[labnetwork] SVG track coaters

[Morrison, Richard H., Jr.]

HI Leif,

Here at Draper we used refurbished SVG systems. Uptime is >90% and COO is very low. We purchased 3 coat tracks and 3 develop tracks for the following vendors:

AZN Track Inc. (2 coat tracks and 2 dev tracks)
1081 Memorex Dr
Santa Clara, CA  95050
Tel: (408) 982-6102

AIO International Corporation   (1 coat track and 1 dev track)
1938 Junction Avenue
San Jose, CA  95131
Ph: 408.586.7667

Both companies are good and responsive. Both have the same pricing. We started with AIO with a person named Jim Grambow, he left AIO and went to AZN so we followed him to AZN.

Rick


Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Leif Johansen
Sent: Thursday, August 23, 2012 8:03 AM
To: 'labnetwork at mtl.mit.edu'
Subject: [labnetwork] SVG track coaters

Dear all,

In our lab we have a 20 years old Semiconductor Systems Inc. (SSI) track coater which is on its last leg. I have noticed that quite a number of you are using Silicon Valley Group (SVG) coaters. We are presently considering if we should buy a refurbished SVG coater as a replacement tool. I therefore have a few questions:


·         What is our experience with their up-time?

·         How easy are they to service?

·         Is the cost of ownership large, medium or small?

·         Is it still possible to find companies which can provide spare parts and/or offer engineering services?

Best regards,

Leif

Leif S. Johansen

Head of Operations

DTU Danchip



Technical University of Denmark

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Danchip

Ørsteds Plads, Byg. 347

2800  Lyngby

Direct +45 45255713
Mobile +45 25348992

lesjo at danchip.dtu.dk<mailto:lesjo at danchip.dtu.dk>

www.danchip.dtu.dk/<http://www.danchip.dtu.dk/>



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