[labnetwork] Lift-Off tool recommendations?
Luciani, Vincent
vincent.luciani at nist.gov
Thu Feb 10 10:58:49 EST 2011
Hello Labnetwork,
I want to help our users with their lift-off processing.
I am seeking your thoughts and comments on an automated lift-tool. There are hot solvent spray systems and batch immersion systems that work well in production environments where mask layout is optimized around a process. As we all know, a user facility can bring extra challenges to such tools since not all mask layouts are optimized for success on a automatic lift-off tool. Many folks simply rely on extended time solvent soaks. Has anyone had success with a particular brand solvent spray tool in their lab or have you found success with a different approach to the problem?
Thanks,
Vincent K. Luciani
NanoFab manager
Center for Nanoscale Science and Technology<http://www.cnst.nist.gov/>
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886
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