From diadiuk at MIT.EDU  Thu Aug  1 08:00:40 2013
From: diadiuk at MIT.EDU (Vicky Diadiuk)
Date: Thu, 1 Aug 2013 08:00:40 -0400
Subject: [labnetwork] E-Beam Evaporation, Ni optimization.
In-Reply-To: <51F95ED7.7020303@eecs.berkeley.edu>
References: <CAP+SBAofRxkw7zOVEBnnP1t+2CCP2_WZdRqvggGCSvdvsUM79w@mail.gmail.com>
 <51F95ED7.7020303@eecs.berkeley.edu>
Message-ID: <BFC5E612-D869-4D69-9ADB-E748FB44DFCD@mit.edu>

HI,
 I think it's ok to discuss process issues.
The idea is to exchange information that affects the fabs.
But I don't feel particularly strongly either way.

Vicky

On Jul 31, 2013, at 3:00 PM, Bill Flounders wrote:

> Chandrashekar S Kambar,
> Lab Network is primarily for operations discussions
> or facility wide issues rather than detailed nanofabrication questions.
> Please consider the mems talk venue for
> questions at this level of process detail.
> I also encourage you to contact Process Support
> at CHA Industries
> http://www.chaindustries.com/
> 
> I welcome dissenting opinion from the network
> if I have misrepresented our forum.
> 
> Thank you
> Bill Flounders
> UC Berkeley
> 
> 
> 
> Chandrashekar S Kambar wrote:
>> Hi,
>>  
>> We are trying to optimize Ni with E-Beam Evaporator (TECPORT). 
>>  
>> The E-Beam power is raised in two steps: RAISE 1, SOAK 1 AND RAISE 2, SOAK 2.
>> ELECTRON BEAM PATTERN: Focused to one point (to the middle of the crucible).
>> CRUCIBLE: Graphite.
>>  
>> ISSUE: During the RAISE 1, everything seems to be normal and only the material in the middle of the crucible gets melted. During the RAISE 2 the material starts to spit out of the crucible. During the deposition the spitting increases drastically, thus we will be forced to stop the deposition. After the deposition when we take out the crucible, crucible was broken across the wall. However there was no damage done to the pocket holder (Hearth). 
>>  
>> Power % : Raise 1: 5% (V= 6.99 KV and I ~ 70 mA)
>>                 Raise 2: 10% (V= 6.99 KV and I ~ 120 mA)
>>                 During the deposition Power % goes up to 16% and the current goes up to 180 mA ( V = 6.99 KV constant).
>>  
>> We need to know, if there is any way to reduce the crucible cracking and to avoid the spitting of the material. 
>>  
>> QUESTION 2:
>>  
>> During the deposition the crucibles are cracked and its pieces are stuck with the Ni material. Is there any way to recover the material by removing the graphite pieces?
>> 
>> Thanks and Regards,
>> Chandrashekar S Kambar.
>> 
>> 
>>  
>> 
>> 
>> _______________________________________________
>> labnetwork mailing list
>> labnetwork at mtl.mit.edu
>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
> 
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From hbtusainc at yahoo.com  Thu Aug  1 09:26:04 2013
From: hbtusainc at yahoo.com (Mario Portillo)
Date: Thu, 1 Aug 2013 06:26:04 -0700 (PDT)
Subject: [labnetwork] E-Beam Evaporation, Ni optimization.
In-Reply-To: <CE1EE424.1A955%elliscd@auburn.edu>
References: <51F95ED7.7020303@eecs.berkeley.edu>
 <CE1EE424.1A955%elliscd@auburn.edu>
Message-ID: <1375363564.28818.YahooMailNeo@web140702.mail.bf1.yahoo.com>

We have 4 cents now...I agree with Charles........

Mario A. Portillo Sr.
High'born Technology USA Inc.
Semiconductor Equipment Services
8130 Glades Road, #229
Boca Raton, FL 33434
561 479-1975 office
561 504-0244 cell
hbtusainc at yahoo.com
www.hbtusainc.com
 

________________________________
 From: Charles Ellis <elliscd at auburn.edu>
To: "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu> 
Sent: Wednesday, July 31, 2013 5:01 PM
Subject: Re: [labnetwork] E-Beam Evaporation, Ni optimization.
  


I could be wrong as the original intent ?of this forum, but I welcome the process questions.. ?I think it is a great place for the old guys like me and some of you to share our experiences and maybe help some of these young guys. ?As a lab manager I also welcome the operations discussions ? it does not seem that this forum is overly busy and so I vote we encourage process questions as well as operational questions. ?It seems to have been working quite well so far. I very much enjoy the traffic I have seen over the years.. 
 
Just my 2 cents! 
 
Charles Ellis? 
Auburn.. 
 From: Bill Flounders <bill at eecs.berkeley.edu>
Date: Wednesday, July 31, 2013 2:00 PM
To: Chandrashekar S Kambar <kambar009 at gmail.com>, "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] E-Beam Evaporation, Ni optimization.
 
 
Chandrashekar S Kambar,
Lab Network is primarily for operations discussions
or facility wide issues rather than detailed nanofabrication questions.
Please consider the mems talk venue for
questions at this level of process detail.
I also encourage you to contact Process Support
at CHA Industries
http://www.chaindustries.com/

I welcome dissenting opinion from the network
if I have misrepresented our forum.

Thank you
Bill Flounders
UC Berkeley



Chandrashekar S Kambar wrote:
 
Hi,
>?
>We are trying to optimize Ni with E-Beam Evaporator (TECPORT). 
>?
>The E-Beam power is raised in two steps: RAISE 1, SOAK 1 AND RAISE 2, SOAK 2.
>ELECTRON BEAM PATTERN: Focused to one point (to the middle of the crucible).
>CRUCIBLE: Graphite.
>?
>ISSUE: During the RAISE 1, everything seems to be normal and only the material in the middle of the crucible gets melted. During the RAISE 2 the material starts to spit out of the crucible. During the deposition the spitting increases drastically, thus we will
 be forced to stop the deposition. After the deposition when we take out the crucible, crucible was broken across the wall. However there was no damage done to the pocket holder (Hearth). 
>?
>Power % : Raise 1: 5% (V= 6.99 KV and I ~ 70 mA)
>??????????????? Raise 2: 10% (V= 6.99 KV and I ~ 120 mA)
>??????????????? During the deposition Power % goes up to 16% and the current goes up to 180 mA ( V = 6.99 KV constant).
>?
>We need to know, if there is any way to reduce the crucible cracking and to avoid the spitting of the material. 
>?
>QUESTION 2:
>?
>During the deposition the crucibles are cracked and its pieces are stuck with the Ni material. Is there any way to recover the material by removing the graphite pieces? 
>Thanks and Regards,
>Chandrashekar S Kambar. 
>
>?  
> 
>
>_______________________________________________
labnetwork mailing list labnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork  
    
_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From dgrimard at umich.edu  Thu Aug  1 13:53:13 2013
From: dgrimard at umich.edu (Dennis Grimard)
Date: Thu, 1 Aug 2013 13:53:13 -0400
Subject: [labnetwork] E-Beam Evaporation, Ni optimization.
In-Reply-To: <CE1EE424.1A955%elliscd@auburn.edu>
References: <51F95ED7.7020303@eecs.berkeley.edu>
 <CE1EE424.1A955%elliscd@auburn.edu>
Message-ID: <CAF2dRnRhqk0O-_fY=FkJUaDYSrHGBVf2JSaimmNmGcYcSYFBaQ@mail.gmail.com>

I agree in principle with Bill ... the "original" intent of the this forum
was to address facility operations and fab-level issues not process details
or process equipment details ...

I feel that the forum could become so diluted that many of us will "tune
out" due to the volume of the questions ...




On Wed, Jul 31, 2013 at 5:01 PM, Charles Ellis <elliscd at auburn.edu> wrote:

>  I could be wrong as the original intent  of this forum, but I welcome
> the process questions..  I think it is a great place for the old guys like
> me and some of you to share our experiences and maybe help some of these
> young guys.  As a lab manager I also welcome the operations discussions ?
> it does not seem that this forum is overly busy and so I vote we encourage
> process questions as well as operational questions.  It seems to have been
> working quite well so far. I very much enjoy the traffic I have seen over
> the years..
>
>  Just my 2 cents!
>
>  Charles Ellis?
> Auburn..
>
>   From: Bill Flounders <bill at eecs.berkeley.edu>
> Date: Wednesday, July 31, 2013 2:00 PM
> To: Chandrashekar S Kambar <kambar009 at gmail.com>, "labnetwork at mtl.mit.edu"
> <labnetwork at mtl.mit.edu>
> Subject: Re: [labnetwork] E-Beam Evaporation, Ni optimization.
>
>   Chandrashekar S Kambar,
> Lab Network is primarily for operations discussions
> or facility wide issues rather than detailed nanofabrication questions.
> Please consider the mems talk venue for
> questions at this level of process detail.
> I also encourage you to contact Process Support
> at CHA Industries
> http://www.chaindustries.com/
>
> I welcome dissenting opinion from the network
> if I have misrepresented our forum.
>
> Thank you
> Bill Flounders
> UC Berkeley
>
>
>
> Chandrashekar S Kambar wrote:
>
> Hi,
>
> We are trying to optimize Ni with E-Beam Evaporator (TECPORT).
>
> The E-Beam power is raised in two steps: RAISE 1, SOAK 1 AND RAISE 2, SOAK
> 2.
> ELECTRON BEAM PATTERN: Focused to one point (to the middle of the
> crucible).
> CRUCIBLE: Graphite.
>
> ISSUE: During the RAISE 1, everything seems to be normal and only the
> material in the middle of the crucible gets melted. During the RAISE 2 the
> material starts to spit out of the crucible. During the deposition the
> spitting increases drastically, thus we will be forced to stop the
> deposition. After the deposition when we take out the crucible, crucible
> was broken across the wall. However there was no damage done to the pocket
> holder (Hearth).
>
> Power % : Raise 1: 5% (V= 6.99 KV and I ~ 70 mA)
>                 Raise 2: 10% (V= 6.99 KV and I ~ 120 mA)
>                 During the deposition Power % goes up to 16% and the
> current goes up to 180 mA ( V = 6.99 KV constant).
>
> We need to know, if there is any way to reduce the crucible cracking and
> to avoid the spitting of the material.
>
> QUESTION 2:
>
> During the deposition the crucibles are cracked and its pieces are stuck
> with the Ni material. Is there any way to recover the material by removing
> the graphite pieces?
>
> Thanks and Regards,
> Chandrashekar S Kambar.
>
>
>
>
> _______________________________________________
> labnetwork mailing listlabnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>


-- 
Dennis S Grimard, Ph.D
Managing Director, Lurie Nanofabrication Facility

University of Michigan
1246D EECS Building
1301 Beal Avenue
Ann Arbor, MI 48109-2122
(734) 368-7172 (Cell)
(734) 647-1781 (Fax)
http://www.lnf.umich.edu
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From codreanu at udel.edu  Thu Aug  1 09:16:36 2013
From: codreanu at udel.edu (Iulian Codreanu)
Date: Thu, 01 Aug 2013 09:16:36 -0400
Subject: [labnetwork] E-Beam Evaporation, Ni optimization.
In-Reply-To: <CE1EE424.1A955%elliscd@auburn.edu>
References: <CE1EE424.1A955%elliscd@auburn.edu>
Message-ID: <51FA5FB4.50506@udel.edu>

I second Bill's motion.  It would be best if we limited the discussions 
to topics that provide the environment (infrastructure, equipment, 
safety, management, billing, etc) that allows our customers to do their 
work.

One could ignore items that are not of interest but I am concerned that 
the forum may be "flooded" with process-related questions.

Iulian

iulian Codreanu, Ph.D.
Director of Operations, UD Nanofab
149 Evans Hall
Newark, DE 19716
302-831-2784

On 7/31/2013 5:01 PM, Charles Ellis wrote:
> I could be wrong as the original intent  of this forum, but I welcome 
> the process questions..  I think it is a great place for the old guys 
> like me and some of you to share our experiences and maybe help some 
> of these young guys.  As a lab manager I also welcome the operations 
> discussions -- it does not seem that this forum is overly busy and so 
> I vote we encourage process questions as well as operational 
> questions.  It seems to have been working quite well so far. I very 
> much enjoy the traffic I have seen over the years..
>
> Just my 2 cents!
>
> Charles Ellis...
> Auburn..
>
> From: Bill Flounders <bill at eecs.berkeley.edu 
> <mailto:bill at eecs.berkeley.edu>>
> Date: Wednesday, July 31, 2013 2:00 PM
> To: Chandrashekar S Kambar <kambar009 at gmail.com 
> <mailto:kambar009 at gmail.com>>, "labnetwork at mtl.mit.edu 
> <mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu 
> <mailto:labnetwork at mtl.mit.edu>>
> Subject: Re: [labnetwork] E-Beam Evaporation, Ni optimization.
>
> Chandrashekar S Kambar,
> Lab Network is primarily for operations discussions
> or facility wide issues rather than detailed nanofabrication questions.
> Please consider the mems talk venue for
> questions at this level of process detail.
> I also encourage you to contact Process Support
> at CHA Industries
> http://www.chaindustries.com/
>
> I welcome dissenting opinion from the network
> if I have misrepresented our forum.
>
> Thank you
> Bill Flounders
> UC Berkeley
>
>
>
> Chandrashekar S Kambar wrote:
>>
>> Hi,
>>
>> We are trying to optimize Ni with E-Beam Evaporator (TECPORT).
>>
>> The E-Beam power is raised in two steps: RAISE 1, SOAK 1 AND RAISE 2, 
>> SOAK 2.
>> ELECTRON BEAM PATTERN: Focused to one point (to the middle of the 
>> crucible).
>> CRUCIBLE: Graphite.
>>
>> ISSUE: During the RAISE 1, everything seems to be normal and only the 
>> material in the middle of the crucible gets melted. During the RAISE 
>> 2 the material starts to spit out of the crucible. During the 
>> deposition the spitting increases drastically, thus we will be forced 
>> to stop the deposition. After the deposition when we take out the 
>> crucible, crucible was broken across the wall. However there was no 
>> damage done to the pocket holder (Hearth).
>>
>> Power % : Raise 1: 5% (V= 6.99 KV and I ~ 70 mA)
>>                 Raise 2: 10% (V= 6.99 KV and I ~ 120 mA)
>>                 During the deposition Power % goes up to 16% and the 
>> current goes up to 180 mA ( V = 6.99 KV constant).
>>
>> We need to know, if there is any way to reduce the crucible cracking 
>> and to avoid the spitting of the material.
>>
>> QUESTION 2:
>>
>> During the deposition the crucibles are cracked and its pieces are 
>> stuck with the Ni material. Is there any way to recover the material 
>> by removing the graphite pieces?
>>
>> Thanks and Regards,
>> Chandrashekar S Kambar.
>>
>>
>>
>>
>> _______________________________________________
>> labnetwork mailing list
>> labnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From evporte at uark.edu  Mon Aug  5 17:06:30 2013
From: evporte at uark.edu (Errol V. Porter)
Date: Mon, 5 Aug 2013 21:06:30 +0000
Subject: [labnetwork] UARK STS multiplex ASE high coil reflectance resolved
Message-ID: <49510757561B8E4EB8076830B69BF2775761363C@ex-mbx3.uark.edu>

Greetings,

I just wanted to inform the forum that we were able to identify the high coil reflectance problem in our ASE. Our ENI VL400 phase shift oscillator was determined to be the culprit. With help from the OEM {who fortunately monitors this forum}, we determined it was not working correctly. A refurbished replacement was installed today and the problem has gone away.

I would like to thank everyone who provided suggestions on how to troubleshoot this issue. It is greatly appreciated.

Regards,

Errol Porter
University of Arkansas / HiDEC
700 W. Research Center Blvd
Fayetteville, AR 72701
Tel. (479) 575-2519
Mobile: (479) 236-0693
Fax (479) 575-2719
email: evporte at uark.edu<mailto:evporte at uark.edu>
http://www.hidec.uark.edu<http://www.hidec.uark.edu/>

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From tbritton at criticalsystemsinc.com  Mon Aug 12 23:19:50 2013
From: tbritton at criticalsystemsinc.com (Tom Britton)
Date: Tue, 13 Aug 2013 03:19:50 +0000
Subject: [labnetwork] 1989 Oxford VG80 MBE System
Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2EFFDEEF@P3PWEX2MB006.ex2.secureserver.net>

Hello all,

A friend of mine at the US Army has a 1989 Oxford Instruments VG80 molecular beam epitaxy tool and he is trying to find parts for it. Currently he is looking for bearings for the trolley. Does anyone have an idea if there is a good source for spares for this tool? He is telling me that since Oxford sold this business unit to Riber that he's having a difficult time getting support.

Any help would be greatly appreciated.

Thanks all!

Sincerely,

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208-890-1417
Office: 877-572-5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>

[logo for email signature png]

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From khbeis at uw.edu  Tue Aug 13 17:00:06 2013
From: khbeis at uw.edu (Michael Khbeis)
Date: Tue, 13 Aug 2013 14:00:06 -0700
Subject: [labnetwork] Phosphine sources
Message-ID: <822BFC73-C4CE-40BE-AA37-CF5522E862AA@uw.edu>

Dear Colleagues, 

I remember hearing (I think it was UGIM) about NIST using sub-atmospheric sources for doping gases (e.g. phosphine, diborane).  I was wondering if you have similar experience or do I need to plan for the traditional gas feeds via a cabinet from our HPM bunker?

Best,

Dr. Michael Khbeis
Associate Director
Microfabrication Facility (MFF)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
http://www.engr.washington.edu/mff/






From bill at eecs.berkeley.edu  Tue Aug 13 20:44:49 2013
From: bill at eecs.berkeley.edu (Bill Flounders)
Date: Tue, 13 Aug 2013 17:44:49 -0700
Subject: [labnetwork] Phosphine sources
In-Reply-To: <822BFC73-C4CE-40BE-AA37-CF5522E862AA@uw.edu>
References: <822BFC73-C4CE-40BE-AA37-CF5522E862AA@uw.edu>
Message-ID: <520AD301.2000007@eecs.berkeley.edu>

UC Berkeley reviewed sub atmospheric (SA) delivery several years ago.
While the technology had some specific advantages it had the
following reservations:
1. there was only single supplier of SA cylinders and hence only
a single supplier of that gas. No competition for cost
savings - you become a captive customer for that gas.
2. The vendor required we purchase and install a specific
gas cabinet / gas panel to insure protection of their custom
cylinder with absorbent media. No competition for gas cabinet
savings - you become captive customer for that gas cabinet
- and it was relatively expensive.
3. Only select pure gases can be provided. Gas mixtures not
possible due to variable gas desorption rates with gas mixtures.
Not all pure gases compatible with absorbent media.
4. Unclear if authority having jurisdiction (AHJ) will relax
any containment and detection requirements. You will likely
still pursue all containment and detection best practices.

Bill Flounders
UC Berkeley




Michael Khbeis wrote:
> Dear Colleagues,
>
> I remember hearing (I think it was UGIM) about NIST using sub-atmospheric sources for doping gases (e.g. phosphine, diborane).  I was wondering if you have similar experience or do I need to plan for the traditional gas feeds via a cabinet from our HPM bunker?
>
> Best,
>
> Dr. Michael Khbeis
> Associate Director
> Microfabrication Facility (MFF)
> University of Washington
> Fluke Hall, Box 352143
> (O) 206.543.5101
> (F) 206.221.1681
> (C) 443.254.5192
> khbeis at uw.edu
> http://www.engr.washington.edu/mff/
>
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork




From dgrimard at umich.edu  Wed Aug 14 07:52:52 2013
From: dgrimard at umich.edu (Dennis Grimard)
Date: Wed, 14 Aug 2013 07:52:52 -0400
Subject: [labnetwork] Phosphine sources
In-Reply-To: <520AD301.2000007@eecs.berkeley.edu>
References: <822BFC73-C4CE-40BE-AA37-CF5522E862AA@uw.edu>
 <520AD301.2000007@eecs.berkeley.edu>
Message-ID: <0C9485E5-F9CF-4FAA-9701-95F63B840C8D@umich.edu>

I could not have said it better.  I would add that the cost per cylinder is significant ...

Dennis S Grimard, Ph.D.
Managing Director
Lurie Nanofabrication Facility
1246D EECS Bldg
University of Michigan
Ann Arbor, MI 48103

(734) 368-7172 Cell

On Aug 13, 2013, at 8:44 PM, Bill Flounders <bill at eecs.berkeley.edu> wrote:

> UC Berkeley reviewed sub atmospheric (SA) delivery several years ago.
> While the technology had some specific advantages it had the
> following reservations:
> 1. there was only single supplier of SA cylinders and hence only
> a single supplier of that gas. No competition for cost
> savings - you become a captive customer for that gas.
> 2. The vendor required we purchase and install a specific
> gas cabinet / gas panel to insure protection of their custom
> cylinder with absorbent media. No competition for gas cabinet
> savings - you become captive customer for that gas cabinet
> - and it was relatively expensive.
> 3. Only select pure gases can be provided. Gas mixtures not
> possible due to variable gas desorption rates with gas mixtures.
> Not all pure gases compatible with absorbent media.
> 4. Unclear if authority having jurisdiction (AHJ) will relax
> any containment and detection requirements. You will likely
> still pursue all containment and detection best practices.
> 
> Bill Flounders
> UC Berkeley
> 
> 
> 
> 
> Michael Khbeis wrote:
>> Dear Colleagues,
>> 
>> I remember hearing (I think it was UGIM) about NIST using sub-atmospheric sources for doping gases (e.g. phosphine, diborane).  I was wondering if you have similar experience or do I need to plan for the traditional gas feeds via a cabinet from our HPM bunker?
>> 
>> Best,
>> 
>> Dr. Michael Khbeis
>> Associate Director
>> Microfabrication Facility (MFF)
>> University of Washington
>> Fluke Hall, Box 352143
>> (O) 206.543.5101
>> (F) 206.221.1681
>> (C) 443.254.5192
>> khbeis at uw.edu
>> http://www.engr.washington.edu/mff/
>> 
>> 
>> 
>> 
>> _______________________________________________
>> labnetwork mailing list
>> labnetwork at mtl.mit.edu
>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
> 
> 
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork



From Vincent.Luciani at nist.gov  Wed Aug 14 08:00:59 2013
From: Vincent.Luciani at nist.gov (Luciani, Vincent)
Date: Wed, 14 Aug 2013 12:00:59 +0000
Subject: [labnetwork] Phosphine sources
In-Reply-To: <822BFC73-C4CE-40BE-AA37-CF5522E862AA@uw.edu>
References: <822BFC73-C4CE-40BE-AA37-CF5522E862AA@uw.edu>
Message-ID: <1d365e92e49a4fd6b5a5ec3e8bd3cd84@BLUPR09MB008.namprd09.prod.outlook.com>

Hello,

My colleague Jerry Bowser talked about this project at UGIM 2012.  The abstract and presentation are attached.  Feel free to contact Jerry or I if you have any questions.

Thanks,

Vince

Vincent K. Luciani
NanoFab Manager
Center for Nanoscale Science and Technology
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886






-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Michael Khbeis
Sent: Tuesday, August 13, 2013 5:00 PM
To: labnetwork at mtl.mit.edu Network
Subject: [labnetwork] Phosphine sources

Dear Colleagues, 

I remember hearing (I think it was UGIM) about NIST using sub-atmospheric sources for doping gases (e.g. phosphine, diborane).  I was wondering if you have similar experience or do I need to plan for the traditional gas feeds via a cabinet from our HPM bunker?

Best,

Dr. Michael Khbeis
Associate Director
Microfabrication Facility (MFF)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
http://www.engr.washington.edu/mff/




_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From codreanu at udel.edu  Thu Aug 15 11:22:39 2013
From: codreanu at udel.edu (Iulian Codreanu)
Date: Thu, 15 Aug 2013 11:22:39 -0400
Subject: [labnetwork] Lithography Engineer at UDNF
Message-ID: <520CF23F.8050404@udel.edu>

Dear Colleagues,

I am looking to hire a lithography engineer for UD's upcoming 
nanofabrication facility.  Among other things the successful candidate 
will be responsible for specifying, acquiring, installing, qualifying, 
and managing a 100 kV e-beam lithography system.

I would like to kindly ask for your help in distributing the attached 
position description to your user lists and to other parties who may be 
interested.

With many thanks,

Iulian

-- 
iulian Codreanu, Ph.D.
Director of Operations, UD NanoFab
University of Delaware
149 Evans Hall
Newark, DE 19716
302-831-2784

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From tbritton at criticalsystemsinc.com  Fri Aug 16 08:20:32 2013
From: tbritton at criticalsystemsinc.com (Tom Britton)
Date: Fri, 16 Aug 2013 12:20:32 +0000
Subject: [labnetwork] CSI Awards Scholarship to University Student for
 Nanomaterial's Research
Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2EFFFE4D@P3PWEX2MB006.ex2.secureserver.net>

http://www.criticalsystemsinc.com/scholarships

Hello all,

A while back several of you helped us determine the requirements for CSI's newly created scholarship program. Deemed "Breakthrough Technologies Scholarship", CSI will award this scholarship to a student twice a year who shows work in the advanced technology studies such as nanotechnology, semiconductors, physics, etc. We feel that the advancements your students are making, and the work they are doing in your facilities, will improve the future for all of us and our children, and we want to do our part to support your students research efforts. It is our goal over time to bring other companies in under this scholarship to grow the award amount to the point where it becomes a sizable sum of money where we can help fund specific research programs.

The winner of the CSI Fall 2103 Breakthrough Technologies Scholarship is Stanford's Ryan Swoboda.!

Ryan's work with synthesis and characterization of novel nanomaterials, namely the assembly of chalcogenide materials, will have applications in quantum computing, biolabelling, and potentially hydrogen storage. We selected Ryan from over 50 scholarship entries, and we wish him much success with his research.

We will be accepting entries for the Winter 2013 Scholarship between September 15th and October 31st, and will award our next scholarship November 15th. If you have students who you feel would benefit by receiving this extra money, please send them this link: http://www.criticalsystemsinc.com/scholarships They can also check their University's Financial Aid & Scholarships page. Our scholarship currently resides in this section within many Universities websites. If you want it to be listed in yours, please let me know who to contact, and we'll get with them to make this scholarship available to your student body as well.

Thank you again for all who helped to make this happen.

Sincerely,

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208-890-1417
Office: 877-572-5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>

[logo for email signature png]

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From ds120 at gatech.edu  Mon Aug 26 15:09:56 2013
From: ds120 at gatech.edu (Dean Sutter)
Date: Mon, 26 Aug 2013 15:09:56 -0400
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols
Message-ID: <521BA804.4070009@gatech.edu>

Hello,

AT GT Nano we have a hard plumbed BCL3 line coming from a central gas 
room, running several hundred feet into the sub fab eventually 
connecting to the tools.

We have been internally debating the necessary protocols and physical 
installations necessary  to ensure a safe and properly functioning 
delivery mechanism.

These discussions have included the elimination of the central approach, 
replaced with a local gas cabinet and shorter runs since maintaining and 
being able to monitor line heaters on a several hundred foot of line, 
buried in plumbing up in the ceiling  is our primary concern.

So, we are seeking a benchmark from existing facilities that use BCL3.

Anyone care to volunteer to explain their installation and 
operating/safety protocols?

Thanks

-- 
Dean A. Sutter
Associate Director,
Research Operations and Industry Engagements

dean.sutter at ien.gatech.edu
404 894 3847 - Office
404 558 1844 - Cell
www.ien.gatech.edu





From roberthamilton at berkeley.edu  Mon Aug 26 18:34:36 2013
From: roberthamilton at berkeley.edu (Bob Hamilton)
Date: Mon, 26 Aug 2013 15:34:36 -0700
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols
In-Reply-To: <521BA804.4070009@gatech.edu>
References: <521BA804.4070009@gatech.edu>
Message-ID: <521BD7FC.5080306@berkeley.edu>

Colleagues,

I can share a UC Berkeley anecdote about delivering SICL4 via a long gas 
delivery line. SiCL4 has similar issues to Dean's query about BCl3 
delivery experience. SiCl4 has similar issues of a liquid/gas phase 
transition at low pressures, at 20 C.

Without problem, we delivered SICl4 to an etcher using one of our 
standard cylinder gas automated gas panels by adjusting the delivery 
pressure to about half the cylinder pressure. We felt confident the 
SiCl4 would remain in a gas phase.  Thus, we delivered at ~ 2 psi absolute.

As it turned out, one of a series of fan-coil units that delivered 
tempered air to the HEPA banks had been out of order since we 
commissioned the lab. This did not cause a significant problem as we had 
excess cooling capacity; however, we eventually got around to fixing it.

Shortly thereafter we began seeing BCL3 delivery problems to an etcher. 
It took a while to associate this fan-coil repair with BCl3 delivery 
problems. The BCL3 line had been routed directly under one of the 
cold-air discharge points. The fix for this problem was obvious; 
however, it took a while to make the association between a air-handler 
fix and the BCl3 delivery issue.

The lesson I learned is gas panels for subambient pressure need better 
low-pressure gauging than standard gas panels and better regulators. It 
is worth purchasing a dedicated subambient-delivery regulator.

Regards,
Bob Hamilton


On 8/26/2013 12:09 PM, Dean Sutter wrote:
> Hello,
>
> AT GT Nano we have a hard plumbed BCL3 line coming from a central gas 
> room, running several hundred feet into the sub fab eventually 
> connecting to the tools.
>
> We have been internally debating the necessary protocols and physical 
> installations necessary  to ensure a safe and properly functioning 
> delivery mechanism.
>
> These discussions have included the elimination of the central 
> approach, replaced with a local gas cabinet and shorter runs since 
> maintaining and being able to monitor line heaters on a several 
> hundred foot of line, buried in plumbing up in the ceiling  is our 
> primary concern.
>
> So, we are seeking a benchmark from existing facilities that use BCL3.
>
> Anyone care to volunteer to explain their installation and 
> operating/safety protocols?
>
> Thanks
>

-- 
Robert Hamilton
University of California at Berkeley
Marvell NanoLab
Equipment Eng. Mgr.
Room 520 Sutardja Dai Hall
Berkeley, CA 94720-1754
bob at eecs.berkeley.edu
Phone: 510-809-8600
Mobile: 510-325-7557
e-mail preferred




From fouad.karouta at anu.edu.au  Mon Aug 26 20:42:38 2013
From: fouad.karouta at anu.edu.au (Fouad Karouta)
Date: Tue, 27 Aug 2013 00:42:38 +0000
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols
In-Reply-To: <521BA804.4070009@gatech.edu>
References: <521BA804.4070009@gatech.edu>
Message-ID: <3AFA8059AACADA449EA87434415992BA61CFE5@SINPRD0610MB356.apcprd06.prod.outlook.com>

Dear Dean,



At ANFF ACT Node we use BCl3 in our ICP system. Here follows the way we installed it:

1-      The cylinder is located in an individual exhausted gas cabinet located outside the lab in a dedicated gas shed. The SS tubing going to the ICP tool is argon welded (single line) and is about 10m long. No other appendages are used between the gas panel in the gas cabinet and the gaspod of the tool.

2-      We have a low pressure (secondary side) pressure regulator with a reading of -4PSI (maybe the gauge is faulty). From the panel the SS tubing is heated at 30?C.

3-      We monitor the gas through three BCl3 sensors (from Bionics): one sampling the exhaust of the gas cabinet, one sampling the tool gaspod (exhaust) and one monitoring the open air around the system. Also we do have a shared gas sensor (with Cl2) to monitor the exhaust of the dry scrubber (Clean Systems).



Hope this is helpful.

Regards, Fouad

*********************************
Manager ANFF ACT Node
Research School of Physics and Engineering
Australian National University
ACT 0200, Canberra, Australia
Tel: + 61 2 6125 7174
Mob: + 61 451 046 412
Email: fouad.karouta at anu.edu.au






-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dean Sutter
Sent: Tuesday, 27 August 2013 5:10 AM
To: <labnetwork at mtl.mit.edu>
Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols



Hello,



AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room, running several hundred feet into the sub fab eventually connecting to the tools.



We have been internally debating the necessary protocols and physical installations necessary  to ensure a safe and properly functioning delivery mechanism.



These discussions have included the elimination of the central approach, replaced with a local gas cabinet and shorter runs since maintaining and being able to monitor line heaters on a several hundred foot of line, buried in plumbing up in the ceiling  is our primary concern.



So, we are seeking a benchmark from existing facilities that use BCL3.



Anyone care to volunteer to explain their installation and operating/safety protocols?



Thanks



--

Dean A. Sutter

Associate Director,

Research Operations and Industry Engagements



dean.sutter at ien.gatech.edu<mailto:dean.sutter at ien.gatech.edu>

404 894 3847 - Office

404 558 1844 - Cell

www.ien.gatech.edu<http://www.ien.gatech.edu>







_______________________________________________

labnetwork mailing list

labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>

https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork


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From rmorrison at draper.com  Tue Aug 27 06:07:13 2013
From: rmorrison at draper.com (Morrison, Richard H., Jr.)
Date: Tue, 27 Aug 2013 10:07:13 +0000
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols
In-Reply-To: <521BA804.4070009@gatech.edu>
References: <521BA804.4070009@gatech.edu>
Message-ID: <D3862732F46DEB4B93B4A7A80614D28809A25055@mbx2.draper.com>

Hi,

At Draper Laboratory we placed the BCL3 cabinet next to the tool. We did not want  to bother with heated lines and all the plumbing involved. The closer the better.

Rick


Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461



-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dean Sutter
Sent: Monday, August 26, 2013 3:10 PM
To: <labnetwork at mtl.mit.edu>
Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols

Hello,

AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room, running several hundred feet into the sub fab eventually connecting to the tools.

We have been internally debating the necessary protocols and physical installations necessary  to ensure a safe and properly functioning delivery mechanism.

These discussions have included the elimination of the central approach, replaced with a local gas cabinet and shorter runs since maintaining and being able to monitor line heaters on a several hundred foot of line, buried in plumbing up in the ceiling  is our primary concern.

So, we are seeking a benchmark from existing facilities that use BCL3.

Anyone care to volunteer to explain their installation and operating/safety protocols?

Thanks

--
Dean A. Sutter
Associate Director,
Research Operations and Industry Engagements

dean.sutter at ien.gatech.edu
404 894 3847 - Office
404 558 1844 - Cell
www.ien.gatech.edu



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork



From dgrimard at umich.edu  Tue Aug 27 07:08:52 2013
From: dgrimard at umich.edu (Dennis Grimard)
Date: Tue, 27 Aug 2013 07:08:52 -0400
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols
In-Reply-To: <521BA804.4070009@gatech.edu>
References: <521BA804.4070009@gatech.edu>
Message-ID: <58171F38-A04E-4EF0-B2DA-E7532F44734D@umich.edu>

Dean:

I would add the following comments: (1) limit the number if 90 degree weldments ... Use large radius bends whenever possible, (2) use close source supplies (place low vapor pressure gas bottles in close proximity to the tool), (3) refrain from using a single source to supply more than one tool, and (4) minimize secondary enclosures with exhaust air flow (VMB's).

I developed these rules of thumb while at IBM ... For production tools they are essential for a reliable supply to your tools.  In a research environment they are good suggestions.  

Heating is always an option.  I would start with simple insulation first.  Watlow may make heat jackets specifically designed for lines (they make a large line of heat jackets for pump vacuum lines).  They may not make them anymore but they did years ago ... There are other companies that may still make them.

Lastly, the demand of the line is important too.  That is, low flow conditions minimize the impact of not following these rules because the line acts as a supply as the gas condenses.  As long as the flow is low the condensed gas will just revaporize to meet the need.

Dennis S Grimard, Ph.D.
Managing Director
Lurie Nanofabrication Facility
1246D EECS Bldg
University of Michigan
Ann Arbor, MI 48103

(734) 368-7172 Cell

On Aug 26, 2013, at 3:09 PM, Dean Sutter <ds120 at gatech.edu> wrote:

> Hello,
> 
> AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room, running several hundred feet into the sub fab eventually connecting to the tools.
> 
> We have been internally debating the necessary protocols and physical installations necessary  to ensure a safe and properly functioning delivery mechanism.
> 
> These discussions have included the elimination of the central approach, replaced with a local gas cabinet and shorter runs since maintaining and being able to monitor line heaters on a several hundred foot of line, buried in plumbing up in the ceiling  is our primary concern.
> 
> So, we are seeking a benchmark from existing facilities that use BCL3.
> 
> Anyone care to volunteer to explain their installation and operating/safety protocols?
> 
> Thanks
> 
> -- 
> Dean A. Sutter
> Associate Director,
> Research Operations and Industry Engagements
> 
> dean.sutter at ien.gatech.edu
> 404 894 3847 - Office
> 404 558 1844 - Cell
> www.ien.gatech.edu
> 
> 
> 
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork



From ds120 at gatech.edu  Tue Aug 27 08:03:35 2013
From: ds120 at gatech.edu (Dean Sutter)
Date: Tue, 27 Aug 2013 08:03:35 -0400
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols
In-Reply-To: <D3862732F46DEB4B93B4A7A80614D28809A25055@mbx2.draper.com>
References: <521BA804.4070009@gatech.edu>
 <D3862732F46DEB4B93B4A7A80614D28809A25055@mbx2.draper.com>
Message-ID: <521C9597.6050508@gatech.edu>

Thanks to all for your responses.

The information will be helpful.

Best regards



On 8/27/2013 6:07 AM, Morrison, Richard H., Jr. wrote:
> Hi,
>
> At Draper Laboratory we placed the BCL3 cabinet next to the tool. We did not want  to bother with heated lines and all the plumbing involved. The closer the better.
>
> Rick
>
>
> Draper Laboratory
> Group Leader Microfabrication Operations
> 555 Technology Square
> Cambridge Ma, 02139-3563
>
> www.draper.com
> rmorrison at draper.com
> W 617-258-3420
> C 508-930-3461
>
>
>
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dean Sutter
> Sent: Monday, August 26, 2013 3:10 PM
> To: <labnetwork at mtl.mit.edu>
> Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen
> Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols
>
> Hello,
>
> AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room, running several hundred feet into the sub fab eventually connecting to the tools.
>
> We have been internally debating the necessary protocols and physical installations necessary  to ensure a safe and properly functioning delivery mechanism.
>
> These discussions have included the elimination of the central approach, replaced with a local gas cabinet and shorter runs since maintaining and being able to monitor line heaters on a several hundred foot of line, buried in plumbing up in the ceiling  is our primary concern.
>
> So, we are seeking a benchmark from existing facilities that use BCL3.
>
> Anyone care to volunteer to explain their installation and operating/safety protocols?
>
> Thanks
>
> --
> Dean A. Sutter
> Associate Director,
> Research Operations and Industry Engagements
>
> dean.sutter at ien.gatech.edu
> 404 894 3847 - Office
> 404 558 1844 - Cell
> www.ien.gatech.edu
>
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork


-- 
Dean A. Sutter
Associate Director,
Research Operations and Industry Engagements

dean.sutter at ien.gatech.edu
404 894 3847 - Office
404 558 1844 - Cell
www.ien.gatech.edu





From spaolini at cns.fas.harvard.edu  Tue Aug 27 10:56:46 2013
From: spaolini at cns.fas.harvard.edu (Paolini, Steven)
Date: Tue, 27 Aug 2013 14:56:46 +0000
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols
In-Reply-To: <521BA804.4070009@gatech.edu>
References: <521BA804.4070009@gatech.edu>
Message-ID: <A806238C0992094FBF9298E5D90F5489015C8D@HARVANDMBX02.fasmail.priv>

I agree with Bob Hamilton. I have gone through all the problems associated with low vapor pressure liquid source gases and the only method that has worked flawlessly for me is to lower the delivery pressure to keep the material in vapor form. This is a common problem with gases such as Boron Trichloride and Dichlorosilane.  In the past, we have heated lines, cylinders, and any other object in the gas circuitry in an effort to keep the gas from condensing into liquid but the material always finds something cooler (like an MFC) and it results in condensation problems. Good ole' high school physics tells us if you lower the pressure surrounding a liquid, you lower the boiling point proportionally.  I now purchase sub-atmospheric regulators and run these gases at the lowest possible pressure that will still deliver full flow and then add about 10% more. Typical pressures for Dichlorosilane are around 1 in Hg to 1 PSI and for Boron Trichloride about 3 PSI due to the higher flows used. Luckily, these gases are almost always used in a vacuum system.
Steve Paolini
Equipment Dood
Harvard University Center For Nanoscale Systems

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dean Sutter
Sent: Monday, August 26, 2013 3:10 PM
To: <labnetwork at mtl.mit.edu>
Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols

Hello,

AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room, running several hundred feet into the sub fab eventually connecting to the tools.

We have been internally debating the necessary protocols and physical installations necessary  to ensure a safe and properly functioning delivery mechanism.

These discussions have included the elimination of the central approach, replaced with a local gas cabinet and shorter runs since maintaining and being able to monitor line heaters on a several hundred foot of line, buried in plumbing up in the ceiling  is our primary concern.

So, we are seeking a benchmark from existing facilities that use BCL3.

Anyone care to volunteer to explain their installation and operating/safety protocols?

Thanks

--
Dean A. Sutter
Associate Director,
Research Operations and Industry Engagements

dean.sutter at ien.gatech.edu
404 894 3847 - Office
404 558 1844 - Cell
www.ien.gatech.edu



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork



From ccheney at infinityhps.com  Tue Aug 27 11:08:35 2013
From: ccheney at infinityhps.com (Craig Cheney)
Date: Tue, 27 Aug 2013 10:08:35 -0500
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols
In-Reply-To: <521BA804.4070009@gatech.edu>
References: <521BA804.4070009@gatech.edu>
Message-ID: <00b501cea337$59ebafb0$0dc30f10$@infinityhps.com>

Dean,

   We have done numerous BCL3 systems for different customers, mostly
semiconductor, but a few others.  Here are the major points we hit with
customers that cover code compliance, safety, and the proper design for a
BCl3 system.  Some of these have been mentioned before but will run through
them quick for you.

	1. Keeping the gas source as close to the point of use is very
beneficial, reduces line length etc. and all the problems that come with
that, given the nature of BCL3.

	2. The gas cabinet needs to be ventilated properly, this does two
things, first, in the event of a leak its exhausted.  Second, if  your
building is 72F or cooler, this will help chill the cylinder.

	3. A typical BCL3 system has the cylinder chilled with a cooling
blanket (you can get them from accurate gas, http://accurategas.com/).   And
the delivery panel as well as the gas line should 	be heat traced also.
68 - 70F on the cylinder, and 75 F or higher on the gas line.
	
	4. The process delivery line is supposed to be coaxial, closed/open
design so the gas is forced to your gas detection point, the gas delivery
system should be Orbitally welded throughout.

	5. Use high quality electro-polished seamless stainless steel for
the wetted portion of the gas line.  The gas panel needs to be capable of
performing cycle purges on the panel, gas line, and 	pigtail.

	6. All regulators, valves, etc. should be rated for use with extreme
corrosives.

	7. If you are delivering this gas to more than one tool and you the
required coaxial gas lines, you will need to use a Valve Manifold Box to
deliver gas to more than one point.

	8. The vapor pressure of BCL3 is 4 psi, if you try to deliver a
higher pressure than 4 psi, you will not get it, and if you try heating the
cylinder to raise the pressure, you will add numerous 	problems to your
system, the gas will turn back into a liquid on the first surface it hits
that is in the 70F range, trashing MFC's, reducing gas flow, and pulling
liquid into your process chamber.

	9. Your gas delivery panel should incorporate a nitrogen bleed on
the pigtail during cylinder changes to prevent moisture from entering any of
the wetted components, failure to do this will 	result in failed components
such as regulators, MFC's, etc.

	10. Minimizing bends and changes in direction is always best, but if
the gas line is properly heat traced and the cylinder is chilled, you should
not have any problems.  We have installed 	systems for BCL3 where the
line length is over 100' with no problems. 

	11. One key point, if the gas delivery line has gas in it, it should
be heated 24X7, if the usage of this gas is low (once a week or less) than
you should consider doing a cycle purge on the gas 	line and leaving it
under vacuum when not in use.

Hope that helps, and feel free to give me a call if you have any other
questions.


Craig Cheney
Infinity High Purity Systems
?
Desk:? (608)834-4200
Fax:???? (608)834-4299
Cell:??? (608)438-8714

This e-mail transmission and any attachments to it are intended solely for
the use of the individual or entity to whom it is addressed and may contain
confidential and privileged information. If you are not the intended
recipient, your use, forwarding, printing, storing, disseminating,
distribution, or copying of this communication is prohibited. If you
received this communication in error, please notify the sender immediately
by replying to this message and delete it from your computer.

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Dean Sutter
Sent: Monday, August 26, 2013 2:10 PM
To: <labnetwork at mtl.mit.edu>
Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols

Hello,

AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room,
running several hundred feet into the sub fab eventually connecting to the
tools.

