From lxie at cns.fas.harvard.edu Mon Feb 7 15:34:49 2011 From: lxie at cns.fas.harvard.edu (Xie, Ling) Date: Mon, 7 Feb 2011 15:34:49 -0500 Subject: [labnetwork] PECVD gasline contamination Message-ID: <8F95EA77ACBF904A861E580B44288EFD99B7EF241E@FASXCH02.fasmail.priv> At CNS, Harvard University, the gas line from the close valve in the gas box to the PECVD deposition chamber has been contaminated twice, which resulted in the deposited films with spots patterned same as the gas holes of the shower head. These spots are clusters of micro-particles. Gases connected with this tool include: pure SiH4, N2O, NH3, N2 for silicon nitride and oxide depositions and CF4, O2 for etching back the coatings on the chamber wall. Has anyone had a similar experience and how did you solve the problem? Thanks, Ling Xie Center for Nanoscale System Harvard University 617-496-9069 (o) 617-780-1821 (cell) -------------- next part -------------- An HTML attachment was scrubbed... URL: From rthowe at stanford.edu Wed Feb 9 15:50:41 2011 From: rthowe at stanford.edu (Roger T. Howe) Date: Wed, 09 Feb 2011 12:50:41 -0800 Subject: [labnetwork] Operations Director job at SNF Message-ID: <4D52FE21.8000004@stanford.edu> Hello labnetwork list members: I'd like to call your attention to the search for an Operations Director for the SNF -- see the job description below (#41024 on jobs.stanford.edu). The SNF is going through a major overhaul in the next couple of years, which is one of several reasons why John Shott (cc'ed) and I think that this new position will have a very positive impact on the lab. Thanks, Roger Howe Faculty Director, SNF -------------- The Stanford Nanofabrication Facility (SNF) at Stanford University is seeking an Operations Director. The Operations Director will have day-to-day responsibility for leading all operational aspects of the SNF, including management of 22 professional and administrative staff, an annual budget of $5 million, research administration, facilities/space, property administration and health and safety. Overview of the SNF: More than a lab, the SNF is a vibrant community serving academic, industrial and government researchers from around the globe. The SNF is supported by the National Science Foundation through the National Nanotechnology Infrastructure Network. More information is available via: http://snf.stanford.edu. The SNF attracts nanotechnology researchers with its specialized equipment and capabilities, its experienced and highly knowledgeable staff and expert assistance in both training safe and effective use of the tools and developing custom processes. Every month, an average of 240 distinct researchers in both academia and industry use the SNF to conduct their research. 2011 will mark the beginning of a $6.5 million renovation project to keep the SNF?s capabilities at the forefront of its field. Overview of the Position: The Operations Director reports directly to the SNF Faculty Director and is expected to work with significant autonomy. The Operations Director is the primary liaison between the SNF and other administrative offices within the University, including but not limited to the School of Engineering Dean?s Office Administration & Finance, the Office of Sponsored Research and Environmental Health & Safety. Primary responsibilities include the following: ? Creating a motivated work environment that organizes and allocates staff in order to achieve the SNF?s goals ? Managing proper staffing levels ? Performing feasibility studies and cost and revenue analyses and developing financial projections to ensure long-term stability of the SNF ? Ensuring that fabrication tools meet the research needs of the labmember community ? Monitoring, managing and balancing the budget ? Operating the SNF according to policies set forth by the University and applicable sponsors ? Coordinating the facility?s operations with other shared nanotechnology labs at Stanford ? Overseeing operational, facility and regulatory issues related to the handling, use and disposal of various hazardous materials Qualifications: The successful candidate is expected to have the following qualifications and will preferably have worked in an academic and/or research laboratory. ? A minimum of seven years experience designing, implementing, maintaining and measuring effective and efficient financial and administrative operations at a senior level. ? Conceptual and analytical skills, including the ability to identify problems and implement effective solutions ? Excellent interpersonal and communication skills ? Sufficient technical knowledge to both ensure effective communication with the Faculty Director and technical staff and to make a variety of decisions that affect operations of the SNF ? Experience allocating staff resources to improve existing equipment operations and provide reliable performance for the research community ? Proven skills in personnel management, supervision and policy implementation ? Familiarity with managing facilities/space and property management according to institutional and sponsor policies ? Experience monitoring compliance with health and safety policies and procedures ? Strong computer skills, including experience working in an environment with varied and complex administrative computing systems (such as Oracle Financials in the Stanford environment), as well as substantial expertise in Microsoft Office From vincent.luciani at nist.gov Thu Feb 10 10:58:49 2011 From: vincent.luciani at nist.gov (Luciani, Vincent) Date: Thu, 10 Feb 2011 10:58:49 -0500 Subject: [labnetwork] Lift-Off tool recommendations? Message-ID: <01F47D4EDEEC64488C10B767D15E485808A2D3B5F0@MBCLUSTER.xchange.nist.gov> Hello Labnetwork, I want to help our users with their lift-off processing. I am seeking your thoughts and comments on an automated lift-tool. There are hot solvent spray systems and batch immersion systems that work well in production environments where mask layout is optimized around a process. As we all know, a user facility can bring extra challenges to such tools since not all mask layouts are optimized for success on a automatic lift-off tool. Many folks simply rely on extended time solvent soaks. Has anyone had success with a particular brand solvent spray tool in their lab or have you found success with a different approach to the problem? Thanks, Vincent K. Luciani NanoFab manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 -------------- next part -------------- An HTML attachment was scrubbed... URL: From kpchen at purdue.edu Thu Feb 10 12:36:14 2011 From: kpchen at purdue.edu (KuoPing Chen_Purdue) Date: Thu, 10 Feb 2011 12:36:14 -0500 Subject: [labnetwork] Lift-Off tool recommendations? In-Reply-To: <01F47D4EDEEC64488C10B767D15E485808A2D3B5F0@MBCLUSTER.xchange.nist.gov> References: <01F47D4EDEEC64488C10B767D15E485808A2D3B5F0@MBCLUSTER.xchange.nist.gov> Message-ID: Dear Vincent K. Luciani The normal spray gun works well for lab. like these: http://www99.epinions.com/t-spray-gun-depot Let me know if you have any question. thank you. best, Kuo-Ping On Thu, Feb 10, 2011 at 10:58 AM, Luciani, Vincent wrote: > Hello Labnetwork, > > > > I want to help our users with their lift-off processing. > > I am seeking your thoughts and comments on an automated lift-tool.? There > are hot solvent spray systems and batch immersion systems that work well in > production environments where mask layout is optimized around a process. ?As > we all know, a user facility can bring extra challenges to such tools since > not all mask layouts are optimized for success on a automatic lift-off > tool.? Many folks simply rely on extended time solvent soaks.? Has anyone > had success with a particular brand solvent spray tool in their lab or have > you found success with a different approach to the problem? > > > > > > Thanks, > > > > Vincent K. Luciani > > NanoFab manager > > Center for Nanoscale Science and Technology > > National Institute of Standards and Technology > > 100 Bureau Drive, MS 6201 > > Gaithersburg, MD 20899-6200 USA > > +1-301-975-2886 > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- Kuo-Ping Chen Purdue University, Electrical and Computer Engineering. Photonics and spectroscopy Lab. Email: kpchen at purdue.edu Office: 765-4963380 Link: http://cobweb.ecn.purdue.edu/~photspec/index.shtml From bill at eecs.berkeley.edu Thu Feb 10 13:19:47 2011 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Thu, 10 Feb 2011 10:19:47 -0800 Subject: [labnetwork] Lift-Off tool recommendations? In-Reply-To: <01F47D4EDEEC64488C10B767D15E485808A2D3B5F0@MBCLUSTER.xchange.nist.gov> References: <01F47D4EDEEC64488C10B767D15E485808A2D3B5F0@MBCLUSTER.xchange.nist.gov> Message-ID: <4D542C43.4090008@eecs.berkeley.edu> Vincent, To date we have reserved lab network for policy and operational related questions. Process related questions are better directed to "mems-talk". I welcome alternate opinion from the group on this protocol. However, since I am writing a reply, I offer the following: I would not advocate an automated liftoff tool in our diverse environments. I would invest the money in better control of substrate temp during evaporation e.g. a cooled chuck or ebeam upgrade rather than thermal evap etc. We have used an acetone filled hobby air brush to enhance lift off - very cheap and very effective. Several groups have tried ultrasonic - many have experienced device damage from this strategy. Sincerely, Bill Flounders UC Berkeley Luciani, Vincent wrote: > > Hello Labnetwork, > > I want to help our users with their lift-off processing. > > I am seeking your thoughts and comments on an automated lift-tool. > There are hot solvent spray systems and batch immersion systems that > work well in production environments where mask layout is optimized > around a process. As we all know, a user facility can bring extra > challenges to such tools since not all mask layouts are optimized for > success on a automatic lift-off tool. Many folks simply rely on > extended time solvent soaks. Has anyone had success with a particular > brand solvent spray tool in their lab or have you found success with a > different approach to the problem? > > Thanks, > > Vincent K. Luciani > > NanoFab manager > > Center for Nanoscale Science and Technology > > National Institute of Standards and Technology > > 100 Bureau Drive, MS 6201 > > Gaithersburg, MD 20899-6200 USA > > +1-301-975-2886 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From bob at eecs.berkeley.edu Thu Feb 24 13:45:43 2011 From: bob at eecs.berkeley.edu (Robert M. Hamilton) Date: Thu, 24 Feb 2011 10:45:43 -0800 Subject: [labnetwork] WYKO interferometer support Message-ID: <4D66A757.5060101@eecs.berkeley.edu> The UC Berkeley Marvell NanoLab has a WKYO, NT3300 interferometer. WYKO was acquired by Veeco Inst. in the late 90's and Veeco has since sold the product to Bruker AXS. Can anyone recommend a second-source for WYKO support? We are looking for a field service engineer familiar with and capable of supporting for this tool preferably someone located in Northern California. Specifically, we are having issues with getting fringes with the 50X objective. I contacted and tried for support from Bruker AXS but have not had lucking getting a proposal from them. Thank you, Bob Hamilton -- Robert M. Hamilton University of CA at Berkeley Rm 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu (e-mail preferred) 510-809-8600 510-325-7557 (My personal cell) From kmcpeak at ethz.ch Sun Feb 27 06:54:54 2011 From: kmcpeak at ethz.ch (Kevin McPeak) Date: Sun, 27 Feb 2011 12:54:54 +0100 Subject: [labnetwork] Chiller recommendations Message-ID: Dear labnetwork subscribers, I am looking for a recommendation for a good chiller manufacturer? I need to purchase two chillers, one for a Lesker PVD75 sputterer and another for a Hitachi SEM. . I am getting a quote for a chiller from Lesker (I haven't received it yet) but I would also like to shop around a bit. I have never purchased a chiller before so any advice is most appreciated. Regards, Kevin McPeak -- Kevin McPeak Ph.D. Postdoctoral Researcher ETH Z?rich Optical Materials Engineering Laboratory Universit?tstrasse 6, CNB F121 CH-8092 Zurich, Switzerland Voice: +41 44 632 6594 Email: kmcpeak at ethz.ch -------------- next part -------------- An HTML attachment was scrubbed... URL: From tufts at usf.edu Mon Feb 28 13:26:23 2011 From: tufts at usf.edu (Tufts, Robert) Date: Mon, 28 Feb 2011 13:26:23 -0500 Subject: [labnetwork] C-mount Digital Microscope Camera Message-ID: Dear Labnetwork, Does anyone have a recommendation for microscope digital camera that will C-mount? USB/Fire preferred. Easy to use measurement software would nice also. I see many manufacturers and models and I'd like to hear a recommendation for one from a user center environment. Thanks, Rob Robert W. Tufts University of South Florida Nanotechnology Research and Education Center (NREC) 4202 East Fowler Ave. ENB 118 Tampa, FL 33620 Phone:813-974-5274 Cell: 813-505-1626 Fax: 813-974-3610 -------------- next part -------------- An HTML attachment was scrubbed... URL: