[labnetwork] Sputtering of As2Se3 and RIE

[Vicky Diadiuk]

HI,
 From what I learnt when we got such a request, you shld also worry  
abt "memory effects" from the Se
Normally systems are used exclusively for chalcogenides since  
reproducibility is shot for any proceses thereafter (even after  
cleaning).
Processing Zinc Selenide is the only request we've ever turned down at  
MTL ...
(we found them a company that works on chalcogenides to collaborate  
with).

Gd luck,
  Vicky



On Oct 14, 2011, at 9:43 AM, Matthieu Nannini, Dr. wrote:

> Dear lab network,
>
> I received a request for sputtering and RIE of chalcogenide glass  
> out of a As2Se3 target. At first sight the As contamination worries  
> me a lot. First it will contaminate the chamber then we will need to  
> clean that taking all necessary precautions as per As.
> Anyone as experience regarding those kind of processes ?
>
> -----------------------------------
> Matthieu Nannini
> McGill Nanotools Microfab
> Manager
> t: 514 398 3310
> c: 514 758 3311
> f: 514 398 8434
> http://miam2.physics.mcgill.ca/
> ------------------------------------
>
>
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