From codreanu at seas.upenn.edu Thu Sep 2 08:54:22 2010 From: codreanu at seas.upenn.edu (Iulian Codreanu) Date: Thu, 02 Sep 2010 08:54:22 -0400 Subject: [labnetwork] piping materials in your cleanroom Message-ID: <4C7F9E7E.2090503@seas.upenn.edu> Good Morning. I am having some disagreements with the design company regarding the piping materials that should be used in our new cleanroom and I need your help. The best answer I could get from them so far is something like "this is common practice". Could you please tell me what material your facility uses for the process vacuum distribution system? Also, what materials does your facility use for house N2 and for process N2? Do you have two separate N2 distribution systems? Do you have two separate bulk LN2 tanks or do you use purifiers for process N2? In case you use purifiers, are they at the facility level, bay level, tool level, etc? What type of purifier is most cost-effective over the long term; the ones that can be regenerated (I hope there is such a thing) or the ones that have to be replaced? Thank you very much. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 305 Moore Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab From scoggin at uark.edu Mon Sep 13 13:32:50 2010 From: scoggin at uark.edu (steve scoggin) Date: Mon, 13 Sep 2010 12:32:50 -0500 Subject: [labnetwork] Quintel 7000 mask aligner and SVG 8800 Coater/Dev for sale Message-ID: <20100913123250.15347gqjud2oxjcy@uamail.uark.edu> Steve W. Scoggin Master Scientific Research Technologist University of Arkansas College of Engineering Office of the Dean 3189 Bell Engineering Center Fayetteville, Ar 72701 Office 479-575-6049 cell 479-236-6049 Fax 479-575-5500 www.hidec.uark.edu/?section=people&content=person&person=scoggin Greetings, Available for sale is the attached and below described Quintel 7000 mask aligner. The system is currently tooled for 100mm and 75mm round wafers, can be tooled up to 200mm wafers. The system is complete and in working condition. Also available is a SVG 8800 dual track coater/developer also complete working condition. Tools are located here in Fayetteville, Arkansas and available for inspection with notice. Regards, Steve W. Scoggin Phone-479-236-6049 QUINTEL 7000 AL Autoloader Mask Aligner, complete, operational> Wafer sizes from pieces 8" diameter or substrates up to 6'x6'> Currently tooled for 4' with 5x5 Mask Holder (Optional 3' with 4x4 Mask> Plate)> Fully motorized X-Y-Theta alignment stage> Manual Tray load for substrateloading/unloading> CCTV Splitfield microscope with zoom> Has Optional Magna View (optical) splitfield / singlefield microscope with> Magna View CCTV for Microscope> Simple Topside Mask loading> UltraSense constant intensity UV power Supply> System set @ 200Watt can be set to 350 Watt> UV Collimation lens for improvedprinting resolution> Shock Isolation Table included as Standard> > Options:> Robotic auto load handling> Pulsed exposure timer sequencing> > Performance:> Print Modes: Soft, Pressure, Vacuum contact> Print Resolution: =<1.0microns> Alignment Stage:> Alignment Travel X-Y: Motorized with automatic re-centering> Alignment Travel Theta: Motorized with automatic re-centering> StageScan: +/- 19mm> X-Y Movement: +/-4mm> Theta RotationRange: +/-7 degrees> Mask / Wafer Separation: 0 - 300 microns> MaskSize: 2.5X2.5'up to 9x9 (optional mask plates required)> Topside Alignment Overlay: <0.5 microns> Bottomside Alignment Overlay: >2microns> Operator/process dependant> > UV LampHouse / UV Optics:> Lamphouse: 200/350 W (setup for 200)> ExposureOptics: UV (350-450 nm) standard> UV Uniformity: +/- 4% 150mm dia. / +/- 5% 200 mm dia.> > System Requirements:> Voltage: 240VAC 50Hz> Compressed Air: 6.2-7.6 bar (90-110PSI)> Vacuum: -0.7 bar (21' Hg)> Nitrogen or CDA: 4.2 bar (60 PSI)> > System WxDxH: 1194x838x1194mm (47'x33'x47')> Weight: 340kg (750lb)> Operational when de-installed> 1999 vintage. From info at fabsurplus.com Mon Sep 13 17:37:49 2010 From: info at fabsurplus.com (Stephen CS Howe) Date: Mon, 13 Sep 2010 23:37:49 +0200 Subject: [labnetwork] Quintel 7000 mask aligner and SVG 8800 Coater/Dev for sale In-Reply-To: <20100913123250.15347gqjud2oxjcy@uamail.uark.edu> References: <20100913123250.15347gqjud2oxjcy@uamail.uark.edu> Message-ID: <1284413869.2567.106.camel@samsung.tower> Dear Steve, Myself and other list members I am sure thank you for letting us know about this equipment. I am always on the lookout for used equipment. If any other list members need to sell used equipment, please do not hesitate to contact me or one of my collegues, who read this mail in CC. Please send me more details about this equipment you have available, including the price if possible. Yours sincerely, Stephen Howe Company Owner SDI Fabsurplus Group Via F Russo, 19 Napoli 80123 Italy +39 081 240 3115 (Office) +39 335 710 7756 (Mobile) Skype: Stephencshowe PS: By the way, I am also looking for the following equipment: APPLIED MATERIALS VERITY 4i Applied Materials Centura Epi or HTF CVD. (8" 2ch, RP in case of Epi) Anelva C7100 sputter tools:12"/300mm Qty: 2 Each ASM A400 or SVG 8000 AVP oxidation Vert furn. DIFF_V ASM A400 or SVG 8000 AVP LPCVD Vert furn. NITRIDE ASM A400 or SVG 8000 AVP LPCVD Vert furn. POLY UNDOPED ASM A400 or SVG 8000 AVP LPCVD Vert furn. PHOSPHOR LPCVD,, 2 reactor, dual boat, PHOSPOR ASM A400 or SVG 8000 AVP LPCVD Vert furn. DOPED ASM A400 or SVG 8000 AVP LPCVD Vert furn. TEOS ASM A400 or SVG 8000 AVP oxidation/ anneal Vert furn. ALLOY ASML /100D or /200 with fast TTL ASML /1400 Axcelis GSD 200E2 High Energy Implanter Biorad / Accent Opto QS2200M FTIR BRUCE BDF 41 oxidation/ anneal High temperature, SiC-ware 4 tubes, SiC ware, 1250?C, external torch, 4 gaslines(N2,O2 hi Flow), Boatloader, Robot Loading QTY 2 CANON ES3 / ES2+ / ES4 - Should be able to demonstrate running wafers DNS 820L or STEAG/MATTSON STEAG/MATTSON AWP200 anorganic clean + resist removal GATE clean (LAB+clean) SPM+ DHF+ SC1+ SC2+ 4xQDR + 2xdry DNS 820L or STEAG/MATTSON AWP200 anorganic clean + resist removal GATE clean (LAB+clean) SPM+ DHF+ SC1+ SC2+ 4xQDR + 2xdry DNS 820L or STEAG/MATTSON AWP200 nitride etch nitride etch DHF+ H3PO4 with Nisson + BOE + rinse + dry ESE 2013 or SEZ RST203 wetetch Si, Film etch, thin wafer handling 3 chemical cabinets, bernoulli handling, ESE 2013 or SEZ RST203 wetetch Si, Film etch, 2 chemical cabinets (1 with mixoption), Film removal ESEC 2008 FSI Polaris K and S Maxum Plus MIRAE MR7500 Nikon i12 or i11D, 5 inch reticle Novellus C3 Altus W 300 mm Mattson Aspen 3 Omron VT-Win II PHILIPS CM 12 Semitool SST organic clean EKC, polymere removal 2 chambers, stainless steel TERADYNE J750 THERMA-WAVE INC. THERMA-PROBE 500 XP NID-Dryer wetetch IPA dryer, thin wafer handling IPA dryer VARIAN VIISION 200 or AXCELIS GSD 200E2 implanter high current >160 keV;3xSDS +1xHigh pressure gaslines, plasma flood gun QTY 2 VARIAN EHP500 or AXCELIS NV8202 implanter Medium Current QTY 3 Complete front end line - 8 inch Let us know right away if your purchasing department is looking to buy any hard to find equipment right now ! Stephen Howe On Mon, 2010-09-13 at 12:32 -0500, steve scoggin wrote: > Steve W. Scoggin > Master Scientific Research Technologist > University of Arkansas > College of Engineering > Office of the Dean > 3189 Bell Engineering Center > Fayetteville, Ar 72701 > Office 479-575-6049 > cell 479-236-6049 > Fax 479-575-5500 > www.hidec.uark.edu/?section=people&content=person&person=scoggin > > > > Greetings, > > Available for sale is the attached and below described Quintel 7000 > mask aligner. The system is currently tooled for 100mm and 75mm round > wafers, can be tooled up to 200mm wafers. The system is complete and > in working condition. Also available is a SVG 8800 dual track > coater/developer also complete working condition. Tools are located > here in Fayetteville, Arkansas and available for inspection with notice. > > Regards, > > > Steve W. Scoggin > Phone-479-236-6049 > > > > > > > > > > > > QUINTEL 7000 AL Autoloader Mask Aligner, complete, operational> > Wafer sizes from pieces 8" diameter or substrates up to 6'x6'> > Currently tooled for 4' with 5x5 Mask Holder (Optional 3' with 4x4 > Mask> Plate)> Fully motorized X-Y-Theta alignment stage> Manual Tray > load for substrateloading/unloading> CCTV Splitfield microscope with > zoom> Has Optional Magna View (optical) splitfield / singlefield > microscope with> Magna View CCTV for Microscope> Simple Topside Mask > loading> UltraSense constant intensity UV power Supply> System set @ > 200Watt can be set to 350 Watt> UV Collimation lens for > improvedprinting resolution> Shock Isolation Table included as > Standard> > Options:> Robotic auto load handling> Pulsed exposure > timer sequencing> > Performance:> Print Modes: Soft, Pressure, Vacuum > contact> Print Resolution: =<1.0microns> Alignment Stage:> Alignment > Travel X-Y: Motorized with automatic re-centering> Alignment Travel > Theta: Motorized with automatic re-centering> StageScan: +/- 19mm> X-Y > Movement: +/-4mm> Theta RotationRange: +/-7 degrees> Mask / Wafer > Separation: 0 - 300 microns> MaskSize: 2.5X2.5'up to 9x9 (optional > mask plates required)> Topside Alignment Overlay: <0.5 microns> > Bottomside Alignment Overlay: >2microns> Operator/process dependant> > > UV LampHouse / UV Optics:> Lamphouse: 200/350 W (setup for 200)> > ExposureOptics: UV (350-450 nm) standard> UV Uniformity: +/- 4% 150mm > dia. / +/- 5% 200 mm dia.> > System Requirements:> Voltage: 240VAC > 50Hz> Compressed Air: 6.2-7.6 bar (90-110PSI)> Vacuum: -0.7 bar (21' > Hg)> Nitrogen or CDA: 4.2 bar (60 PSI)> > System WxDxH: > 1194x838x1194mm (47'x33'x47')> Weight: 340kg (750lb)> Operational when > de-installed> 1999 vintage. > > > > > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From codreanu at seas.upenn.edu Wed Sep 15 08:52:35 2010 From: codreanu at seas.upenn.edu (Iulian Codreanu) Date: Wed, 15 Sep 2010 08:52:35 -0400 Subject: [labnetwork] foreline and exhaust line maintenance Message-ID: <4C90C193.40609@seas.upenn.edu> Good Morning. I understand that the foreline and pump exhaust line on tools using particular precursors (e.g. silane) need to be made of short (4-5 ft) sections so that they can be immersed in a liquid bath to neutralize the exhaust byproducts that accumulate over time. If you do something similar in your fab could you please share your experience with us? Thank you very much. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 305 Moore Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab From bob at eecs.berkeley.edu Wed Sep 15 12:19:42 2010 From: bob at eecs.berkeley.edu (Bob Hamilton) Date: Wed, 15 Sep 2010 09:19:42 -0700 Subject: [labnetwork] foreline and exhaust line maintenance In-Reply-To: <4C90C193.40609@seas.upenn.edu> References: <4C90C193.40609@seas.upenn.edu> Message-ID: <4C90F21E.6080800@eecs.berkeley.edu> Iulian, The UC Berkeley Microlab's biggest concern has been soaking the silicon nitride forelines in water, overnight. If left open to air they will corrode. In water this does not happen to the same degree. The ammonium chloride resides swell and become easy to remove after a 12-24 hour soak. There is likely some trapped DCS in these films which water helps mitigate. One can see some bubbles emanating from the coating when first immersed so this should be done in an exhausted enclosure. In the past, we have made long troughs by buying PVC piping, putting on end-caps on and slicing it in half, longitudinally on a band saw; however, our current forelines do not exceed a few feet in length. Poly generates red powder which we assume is silicon and phosphorus compounds. Scratching this material generates some sparks, even after long exposure to air; however, I have not seen it be a particular problem. It wipes off easily with towels. One gets a whiff of Eau D'phosphine doing this work. We can set off our hand-held hydride detector, above its 1 ppm threshold when sampling forelines so you may want a respirator for the short time it takes to move these parts. A rubber glove over each end serves well. I would not dispose of any LTO residues in a trash container unless it is fire-proof. I prefer to wet the towels to assure they are reacted and not flammable. The LTO exhaust deposition seems to have no particulary issues except some residual PH3 odor. UC Berkeley does not use TEOS in lpcvd so I do not have experience with this material. Bob Hamilton On 9/15/2010 5:52 AM, Iulian Codreanu wrote: > Good Morning. > > I understand that the foreline and pump exhaust line on > tools using particular precursors (e.g. silane) need to be > made of short (4-5 ft) sections so that they can be immersed > in a liquid bath to neutralize the exhaust byproducts that > accumulate over time. > > If you do something similar in your fab could you please > share your experience with us? > > Thank you very much. > > Iulian -- Robert Hamilton UC Berkeley Marvell Nanolab Equipment Manager Rm 520 Sutardja Dia Hall Berkeley, CA 94720-1764 bob at eecs.berkeley.edu (preferred) 510-642-2716 510-642-2916 (Fax) 510-325-7557 (Personal Cell) From vozguz at sabanciuniv.edu Thu Sep 30 04:36:50 2010 From: vozguz at sabanciuniv.edu (Volkan Ozguz) Date: Thu, 30 Sep 2010 11:36:50 +0300 Subject: [labnetwork] PVC piping Message-ID: Dear Colleagues, There are some new classes of PVC piping (and related joining techniques) marketed for use in ultra pure water applications including 18 MOhm levels. Are there any users in our network who used similar piping materials? How do they compare to PVDF or PP piping materials? What are your assements about installation, service and long term reliability? Thanks for your help, Volkan -- Volkan ?zg?z Sabanc? University Nanotechnology Research and Application Center Orhanl?, Tuzla, ?stanbul 34956 Office: 0 216 483 9880 Fax: 0 216 483 9550 Email: vozguz at sabanciuniv.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From agregg at abbiegregg.com Thu Sep 30 14:45:04 2010 From: agregg at abbiegregg.com (Abbie Gregg) Date: Thu, 30 Sep 2010 14:45:04 -0400 Subject: [labnetwork] PVC piping In-Reply-To: References: Message-ID: <5863FB4055D90542A7A7DAE0CEF2ACB0060B734532@E2K7CCR1.netvigour.com> We would be very interested in results on this. We have been using PVDF on the supply side and Polypro on the return side for most Nanolab construction in the last 10 years. Abbie Gregg President Abbie Gregg, Inc. 1130 East University Drive, Suite 105 Tempe, Arizona 85281 Phone 480 446-8000 x 107 Cell 480-577-5083 FAX 480-446-8001 email agregg at abbiegregg.com website www.abbiegregg.com CONFIDENTIALITY NOTICE: All information contained in or attached to this email constitutes confidential information belonging to Abbie Gregg, Inc., its affiliates and subsidiaries and/or its clients. This email and any attachments are proprietary and/or confidential and are intended for business use of the addressee(s) only. All other uses or disclosures are strictly prohibited. If the reader is not the intended recipient you are hereby notified that the perusal, copying or dissemination of this email is strictly prohibited. If you have received this communication in error, please notify the sender, and delete all copies of this message and its attachments immediately. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Volkan Ozguz Sent: Thursday, September 30, 2010 1:37 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] PVC piping Dear Colleagues, There are some new classes of PVC piping (and related joining techniques) marketed for use in ultra pure water applications including 18 MOhm levels. Are there any users in our network who used similar piping materials? How do they compare to PVDF or PP piping materials? What are your assements about installation, service and long term reliability? Thanks for your help, Volkan -- Volkan ?zg?z Sabanc? University Nanotechnology Research and Application Center Orhanl?, Tuzla, ?stanbul 34956 Office: 0 216 483 9880 Fax: 0 216 483 9550 Email: vozguz at sabanciuniv.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From kuhn1 at purdue.edu Thu Sep 30 16:16:03 2010 From: kuhn1 at purdue.edu (Kuhn, Jeffrey G) Date: Thu, 30 Sep 2010 16:16:03 -0400 Subject: [labnetwork] PVC piping In-Reply-To: <5863FB4055D90542A7A7DAE0CEF2ACB0060B734532@E2K7CCR1.netvigour.com> References: <5863FB4055D90542A7A7DAE0CEF2ACB0060B734532@E2K7CCR1.netvigour.com> Message-ID: My initial concern was with organic compounds (TOC) leaching from the PVC pipe and cement, but it appears this new material has low extractables. The other concern I have is with the smoothness of the pipe joints. Any crevices or beads in the joint would invite bacteria growth. I did not dig too deeply into the specifications, but the following link from one supplier may be of some use: http://www.harvellxt.com/ It appears there is training required to acquire the skill set needed to properly use the system, not unlike with PVDF fusion. I?d also be curious to see the cost difference between the two systems. Jeff Kuhn Facility Engineer Birck Nanotechnology Center Purdue University 1205 W. State St. West Lafayette, IN 47907 Ph: (765) 496-8329 Fax: (765) 496-2018 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Abbie Gregg Sent: Thursday, September 30, 2010 2:45 PM To: Volkan Ozguz; labnetwork at mtl.mit.edu Cc: Ciel Villawatkins; Mark Winter Subject: Re: [labnetwork] PVC piping We would be very interested in results on this. We have been using PVDF on the supply side and Polypro on the return side for most Nanolab construction in the last 10 years. Abbie Gregg President Abbie Gregg, Inc. 1130 East University Drive, Suite 105 Tempe, Arizona 85281 Phone 480 446-8000 x 107 Cell 480-577-5083 FAX 480-446-8001 email agregg at abbiegregg.com website www.abbiegregg.com CONFIDENTIALITY NOTICE: All information contained in or attached to this email constitutes confidential information belonging to Abbie Gregg, Inc., its affiliates and subsidiaries and/or its clients. This email and any attachments are proprietary and/or confidential and are intended for business use of the addressee(s) only. All other uses or disclosures are strictly prohibited. If the reader is not the intended recipient you are hereby notified that the perusal, copying or dissemination of this email is strictly prohibited. If you have received this communication in error, please notify the sender, and delete all copies of this message and its attachments immediately. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Volkan Ozguz Sent: Thursday, September 30, 2010 1:37 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] PVC piping Dear Colleagues, There are some new classes of PVC piping (and related joining techniques) marketed for use in ultra pure water applications including 18 MOhm levels. Are there any users in our network who used similar piping materials? How do they compare to PVDF or PP piping materials? What are your assements about installation, service and long term reliability? Thanks for your help, Volkan -- Volkan ?zg?z Sabanc? University Nanotechnology Research and Application Center Orhanl?, Tuzla, ?stanbul 34956 Office: 0 216 483 9880 Fax: 0 216 483 9550 Email: vozguz at sabanciuniv.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: