[labnetwork] Wet Etching of Sapphire

[Mary Tang]

Hi all --

Does anyone have advice on how to safely etch sapphire using 
concentrated hot phosphoric/sulfuric acids?  Can this be safely done in 
a beaker on a hot plate?  What temperature is considered "safe"?  How 
long do you allow the process to run?  Does the mixture require 
replenishing?

This seems to be a fairly standard process, although we at SNF are not 
familiar with it.  If anyone has advice or procedures to share, it would 
be appreciated.

Thanks,

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu