[labnetwork] Cleanroom Safety

[Morrison, Richard H., Jr.]

Hi,

Here at Draper the fire extinguisher is selected by the material in the area, most of ours are dry CO2, however, only trained staff should use them, for us it is a ERT team.
Hazardous gas safety start with the proper gas cabinet selected for the gas you want to use, then a gas monitoring system, sensor at the cabinet, load area, vacuum pump exhaust, gas cabinet on the tool. These monitors should shut off the gas source at the cabinet and evacuate the area.
People safety for gases, is SCBA while changing the tanks, maybe a hand held gas detector to ensure that the cylinder does not leak. If using SiH4 or materials like that, then fire resistant gloves are good and a suit is helpful. It is safer to have a gas cabinet with a auto cylinder opener, that way you are not exposed while changing the cylinders

Rick


Rick Morrison
Senior Member Technical  Staff
Group Leader Microfabrication Operations
Draper Laboratory
555 Technology Square
Cambridge, MA  02139

W  617-258-3420
C   508-930-3461



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bulent KOROGLU
Sent: Wednesday, May 02, 2012 5:16 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Cleanroom Safety

Dear All

we are making a new nano technology center in Turkey,

Our web site is not completed yet but if you are interested link is below

 http://sunum.sabanciuniv.edu<http://sunum.sabanciuniv.edu>

I have a few questions

1.) what kind of fire extinguisher are you using in your Cleanroom (Gas,Water,Powder etc...) and which one is the best solution

2.) How do you ensure the safety of hazardous gases (silane,chlorine,Ammonium)

3.) How do you ensure personal safety when working with hazardous gases (fireman's suit and scuba mask)

if i will not to bother you, i will ask to continue my questions to use your experience

Thank you very much for your help

Sincerely...
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20120503/1a92bb7e/attachment.html>