[labnetwork] Query regarding MFC_IIT Bombay

[Anjum Ahmed]

Dear Sir,

We are using toxic gases like silane, phosphine,Diborane, hydrogen, ammonia
in our lab.

We have a query whether Nitrogen gas Mass flow controller (MFC) can be used
for following gases: 1.Silane
2.Diborane
3.Phosphine
4. Ammonia
If we can use, what are the correction factors we need to follow.
Also, whether the above gas MFCs are compatible with each other.
Is there any safety concern.

Please advice for the same.

Regards,
Anjum Ahmed,
CEN, Eectrical Engg Dept, Annex,
IIT Bombay,Mumbai, Powai-400076.
Tel no. 02225764464 / 9920470606
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