[labnetwork] question ...

Michael Khbeis khbeis at uw.edu
Sat Dec 1 08:32:15 EST 2012


Leonidas,

I would say it is dependent on the reactivity of the byproduct.  For pyrophorics we "scrub" at the point of use with a gas reactor column.  For acids we just collect at the main scrubber.  If there was something that would be potentially reactive with other byproducts, you may be better off with the local scrubber, but these are very expensive.  You also need to consider the dilution factor in the exhaust stream.  If you have a large volume of exhaust, say from numerous wet benches, this will dilute the shared exhaust so consider the volume and rate of byproduct being produced compared to the total exhaust volume/flow.

Dr. Michael Khbeis
Associate Director
Microfabrication Facility (MFF)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(C) 443.254.5192
khbeis at uw.edu



On Nov 30, 2012, at 9:29 AM, Leonidas Ocola wrote:

> 
> Dear List,
> 
> When does it make sense to just use a point of use scrubber for a
> particularly noxious tool or when to install a "capture it all" scrubber
> at the end of a facility exhaust?
> 
> Just curious.
> 
> Thanks
> 
> Leo
> 
> 
> -- 
> Leonidas E Ocola, PhD
> Center for Nanoscale Materials
> Argonnne National Laboratory
> Bldg 440, Rm A129
> 9700 South Cass Avenue, Argonne, IL 60439
> Ph: 630-252-6613
> Fax: 630-252-5739
> 
> 
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