From vito.logiudice at uwaterloo.ca Thu Mar 1 14:44:06 2012 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Thu, 1 Mar 2012 19:44:06 +0000 Subject: [labnetwork] Experience etching YBCO superconducting films Message-ID: Hi all, Since we do not have access to an ion mill, one of our users is interested in attempting to develop an etch recipe for YBCO on our ICP RIE (Oxford ICP380). The system is currently used to etch a variety of materials including InAs, GaAs, Nb and Al. I was wondering if anyone has experience etching such films on this type of system. We're specifically concerned about the potential for chamber contamination and adversely affecting our existing etch recipes. Thanks very much for any insights. Regards, Vito -- Vito Logiudice M.A.Sc., P.Eng. Director of Operations, Quantum NanoFab University of Waterloo 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel: 1-519-888-4567 ext. 38703 Email: vlogiudi at uwaterloo.ca Website: https://qncfab.uwaterloo.ca/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Fri Mar 2 19:28:16 2012 From: hathaway at cns.fas.harvard.edu (Hathaway, Malcolm) Date: Fri, 2 Mar 2012 19:28:16 -0500 Subject: [labnetwork] Tool Usage System In-Reply-To: References: Message-ID: <8F95EA77ACBF904A861E580B44288EFD9B5977983B@FASXCH02.fasmail.priv> Hi, This is Mac, at Harvard CNS. We have a system called CLEAN, which was designed in-house. It is a php-based application which controls system access via ethernet-connected interlock switches, and uses a browser user-interface to log in and out. It has an on-line log-book function, and interacts with our pre-existing reservation system. It also tracks tool usage, and recently was integrated with our billing system to automate user invoices. It works pretty well, but is not yet truly portable or "turn-key". There is a possibility that it could be made available to outside groups, but would require additional software support to integrate it into your own pre-existing systems. Feel free to contact me if you have more questions. Mac Hathaway Harvard Center for Nanoscale Systems ________________________________________ From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] On Behalf Of Aebersold,Julia Weyer [julia.aebersold at louisville.edu] Sent: Wednesday, February 22, 2012 6:39 PM To: Lab Network (labnetwork at mtl.mit.edu) Subject: [labnetwork] Tool Usage System I am investigating systems that capture tool usage that have integrated capabilities for scheduling, billing, access, etc. I am aware of CORAL, but would also like to know if there are turnkey systems that exist geared towards a RFID card reader. Or if you made your own system or adapted CORAL to your facility. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From codreanu at seas.upenn.edu Mon Mar 5 13:11:08 2012 From: codreanu at seas.upenn.edu (Iulian Codreanu) Date: Mon, 05 Mar 2012 13:11:08 -0500 Subject: [labnetwork] who cleans your cleanroom? Message-ID: <4F5501BC.8090909@seas.upenn.edu> Dear Fab Network, I am working on a cleaning plan for Penn's new cleanroom (about 10,000 sqft of class 100 and 1,000) and I am writing to ask for your help: - Who does the cleaning for you: fab staff, central Facilities, external contractor, etc? - How many times a day is your Facility cleaned? - How often are the walls cleaned? - How many "general cleanings" do you have throughout the year? Who does it? - Do you use anything else besides DI water/IPA to mop the floors? - If you do not have central vacuum, what vacuum cleaners have you had good experiences with? - What precautions should one take when cleaning raised floors? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab From hbtusainc at yahoo.com Mon Mar 5 14:34:19 2012 From: hbtusainc at yahoo.com (Mario Portillo) Date: Mon, 5 Mar 2012 11:34:19 -0800 (PST) Subject: [labnetwork] who cleans your cleanroom? In-Reply-To: <4F5501BC.8090909@seas.upenn.edu> References: <4F5501BC.8090909@seas.upenn.edu> Message-ID: <1330976059.65667.YahooMailNeo@web130205.mail.mud.yahoo.com> Mr. Codreanu.......I visit many cleanrooms in the USA and ?around the world......I suggest to get in touch with Mr. John Weaver at Purdue University, he has the most rigorous program I have seen in a long time to really upkeep the cleanliness at the Birck Center..... ? Regards Mario A. Portillo Sr. High'born Technology USA Inc. Semiconductor Equipment Services 8130 Glades Road, #229 Boca Raton, FL 33434 561 479-1975 office 561 504-0244 cell hbtusainc at yahoo.com www.hbtusainc.com ________________________________ From: Iulian Codreanu To: Fab Network Sent: Monday, March 5, 2012 1:11 PM Subject: [labnetwork] who cleans your cleanroom? Dear Fab Network, I am working on a cleaning plan for Penn's new cleanroom (about 10,000 sqft of class 100 and 1,000) and I am writing to ask for your help: - Who does the cleaning for you: fab staff, central Facilities, external contractor, etc? - How many times a day is your Facility cleaned? - How often are the walls cleaned? - How many "general cleanings" do you have throughout the year?? Who does it? - Do you use anything else besides DI water/IPA to mop the floors? - If you do not have central vacuum, what vacuum cleaners have you had good experiences with? - What precautions should one take when cleaning raised floors? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Mon Mar 5 17:23:26 2012 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Mon, 5 Mar 2012 22:23:26 +0000 Subject: [labnetwork] who cleans your cleanroom? In-Reply-To: <4F5501BC.8090909@seas.upenn.edu> Message-ID: Dear Iulian, While we won't be migrating to our new cleanroom until late this year, I'm considering the possibility of training a small group of conscientious people within our plant operations group here at the University of Waterloo for this very task. With the exception of two modules rated class 100, most of our 6,000 sqft cleanroom will be rated class 1,000. For class 1,000, I have in the past gotten away with (ie., strained budgets) weekly cleans of all horizontal surfaces coupled with monthly cleans of all vertical surfaces. This was done by an experienced external contractor. We also had one major annual clean which was also performed by this same contractor. The cleanroom was re-certified at the end of this annual clean with detailed particle count testing and verification of air flows at each ceiling HEPA filter. I too need to re-think the protocol for both our class 100 and 1,000 areas so I look forward to hearing the community's input on this subject. We do not have a central vacuum and will therefore likely purchase our stand-alone vacuums from a local (Canadian) manufacturer of such units which I have dealt with in the past with excellent results: http://www.tiger-vac.com/product-line/cleanroom-and-pharmaceutical/cleanroo m.html I recall that this vendor's costs were much lower than those of the competition at the time. Best regards, Vito -- Vito Logiudice M.A.Sc., P.Eng. Director of Operations, Quantum NanoFab University of Waterloo 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel: 1-519-888-4567 ext. 38703 Email: vlogiudi at uwaterloo.ca Website: https://qncfab.uwaterloo.ca/ On 12-03-05 1:11 PM, "Iulian Codreanu" wrote: >Dear Fab Network, > >I am working on a cleaning plan for Penn's new cleanroom (about 10,000 >sqft of class 100 and 1,000) and I am writing to ask for your help: >- Who does the cleaning for you: fab staff, central Facilities, external >contractor, etc? >- How many times a day is your Facility cleaned? >- How often are the walls cleaned? >- How many "general cleanings" do you have throughout the year? Who >does it? >- Do you use anything else besides DI water/IPA to mop the floors? >- If you do not have central vacuum, what vacuum cleaners have you had >good experiences with? >- What precautions should one take when cleaning raised floors? > >Thank you very much for your help. > >Iulian >-- >iulian Codreanu, Ph.D. >Director, Penn NanoFab >200 South 33rd Street >Room 376 GRW Bldg >Philadelphia, PA 19104-6314 >P: 215-898-9308 >F: 215-573-2068 >www.seas.upenn.edu/~nanofab > >_______________________________________________ >labnetwork mailing list >labnetwork at mtl.mit.edu >https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From vincent.luciani at nist.gov Mon Mar 5 18:31:42 2012 From: vincent.luciani at nist.gov (Luciani, Vincent) Date: Mon, 5 Mar 2012 18:31:42 -0500 Subject: [labnetwork] who cleans your cleanroom? In-Reply-To: <4F5501BC.8090909@seas.upenn.edu> References: <4F5501BC.8090909@seas.upenn.edu> Message-ID: <01F47D4EDEEC64488C10B767D15E485810092CC005@MBCLUSTER.xchange.nist.gov> Hello Iulian, * Every bay in our cleanroom has an owner (process engineer) that is responsible for making sure it stays neat and tidy and does daily inspections. * About once a week, our part time student lab assistant vacuums the floor. * We tacky roll the floor occasionally. * I am in the process of soliciting for a clean room cleaning company to do periodic cleanings. I am planning on every year or after any significant construction, whichever comes first. I am getting budgetary estimates ranging from $6000 to $12000 per clean for 8000sq. ft. of class 100. It includes floor, wall and HEPA ceiling grid cleaning. Since you are relatively close, I will send you those company names as they may also service your area as well. * DI/IPA is all you need to clean the floor. A scrubby will remove scuffs etc. * I like to be stingy with the water to avoid getting drips on all the infrastructure under the raised floor. * A skillful Clean Room cleaning company will also know how to safely vacuum out under the raised floors which should be done at least every few years. They will do it over a weekend and methodically make their way around the area removing tiles for access. * I like the HEPA filtered Nilfisk brand vacuums. They are quiet, powerful and have backpack and rolling versions. They are more convenient than the central vacuum which we also have, but you need to make sure the HEPA is working well. You can't beat the central for cleanliness. There is a time and place for both. * I also have our student take weekly particle counts at several areas and chart the data and plan to adjust cleaning frequency as needed. Hope this helps. Vince Vincent K. Luciani NanoFab Manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 [cid:image001.jpg at 01CCFAFE.A111FE90] -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Monday, March 05, 2012 1:11 PM To: Fab Network Subject: [labnetwork] who cleans your cleanroom? Dear Fab Network, I am working on a cleaning plan for Penn's new cleanroom (about 10,000 sqft of class 100 and 1,000) and I am writing to ask for your help: - Who does the cleaning for you: fab staff, central Facilities, external contractor, etc? - How many times a day is your Facility cleaned? - How often are the walls cleaned? - How many "general cleanings" do you have throughout the year? Who does it? - Do you use anything else besides DI water/IPA to mop the floors? - If you do not have central vacuum, what vacuum cleaners have you had good experiences with? - What precautions should one take when cleaning raised floors? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 6965 bytes Desc: image001.jpg URL: From rmorrison at draper.com Tue Mar 6 06:20:13 2012 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Tue, 06 Mar 2012 11:20:13 +0000 Subject: [labnetwork] who cleans your cleanroom? In-Reply-To: <4F5501BC.8090909@seas.upenn.edu> References: <4F5501BC.8090909@seas.upenn.edu> Message-ID: Hi, Here at Draper we have technicians that are assigned to keep the areas that they work in clean, that means a weekly wipe of all horizontal surfaces and remove the clutter. We have a facility technician that vacuums and washes the floor once per week. We do one big clean per year and per the ISO requirements the room is tested one time per year for HEPA integrity. The facility technician does a monthly particle check of all areas, we focus on the load/unload areas. We have several process technicians measure particles added/subtracted to wafers after a simulated process run on all of our tools. If this test fails, then we check the room particles in that area and adjust the cleaning if needed. We use HEPA vacuum cleaners, back-pack type and the floor model type. Regards Rick Rick Morrison Senior Member Technical Staff Group Leader Microfabrication Operations Draper Laboratory 555 Technology Square Cambridge, MA 02139 W 617-258-3420 C 508-930-3461 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Monday, March 05, 2012 1:11 PM To: Fab Network Subject: [labnetwork] who cleans your cleanroom? Dear Fab Network, I am working on a cleaning plan for Penn's new cleanroom (about 10,000 sqft of class 100 and 1,000) and I am writing to ask for your help: - Who does the cleaning for you: fab staff, central Facilities, external contractor, etc? - How many times a day is your Facility cleaned? - How often are the walls cleaned? - How many "general cleanings" do you have throughout the year? Who does it? - Do you use anything else besides DI water/IPA to mop the floors? - If you do not have central vacuum, what vacuum cleaners have you had good experiences with? - What precautions should one take when cleaning raised floors? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From jrweaver at purdue.edu Tue Mar 6 14:55:46 2012 From: jrweaver at purdue.edu (Weaver, John R) Date: Tue, 6 Mar 2012 14:55:46 -0500 Subject: [labnetwork] who cleans your cleanroom? In-Reply-To: <4F5501BC.8090909@seas.upenn.edu> References: <4F5501BC.8090909@seas.upenn.edu> Message-ID: <18AD986E445FE847B2A80B53E65704EDB91918A3DB@VPEXCH02.purdue.lcl> Thank you Mario for the kind words. We use in-house janitorial for our cleanroom cleaning. We pay a bonus above the normal university scale as an incentive, but put them through rigorous training. Since the turnover is low (probably due to the bonus, and the fact that we conduct the interview with the person wearing a cleanroom garment so they know what things will be like), the peer pressure dominates in helping the new people to "fall in line" with our procedures. Things have worked out quite well in that regard. If you are looking for an outside company, I believe that GCA Cleanroom Services has a local office. While I don't have any first-hand experience with them, their principal - Ian Wallis - is a long-term friend and colleague. I would expect him to do a very good job for you. John John R. Weaver Facility Manager Birck Nanotechnology Center Purdue University (765) 494-5494 jrweaver at purdue.edu -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Monday, March 05, 2012 1:11 PM To: Fab Network Subject: [labnetwork] who cleans your cleanroom? Dear Fab Network, I am working on a cleaning plan for Penn's new cleanroom (about 10,000 sqft of class 100 and 1,000) and I am writing to ask for your help: - Who does the cleaning for you: fab staff, central Facilities, external contractor, etc? - How many times a day is your Facility cleaned? - How often are the walls cleaned? - How many "general cleanings" do you have throughout the year? Who does it? - Do you use anything else besides DI water/IPA to mop the floors? - If you do not have central vacuum, what vacuum cleaners have you had good experiences with? - What precautions should one take when cleaning raised floors? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From jrweaver at purdue.edu Tue Mar 6 15:10:05 2012 From: jrweaver at purdue.edu (Weaver, John R) Date: Tue, 6 Mar 2012 15:10:05 -0500 Subject: [labnetwork] who cleans your cleanroom? In-Reply-To: <4F5501BC.8090909@seas.upenn.edu> References: <4F5501BC.8090909@seas.upenn.edu> Message-ID: <18AD986E445FE847B2A80B53E65704EDB91918A3DC@VPEXCH02.purdue.lcl> Sorry, I didn't answer all your questions. Also, I wanted to mention that we monitor surface cleanliness using a Pentagon Technologies QIII Surface Particle Counter. We have three people on the cleaning staff who work a 40-hour week. We do half during the night and half during normal working hours (we are open 24-7) - janitorial staff begin at 4:30 am and work until 1 pm with a half-hour lunch. They have two 15-minute breaks, otherwise are in the cleanroom doing the cleaning. We clean the floors of the bays and chases twice per week and the floors of the main aisle and gowning room daily. We clean the walls of the bays and chases weekly. We have a shutdown twice per year, and the janitorial staff does a more extensive clean - including under the raised floor - then. They do half of the sub-floor during each shutdown, so the entire floor is cleaned annually. We use DI water only, using a microfiber moping system. We converted to that after extensive testing, and get the same results (or better) using that system with water as we did with a conventional system using IPA:water. We don't have a central vacuum (I wish I did but couldn't afford it). We use Nilfisk portable vacuums, and have had good results with them. Be sure to buy the one with the filter DOWNSTREAM of the motor, otherwise you will throw motor-generated particles all over. A "Hospital Vac" has the filter upstream of the motor; you want a "cleanroom vac." For hazardous materials, we use a dual-filter system - one filter upstream of the motor and a second filter downstream of the filter. Be sure to use a mop that will stand up to the sharp edges on the perf floor. I hope that helps, John John R. Weaver Facility Manager Birck Nanotechnology Center Purdue University (765) 494-5494 jrweaver at purdue.edu -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Monday, March 05, 2012 1:11 PM To: Fab Network Subject: [labnetwork] who cleans your cleanroom? Dear Fab Network, I am working on a cleaning plan for Penn's new cleanroom (about 10,000 sqft of class 100 and 1,000) and I am writing to ask for your help: - Who does the cleaning for you: fab staff, central Facilities, external contractor, etc? - How many times a day is your Facility cleaned? - How often are the walls cleaned? - How many "general cleanings" do you have throughout the year? Who does it? - Do you use anything else besides DI water/IPA to mop the floors? - If you do not have central vacuum, what vacuum cleaners have you had good experiences with? - What precautions should one take when cleaning raised floors? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director, Penn NanoFab 200 South 33rd Street Room 376 GRW Bldg Philadelphia, PA 19104-6314 P: 215-898-9308 F: 215-573-2068 www.seas.upenn.edu/~nanofab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From kutepova at anl.gov Tue Mar 6 16:49:59 2012 From: kutepova at anl.gov (Valentina Kutepova) Date: Tue, 06 Mar 2012 15:49:59 -0600 Subject: [labnetwork] Fwd: who cleans your cleanroom? In-Reply-To: <4F551A1A.7080504@anl.gov> References: <4F5501BC.8090909@seas.upenn.edu> <4F551A1A.7080504@anl.gov> Message-ID: <4F568687.9070200@anl.gov> Hello Iulian, I am a manager of the CNM Clean Room (11,000 sq.ft, class 100/1000). I would try to answer on your questions. 1. External contractor. 2. We started with having 40 hours per week. Now, for second year already, we decreased the hours to 28 per week. 3. Two times per year and only when we have the Clean Room general cleaning. 4. Twice per year. Contractor team. 5. No. 6. Vacuum cleaner should have a HEPA filter. 7. We don`t have raised floor in our CR. Best wishes Valentina /Valentina Kutepova, Ph.D. Clean Room Manager Argonne National Laboratory, www.anl.gov Center for Nanoscale Materials 9700 South Cass Avenue, Bldg. 440, Room A134 Argonne, IL 60439 PH: 1-630-252-4290 FAX: 1-630-252-5739 / On 3/5/2012 1:55 PM, Leonidas Ocola wrote: > Valentina > > Can you reply to this email? > > Thanks > > Leo > > -------- Original Message -------- > Subject: [labnetwork] who cleans your cleanroom? > Date: Mon, 05 Mar 2012 13:11:08 -0500 > From: Iulian Codreanu > To: Fab Network > > > > Dear Fab Network, > > I am working on a cleaning plan for Penn's new cleanroom (about 10,000 > sqft of class 100 and 1,000) and I am writing to ask for your help: > - Who does the cleaning for you: fab staff, central Facilities, external > contractor, etc? > - How many times a day is your Facility cleaned? > - How often are the walls cleaned? > - How many "general cleanings" do you have throughout the year? Who > does it? > - Do you use anything else besides DI water/IPA to mop the floors? > - If you do not have central vacuum, what vacuum cleaners have you had > good experiences with? > - What precautions should one take when cleaning raised floors? > > Thank you very much for your help. > > Iulian > -- > iulian Codreanu, Ph.D. > Director, Penn NanoFab > 200 South 33rd Street > Room 376 GRW Bldg > Philadelphia, PA 19104-6314 > P: 215-898-9308 > F: 215-573-2068 > www.seas.upenn.edu/~nanofab > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- > Leonidas E Ocola, PhD > Center for Nanoscale Materials > Argonnne National Laboratory > Bldg 440, Rm A129 > 9700 South Cass Avenue, Argonne, IL 60439 > Ph: 630-252-6613 > Fax: 630-252-5739 -------------- next part -------------- An HTML attachment was scrubbed... URL: From voros at silicon.EECS.Berkeley.EDU Sat Mar 10 11:58:48 2012 From: voros at silicon.EECS.Berkeley.EDU (Katalin Voros) Date: Sat, 10 Mar 2012 08:58:48 -0800 (PST) Subject: [labnetwork] UGIM 2012 paper submission Message-ID: <201203101658.q2AGwmwM020033@silicon2.EECS.Berkeley.EDU> Dear colleagues, Time is running out. The deadline to submit a paper for UGIM 2012 is Thursday, March 15, 2012. This deadline is set by IEEE and can not be extended. The only written requirement is a one page extended abstract. See the UGIM call for papers at: http://microlab2.eecs.berkeley.edu/UGIM2012/call.2.21.12.pdf We are especially seeking submissions from our community who have not presented at previous UGIM events. Submissions on all panel topics are welcome. Sincerely Bill Flounders Katalin Voros Co-Chairs UGIM 2012 Conference Committee http://microlab2.eecs.berkeley.edu/UGIM2012/ From voros at silicon.EECS.Berkeley.EDU Thu Mar 15 10:57:11 2012 From: voros at silicon.EECS.Berkeley.EDU (Katalin Voros) Date: Thu, 15 Mar 2012 07:57:11 -0700 (PDT) Subject: [labnetwork] UGIM paper submission extended through the weekend Message-ID: <201203151457.q2FEvBCx000776@silicon2.EECS.Berkeley.EDU> Hello colleagues, We need a few more papers to fill the schedule so I asked IEEE for a grace period. The new deadline for submission is Monday, 19 March, so you have the week end to work on it. Pls submit a one-page extended abstract (no full paper required) for a 20+10 min. talk. Thank you. This is YOUR conference, lab managers, let's make it lively! Katalin Mary Tang, Technical Chair Stanford Bill Flounders and Katalin Voros, Co-Chairs UC Berkeley http://microlab2.eecs.berkeley.edu/UGIM2012/ Contact: voros at eecs.berkeley.edu 510-642-2911 -------------------------------------------- KATALIN VOROS R&D Engineering Manager Engineering Research Support Organization Electrical Engineering and Computer Sciences University of California at Berkeley 406 Cory Hall #1770 Berkeley, CA 94720-1770 phone: (510) 642-2911 voros at eecs.berkeley.edu http://microlab.berkeley.edu -------------------------------------------- From julia.aebersold at louisville.edu Fri Mar 16 17:30:18 2012 From: julia.aebersold at louisville.edu (Aebersold,Julia Weyer) Date: Fri, 16 Mar 2012 21:30:18 +0000 Subject: [labnetwork] Questions for other Cleanroom Facilities Message-ID: I am gathering information about other cleanrooms to compare ourselves on how we do operations. The list below is a bit long (short answers good), but if you have the time to answer some or all of the questions I would appreciate it. 1. How many users do you have per month? 2. How many faculty use the cleanroom? 3. How many engineering, admin and IT people do you employ? 4. What is the square footage of your cleanroom? 5. What is your fee structure for internal and external clients? 6. Do you charge an access fee to the cleanroom? If so, it per hour, day or month? 7. Do your collected cleanroom fees cover your operational expenses or do you receive a subsidy? 8. If you receive a subsidy what percentage of your subsidy supports your operating budget? 9. Do you have a faculty advisory board that assists with determining direction of the cleanroom? If so, what kind of input do they offer? 10. What methods of communication do you utilize with your users? 11. Is training scheduled with users or is it offered on a regularly scheduled basis. 12. Do you charge for wafers, chemical usage, glassware, tweezers, cleanroom notebooks, etc. or are these incorporated with your fee structure? 13. How do you generate billing/invoice information for each user? 14. If you have a system that automatically captures usage at each tool did you implement a turnkey package or develop your own system? Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Mon Mar 19 11:44:27 2012 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Mon, 19 Mar 2012 15:44:27 +0000 Subject: [labnetwork] Questions for other Cleanroom Facilities In-Reply-To: References: Message-ID: See below, I am from Draper Labs, not for profit company. Rick Rick Morrison Senior Member Technical Staff Group Leader Microfabrication Operations Draper Laboratory 555 Technology Square Cambridge, MA 02139 W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Aebersold,Julia Weyer Sent: Friday, March 16, 2012 5:30 PM To: Lab Network (labnetwork at mtl.mit.edu) Subject: [labnetwork] Questions for other Cleanroom Facilities I am gathering information about other cleanrooms to compare ourselves on how we do operations. The list below is a bit long (short answers good), but if you have the time to answer some or all of the questions I would appreciate it. 1. How many users do you have per month? We average about 15 users/ week, that is made up of 9 technicians, maybe 2 students and the rest is staff. 2. How many faculty use the cleanroom? None, but we have technicians/students and staff 3. How many engineering, admin and IT people do you employ? I have 2 engineers and 2 engineering assistants dedicated to tool maintenance, one person to order supplies and one technician to help the engineers. 4. What is the square footage of your cleanroom? 7200 sqft 5. What is your fee structure for internal and external clients? All of our customers pay for the salaries of the people working the program, then we add on a service center charge, which pays for the staff and supplies 6. Do you charge an access fee to the cleanroom? If so, it per hour, day or month? no 7. Do your collected cleanroom fees cover your operational expenses or do you receive a subsidy? Our service center fee covers the cost of operation 8. If you receive a subsidy what percentage of your subsidy supports your operating budget? 9. Do you have a faculty advisory board that assists with determining direction of the cleanroom? If so, what kind of input do they offer? The Draper staff as a whole steers the direction of equipment selection and process development 10. What methods of communication do you utilize with your users? Broadcast emails go out when tools are down and we have a white board that we use to keep track of issues. I also have a daily meeting where equipment issues and tool usage is discussed and priority is set for usage if a tool is over booked for the day. 11. Is training scheduled with users or is it offered on a regularly scheduled basis. Training is done by the tool owner and we have forms that have to be filled out by the trainer and trainee, then these are posted to our in house web site. 12. Do you charge for wafers, chemical usage, glassware, tweezers, cleanroom notebooks, etc. or are these incorporated with your fee structure? All supplies are incorporated into our service center. No with that said if someone wants to use a non-standard wafer or chemical then their project purchases the first material, if it becomes standard then the fab supplies it in the future. 13. How do you generate billing/invoice information for each user? We have a 2nd time card that all users fill out, this is used to bill the customer 14. If you have a system that automatically captures usage at each tool did you implement a turnkey package or develop your own system? We are looking at Coral for our new fab. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ -------------- next part -------------- An HTML attachment was scrubbed... URL: