[labnetwork] duct material for pyrophorics

[Luciani, Vincent]

Hello Lulian,

We used unlined stainless steel ductwork. Teflon coated is not required but, as Bill noted, is a nice feature. Our nitride LPCVD, which uses dichlorosilane, produces acidic and pyrophoric by products and we see no sign of corrosion so far. We also employ dry pumps for these processes to avoid the oily acidic buildup in the ducts. Good luck on your transition into your new facility...always exciting, but lots of work.

Vince

Vince Luciani
NanoFab Manager
NIST CNST
Gaithersburg, Md.



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-----Original Message-----
From: Iulian Codreanu [codreanu at seas.upenn.edu<mailto:codreanu at seas.upenn.edu>]
Sent: Tuesday, January 31, 2012 04:16 PM Eastern Standard Time
To: Fab Network
Subject: [labnetwork] duct material for pyrophorics


Good Afternoon Fab Network.

Is it a good idea to have the inside of the exhaust ducts serving
pyrophoric gas equipment coated with teflon?

Thank you very much for your help.

Iulian
--
iulian Codreanu, Ph.D.
Director, Penn NanoFab
200 South 33rd Street
Room 376 GRW Bldg
Philadelphia, PA 19104-6314
P: 215-898-9308
F: 215-573-2068
www.seas.upenn.edu/~nanofab

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