From vincent.luciani at nist.gov Fri Jun 1 08:38:59 2012 From: vincent.luciani at nist.gov (Luciani, Vincent) Date: Fri, 1 Jun 2012 08:38:59 -0400 Subject: [labnetwork] Employment opportunity Message-ID: <01F47D4EDEEC64488C10B767D15E4858100CD0B23F@MBCLUSTER.xchange.nist.gov> Good Morning, Alas, I am losing my go-to guy for equipment installations and maintenance. You know the type, the guy that knows ALL the tools, talented, dependable, mentors the junior technicians and bridges the gap between process and hardware and doesn't mind getting his hands dirty. I have attached an ad which is now running in CareerBuilder.com and Indeed.com. The official posting will show up soon in USAJobs.gov. If you know anyone that is a fit for this position please forward them this info. The job is full-time, permanent, located here in our Gaithersburg, MD NanoFab. Thanks, Vince Luciani Vincent K. Luciani NanoFab Manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 [cid:image001.jpg at 01CD3FD2.38417B70] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 3478 bytes Desc: image001.jpg URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Engineering_Technician_Senior_level_Final.docx Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Size: 66057 bytes Desc: Engineering_Technician_Senior_level_Final.docx URL: From rmorrison at draper.com Wed Jun 6 07:49:05 2012 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Wed, 06 Jun 2012 11:49:05 +0000 Subject: [labnetwork] Triscroll pump question Message-ID: Hi All, We had a very interesting event happen 2 weeks ago on our Oxford tool. We have an Oxford PECVD/RIE tool. PECVD chamber on the left side for PECVD Nitride, Load in the center, RIE on the right hand side. The turbo on the load lock crashed and we discovered that the Varian Triscroll backing pump was off and the circuit breaker tripped.. We sent the pump out for repair and the inside of the pump was covered with black soot, it seems that the Pump had some sort of combustion event. The screen was blown outwards and it had a large hole in it. The only gas the load has in N2. When the pump self destructed it back-streamed gas into the load lock, we had the residue analyzed, and it was fluorinated hydrocarbon. We are completed stumped, has any of you had a TriScroll combust before. Thanks in advance for any help. Rick Rick Morrison Senior Member Technical Staff Group Leader Microfabrication Operations Draper Laboratory 555 Technology Square Cambridge, MA 02139 W 617-258-3420 C 508-930-3461 -------------- next part -------------- An HTML attachment was scrubbed... URL: From spaolini at cns.fas.harvard.edu Wed Jun 6 12:03:23 2012 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Wed, 6 Jun 2012 12:03:23 -0400 Subject: [labnetwork] Triscroll pump question In-Reply-To: References: Message-ID: <8F95EA77ACBF904A861E580B44288EFD9B5C12CD55@FASXCH02.fasmail.priv> I have some experience with these. First of all, depending on use, you can expect 6 months to one year of service out of these which I find unacceptable. Second of all, the fluorinated hydrocarbon residue is a mixture of o-ring material and Teflon from the tip seals. After rebuilding a bunch of them, I saw the same stuff in every pump housing and it was a dark powdery substance. I can't explain the inlet screen blowing outwards (upstream?) unless there was an event in your exhaust somewhere downstream. Hope this helps, Steve Paolini Harvard University Center For Nanoscale Systems. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr. Sent: Wednesday, June 06, 2012 7:49 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Triscroll pump question Hi All, We had a very interesting event happen 2 weeks ago on our Oxford tool. We have an Oxford PECVD/RIE tool. PECVD chamber on the left side for PECVD Nitride, Load in the center, RIE on the right hand side. The turbo on the load lock crashed and we discovered that the Varian Triscroll backing pump was off and the circuit breaker tripped.. We sent the pump out for repair and the inside of the pump was covered with black soot, it seems that the Pump had some sort of combustion event. The screen was blown outwards and it had a large hole in it. The only gas the load has in N2. When the pump self destructed it back-streamed gas into the load lock, we had the residue analyzed, and it was fluorinated hydrocarbon. We are completed stumped, has any of you had a TriScroll combust before. Thanks in advance for any help. Rick Rick Morrison Senior Member Technical Staff Group Leader Microfabrication Operations Draper Laboratory 555 Technology Square Cambridge, MA 02139 W 617-258-3420 C 508-930-3461 -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at seas.upenn.edu Wed Jun 6 12:25:52 2012 From: codreanu at seas.upenn.edu (Iulian Codreanu) Date: Wed, 06 Jun 2012 12:25:52 -0400 Subject: [labnetwork] Triscroll pump question In-Reply-To: References: Message-ID: <4FCF8490.3090205@seas.upenn.edu> Rick, The tip seals generate dark powder when they wear out. Is it possible that yours wore out completely? Iulian --- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab On 6/6/2012 7:49 AM, Morrison, Richard H., Jr. wrote: > Hi All, > > We had a very interesting event happen 2 weeks ago on our Oxford tool. > We have an Oxford PECVD/RIE tool. PECVD chamber on the left side for > PECVD Nitride, Load in the center, RIE on the right hand side. > > The turbo on the load lock crashed and we discovered that the Varian > Triscroll backing pump was off and the circuit breaker tripped.. We sent > the pump out for repair and the inside of the pump was covered with > black soot, it seems that the Pump had some sort of combustion event. > The screen was blown outwards and it had a large hole in it. The only > gas the load has in N2. > > When the pump self destructed it back-streamed gas into the load lock, > we had the residue analyzed, and it was fluorinated hydrocarbon. We are > completed stumped, has any of you had a TriScroll combust before. > > Thanks in advance for any help. > > > Rick > > Rick Morrison > > Senior Member Technical Staff > > Group Leader Microfabrication Operations > > Draper Laboratory > > 555 Technology Square > > Cambridge, MA 02139 > > W 617-258-3420 > > C 508-930-3461 > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From PhilH at ee.montana.edu Fri Jun 8 10:18:02 2012 From: PhilH at ee.montana.edu (Himmer, Phil) Date: Fri, 8 Jun 2012 08:18:02 -0600 Subject: [labnetwork] reliable scroll pump In-Reply-To: <8F95EA77ACBF904A861E580B44288EFD9B5C12CD55@FASXCH02.fasmail.priv> References: <8F95EA77ACBF904A861E580B44288EFD9B5C12CD55@FASXCH02.fasmail.priv> Message-ID: Hello I am in the process of replacing a Edwards GVSP 30 pump used to back a cryo on an evaporator, the needle bearings went bad and damaged the housing. Multiple pump suppliers have said that the Edwards GVSP are poorly designed pumps and the triscroll 600 would be a better choice. I have also been told that the Edwards is a bad copy of the Anest Iwata ISP 500. The equipment manufacturer likes the triscroll 600 for the cost and ease of replacing the tip seals but does acknowledge that they do need replacing at least every year. Can anyone weigh in on which, if any, of these scroll pumps would be a better choice or do they all have their own problems? Thanks Dr. Phillip Himmer Manager Montana Microfabrication Facility Montana State University ph: 406-994-7178 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven Sent: Wednesday, June 06, 2012 10:03 AM To: Morrison, Richard H., Jr.; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Triscroll pump question I have some experience with these. First of all, depending on use, you can expect 6 months to one year of service out of these which I find unacceptable. Second of all, the fluorinated hydrocarbon residue is a mixture of o-ring material and Teflon from the tip seals. After rebuilding a bunch of them, I saw the same stuff in every pump housing and it was a dark powdery substance. I can't explain the inlet screen blowing outwards (upstream?) unless there was an event in your exhaust somewhere downstream. Hope this helps, Steve Paolini Harvard University Center For Nanoscale Systems. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr. Sent: Wednesday, June 06, 2012 7:49 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Triscroll pump question Hi All, We had a very interesting event happen 2 weeks ago on our Oxford tool. We have an Oxford PECVD/RIE tool. PECVD chamber on the left side for PECVD Nitride, Load in the center, RIE on the right hand side. The turbo on the load lock crashed and we discovered that the Varian Triscroll backing pump was off and the circuit breaker tripped.. We sent the pump out for repair and the inside of the pump was covered with black soot, it seems that the Pump had some sort of combustion event. The screen was blown outwards and it had a large hole in it. The only gas the load has in N2. When the pump self destructed it back-streamed gas into the load lock, we had the residue analyzed, and it was fluorinated hydrocarbon. We are completed stumped, has any of you had a TriScroll combust before. Thanks in advance for any help. Rick Rick Morrison Senior Member Technical Staff Group Leader Microfabrication Operations Draper Laboratory 555 Technology Square Cambridge, MA 02139 W 617-258-3420 C 508-930-3461 -------------- next part -------------- An HTML attachment was scrubbed... URL: From voros at silicon.EECS.Berkeley.EDU Wed Jun 13 19:46:28 2012 From: voros at silicon.EECS.Berkeley.EDU (Katalin Voros) Date: Wed, 13 Jun 2012 16:46:28 -0700 (PDT) Subject: [labnetwork] UGIM 2012 Message-ID: <201206132346.q5DNkSiR012536@silicon2.EECS.Berkeley.EDU> Dear colleagues, Registration is open and the full program of the UGIM 2012 Symposium is available for your perusal on the website: http://microlab2.eecs.berkeley.edu/UGIM2012/ The technical program includes two days packed with papers on all aspects of lab management and two lab tours. Special events include a San Franscisco Bay dinner cruise and a banquet in the Great Hall of the beautiful historic Bancroft Hotel. Companions are welcome at both special events. (Pay by check on site.) Hope to see many of you in Berkeley! Sincerely Katalin and Bill A. William Flounders, Co-Chair Katalin Voros, Co-Chair 510-642-2911 From codreanu at seas.upenn.edu Tue Jun 19 16:56:47 2012 From: codreanu at seas.upenn.edu (Iulian Codreanu) Date: Tue, 19 Jun 2012 16:56:47 -0400 Subject: [labnetwork] cleanroom air handling equipment maintenance Message-ID: <4FE0E78F.4070107@seas.upenn.edu> Good Afternoon. We are trying to determine who will maintain the systems that will serve Penn's new cleanroom and hope that you can share some of your experience with us. - Who maintains your cleanroom air handling equipment (e.g. external contractor, Central Facilities)? - If the maintenance is done by Facilities, what kind of additional training/certification do you require? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab From bill at eecs.berkeley.edu Tue Jun 19 21:21:34 2012 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Tue, 19 Jun 2012 18:21:34 -0700 Subject: [labnetwork] cleanroom air handling equipment maintenance In-Reply-To: <4FE0E78F.4070107@seas.upenn.edu> References: <4FE0E78F.4070107@seas.upenn.edu> Message-ID: <4FE1259E.7000902@eecs.berkeley.edu> Shared with Central Facilities but primarily maintained by lab staff. Check in with lab staff, do not touch lab equipment, Pre-notify of any utility shutdowns, general gowning protocol and emergency exit procedures are the primary requirements for central campus staff to work in the clean room. Bill Flounders UC Berkeley Iulian Codreanu wrote: > Good Afternoon. > > We are trying to determine who will maintain the systems that will serve > Penn's new cleanroom and hope that you can share some of your experience > with us. > - Who maintains your cleanroom air handling equipment (e.g. external > contractor, Central Facilities)? > - If the maintenance is done by Facilities, what kind of additional > training/certification do you require? > > Thank you very much for your help. > > Iulian From diadiuk at MIT.EDU Wed Jun 20 13:32:15 2012 From: diadiuk at MIT.EDU (Vicky Diadiuk) Date: Wed, 20 Jun 2012 13:32:15 -0400 Subject: [labnetwork] OpenCORAL.org has been moved to OpenCORAL.mit.edu Message-ID: <9FBF2065-89B4-4363-A6FB-9C0CBCD559F6@mit.edu> Hi, As you will recall from earlier messages (eg, see note below), MIT has agreed to host the OpenCORAL forum and the web content. We have been working with John to make the transition, & it is now complete. OpenCORAL.org has been moved to OpenCORAL.mit.edu (at this point, the old Website will re-direct you to the new one). We look forward to energetic participation by all CORAL users. Thanks, Vicky *********************** 12/04/11 Dear colleagues, Recently Stanford informed us that OpenCoral.org will remain an active site for the discussion, development, and distribution of OpenCoral. However, Stanford will not be able to continue to host the website, since they do not plan to run Coral after they transition to Badger (the new commercial version of CORAL). Since MIT will continue to use and maintain CORAL, we agreed to host the forum and the web content. In contrast to Stanford, however, we don't have the resources necessary to provide the extensive help that John Shott has offered in the past. We will rely on the expertise of all CORAL users to help each other. After the transition to MIT, we do not expect to do as much development and functionality additions as Bill Murray had been able to do, but we will keep CORAL current, i.e. compatible with modern operating systems and databases. Our intent is to continue the collaboration between the user-institutions in assisting each other with maintenance of the systems we are already using. With John Shott?s help we are presently working to make a smooth transition of OpenCoral.org hosting from Stanford to MIT. Please let us know if you have any questions and/or if you would like to assist with the transition and future CORAL maintenance -------------- next part -------------- An HTML attachment was scrubbed... URL: From tribble at fas.harvard.edu Tue Jun 19 23:10:25 2012 From: tribble at fas.harvard.edu (Tribble, Thomas) Date: Tue, 19 Jun 2012 23:10:25 -0400 Subject: [labnetwork] cleanroom air handling equipment maintenance In-Reply-To: <4FE0E78F.4070107@seas.upenn.edu> References: <4FE0E78F.4070107@seas.upenn.edu> Message-ID: <3456A84829A8044899D2165963478C84D8C7D3B8B6@FASXCH01.fasmail.priv> Julian, Stretching the Harvard Management Model so as to resemble other institutions, the answer is 'yes.' the Cleanroom and other Center spaces are maintained by central Facilities. The Director of the Center focuses on maintaining the tools, training users, and managing the Center for Nanoscale Systems (CNS). He is also the major tenant of the LISE lab, which houses the Center. In a Customer Services oriented central facilities organization, being a tenant is more powerful position than it sounds. The building systems serving CNS are my responsibility. The maintenance of those systems are my responsibility. The majority of the work associated with those responsibilities is performed by outside contractors under Facilities supervision, and the Directors review and approval. Examples: 1. The cleanroom floors are cleaned by a specialty contractor, managed by central Facilities. 2. The mechanical equipment is maintained under a full service contract currently held by Siemens. a. maintenance schedules are set and monitored by central Facilities. 3. The cleanroom is recertified annually by an outside contractor. Recertification and repairs needed to achieve recertification are paid by central Facilities 4. Emergency needs are responded to by central Facilities 5. Routine needs are responded to central Facilities, often using Contractors. 6. Life Safety systems (TGMS, etc.) are maintained by central Facilities. Central Facilities is responsible for maintaining the building and building systems. Central Facilities is responsible for maintaining what exists. The Center is financially responsible for new things, and the tools associated with the Center. It's not a perfect system, but we all try to make it work. The issue of training for internal personnel is probably locale specific. If our Center was not in an urban area, probably more work would be done internally. But given the specialty nature of much of the work, and the ready availability of specialty contractors in our area, the choice is not too hard. Thomas A Tribble PE, JD 52 Oxford St. 02138 617 495 0990 C 617 780 5685 ________________________________________ From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu [codreanu at seas.upenn.edu] Sent: Tuesday, June 19, 2012 4:56 PM To: Fab Network Subject: [labnetwork] cleanroom air handling equipment maintenance Good Afternoon. We are trying to determine who will maintain the systems that will serve Penn's new cleanroom and hope that you can share some of your experience with us. - Who maintains your cleanroom air handling equipment (e.g. external contractor, Central Facilities)? - If the maintenance is done by Facilities, what kind of additional training/certification do you require? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Wed Jun 20 05:22:44 2012 From: schweig at umich.edu (Schweiger, Dennis) Date: Wed, 20 Jun 2012 09:22:44 +0000 Subject: [labnetwork] cleanroom air handling equipment maintenance In-Reply-To: <4FE0E78F.4070107@seas.upenn.edu> References: <4FE0E78F.4070107@seas.upenn.edu> Message-ID: <4E7EB3A5C63C4B4FA973714C1DAF0B0F22F9F979@its-embx-02.adsroot.itcs.umich.edu> Iulian, Here at the LNF at Michigan, we're using our Central Facilities group for the maintenance of all of the support systems. Other than the field of service (AC, pumps, steam, etc....) we don't require any additional training, other than what was provided as part of the startup package by the equipment vendor when the new facility came on line. However, like any owner, we have a vested interest in keeping the systems, spaces, and equipment, at its peak operating condition. Sometimes our facilities group doesn't share that same enthusiasm, so we have to keep after them. We've found that what works best for us is having a couple of key maintenance mechanics (general facilities people) get familiar with the facility, and then we'll work closely with them. It's not perfect, but it has been working well so far. Even with their support, every morning I make a pass through all of our mechanical spaces looking at the general status of the systems, and looking for the "out of the ordinary" so that it can get corrected. Dennis Schweiger Facilities Manager Lurie Nanofabrication Facility University of Michigan 1301 Beal Ave. Ann Arbor, MI 48109-2122 734.647.2055 Ofc 877.471.6208 Fax 586.531.3030 Cell "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Tuesday, June 19, 2012 4:57 PM To: Fab Network Subject: [labnetwork] cleanroom air handling equipment maintenance Good Afternoon. We are trying to determine who will maintain the systems that will serve Penn's new cleanroom and hope that you can share some of your experience with us. - Who maintains your cleanroom air handling equipment (e.g. external contractor, Central Facilities)? - If the maintenance is done by Facilities, what kind of additional training/certification do you require? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From vincent.luciani at nist.gov Wed Jun 20 12:42:00 2012 From: vincent.luciani at nist.gov (Luciani, Vincent) Date: Wed, 20 Jun 2012 12:42:00 -0400 Subject: [labnetwork] cleanroom air handling equipment maintenance Message-ID: <01F47D4EDEEC64488C10B767D15E4858100E36BD42@MBCLUSTER.xchange.nist.gov> Hello Iulian, Will you be at the UGIM? I have been working through these issues here at NIST and there is far too much to say about this topic than can be said in email. Vince Sent with Good (www.good.com) -----Original Message----- From: Iulian Codreanu [codreanu at seas.upenn.edu] Sent: Tuesday, June 19, 2012 07:48 PM Eastern Standard Time To: Fab Network Subject: [labnetwork] cleanroom air handling equipment maintenance Good Afternoon. We are trying to determine who will maintain the systems that will serve Penn's new cleanroom and hope that you can share some of your experience with us. - Who maintains your cleanroom air handling equipment (e.g. external contractor, Central Facilities)? - If the maintenance is done by Facilities, what kind of additional training/certification do you require? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From noreply at qemailserver.com Wed Jun 20 14:38:41 2012 From: noreply at qemailserver.com (IULIAN CODREANU) Date: Wed, 20 Jun 2012 12:38:41 -0600 (MDT) Subject: [labnetwork] Equipment Move/Install survey Message-ID: <858239918.186120.1340217521393.JavaMail.dev@mailer1.qualtrics.com> An HTML attachment was scrubbed... URL: From rmorrison at draper.com Thu Jun 21 06:10:42 2012 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Thu, 21 Jun 2012 10:10:42 +0000 Subject: [labnetwork] cleanroom air handling equipment maintenance In-Reply-To: <4FE0E78F.4070107@seas.upenn.edu> References: <4FE0E78F.4070107@seas.upenn.edu> Message-ID: HI, At Draper the central facilities group is responsible for all building equipment. When they have to enter the cleanroom envelope we train them on gowning and tool cleaning procedures. The HVAC equipment vendors trains the facilities technicians during the installation of the equipment. All fans are on a 6 month PM schedule, this entails a published scheduled down time to have this done, usually on a weekend. All process equipment is maintained by a dedicated staff off 3 equipment technicians and we do not hesitate to bring in the manufacturers service people. Rick Rick Morrison Senior Member Technical Staff Group Leader Microfabrication Operations Draper Laboratory 555 Technology Square Cambridge, MA 02139 W 617-258-3420 C 508-930-3461 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Tuesday, June 19, 2012 4:57 PM To: Fab Network Subject: [labnetwork] cleanroom air handling equipment maintenance Good Afternoon. We are trying to determine who will maintain the systems that will serve Penn's new cleanroom and hope that you can share some of your experience with us. - Who maintains your cleanroom air handling equipment (e.g. external contractor, Central Facilities)? - If the maintenance is done by Facilities, what kind of additional training/certification do you require? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From codreanu at seas.upenn.edu Thu Jun 21 08:29:29 2012 From: codreanu at seas.upenn.edu (Iulian Codreanu) Date: Thu, 21 Jun 2012 08:29:29 -0400 Subject: [labnetwork] Correction: Equipment Move/Install survey Message-ID: <4FE313A9.2080606@seas.upenn.edu> Good Morning. I apologize for the incorrect survey link that was mailed out last night. Could you please try this link: https://upenn.us2.qualtrics.com/SE/?SID=SV_3dDCLOr2dIzPQ3i Iulian --- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab On 6/20/2012 2:38 PM, IULIAN CODREANU wrote: > Good Afternoon. > > We are planning the move of equipment into Penn's new cleanroom and need > your help to make our case to Facilities. Would you please take the > brief survey linked below? > > Thank you very much. > > Iulian > Penn Nanofab From donald.yeager at louisville.edu Thu Jun 21 10:08:04 2012 From: donald.yeager at louisville.edu (Yeager,Don) Date: Thu, 21 Jun 2012 14:08:04 +0000 Subject: [labnetwork] cleanroom air handling equipment maintenance In-Reply-To: <4FE0E78F.4070107@seas.upenn.edu> References: <4FE0E78F.4070107@seas.upenn.edu> Message-ID: Hi Iulian, Response from the University of Louisville's Micro/Nano Technology Center: 1) Our university's physical plant maintains the cleanroom air handling equipment. 2) The only requirement we have currently is for physical plant to gown up to work on the air handlers, since the 14 air handlers are in the interstitial space above the cleanroom which is considered clean space. Don Yeager University of Louisville Technical Research Services Coordinator Micro/Nano Technology Center Shumaker Research Building 2210 S. Brook Street Louisville, KY 40292 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Tuesday, June 19, 2012 4:57 PM To: Fab Network Subject: [labnetwork] cleanroom air handling equipment maintenance Good Afternoon. We are trying to determine who will maintain the systems that will serve Penn's new cleanroom and hope that you can share some of your experience with us. - Who maintains your cleanroom air handling equipment (e.g. external contractor, Central Facilities)? - If the maintenance is done by Facilities, what kind of additional training/certification do you require? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From khbeis at uw.edu Fri Jun 22 11:28:30 2012 From: khbeis at uw.edu (Michael Khbeis) Date: Fri, 22 Jun 2012 08:28:30 -0700 Subject: [labnetwork] KOH/IPA Solution In-Reply-To: <858239918.186120.1340217521393.JavaMail.dev@mailer1.qualtrics.com> References: <858239918.186120.1340217521393.JavaMail.dev@mailer1.qualtrics.com> Message-ID: Good Morning, We have just replaced all of our wet processing stations and are setting up a 6L recirculating bath of KOH w/ ~20% IPA as a surfactant. I am presuming that the IPA will readily evaporate and will not pose a regulatory issue with dumping to waste water treatment. I was wondering if most of you still use IPA or have moved to other surfactants for Si preferential wet etch. If you still use IPA how do you handle the effluent? I appreciate the fab knowledge support community that you all contribute to. Gratefully, Dr. Michael Khbeis Associate Director Microfabrication Facility (MFF) University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (C) 443.254.5192 khbeis at uw.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Fri Jun 22 12:08:17 2012 From: julia.aebersold at louisville.edu (Aebersold,Julia Weyer) Date: Fri, 22 Jun 2012 16:08:17 +0000 Subject: [labnetwork] Turbo Pump for STS DRIE, Leybold MAG 900 Message-ID: We have experienced a failure of our turbo pump for our STS DRIE system (sigh). Our turbo pump is fairly old and was new in 2001, but has not been run constantly. I have been talking with STS and they have suggested the upgrade to the Leybold MAG1500, but has quite a significant cost. I wanted to tap into our group to find out whom else has encountered such a problem and if they were able to just replace the MAG 900 with a refurb unit or if they bit the bullet and did the upgrade. If you purchased a refurb unit please also include the vendor you used. I also found out that the heater tape to keep the SF6 residue from condensing hasn't functioned for a majority of years of service. While this is being remedied I wanted to also find out what PM items and schedules you perform at your facility to keep such a catastrophic failure from happening. I am also wondering if this is the normal life expectancy of a turbo pump. I welcome your comments. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From bob at eecs.berkeley.edu Fri Jun 22 18:57:31 2012 From: bob at eecs.berkeley.edu (Robert M. Hamilton) Date: Fri, 22 Jun 2012 15:57:31 -0700 Subject: [labnetwork] Turbo Pump for STS DRIE, Leybold MAG 900 In-Reply-To: References: Message-ID: <4FE4F85B.7050005@eecs.berkeley.edu> Julia Aebersold, UC Berkeley's experience with Leybold turbos has been excellent. We have also had good experience with rebuilds for both Leybold and Seiko-Sekei (now Edwards) turbos. We have used Highvac Corp, www.highvacgroup.com for most rebuilds and pleased with their work and the way they treat us. Over the years we've upgraded some older Seiko-Sekei turbo controllers as older controllers seem impossible to get rebuilt and Seiko's newer controllers are more flexible. Turbos do age and there is considerable electrical and mechanical stress on the drive elements of these pumps. They do have a finite lifetime. I would turn to a reputable turbo rebuilding service for their advice about your specific unit. From a different standpoint, your decision may be influenced by your gas throughput needs and achieving better etch performance at higher gas throughput. Historically, UC's STS was originally equipped with a Pfeiffer turbo w/Hollweg stage, i.e. a high throughput turbo with performance enhanced by a high-pressure stage. This pump failed after relatively short service life because of sulfur deposition in the tight annulus of the high pressure stage. This issue was specific to this process. It does point out the difficulties one may face with a process that produces effluents change to a solid phase within the pressure range of a pump. With help from STS we replaced this turbo with a Pfeiffer that did not contain a high pressure stage and we added an Edwards QMB250 blower to recover the lost throughput. Our newest STS systems are equipped with Oerlikon (Leybold) turbos and these systems have been in operation for two years without any vacuum pump issues. Bob Hamilton Robert M. Hamilton Marvel NanoLab University of CA at Berkeley Rm 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu (e-mail preferred) 510-809-8600 510-325-7557 (mobile - emergencies) On 6/22/2012 9:08 AM, Aebersold,Julia Weyer wrote: > > We have experienced a failure of our turbo pump for our > STS DRIE system (sigh). Our turbo pump is fairly old and > was new in 2001, but has not been run constantly. I have > been talking with STS and they have suggested the upgrade > to the Leybold MAG1500, but has quite a significant cost. > I wanted to tap into our group to find out whom else has > encountered such a problem and if they were able to just > replace the MAG 900 with a refurb unit or if they bit the > bullet and did the upgrade. If you purchased a refurb > unit please also include the vendor you used. > > I also found out that the heater tape to keep the SF6 > residue from condensing hasn't functioned for a majority > of years of service. While this is being remedied I > wanted to also find out what PM items and schedules you > perform at your facility to keep such a catastrophic > failure from happening. I am also wondering if this is the > normal life expectancy of a turbo pump. > > I welcome your comments. > > Cheers! > > Julia Aebersold, Ph.D. > > MNTC Cleanroom Manager > > Shumaker Research Building, Room 233 > > 2210 South Brook Street > > University of Louisville > > Louisville, KY 40292 > > 502-852-1572 > > http://louisville.edu/micronano/ > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From bill at eecs.berkeley.edu Fri Jun 22 20:08:40 2012 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Fri, 22 Jun 2012 17:08:40 -0700 Subject: [labnetwork] KOH/IPA Solution In-Reply-To: References: <858239918.186120.1340217521393.JavaMail.dev@mailer1.qualtrics.com> Message-ID: <4FE50908.2060609@eecs.berkeley.edu> Michael, Your local authority having jurisdiction (AHJ) will define if you are allowed to drain dispose modest volumes of water miscible solvent - just as we all dispose limited volumes of ethanol and rubbing alcohol from our homes. I find your proposal that most of the solvent has evaporated as part of the process an additional compelling reason for approval. As a separate topic, I offer that we also run a KOH bath and we intentionally sparge the tank with O2 to minimize hillock formation as O2 saturated solutions provide O2 to rapidly react with H2 produced at the surface during etching. H2 bubbles cause micromasking which results in micropyramid (or hillock) structures. Some related refs: J. Micmmech. Microeng. 5 (1995) 209-218. J. Micromech. Microeng. 9 (1999) 139--145. I welcome separate off line contact if you want to discuss further. Bill Flounders UC Berkeley NanoLab Michael Khbeis wrote: > Good Morning, > > We have just replaced all of our wet processing stations and are > setting up a 6L recirculating bath of KOH w/ ~20% IPA as a surfactant. > I am presuming that the IPA will readily evaporate and will not pose > a regulatory issue with dumping to waste water treatment. I was > wondering if most of you still use IPA or have moved to other > surfactants for Si preferential wet etch. If you still use IPA how do > you handle the effluent? > > I appreciate the fab knowledge support community that you all > contribute to. > > Gratefully, > > Dr. Michael Khbeis > Associate Director > Microfabrication Facility (MFF) > University of Washington > Fluke Hall, Box 352143 > (O) 206.543.5101 > (C) 443.254.5192 > khbeis at uw.edu > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From daniel.woodie at cornell.edu Sun Jun 24 18:47:57 2012 From: daniel.woodie at cornell.edu (Dan Woodie) Date: Sun, 24 Jun 2012 22:47:57 +0000 Subject: [labnetwork] KOH/IPA Solution In-Reply-To: References: <858239918.186120.1340217521393.JavaMail.dev@mailer1.qualtrics.com> Message-ID: <1A2C639447BEA24EA19C3A3B7DF59AF9095601DC@MBXD-01.exchange.cornell.edu> Michael, At the CNF, we do not allow IPA on KOH due to the fire hazard (flash point of IPA is about 11 - 13 deg C, well below even room temp). Instead of using IPA, we offer Triton X-100, an anionic surfactant that can be added to many etching solutions. We pursued that after users started requesting many of the common etching solutions we used in surfactant variations. Trying to avoid every combination of surfactant and regular solutions on the shelf, we looked for something that could be added to most solutions if desired. The challenge with most surfactants is getting the correct concentration, which is usually very low. For the Triton X-100, I found a publication that pointed towards 100 ppm as the optimum concentration. So, we predilute the material down to a dilute solution in an eye dropper style dispenser, labeled to show the proper number of drops to add per liter of etching solution, and warning that more is not better for surfactants. I don't have definitive information on how well it does versus IPA, but for both BOE solutions and KOH, I have had positive verbal feedback from researchers. Dan Daniel Woodie Safety Manager, College of Engineering Cornell University 344 Duffield Hall Ithaca, NY 14853-2700 (607)254-4891 Off Hour Emergency # - (607)227-2993 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis Sent: Friday, June 22, 2012 11:29 AM To: Fab Network Cc: Andrew R. Lingley Subject: [labnetwork] KOH/IPA Solution Good Morning, We have just replaced all of our wet processing stations and are setting up a 6L recirculating bath of KOH w/ ~20% IPA as a surfactant. I am presuming that the IPA will readily evaporate and will not pose a regulatory issue with dumping to waste water treatment. I was wondering if most of you still use IPA or have moved to other surfactants for Si preferential wet etch. If you still use IPA how do you handle the effluent? I appreciate the fab knowledge support community that you all contribute to. Gratefully, Dr. Michael Khbeis Associate Director Microfabrication Facility (MFF) University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (C) 443.254.5192 khbeis at uw.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From gwatson at Princeton.EDU Wed Jun 27 16:14:55 2012 From: gwatson at Princeton.EDU (George P. Watson) Date: Wed, 27 Jun 2012 20:14:55 +0000 Subject: [labnetwork] Nitrogen Gas Flow Meters Message-ID: <0565B0F370443F4CB0D9C1CDDD8533E738BA7F7D@CSGMBX201W.pu.win.princeton.edu> Dear Labnetwork members, Our engineering school Nitrogen cost has risen dramatically and our method of dividing the cost (mostly guessing everyone's usage) has become outdated. We would like to meter each lab and facility to more fairly assign the cost. Has anyone had experience installing and using these meters? Can you recommend a meter capable of maintaining the N2 purity? How much does such a meter cost, and how much is installation and hookup for remote readout? What happens if there is a wide range of N2 flow rate, both from lab to lab, and at various times within one lab? Will one meter meet our needs? How do you monitor the N2 use? Do you read flow totals from the units themselves, or are they connected to a network? Thanks in advance, Pat George Patrick Watson (Pat), Ph.D. Director of Operations PRISM Micro/Nano Fabrication Laboratory E-Quad J301A Princeton University Princeton, NJ 08544 gwatson at princeton.edu (609) 258 4626 -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Wed Jun 27 21:32:23 2012 From: shott at stanford.edu (John Shott) Date: Wed, 27 Jun 2012 18:32:23 -0700 Subject: [labnetwork] Nitrogen Gas Flow Meters In-Reply-To: <0565B0F370443F4CB0D9C1CDDD8533E738BA7F7D@CSGMBX201W.pu.win.princeton.edu> References: <0565B0F370443F4CB0D9C1CDDD8533E738BA7F7D@CSGMBX201W.pu.win.princeton.edu> Message-ID: <4FEBB427.9070701@stanford.edu> Pat et al: I was asking many of the same questions on this list nearly a year ago and got some useful information from a variety of places including Michigan, Berkeley, Draper, Cornell, some of your colleagues at Princeton and probably a few others. A search of this mailing list archive from about August 2011 should show those messages. With that information, we've selected flow meters, have them installed, and are coming up the learning curve in terms of collecting data, reliability, etc. The first important question is whether you have a stainless piping system or a copper piping system or some of both. In our case, we have both .... but 90-95% of our usage is on the "house" nitrogen system piped in copper and a significantly lesser amount is flowing in our "Ultra High Purity" system piped in stainless (we only have one LN2 tank ... but at least have some additional purifiers that make the UHP stuff somewhat better than the house nitrogen. However, meters clean enough to go on a copper system are going to be significantly cheaper than their stainless steel counterparts. Some of the other labs will likely have more relevant information if you have a stainless steel system. For our system house nitrogen system that is piped in copper, we have ended up with two different style meters: We have "vampire style" meters that clamp on a section of type L 3/4" copper pipe that are built by CDI meters (www.cdimeters.com). They are easily the most cost effective meters that I was able to find, seem to work well and have large useful flow range. In fact, the maximum flow that these things can read is HUGE .... like 150 CFM. We've used those primarily in our main facility where we do see some fairly high flows: when our tube cleaner is running, that flow meter will hit 60 CFM and we've got others that run 10-15 CFM day and night. (Aside: I apologize to those of you who are offended by my use of CFM ... I can think in l/min, but I've never learned to think in m3/time.) Probably the only downside of these flow meters is that you need to drill and clamp them onto a length of pipe that has 20-30 diameters of straight, unobstructed flow upstream and something like 6-10 diameters downstream. I was worried about drilling into a actively used section of pipe, so we pre-drilled sections of pipe about 30" long, deburred and cleaned them, attached the meters and then cut out an appropriate length of pipe, cleaned an deburred those ends and then used crimp-on fittings to attach the new section of metered pipe. We have a total of 24 of those meters installed and they have on-board totalizers. They also have a MODBUS interface that we are able to poll over the network using NET-485 MB interface adapters from Grid Connect (www.gridconnect.com). The second style flow meter (I think that we have 14 of these) is primarily used in the private labs (that we are now able to charge for nitrogen use) but whose use is typically smaller. In those applications we selected an Aalborg XFM flow meter with a range of 0-100 l/min. These lower capacity flow meters seem pretty good down to comparatively low flows. How accurate are they down below 5% of full flow? I don't know ... but haven't been asked. They are digital flow meters, have an onboard totalizer, and communicate using RS-485 (note: while most MODBUS runs over RS-485, RS-485 != MODBUS). We have found that we can also communicate with these over the network, with a slightly different adapter from Grid Connect: their NET-485 device. Note: one NET-485 MB device can be hooked up to as many as 32 CDI meters and a single NET-485 could be connected to as many as 32 of the Aalborg meters. Depending on things like fire walls (physical barriers, not software firewalls ...) we actually have a total of 8 of these network devices to talk to our 38 flow meters. For ball park pricing, I'd use: CDI 5200 meter including serial communcations option: $550 each. Aalborg XFM meter (with RS-485 built in): $1100 each. NET-485 MB: $150 each. NET-455: $100 each. The big cost unknown, I believe is software to communicate with this stuff. We're doing our own .... so it's free, correct? But not yet done ... There are companies that will sell you turnkey systems, of course, but that is likely comparatively pricey. Others may be able to comment on that approach. I've rambled on enough, but hope that this will get the discussion started. Thanks, John On 6/27/2012 1:14 PM, George P. Watson wrote: > > Dear Labnetwork members, > > Our engineering school Nitrogen cost has risen dramatically and our > method of dividing the cost (mostly guessing everyone's usage) has > become outdated. We would like to meter each lab and facility to more > fairly assign the cost. Has anyone had experience installing and > using these meters? > > Can you recommend a meter capable of maintaining the N2 purity? How > much does such a meter cost, and how much is installation and hookup > for remote readout? > > What happens if there is a wide range of N2 flow rate, both from lab > to lab, and at various times within one lab? Will one meter meet our > needs? > > How do you monitor the N2 use? Do you read flow totals from the units > themselves, or are they connected to a network? > > Thanks in advance, > > Pat > > George Patrick Watson (Pat), Ph.D. > > Director of Operations > > PRISM Micro/Nano Fabrication Laboratory > > E-Quad J301A > > Princeton University > > Princeton, NJ 08544 > > gwatson at princeton.edu > > (609) 258 4626 > -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Thu Jun 28 06:31:43 2012 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Thu, 28 Jun 2012 10:31:43 +0000 Subject: [labnetwork] Nitrogen Gas Flow Meters In-Reply-To: <0565B0F370443F4CB0D9C1CDDD8533E738BA7F7D@CSGMBX201W.pu.win.princeton.edu> References: <0565B0F370443F4CB0D9C1CDDD8533E738BA7F7D@CSGMBX201W.pu.win.princeton.edu> Message-ID: Hi George, We have been using N2 flow meters for the last 4 years here at Draper, they are totalizing flow meters from Sage Metering, model SRG-100. The units are located on the main trunk lines to 5 different labs. The meters cost about $4K each, they use a RF comms link to report back to a central unit. We had a bypass installed on each meter so we can calibrate the meters without shutting of the lab space. The install cost per meter was around $2500 for each meter. So each lab is billed on a monthly basis for the N2 that they use. So we know how much N2 was delivered. we know how much total was used (central unit report). We then divide the cost per month by the CFM delivered gets us $/CFM. Then each lab pays for CFM usage, and since we use the $$ delivered price everyone shares in the boil off amount. Rick Rick Morrison Senior Member Technical Staff Group Leader Microfabrication Operations Draper Laboratory 555 Technology Square Cambridge, MA 02139 W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of George P. Watson Sent: Wednesday, June 27, 2012 4:15 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Nitrogen Gas Flow Meters Dear Labnetwork members, Our engineering school Nitrogen cost has risen dramatically and our method of dividing the cost (mostly guessing everyone's usage) has become outdated. We would like to meter each lab and facility to more fairly assign the cost. Has anyone had experience installing and using these meters? Can you recommend a meter capable of maintaining the N2 purity? How much does such a meter cost, and how much is installation and hookup for remote readout? What happens if there is a wide range of N2 flow rate, both from lab to lab, and at various times within one lab? Will one meter meet our needs? How do you monitor the N2 use? Do you read flow totals from the units themselves, or are they connected to a network? Thanks in advance, Pat George Patrick Watson (Pat), Ph.D. Director of Operations PRISM Micro/Nano Fabrication Laboratory E-Quad J301A Princeton University Princeton, NJ 08544 gwatson at princeton.edu (609) 258 4626 -------------- next part -------------- An HTML attachment was scrubbed... URL: From joseph_ring at harvard.edu Thu Jun 28 14:40:50 2012 From: joseph_ring at harvard.edu (Ring, Joseph P.) Date: Thu, 28 Jun 2012 18:40:50 +0000 Subject: [labnetwork] Safety Officer Position to support Harvard Nanotechnology Position Message-ID: <6DB8E2434A4A5B409F02979B5DCE5CBC1081866E@ENTWEXMB0000008.university.harvard.edu> Harvard University has an exciting opportunity for an experienced Safety Officer to support the Harvard Nanotechnology Center: Lab for Interface Science and Engineering (LISE). Working collaboratively with a close knit team, the incumbent will consult with a diverse array of faculty, researcher staff and other safety professionals to deliver the resources needed to advance our leadership in materials, microelectronic and nanotechnology research. The successful candidate will be responsible for the implementation and management of the laboratory safety, industrial hygiene, Clean Air Act, hazardous waste and toxic gas programs in the nanotechnology research areas. We seek an individual with a Bachelor of Science in environmental health and safety related discipline; preferably industrial hygiene, engineering or equivalent; A Master of Science is preferred. A minimum of five years experience working with environmental health and safety programs, hazardous gas, and clean room laboratory experience preferred. Require strong working knowledge of regulations, with primary emphasis on OSHA laboratory compliance. Prefer knowledge of NFPA, CDC, and DEP/EPA regulations. Must have excellent communications skills, operational level expertise to implement EHSEM programs; demonstrated ability to work independently, cooperatively and collaboratively and with a proven philosophy of service. Interested individuals are asked to review the complete position description, and apply on-line at, http://employment.harvard.edu for position 26311BR. Please contact Tori_Caldwell at harvard.edu , if you have any questions. Joseph P. Ring, Ph.D., DABHP Director of Laboratory Safety Radiation Safety Officer Harvard University Environmental Health, Safety and Emergency Management 46 Blackstone Street Cambridge, MA 02139 Telephone: 617 495-8795 FAX: 617 496-5509 Email: Joseph_ring at harvard.edu Radiation Protection Office email: Radiation_protection at harvard.edu EHSEM http://www.uos.harvard.edu/ehs/ This document may contain information that is privileged, CONFIDENTIAL and exempt from disclosure under applicable law. If you are not the intended recipient, please destroy the email and notify me immediately, as the use of this information is strictly prohibited. -------------- next part -------------- An HTML attachment was scrubbed... URL: