[labnetwork] Low temperature LPCVD Silicon
Matthieu Nannini, Dr.
matthieu.nannini at mcgill.ca
Wed Apr 25 17:42:05 EDT 2012
Dear colleagues,
A researcher in the lab would like to run our poly tube as low as 400°C. He is using very dilute amounts of Silane in N2. At this temperature, I have concerns about unreacted silane in the pump. Our Ebara dry pumps are purged with filtered (2% O2) air and we never had any issue with them.
Does anyone have experience running a poly tube that low ?
Thanks
Matthieu Nannini
McGill Nanotools Microfab
mnm.physics.mcgill.ca
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