[labnetwork] Sapphire Wafers in Silicon Oxidation Furnaces

[Conrad L. Silvestre]

Do any problems arise for conventional Silicon CMOS furnace oxidation processes if prime grade sapphire wafers are put through the dry or wet oxidation process at 1000°C?

Conrad Silvestre
Department of Electrical Engineering
C430 EQuad, CN-5263
Princeton University
Princeton, New Jersey 08544-5263


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