From info at fabsurplus.com Sat Jan 1 12:21:54 2011 From: info at fabsurplus.com (Stephen CS Howe) Date: Sat, 01 Jan 2011 18:21:54 +0100 Subject: [labnetwork] 200 mm Silicon Wafers In-Reply-To: <000401cba86c$9b60fc70$d222f550$@edu> References: <01F47D4EDEEC64488C10B767D15E485808967AAEFA@MBCLUSTER.xchange.nist.gov> <001b01cb9250$b8f69d80$2ae3d880$@utah.edu> <000401cba86c$9b60fc70$d222f550$@edu> Message-ID: <1293902514.2499.27.camel@samsung.tower> Dear Richard, I am interested in the wafers to offer to our clients via fabsurplus.com. Is this ok for you ? Yours sincerely, Stephen Howe Company Owner SDI Fabsurplus Group Via F Russo, 19 Napoli 80123 Italy +1 830 388 1071 (Mobile) +39 335 710 7756 (Italy Mobile) Skype: Stephencshowe WWW.FABSURPLUS.COM On Thu, 2010-12-30 at 13:57 -0800, Richard Savage wrote: > All: > I have quite a few boxes (25 wafers/box) of new Prime 200mm silicon wafers > (never been processed). > (100) orientation epi wafers with p-type (B) substrate 730 microns thick and > epi layer p-type (B) 4-4.5 microns thick. > Am willing to sell at $250/box to raise money for our Micro Systems > Technology student research group (www.mst.calpoly.edu). > Please contact me if you are interested. > Regards, > Rich > > Richard N. Savage, Ph.D. > Professor > Materials Engineering, 41-227 > 1 Grand Avenue > Cal Poly State University > San Luis Obispo, CA 93407 > 805-756-6441 > rsavage at calpoly.edu > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From voros at silicon.EECS.Berkeley.EDU Mon Jan 3 23:47:05 2011 From: voros at silicon.EECS.Berkeley.EDU (Katalin Voros) Date: Mon, 3 Jan 2011 20:47:05 -0800 (PST) Subject: [labnetwork] Microlab ==> Nanolab Message-ID: <201101040447.p044l5dx023037@silicon2.EECS.Berkeley.EDU> Dear Colleagues, I am pleased to inform you that the Berkeley Microlab closed its doors at the end of 2010. The good news is that the new Marvell Nanofabrication Laboratory, located next door in the new engineering building, Sutardja Dai Hall, is in full operation now, under the management of Dr. A. William Flounders. http://nanolab.berkeley.edu/ As I indicated earlier, we are committed to hold the next UGIM, 2012, here in Berkeley, when you will have a chance to visit our new lab. At that meeting we will discuss all facets of lab management, benchmarking, and special issues medium and small labs face. Start thinking about what you could contribute to our symposium. Dates: UGIM 2012: 9-10 July 2012 Semicon West: 10-11-12 July 2012 Until then, wishing you all a succesful 2011, Sincerely Katalin -------------------------------------------- KATALIN VOROS R&D Engineering Manager Electrical Engineering and Computer Sciences University of California at Berkeley 406 Cory Hall #1770 Berkeley, CA 94720-1770 phone: (510) 642-2911 voros at eecs.berkeley.edu http://microlab.berkeley.edu ------------------------------------------- From daniel.woodie at cornell.edu Wed Jan 5 13:43:19 2011 From: daniel.woodie at cornell.edu (Dan Woodie) Date: Wed, 5 Jan 2011 13:43:19 -0500 Subject: [labnetwork] C5F8 Usage and handling Message-ID: Hello from the white north, We are working on adding several of the more unusual fluorocarbon gases to our Oxford 100 tool and we are having a hard time getting clear information on proper handling and storage of some of the gases. Specifically we are looking at adding: Difluoromethane (CH2F2) Hexafluorobutadiene (C4F6) Octofluorocyclopentene (C5F8) Unlike the more common fluorocarbons such as CHF3, CF4, C4F8, these are all flammable, and the last two are also listed as toxic. MSDS information on them is also light as they are fairly new materials and most do not have TLV values set yet. Some sources are indicating that the C5F8 does not need to be in a gas cabinet, but a review of the MSDS makes me hesitant to follow that. Is anyone else using this material and if so, how do you handle it? Thanks in advance for your collective wisdom. Dan Dan Woodie Lab Use Manager Cornell NanoScale Facility 250 Duffield Hall Ithaca, NY 14853-2700 (607)254-4891 -------------- next part -------------- An HTML attachment was scrubbed... URL: From bill at eecs.berkeley.edu Wed Jan 5 21:50:58 2011 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Wed, 05 Jan 2011 18:50:58 -0800 Subject: [labnetwork] C5F8 Usage and handling In-Reply-To: References: Message-ID: <4D252E12.7060108@eecs.berkeley.edu> Dan, We do not presently use these gases. I have been considering C5F8 as potential etch replacement if California imposes stringent controls on select freons due to their very high global warming CO2 equivalent values. I expect I uncovered the same info you already have. 1. Re C5F8 I found no indication that this gas is flammable. Praxair, Matheson, Linde and Air Liquide all list LC50 (1hr): 1124ppm but don't define reference for this info TGO "Class II" is defined as 200ppm - 3000ppm CFC "Toxic" Gas is defined as LC50 200ppm - 2000ppm Gas cabinet is required for TGO "ClassII" or CFC "Toxic". I would put C5F8 in a gas cabinet. ----- 2. C4F6 definitely flammable but limited and inconsistent toxicity data A single source cited LC50 667ppm (4 hours, this is usually listed as 1 hour) I would consider C4F6 in a gas cabinet; I would seek additional info to support a decision either way ----- 3. CH2F2 I found a single LC50 of 520,000ppm (4hour) and many TWA (8hr) > 1000ppm. This has been evaluated as a non-ozone depleting refrigerant for many years with some concerns about its flammability. I would handle like methane. I would not place in a gas cabinet. Of course all the usual disclaimers apply - not the opinion of University of California blah blah blah this is simply my personal evaluation, your local AHJ (Authority Having Jurisdiction) makes the call Good Luck and enjoy the snow, Bill Flounders UC Berkeley Dan Woodie wrote: > Hello from the white north, > We are working on adding several of the more unusual fluorocarbon > gases to our Oxford 100 tool and we are having a hard time getting > clear information on proper handling and storage of some of the gases. > Specifically we are looking at adding: > Difluoromethane (CH2F2) > Hexafluorobutadiene (C4F6) > Octofluorocyclopentene (C5F8) > Unlike the more common fluorocarbons such as CHF3, CF4, C4F8, these > are all flammable, and the last two are also listed as toxic. MSDS > information on them is also light as they are fairly new materials and > most do not have TLV values set yet. Some sources are indicating that > the C5F8 does not need to be in a gas cabinet, but a review of the > MSDS makes me hesitant to follow that. Is anyone else using this > material and if so, how do you handle it? Thanks in advance for your > collective wisdom. > Dan > Dan Woodie > Lab Use Manager > Cornell NanoScale Facility > 250 Duffield Hall > Ithaca, NY 14853-2700 > (607)254-4891 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From kfschwar at purdue.edu Thu Jan 6 07:29:29 2011 From: kfschwar at purdue.edu (Schwartz, Kenneth F) Date: Thu, 6 Jan 2011 07:29:29 -0500 Subject: [labnetwork] C5F8 Usage and handling In-Reply-To: References: Message-ID: <4236EE4ACF400B428955E0E7D5012AAD7FFDA8A0BE@VPEXCH06.purdue.lcl> Dan, I am responsible for all process gases here at the Birck Nanotechnology Center at Purdue University and I have also worked in the private sector for 15 years with process gases. I would recommend placing all 3 in gas cabinets from a safety point of view .Please feel free to contact me if I can be of any assistance Kenny Schwartz Birck Nanotechnology Center Purdue University PH 765-496-1174 kfschwar at purdue.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dan Woodie Sent: Wednesday, January 05, 2011 1:43 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] C5F8 Usage and handling Hello from the white north, We are working on adding several of the more unusual fluorocarbon gases to our Oxford 100 tool and we are having a hard time getting clear information on proper handling and storage of some of the gases. Specifically we are looking at adding: Difluoromethane (CH2F2) Hexafluorobutadiene (C4F6) Octofluorocyclopentene (C5F8) Unlike the more common fluorocarbons such as CHF3, CF4, C4F8, these are all flammable, and the last two are also listed as toxic. MSDS information on them is also light as they are fairly new materials and most do not have TLV values set yet. Some sources are indicating that the C5F8 does not need to be in a gas cabinet, but a review of the MSDS makes me hesitant to follow that. Is anyone else using this material and if so, how do you handle it? Thanks in advance for your collective wisdom. Dan Dan Woodie Lab Use Manager Cornell NanoScale Facility 250 Duffield Hall Ithaca, NY 14853-2700 (607)254-4891 -------------- next part -------------- An HTML attachment was scrubbed... URL: From matthieu.nannini at mcgill.ca Wed Jan 26 10:53:36 2011 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Wed, 26 Jan 2011 10:53:36 -0500 Subject: [labnetwork] PECVD process advice/experience Message-ID: Hi all, First of all, happy new year to all of you and all the best for a prosperous year 2011. I have a user here wanting to deposit PECVD oxide @ 200C because she has a polymer exposed which Tg is 240C. Do any of you have experience/recommendations about such a low temperature PECVD process ? Putting a polymer in a PECVD chamber is not recommended I guess but hey we are a university lab and try to accommodate all of our users. Thanks Matthieu From vozguz at sabanciuniv.edu Wed Jan 26 15:40:01 2011 From: vozguz at sabanciuniv.edu (Volkan Ozguz) Date: Wed, 26 Jan 2011 22:40:01 +0200 Subject: [labnetwork] DI water cooling Message-ID: Dear Colleagues We are tying to select a cooler (heat exchanger) to maintain the temperature of the water in our Type-1 DI water circulation loop for our lab. We are giving two options: a plate-type heat echanger and a pipe-type heat exchanger with ultra polished SS construction. The price tag difference is large (about 2:1) between the two options. What are your views about initial selection and long term reliability? What is the maximum temperature level tolerable in the loop if we wantt to eliminate the exchanger? Thanks for your help, Volkan -- Volkan ?zg?z Sabanc? University Nanotechnology Research and Application Center Orhanl?, Tuzla, ?stanbul 34956 Office: 0 216 483 9880 Fax: 0 216 483 9550 Email: vozguz at sabanciuniv.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From meng at eecs.berkeley.edu Fri Jan 28 03:22:23 2011 From: meng at eecs.berkeley.edu (meng at eecs.berkeley.edu) Date: Fri, 28 Jan 2011 00:22:23 -0800 Subject: [labnetwork] PECVD process advice/experience In-Reply-To: References: Message-ID: Hi Matthieu, I use ECR PECVD system (made by Plasma Quest) to deposit oxide at room temperature on polymer surfaces. Since it's microwave generated plasma, the ion density is about 1000 times higher than RF plasma. So the substrate doesn't need to be heated. Thanks, Xiaofan > Hi all, > > First of all, happy new year to all of you and all the best for a > prosperous year 2011. > > I have a user here wanting to deposit PECVD oxide @ 200C because she has a > polymer exposed which Tg is 240C. > Do any of you have experience/recommendations about such a low temperature > PECVD process ? > Putting a polymer in a PECVD chamber is not recommended I guess but hey we > are a university lab and try to accommodate all of our users. > > Thanks > > Matthieu > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > From matthieu.nannini at mcgill.ca Fri Jan 28 10:09:20 2011 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Fri, 28 Jan 2011 10:09:20 -0500 Subject: [labnetwork] Fwd: low temperature PECVD References: <863BDEB2A4237C4EB029E32D849DCEDE01094CF01C9E@EXMBXVS4C.campus.mcgill.ca> Message-ID: Hi all, The polymer the user wants to use is a heat decomposable material (QPAC 40)that starts to decompose into CO2 mainly (according to user) when temperature exceeds 240C. I'm more concerned about the possible reaction between silane and N2O. Matthieu From fcm1 at Lehigh.EDU Fri Jan 28 11:52:18 2011 From: fcm1 at Lehigh.EDU (Floyd Miller) Date: Fri, 28 Jan 2011 11:52:18 -0500 Subject: [labnetwork] Gas Monitor Message-ID: <4D42F442.3060209@lehigh.edu> We are currently in need if a new gas monitor to monitor for silane, dichlorosilane and hydrogen. Are there vendors that anyone can recommend that supply gas monitors for these gases? Thank you. Floyd Miller Lehigh University -------------- next part -------------- An HTML attachment was scrubbed... URL: From dabunzow at lbl.gov Fri Jan 28 12:36:40 2011 From: dabunzow at lbl.gov (David A. Bunzow) Date: Fri, 28 Jan 2011 09:36:40 -0800 Subject: [labnetwork] Fwd: low temperature PECVD In-Reply-To: References: <863BDEB2A4237C4EB029E32D849DCEDE01094CF01C9E@EXMBXVS4C.campus.mcgill.ca> Message-ID: <4D42FEA8.9040902@lbl.gov> Low temperature (cryogenic to 300 C.) PECVD reactions involving silanes and N2O, NH3 and CxHy compounds was an area of technical expertise I practiced for many years in the IC industry. I'm not sure what information you need, but I assure you these reactions can be carried out at RT if needed.... David A. Bunzow User Facilities Program Manager The Molecular Foundry Materials Science Division Lawrence Berkeley National Laboratory 1 Cyclotron Road MS 67-3207 Berkeley, CA 94720 Office: 510-486-4574 FAX: 510-486-7424 Cell: 701-541-2354 On 1/28/2011 7:09 AM, Matthieu Nannini, Dr. wrote: > Hi all, > > The polymer the user wants to use is a heat decomposable material (QPAC 40)that starts to decompose into CO2 mainly (according to user) when temperature exceeds 240C. > I'm more concerned about the possible reaction between silane and N2O. > > Matthieu > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From hughes at illinois.edu Fri Jan 28 14:26:03 2011 From: hughes at illinois.edu (Hughes, John S) Date: Fri, 28 Jan 2011 13:26:03 -0600 Subject: [labnetwork] Gas Monitor In-Reply-To: <4D42F442.3060209@lehigh.edu> References: <4D42F442.3060209@lehigh.edu> Message-ID: <54C0DEC5-D355-4DE9-A320-7123A4989A37@illinois.edu> Hello Floyd, We recently replaced our Honeywell toxic gas detection systems with systems from DOD Technologies (http://www.dodtec.com/). They (DOD) was able to make use of our existing sensor lines, which saved us quite a bit of money. The new systems are capable of detecting at levels well below what could be done with the previous systems, and the response time is much better. -- John ------------------------------------------------------------- John S. Hughes Office: (217) 333-4674 Associate Director FAX: (217) 244-6375 Laboratory Operations hughes at illinois.edu Micro and Nanotechnology Laboratory University of Illinois at Urbana-Champaign 3114 Micro and Nanotechnology Laboratory 208 North Wright Street Urbana, Illinois 61801 http://mntl.illinois.edu ------------------------------------------------------------- On Jan 28, 2011, at 10:52 AM, Floyd Miller wrote: We are currently in need if a new gas monitor to monitor for silane, dichlorosilane and hydrogen. Are there vendors that anyone can recommend that supply gas monitors for these gases? Thank you. Floyd Miller Lehigh University From sejurss at purdue.edu Fri Jan 28 14:27:05 2011 From: sejurss at purdue.edu (Jurss, Stephen E) Date: Fri, 28 Jan 2011 14:27:05 -0500 Subject: [labnetwork] Gas Monitoring Message-ID: <4236EE4ACF400B428955E0E7D5012AAD8375ABA2D7@VPEXCH06.purdue.lcl> Floyd, I would be happy to discuss our monitoring system with you. Stephen Jurss (765-496-8337). Stephen E. Jurss CIH, CSP Safety Manager Birck Nanotechnology Center 1205 W. State Street West Lafayette, IN 47907 TX 765-496-8337 e-mail sejurss at purdue.edu From Hathaway at cns.fas.harvard.edu Mon Jan 31 10:49:39 2011 From: Hathaway at cns.fas.harvard.edu (Mac Hathaway) Date: Mon, 31 Jan 2011 10:49:39 -0500 Subject: [labnetwork] FW: Gas Monitor In-Reply-To: <8F95EA77ACBF904A861E580B44288EFD99B7D838B5@FASXCH02.fasmail.priv> References: <8F95EA77ACBF904A861E580B44288EFD99B7D838B5@FASXCH02.fasmail.priv> Message-ID: <4D46DA13.10903@cns.fas.harvard.edu> Hey there, Floyd, This is Mac Hathaway, from Harvard Center for Nanoscale Systems. At CNS, We use MST and Midas sensors (Honeywell), which both seem to work pretty well. The MST has a sensor cartridge right at the monitoring point, and the Midas can do remote sensing, i.e. the sensor can be some distance from the monitored point, drawing a continuous gas sample via poly or teflon tube, up to ~100 ft away depending on the gas. There is another group that is breaking in, some guys from Zellweger (used to be MDA, old makers of Chemcassettes). They are called DOD Technologies. Our sensor guys, EERC out of Rochester, NY are quite good, and would happy to help you spec out your new sensors, or even help you put a new system together. They helped us with our initial setup, and are currently doing the bump tests several times a year. Mac Hathaway Harvard CNS -------------- next part -------------- An HTML attachment was scrubbed... URL: From bob at eecs.berkeley.edu Mon Jan 31 13:33:07 2011 From: bob at eecs.berkeley.edu (Robert M. Hamilton) Date: Mon, 31 Jan 2011 10:33:07 -0800 Subject: [labnetwork] FW: Gas Monitor In-Reply-To: <4D46DA13.10903@cns.fas.harvard.edu> References: <8F95EA77ACBF904A861E580B44288EFD99B7D838B5@FASXCH02.fasmail.priv> <4D46DA13.10903@cns.fas.harvard.edu> Message-ID: <4D470063.8090806@eecs.berkeley.edu> At UC Bekeley we have had experience with Zellweger tape-based systems. We chose their system because a tape-based system does not require the same level of annual service to verify and calibrate each individual gas detector as chemical sensors. Having said this, we did not choose Zellweger for our new NanoLab. I found them slow in their response, expensive and not willing to support legacy systems. I believe Honeywell acquired or reps. Zellweger but have not had recent interactions with them. Bob Hamilton -- Robert M. Hamilton University of CA at Berkeley Rm 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu (e-mail preferred) 510-809-8600 510-325-7557 (My personal cell) On 1/31/2011 7:49 AM, Mac Hathaway wrote: > Hey there, Floyd, > > This is Mac Hathaway, from Harvard Center for Nanoscale > Systems. At CNS, We use MST and Midas sensors > (Honeywell), which both seem to work pretty well. The MST > has a sensor cartridge right at the monitoring point, and > the Midas can do remote sensing, i.e. the sensor can be > some distance from the monitored point, drawing a > continuous gas sample via poly or teflon tube, up to ~100 > ft away depending on the gas. > > There is another group that is breaking in, some guys from > Zellweger (used to be MDA, old makers of Chemcassettes). > They are called DOD Technologies. > > Our sensor guys, EERC out of Rochester, NY are quite good, > and would happy to help you spec out your new sensors, or > even help you put a new system together. They helped us > with our initial setup, and are currently doing the bump > tests several times a year. > > Mac Hathaway > Harvard CNS > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Robert M. Hamilton University of CA at Berkeley Rm 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu (e-mail preferred) 510-809-8600 510-325-7557 (My personal cell) -------------- next part -------------- An HTML attachment was scrubbed... URL: From daniel.woodie at cornell.edu Mon Jan 31 16:15:07 2011 From: daniel.woodie at cornell.edu (Dan Woodie) Date: Mon, 31 Jan 2011 16:15:07 -0500 Subject: [labnetwork] FW: Gas Monitor In-Reply-To: <4D470063.8090806@eecs.berkeley.edu> References: <8F95EA77ACBF904A861E580B44288EFD99B7D838B5@FASXCH02.fasmail.priv> <4D46DA13.10903@cns.fas.harvard.edu> <4D470063.8090806@eecs.berkeley.edu> Message-ID: Bob / Mac, Zellweger was the original manufacturer of the Lifeline II electrochemical cells that we just had to replace. They were acquired by Honeywell shortly after our install (2004 or so). DOD Technologies is a different company representing product from a Japanese manufacturer. Our current experience with Honeywell matches Bob's description. Dan Dan Woodie Lab Use Manager From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Robert M. Hamilton Sent: Monday, January 31, 2011 1:33 PM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] FW: Gas Monitor At UC Bekeley we have had experience with Zellweger tape-based systems. We chose their system because a tape-based system does not require the same level of annual service to verify and calibrate each individual gas detector as chemical sensors. Having said this, we did not choose Zellweger for our new NanoLab. I found them slow in their response, expensive and not willing to support legacy systems. I believe Honeywell acquired or reps. Zellweger but have not had recent interactions with them. Bob Hamilton -- Robert M. Hamilton University of CA at Berkeley Rm 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu (e-mail preferred) 510-809-8600 510-325-7557 (My personal cell) On 1/31/2011 7:49 AM, Mac Hathaway wrote: Hey there, Floyd, This is Mac Hathaway, from Harvard Center for Nanoscale Systems. At CNS, We use MST and Midas sensors (Honeywell), which both seem to work pretty well. The MST has a sensor cartridge right at the monitoring point, and the Midas can do remote sensing, i.e. the sensor can be some distance from the monitored point, drawing a continuous gas sample via poly or teflon tube, up to ~100 ft away depending on the gas. There is another group that is breaking in, some guys from Zellweger (used to be MDA, old makers of Chemcassettes). They are called DOD Technologies. Our sensor guys, EERC out of Rochester, NY are quite good, and would happy to help you spec out your new sensors, or even help you put a new system together. They helped us with our initial setup, and are currently doing the bump tests several times a year. Mac Hathaway Harvard CNS _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Robert M. Hamilton University of CA at Berkeley Rm 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu (e-mail preferred) 510-809-8600 510-325-7557 (My personal cell) -------------- next part -------------- An HTML attachment was scrubbed... URL: From mculcasi at sbcglobal.net Mon Jan 31 12:24:10 2011 From: mculcasi at sbcglobal.net (Mike Culcasi) Date: Mon, 31 Jan 2011 09:24:10 -0800 (PST) Subject: [labnetwork] Etch Tool Opportunity Message-ID: <397952.72107.qm@web81003.mail.mud.yahoo.com> To LabNetwork Community: My name is Mike Culcasi and I am representing a local start-up in?California that has a used Tegal Model 6500 Reactive Ion Etcher for sale.? I was wondering if any of your facilities would have any interest in such a tool.? It is a multi-chamber tool that is currently configured for 8" wafers.? I have attached a detailed description for your review.? If there might be a need for such at tool at your center, please contact me via email or phone and I would be happy to answer any questions you may have.? Sincerely, Mike Culcasi mculcasi at sbcglobal.net 408-391-0375 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Tegal 6500 tool description_rev a.docx Type: application/octet-stream Size: 36178 bytes Desc: not available URL: