[labnetwork] Hydrogen Generation

[Rizik]

Excellent suggestion. To add to Bill's recommendation, usually, when we
install flammable gas cylinders with regulator or gas panel without an
exhausted enclosure, we expose mechanical connections to the open space. If
this is the lab/fab strategy, then we recommend installing LEL/flammable gas
sensor in the vicinity with horn/strobe and manual pull station. Usually the
AHJ will require monitoring in this situation.

 

Rizik Michael, PE

Principal

Integrated Engineering Services

Office: +408 261 3500, Ext. 201

Cell:      +408 718 0927

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Bill Flounders
Sent: Wednesday, July 18, 2012 1:31 PM
To: Ferraguto, Thomas
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Hydrogen Generation

 

Thomas,
While I have had excellent experience with Proton Systems 
and recommend an H2 generator to minimize bottle changes,
I know of no requirement to keep H2 in a gas cabinet.
Your local authority may impose a different requirement.

On site hydrogen generation with a PEM strategy rather than
a potassium hydroxide system - in a facility that already has
excess high quality DI water and excess electrical capacity
(as our labs usually do) makes sense. It takes some time to 
recover the investment - if it is not being compared to a gas cabinet.

I ask that the discussion address which labs keep H2
in a gas cabinet and why. There are arguments against keeping H2
in a gas cabinet rather than having it open to lab air where the air
changes per hour are significant and offer their own safety.

Bill Flounders
UCBerkeley



Ferraguto, Thomas wrote:

Colleagues,

 

We're in the process of designing our gas cabinet and abatement layout for
our fab.

 

I just met with the sales representative from Proton and we're looking at
Hogen GC600 (99.9999%) purity hydrogen delivery system (600cc a minute)

 

I can't find any holes in the argument for Hydrogen generation for ~$12k,
when a gas cabinet will cost me ~$20K

 

Does anyone have any thoughts on this unit or Hydrogen generation in general
? (primarily for PECVD)

 

Thanks.

 

 

Thomas S. Ferraguto

ETIC Clean Room Director

University of Massachusetts Lowell

600 Suffolk Street 456C

Lowell MA 01854-5120

978-934-1809 land

617-755-0910 mobile

 






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