[labnetwork] Fwd: hotplate parameters for Shipley 1813

[Michael Murphy]

Everyone

Here are our research associate's, Daniel Park's, conditions for processing Shipley 1813.

Mike Murphy

Begin forwarded message:

> From: Daniel S Park <spark at lsu.edu>
> Subject: RE: [labnetwork] hotplate parameters for Shipley 1813
> Date: August 31, 2012 10:13:44 AM CDT
> To: Michael Murphy <murphy at me.lsu.edu>
> 
> Dr. Murphy.
> 
> Here is the data w/ 4 inch Si wafer.
> 
> Dehydration: 150oC for 10min (or 200oC for 5 min)
> Spin-coat S1813 at 3,000 rpm for 60 sec
> Softbake at 115oC for 60 sec
> Exposure at 30~50 mJ/cm^2 (UV wavelength at 365 nm)
> Develop in 1:4 dilution of AZ400K for 20~30 sec
> Hard bake: 115oC for 60 sec
> 
> All soft contact for HP use
> Use 6 inch Si wafer (not Al foil) to keep hotplate clean and place 4 inch Si wafer on 6 inch Si wafer during baking
> 
> Best,
> Daniel
> 
> ----------------------------------------------------------------------------------------------------------------
> 
> Daniel Park, Ph. D., Research Associate
> 
> Mechanical Engineering
> 
> Louisiana State Univeristy
> 
> Phone: 225-578-4412
> 
> From: Michael Murphy [murphy at me.lsu.edu]
> Sent: Thursday, August 30, 2012 12:59 PM
> To: Daniel S Park
> Subject: Fwd: [labnetwork] hotplate parameters for Shipley 1813
> 
> Daniel
> 
> Do we have some?
> 
> Mike
> 
> 
> Begin forwarded message:
> 
>> From: "Walsh,Kevin M." <kevin.walsh at louisville.edu>
>> Subject: [labnetwork] hotplate parameters for Shipley 1813
>> Date: August 28, 2012 5:21:09 PM CDT
>> To: "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>
>> 
>> Processing Experts!
>>  
>> What hotplate processing parameters do you recommend for Shipley 1813.  We have Brewer Science hotplates capable of hard contact (vacuum), proximity contact (nitrogen cushion), or soft contact (gravity).
>>  
>> Dehydration Bake - temp, time, soft/hard/proximity contact?
>> Soft Bake - temp, time, soft/hard/proximity contact?
>> Hard Bake - temp, time, soft/hard/proximity contact?
>>  
>> If soft contact, do you use alum foil to keep your hotplate surfaces clean?
>>  
>> Thanks in advance,
>> Kevin
>>  
>> Dr. Kevin M. Walsh
>> Samuel T. Fife Professor of Electrical and Computer Engineering
>> Founding Director of the UofL Micro/Nanotechnology Center
>> University of Louisville
>> BRB Building, Room 234
>> 2210 S. Brook St
>> Louisville, KY 40292
>> (502) 852-0826 office
>> (502) 852-8128 fax
>> walsh at louisville.edu or walsh at ieee.org 
>> www.louisville.edu /micronano
>>  
>> _______________________________________________
>> labnetwork mailing list
>> labnetwork at mtl.mit.edu
>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
> 
> *************************************************************************************************************
> Michael C. Murphy
> Phone: (225) 578-5921
> Roy O. Martin Lumber Company
> Fax: (225) 578-5924
> Professor of Mechanical Engineering
> E-mail: murphy at me.lsu.edu
> Dept. of Mechanical Engineering
> Louisiana State University
> 2508 Patrick F. Taylor Hall
> Baton Rouge, LA 70803
> **************************************************************************************************************
> 
> 

*************************************************************************************************************
Michael C. Murphy											Phone: (225) 578-5921
Roy O. Martin Lumber Company								Fax:		(225) 578-5924
Professor of Mechanical Engineering							E-mail:		murphy at me.lsu.edu
Dept. of Mechanical Engineering
Louisiana State University
2508 Patrick F. Taylor Hall
Baton Rouge, LA 70803
**************************************************************************************************************

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