[labnetwork] question ... Scrubber feedback

[Tom Britton]

Just to add a little information to help with your decision.



We have reconditioned exhaust gas scrubbers at the following prices:

(All reconditioned scrubbers carry a full 6 month warranty. Spare parts and start up assistance is offered as well.)



Edwards GRCs

- M150 (Single Cannister)            $15,850.00

- D150  (Dual Cannister)                $17,850.00

- Hot Bed Reactor chemically destroys toxic gases

- Plasma Etching, PECVD & LPCVD processes

- Gases such as CL2, BCl3, SiCl4, CHF3, SF6



Delatech 859 CDOs                          $23,450.00

- Thermal Oxidation Chamber with Secondary Wet Scrub Chamber

- Advaned CVD processes - PECVD, LPCVD & MOCVD

- Gases such as SiH4, PH3, GeH4, CH4, H2,B2H6, NH3



ATMI Vector ULtra 3000                $23,450.00

- Dual Stage Aquious Scrubber

- For water soluable effluent gases such as F2, Cl2, NH3, SiF4, HF

- Etch, CVD & EPI processes



If you'd like to discuss this further, please let me know.

Best Regards,

Tom Britton
Director of Sales
Critical Systems, Inc.
7000 W. Victory Road
Boise, ID 83709
Direct:  208.890.1417
Office:  877.572.5515
[cid:image003.png at 01CCFBA5.86785370]

www.criticalsystemsinc.com<http://www.criticalsystemsinc.com>





-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis
Sent: Saturday, December 1, 2012 6:32 AM
To: Leonidas Ocola
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] question ...



Leonidas,



I would say it is dependent on the reactivity of the byproduct.  For pyrophorics we "scrub" at the point of use with a gas reactor column.  For acids we just collect at the main scrubber.  If there was something that would be potentially reactive with other byproducts, you may be better off with the local scrubber, but these are very expensive.  You also need to consider the dilution factor in the exhaust stream.  If you have a large volume of exhaust, say from numerous wet benches, this will dilute the shared exhaust so consider the volume and rate of byproduct being produced compared to the total exhaust volume/flow.



Dr. Michael Khbeis

Associate Director

Microfabrication Facility (MFF)

University of Washington

Fluke Hall, Box 352143

(O) 206.543.5101

(C) 443.254.5192

khbeis at uw.edu<mailto:khbeis at uw.edu>







On Nov 30, 2012, at 9:29 AM, Leonidas Ocola wrote:



>

> Dear List,

>

> When does it make sense to just use a point of use scrubber for a

> particularly noxious tool or when to install a "capture it all"

> scrubber at the end of a facility exhaust?

>

> Just curious.

>

> Thanks

>

> Leo

>

>

> --

> Leonidas E Ocola, PhD

> Center for Nanoscale Materials

> Argonnne National Laboratory

> Bldg 440, Rm A129

> 9700 South Cass Avenue, Argonne, IL 60439

> Ph: 630-252-6613

> Fax: 630-252-5739

>

>

> _______________________________________________

> labnetwork mailing list

> labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>

> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork


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