[labnetwork] Help ... Please !!! ... our safety guys have not clue about gas cabinets ...

Leonidas E Ocola ocola at anl.gov
Wed Dec 22 17:40:21 EST 2010



Sorry again for the air bubble comment. It seems it is I who has not clue.

I figured that if we have a gas detection system in place with shut down 
valves,
and the tools are not used, that we do not need shut them down for the 
holidays.

Thanks

Leo



Hughes, John S wrote:
> Hi Leo,
>
> With the hazardous gases, our procedures require that tool users open the gas cylinders when they start their process and close them when finished. (Oxygen, nitrogen, argon, and a couple others are usually always kept open.) So our toxic gas cylinders will be closed over the break. (That doesn't necessarily mean that the lines get evacuated/purged back to the cylinders.)
>
> I'm not sure why you think you might get air bubbles in the lines if you close the cylinders. Perhaps you could elaborate.
>
>  -- John
>
> -------------------------------------------------------------
> John S. Hughes                         Office: (217) 333-4674
> Associate Director                        FAX: (217) 244-6375
> Laboratory Operations                     hughes at illinois.edu<mailto:hughes at illinois.edu>
> Micro and Nanotechnology Laboratory
> University of Illinois at Urbana-Champaign
> 3114 Micro and Nanotechnology Laboratory
> 208 North Wright Street
> Urbana, Illinois  61801              http://mntl.illinois.edu
> -------------------------------------------------------------
>
> On Dec 22, 2010, at 2:45 PM, Leonidas E Ocola wrote:
>
>
> All,
>
> Can anyone tell me if you shut the valves of the gas bottles in your
> cleanroom
> during winter break ? Our safety guys are under the impression that it is
> hazardous to leave them open. They will only listen to me that they are
> wrong
> if other labs leave them as is.
>
> (We have gas cabinets with gas alarms, shutoff valves, manifolds, etc. They
> are hooked up to our RIE tool with 12 sticks for different gases)
>
> I do not want to shut all the gas bottles for winter break because I
> believe it is
> unnecessary and in some cases could introduce air bubbles into the line
> which could affect my RIE recipes if I do not flush the line.
>
> If you can reply within the next few hours I would appreciate it.
>
> Thanks
>
> Leo
>
> --
> Leonidas E. Ocola, PhD
> Nanofabrication Group
>
> Center for Nanoscale Materials
> Argonne National Laboratory
> 9700 South Cass Ave, Bldg 440, Rm A129
> Argonne, IL 60439
>
> Email: ocola at cnm.anl.gov<mailto:ocola at cnm.anl.gov>
> Phone: 630-252-6613
> Fax :  630-252-5739
> Web:   nano.anl.gov<http://nano.anl.gov>
> http://nano.anl.gov/docs/people/ocola.pdf
>
>
>
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>
>   

-- 
Leonidas E. Ocola, PhD
Nanofabrication Group

Center for Nanoscale Materials
Argonne National Laboratory
9700 South Cass Ave, Bldg 440, Rm A129
Argonne, IL 60439

Email: ocola at cnm.anl.gov
Phone: 630-252-6613
Fax :  630-252-5739
Web:   nano.anl.gov
http://nano.anl.gov/docs/people/ocola.pdf






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