[labnetwork] DEZ compatibility

[Yasmin Afsar]

Dear colleagues,

I am a graduate student at Princeton currently working on a new system
for plasma-enhanced atomic layer deposition (PEALD) of ZnO and Al2O3.
We are outsourcing the production of the gas manifold, and we need to
supply this company with information about compatibility of our
metal-organic precursors with various components in the manifold.

Does anyone know the valve seat material compatibility for DEZ
(diethyl zinc) vapor, or what type of seat material is typically used
with DEZ? Since our group is new to ALD and to these materials, we
really do not know.

Any advice would be much appreciated!

Thank you,
Yasmin


Yasmin Afsar
Graduate Student
Electrical Engineering
Princeton University
yafsar at princeton.edu