
Gregg Cure

On Wed, Dec 22, 2010 at 1:45 PM, Leonidas E Ocola <ocola at anl.gov> wrote:

>
> All,
>
> Can anyone tell me if you shut the valves of the gas bottles in your
> cleanroom
> during winter break ? Our safety guys are under the impression that it is
> hazardous to leave them open. They will only listen to me that they are
> wrong
> if other labs leave them as is.
>
> (We have gas cabinets with gas alarms, shutoff valves, manifolds, etc. They
> are hooked up to our RIE tool with 12 sticks for different gases)
>
> I do not want to shut all the gas bottles for winter break because I
> believe it is
> unnecessary and in some cases could introduce air bubbles into the line
> which could affect my RIE recipes if I do not flush the line.
>
> If you can reply within the next few hours I would appreciate it.
>
> Thanks
>
> Leo
>
> --
> Leonidas E. Ocola, PhD
> Nanofabrication Group
>
> Center for Nanoscale Materials
> Argonne National Laboratory
> 9700 South Cass Ave, Bldg 440, Rm A129
> Argonne, IL 60439
>
> Email: ocola at cnm.anl.gov
> Phone: 630-252-6613
> Fax :  630-252-5739
> Web:   nano.anl.gov
> http://nano.anl.gov/docs/people/ocola.pdf
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>


-- 
Gregg D. Cure`
The University of Arizona
Arizona Research Laboratories
Nano Fabrication and Processing Center
1230 E. Speedway Blvd.
P.O. Box 210104
Tucson, AZ 85721-0104
Office: 520.626.1987
Cell: 520.307.2760
Fax: 520.626.7877
Website: http://mfc.engr.arizona.edu
Website: http://www.arl.arizona.edu/
-------------- next part --------------
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From hughes at illinois.edu  Wed Dec 22 16:50:41 2010
From: hughes at illinois.edu (Hughes, John S)
Date: Wed, 22 Dec 2010 15:50:41 -0600
Subject: [labnetwork] Help ... Please !!! ... our safety guys have not
 clue about gas cabinets ...
In-Reply-To: <4D126368.10804@cnm.anl.gov>
References: <4D126368.10804@cnm.anl.gov>
Message-ID: <2BC1FC71-6B0B-4E34-8025-882FCDE86413@illinois.edu>


Hi Leo,

With the hazardous gases, our procedures require that tool users open the gas cylinders when they start their process and close them when finished. (Oxygen, nitrogen, argon, and a couple others are usually always kept open.) So our toxic gas cylinders will be closed over the break. (That doesn't necessarily mean that the lines get evacuated/purged back to the cylinders.)

I'm not sure why you think you might get air bubbles in the lines if you close the cylinders. Perhaps you could elaborate.

 -- John

-------------------------------------------------------------
John S. Hughes                         Office: (217) 333-4674
Associate Director                        FAX: (217) 244-6375
Laboratory Operations                     hughes at illinois.edu<mailto:hughes at illinois.edu>
Micro and Nanotechnology Laboratory
University of Illinois at Urbana-Champaign
3114 Micro and Nanotechnology Laboratory
208 North Wright Street
Urbana, Illinois  61801              http://mntl.illinois.edu
-------------------------------------------------------------

On Dec 22, 2010, at 2:45 PM, Leonidas E Ocola wrote:


All,

Can anyone tell me if you shut the valves of the gas bottles in your
cleanroom
during winter break ? Our safety guys are under the impression that it is
hazardous to leave them open. They will only listen to me that they are
wrong
if other labs leave them as is.

(We have gas cabinets with gas alarms, shutoff valves, manifolds, etc. They
are hooked up to our RIE tool with 12 sticks for different gases)

I do not want to shut all the gas bottles for winter break because I
believe it is
unnecessary and in some cases could introduce air bubbles into the line
which could affect my RIE recipes if I do not flush the line.

If you can reply within the next few hours I would appreciate it.

Thanks

Leo

--
Leonidas E. Ocola, PhD
Nanofabrication Group

Center for Nanoscale Materials
Argonne National Laboratory
9700 South Cass Ave, Bldg 440, Rm A129
Argonne, IL 60439

Email: ocola at cnm.anl.gov<mailto:ocola at cnm.anl.gov>
Phone: 630-252-6613
Fax :  630-252-5739
Web:   nano.anl.gov<http://nano.anl.gov>
http://nano.anl.gov/docs/people/ocola.pdf



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork




From ocola at anl.gov  Wed Dec 22 17:25:36 2010
From: ocola at anl.gov (Leonidas E Ocola)
Date: Wed, 22 Dec 2010 16:25:36 -0600
Subject: [labnetwork] Help ... Please !!! ... our safety guys have not
 clue about gas cabinets ...
In-Reply-To: <8F95EA77ACBF904A861E580B44288EFD99B7797B75@FASXCH02.fasmail.priv>
References: <4D126368.10804@cnm.anl.gov>
	<8F95EA77ACBF904A861E580B44288EFD99B7797B75@FASXCH02.fasmail.priv>
Message-ID: <4D127AE0.4010804@cnm.anl.gov>

All,

I appreciate the comments about the "air bubbles".
I admit it is an overblown comment.

Thank you and have happy holidays.

Leo

Paolini, Steve wrote:
> Leo, If you're gas cylinders are piped in such a manner that air bubbles can be introduced simply by shutting the cylinder valve, you have much more to worry about that the mandate of shutting them down.
> Federal and local regulations dictate which type of valve can be installed for use on compressed gas cylinders. Almost all common cylinders whether containing inert or hazardous contents use some variation of a diaphragm valve, what this means is that you will not get leak-by at the stem (under the handle) when opening or closing. It is critical that this stem seal is durable and that is why the Compressed Gas Association regulates the type of valve and connection for all compressed gases. 
> I see absolutely no problem in shutting the cylinder valves at any given time. When I first started in the semiconductor industry we had all manual gas equipment and this was a nightly ritual after pumping out the lines. The statement that you made about air bubbles concerns me; have you experienced any indication that the gas circuit could be breached? I would suggest shutting the cylinder then pumping the lines back and noting the pressure reading. If you return from your break and notice degradation by a rise in pressure, you must leak check your gas circuit (after purging thoroughly).
> Stay safe and don't hesitate to contact me if a question should arise.
> Regards,
>
> Steve Paolini
> Principal Equipment Engineer
> Harvard University Center for Nanoscale Systems
> 11 Oxford St. Cambridge MA 02138
> Tel. 617 496 9816
> Cell. 617 851 4793
> spaolini at cns.fas.harvard.edu
>
>
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Leonidas E Ocola
> Sent: Wednesday, December 22, 2010 3:45 PM
> To: 'Rob Ilic'; Daniel Christensen; Fab Network
> Subject: [labnetwork] Help ... Please !!! ... our safety guys have not clue about gas cabinets ...
>
>
> All,
>
> Can anyone tell me if you shut the valves of the gas bottles in your 
> cleanroom
> during winter break ? Our safety guys are under the impression that it is
> hazardous to leave them open. They will only listen to me that they are 
> wrong
> if other labs leave them as is.
>
> (We have gas cabinets with gas alarms, shutoff valves, manifolds, etc. They
> are hooked up to our RIE tool with 12 sticks for different gases)
>
> I do not want to shut all the gas bottles for winter break because I 
> believe it is
> unnecessary and in some cases could introduce air bubbles into the line
> which could affect my RIE recipes if I do not flush the line.
>
> If you can reply within the next few hours I would appreciate it.
>
> Thanks
>
> Leo
>
>   

-- 
Leonidas E. Ocola, PhD
Nanofabrication Group

Center for Nanoscale Materials
Argonne National Laboratory
9700 South Cass Ave, Bldg 440, Rm A129
Argonne, IL 60439

Email: ocola at cnm.anl.gov
Phone: 630-252-6613
Fax :  630-252-5739
Web:   nano.anl.gov
http://nano.anl.gov/docs/people/ocola.pdf





From ocola at anl.gov  Wed Dec 22 17:40:21 2010
From: ocola at anl.gov (Leonidas E Ocola)
Date: Wed, 22 Dec 2010 16:40:21 -0600
Subject: [labnetwork] Help ... Please !!! ... our safety guys have not
 clue about gas cabinets ...
In-Reply-To: <2BC1FC71-6B0B-4E34-8025-882FCDE86413@illinois.edu>
References: <4D126368.10804@cnm.anl.gov>
	<2BC1FC71-6B0B-4E34-8025-882FCDE86413@illinois.edu>
Message-ID: <4D127E55.3070006@cnm.anl.gov>



Sorry again for the air bubble comment. It seems it is I who has not clue.

I figured that if we have a gas detection system in place with shut down 
valves,
and the tools are not used, that we do not need shut them down for the 
holidays.

Thanks

Leo



Hughes, John S wrote:
> Hi Leo,
>
> With the hazardous gases, our procedures require that tool users open the gas cylinders when they start their process and close them when finished. (Oxygen, nitrogen, argon, and a couple others are usually always kept open.) So our toxic gas cylinders will be closed over the break. (That doesn't necessarily mean that the lines get evacuated/purged back to the cylinders.)
>
> I'm not sure why you think you might get air bubbles in the lines if you close the cylinders. Perhaps you could elaborate.
>
>  -- John
>
> -------------------------------------------------------------
> John S. Hughes                         Office: (217) 333-4674
> Associate Director                        FAX: (217) 244-6375
> Laboratory Operations                     hughes at illinois.edu<mailto:hughes at illinois.edu>
> Micro and Nanotechnology Laboratory
> University of Illinois at Urbana-Champaign
> 3114 Micro and Nanotechnology Laboratory
> 208 North Wright Street
> Urbana, Illinois  61801              http://mntl.illinois.edu
> -------------------------------------------------------------
>
> On Dec 22, 2010, at 2:45 PM, Leonidas E Ocola wrote:
>
>
> All,
>
> Can anyone tell me if you shut the valves of the gas bottles in your
> cleanroom
> during winter break ? Our safety guys are under the impression that it is
> hazardous to leave them open. They will only listen to me that they are
> wrong
> if other labs leave them as is.
>
> (We have gas cabinets with gas alarms, shutoff valves, manifolds, etc. They
> are hooked up to our RIE tool with 12 sticks for different gases)
>
> I do not want to shut all the gas bottles for winter break because I
> believe it is
> unnecessary and in some cases could introduce air bubbles into the line
> which could affect my RIE recipes if I do not flush the line.
>
> If you can reply within the next few hours I would appreciate it.
>
> Thanks
>
> Leo
>
> --
> Leonidas E. Ocola, PhD
> Nanofabrication Group
>
> Center for Nanoscale Materials
> Argonne National Laboratory
> 9700 South Cass Ave, Bldg 440, Rm A129
> Argonne, IL 60439
>
> Email: ocola at cnm.anl.gov<mailto:ocola at cnm.anl.gov>
> Phone: 630-252-6613
> Fax :  630-252-5739
> Web:   nano.anl.gov<http://nano.anl.gov>
> http://nano.anl.gov/docs/people/ocola.pdf
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>   

-- 
Leonidas E. Ocola, PhD
Nanofabrication Group

Center for Nanoscale Materials
Argonne National Laboratory
9700 South Cass Ave, Bldg 440, Rm A129
Argonne, IL 60439

Email: ocola at cnm.anl.gov
Phone: 630-252-6613
Fax :  630-252-5739
Web:   nano.anl.gov
http://nano.anl.gov/docs/people/ocola.pdf





From spaolini at cns.fas.harvard.edu  Wed Dec 22 16:59:13 2010
From: spaolini at cns.fas.harvard.edu (Paolini, Steve)
Date: Wed, 22 Dec 2010 16:59:13 -0500
Subject: [labnetwork] Help ... Please !!! ... our safety guys have not
 clue about gas cabinets ...
In-Reply-To: <4D126368.10804@cnm.anl.gov>
References: <4D126368.10804@cnm.anl.gov>
Message-ID: <8F95EA77ACBF904A861E580B44288EFD99B7797B75@FASXCH02.fasmail.priv>

Leo, If you're gas cylinders are piped in such a manner that air bubbles can be introduced simply by shutting the cylinder valve, you have much more to worry about that the mandate of shutting them down.
Federal and local regulations dictate which type of valve can be installed for use on compressed gas cylinders. Almost all common cylinders whether containing inert or hazardous contents use some variation of a diaphragm valve, what this means is that you will not get leak-by at the stem (under the handle) when opening or closing. It is critical that this stem seal is durable and that is why the Compressed Gas Association regulates the type of valve and connection for all compressed gases. 
I see absolutely no problem in shutting the cylinder valves at any given time. When I first started in the semiconductor industry we had all manual gas equipment and this was a nightly ritual after pumping out the lines. The statement that you made about air bubbles concerns me; have you experienced any indication that the gas circuit could be breached? I would suggest shutting the cylinder then pumping the lines back and noting the pressure reading. If you return from your break and notice degradation by a rise in pressure, you must leak check your gas circuit (after purging thoroughly).
Stay safe and don't hesitate to contact me if a question should arise.
Regards,

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St. Cambridge MA 02138
Tel. 617 496 9816
Cell. 617 851 4793
spaolini at cns.fas.harvard.edu


-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Leonidas E Ocola
Sent: Wednesday, December 22, 2010 3:45 PM
To: 'Rob Ilic'; Daniel Christensen; Fab Network
Subject: [labnetwork] Help ... Please !!! ... our safety guys have not clue about gas cabinets ...


All,

Can anyone tell me if you shut the valves of the gas bottles in your 
cleanroom
during winter break ? Our safety guys are under the impression that it is
hazardous to leave them open. They will only listen to me that they are 
wrong
if other labs leave them as is.

(We have gas cabinets with gas alarms, shutoff valves, manifolds, etc. They
are hooked up to our RIE tool with 12 sticks for different gases)

I do not want to shut all the gas bottles for winter break because I 
believe it is
unnecessary and in some cases could introduce air bubbles into the line
which could affect my RIE recipes if I do not flush the line.

If you can reply within the next few hours I would appreciate it.

Thanks

Leo

-- 
Leonidas E. Ocola, PhD
Nanofabrication Group

Center for Nanoscale Materials
Argonne National Laboratory
9700 South Cass Ave, Bldg 440, Rm A129
Argonne, IL 60439

Email: ocola at cnm.anl.gov
Phone: 630-252-6613
Fax :  630-252-5739
Web:   nano.anl.gov
http://nano.anl.gov/docs/people/ocola.pdf



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From ocola at anl.gov  Thu Dec 23 11:08:14 2010
From: ocola at anl.gov (Leo Ocola)
Date: Thu, 23 Dec 2010 10:08:14 -0600 (CST)
Subject: [labnetwork] Help ... Please !!! ... our safety guys have not
 clue about gas cabinets ...
In-Reply-To: <4D136180.9020506@stanford.edu>
Message-ID: <504555811.749.1293120494614.JavaMail.root@zimbra.anl.gov>

John, and all,

I am deeply thankful for all your feedback.
Our safety guys are also thankful.

There is about a 2:1 ratio  (do not shut off : do shut off) in the Fab Network responses.

Although your comment covers some issues that are worth considering.
In our system, the double walled gas lines have vacuum in the 
void between the tubes. In this way, if there is a leak
it can be easily detected as a drop in vacuum.

Our gas cabinet and toxic gas piping supplier is
AES (Applied Energy Systems). Steve Buerkel is
the one who recommended we use the vacuum as a means 
to detect any leaks in double walled lines.

Thanks to all.

Leo



----- Original Message -----
From: "John Shott" <shott at stanford.edu>
To: "Leonidas E Ocola" <ocola at anl.gov>
Cc: "Rob Ilic" <rob at cnf.cornell.edu>, "Daniel Christensen" <dan at engr.wisc.edu>, "Fab Network" <labnetwork at mtl.mit.edu>
Sent: Thursday, December 23, 2010 8:49:36 AM
Subject: Re: [labnetwork] Help ... Please !!! ... our safety guys have not clue about gas cabinets ...

Leo et al:

Just to add another point of reference to this discussion.

Normally, our bottles are open and charged with gas all of the time ... 
50 weeks a year around the clock.  Gas detectors, seismic switch, etc 
shut the pneumatic valve in the pigtail in the event of a problem.

We do valve off the bottles during the holiday shutdown with product 
still in the lines ... but not for the safety reasons that you imply.  
During this shutdown period, we have 100% sensor testing with live gas 
performed by a third party with county hazardous materials inspectors 
witnessing each test.  That normally takes two full days and often has 
the TGO system in a state where it wouldn't call the fire department, 
for example, in the event of a real emergency.  Also, during that time, 
our fume scrubbers are shutdown for annual cleans.  When they are 
shutdown we have no ability to treat for a catastrophic leak so having 
the bottle valves shut eliminates the chance of a big release.  Finally, 
with the bottle valves off, it also allows us to check for static creep 
in the regulator and, by watching for high- or low-pressure changes over 
a period of days, provides at least a modest double-check of any leaks 
in the system.  In other words, because we are not using any of the 
gases and because we are working on systems that support those gases in 
various ways, we shut the bottle valves but without purging the gas lines.

Thanks,

John




From shott at stanford.edu  Thu Dec 23 09:49:36 2010
From: shott at stanford.edu (John Shott)
Date: Thu, 23 Dec 2010 06:49:36 -0800
Subject: [labnetwork] Help ... Please !!! ... our safety guys have not
 clue about gas cabinets ...
In-Reply-To: <4D126368.10804@cnm.anl.gov>
References: <4D126368.10804@cnm.anl.gov>
Message-ID: <4D136180.9020506@stanford.edu>

Leo et al:

Just to add another point of reference to this discussion.

Normally, our bottles are open and charged with gas all of the time ... 
50 weeks a year around the clock.  Gas detectors, seismic switch, etc 
shut the pneumatic valve in the pigtail in the event of a problem.

We do valve off the bottles during the holiday shutdown with product 
still in the lines ... but not for the safety reasons that you imply.  
During this shutdown period, we have 100% sensor testing with live gas 
performed by a third party with county hazardous materials inspectors 
witnessing each test.  That normally takes two full days and often has 
the TGO system in a state where it wouldn't call the fire department, 
for example, in the event of a real emergency.  Also, during that time, 
our fume scrubbers are shutdown for annual cleans.  When they are 
shutdown we have no ability to treat for a catastrophic leak so having 
the bottle valves shut eliminates the chance of a big release.  Finally, 
with the bottle valves off, it also allows us to check for static creep 
in the regulator and, by watching for high- or low-pressure changes over 
a period of days, provides at least a modest double-check of any leaks 
in the system.  In other words, because we are not using any of the 
gases and because we are working on systems that support those gases in 
various ways, we shut the bottle valves but without purging the gas lines.

Thanks,

John




From rsavage at calpoly.edu  Thu Dec 30 16:57:52 2010
From: rsavage at calpoly.edu (Richard Savage)
Date: Thu, 30 Dec 2010 13:57:52 -0800
Subject: [labnetwork] 200 mm Silicon Wafers
In-Reply-To: <001b01cb9250$b8f69d80$2ae3d880$@utah.edu>
References: <01F47D4EDEEC64488C10B767D15E485808967AAEFA@MBCLUSTER.xchange.nist.gov>	<B8E8659D-AB4A-471F-B80F-A0A364E432EC@eng.utah.edu>
	<001b01cb9250$b8f69d80$2ae3d880$@utah.edu>
Message-ID: <000401cba86c$9b60fc70$d222f550$@edu>

All:
I have quite a few boxes (25 wafers/box) of new Prime 200mm silicon wafers
(never been processed).
(100) orientation epi wafers with p-type (B) substrate 730 microns thick and
epi layer p-type (B) 4-4.5 microns thick.
Am willing to sell at $250/box to raise money for our Micro Systems
Technology student research group (www.mst.calpoly.edu).
Please contact me if you are interested.
Regards,
Rich

Richard N. Savage, Ph.D.
Professor
Materials Engineering, 41-227
1 Grand Avenue
Cal Poly State University
San Luis Obispo, CA  93407
805-756-6441
rsavage at calpoly.edu





From tingliu at princeton.edu  Thu Dec 30 18:18:02 2010
From: tingliu at princeton.edu (Ting Liu)
Date: Thu, 30 Dec 2010 18:18:02 -0500
Subject: [labnetwork] Edwards EXT555H Turbo Pump
Message-ID: <AANLkTinUxe=+ExQndJueFLBfy5SHi5BZJzPMNKCUfMEg@mail.gmail.com>

Hi All,

We have an Edwards thermal evaporator with an Edwards EXT555H Turbo Pump.

The bearing of the turbo pump has been broken recently, and Edwards has
stopped servicing this model because it is too old.

Does anyone has a thermal evaporator with a working Edwards EXT555H Turbo
Pump which is not in use? We want to buy the thermal evaporator or the Turbo
pump alone if possible.

Any information about where we can have the turbo pump fixed at a reasonable
price will also be appreciated.

Thanks and Happy New Year!!
Ting
------------------------------------------------------------
Ting Liu, PhD student
Department of Electrical Engineering and PRISM
Princeton University
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