We have been internally debating the necessary protocols and physical
installations necessary  to ensure a safe and properly functioning delivery
mechanism.

These discussions have included the elimination of the central approach,
replaced with a local gas cabinet and shorter runs since maintaining and
being able to monitor line heaters on a several hundred foot of line, buried
in plumbing up in the ceiling  is our primary concern.

So, we are seeking a benchmark from existing facilities that use BCL3.

Anyone care to volunteer to explain their installation and operating/safety
protocols?

Thanks

--
Dean A. Sutter
Associate Director,
Research Operations and Industry Engagements

dean.sutter at ien.gatech.edu
404 894 3847 - Office
404 558 1844 - Cell
www.ien.gatech.edu



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork






From reynolds at ece.ucsb.edu  Tue Aug 27 12:05:06 2013
From: reynolds at ece.ucsb.edu (Tom Reynolds)
Date: Tue, 27 Aug 2013 09:05:06 -0700
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols
In-Reply-To: <A806238C0992094FBF9298E5D90F5489015C8D@HARVANDMBX02.fasmail.priv>
References: <521BA804.4070009@gatech.edu>
 <A806238C0992094FBF9298E5D90F5489015C8D@HARVANDMBX02.fasmail.priv>
Message-ID: <062001cea33f$32316c50$969444f0$@ucsb.edu>

I agree with Bob and Steve.  This is our approach at UCSB with our BCl3. We
feed multiple tools from one source with over 100' of 1/4" SS coax line.
Keep the cylinder pressure as low as possible with a sub atmospheric
regulator while maintaining the appropriate total flow. This took us a
little time to figure out originally as we set up the lab, but has worked
fine since the adjustments.
--------------------------------------------------------------
Tom Reynolds,  Lab Manager
UCSB Nanofabrication Facility
Electrical and Computer Engineering Dept.
Engineering Science Bldg #225, Room 1109E
Santa Barbara, CA 93106
805-893-3918 x215  office
805-451-3979  cell
805-893-3918  fax
reynolds at ece.ucsb.edu




-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Paolini, Steven
Sent: Tuesday, August 27, 2013 7:57 AM
To: Dean Sutter; <labnetwork at mtl.mit.edu>
Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen
Subject: Re: [labnetwork] BCL3 - Gas Line Heaters and Protocols

I agree with Bob Hamilton. I have gone through all the problems associated
with low vapor pressure liquid source gases and the only method that has
worked flawlessly for me is to lower the delivery pressure to keep the
material in vapor form. This is a common problem with gases such as Boron
Trichloride and Dichlorosilane.  In the past, we have heated lines,
cylinders, and any other object in the gas circuitry in an effort to keep
the gas from condensing into liquid but the material always finds something
cooler (like an MFC) and it results in condensation problems. Good ole' high
school physics tells us if you lower the pressure surrounding a liquid, you
lower the boiling point proportionally.  I now purchase sub-atmospheric
regulators and run these gases at the lowest possible pressure that will
still deliver full flow and then add about 10% more. Typical pressures for
Dichlorosilane are around 1 in Hg to 1 PSI and for Boron Trichloride about 3
PSI due to the higher flows u  sed. Luckily, these gases are almost always
used in a vacuum system.
Steve Paolini
Equipment Dood
Harvard University Center For Nanoscale Systems

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Dean Sutter
Sent: Monday, August 26, 2013 3:10 PM
To: <labnetwork at mtl.mit.edu>
Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols

Hello,

AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room,
running several hundred feet into the sub fab eventually connecting to the
tools.

We have been internally debating the necessary protocols and physical
installations necessary  to ensure a safe and properly functioning delivery
mechanism.

These discussions have included the elimination of the central approach,
replaced with a local gas cabinet and shorter runs since maintaining and
being able to monitor line heaters on a several hundred foot of line, buried
in plumbing up in the ceiling  is our primary concern.

So, we are seeking a benchmark from existing facilities that use BCL3.

Anyone care to volunteer to explain their installation and operating/safety
protocols?

Thanks

--
Dean A. Sutter
Associate Director,
Research Operations and Industry Engagements

dean.sutter at ien.gatech.edu
404 894 3847 - Office
404 558 1844 - Cell
www.ien.gatech.edu



_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork




From tbritton at criticalsystemsinc.com  Tue Aug 27 19:25:47 2013
From: tbritton at criticalsystemsinc.com (Tom Britton)
Date: Tue, 27 Aug 2013 23:25:47 +0000
Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols
In-Reply-To: <521C9597.6050508@gatech.edu>
References: <521BA804.4070009@gatech.edu>
 <D3862732F46DEB4B93B4A7A80614D28809A25055@mbx2.draper.com>
 <521C9597.6050508@gatech.edu>
Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2E0100BF2A@P3PWEX2MB006.ex2.secureserver.net>

Hello Dean,



I asked my Ops Manager how he dealt with BCl3 in a production Fab. He was the gas manager for ON Semi for 15 years, and has used BCl3, without issue, for most of his tenure there.



Here's what I got from him:



Chill the cylinders to 65F, remove regulators from the gas cabinet, temp control line from gas cabinet to VMB( 77 F +- 3F.) Regulators should be installed in VMB to reduce line pressure from VMB to Tool, temp from VMB to tool to around  83F+- 4F.  Basically an increase in line temp from source to point of use and a decrease in pressure this system will flow flawlessly at distances upwards of 5 to 600'.  I would recommend using 3/8" tubing from the gas cabinet to the VMB. After that it doesn't matter on size unless large amounts of BCL3 is used in process. The key factor is not using a regulator in the gas cabinet it is not necessary and will cause a heat sink. The VMB does not require temp control unless the environment its located in is below ambient.



Hope it helps.

Sincerely,

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208-890-1417
Office: 877-572-5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>

[logo for email signature png]






-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dean Sutter
Sent: Tuesday, August 27, 2013 6:04 AM
To: <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] BCL3 - Gas Line Heaters and Protocols



Thanks to all for your responses.



The information will be helpful.



Best regards







On 8/27/2013 6:07 AM, Morrison, Richard H., Jr. wrote:

> Hi,

>

> At Draper Laboratory we placed the BCL3 cabinet next to the tool. We did not want  to bother with heated lines and all the plumbing involved. The closer the better.

>

> Rick

>

>

> Draper Laboratory

> Group Leader Microfabrication Operations

> 555 Technology Square

> Cambridge Ma, 02139-3563

>

> www.draper.com<http://www.draper.com>

> rmorrison at draper.com<mailto:rmorrison at draper.com>

> W 617-258-3420

> C 508-930-3461

>

>

>

> -----Original Message-----

> From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dean Sutter

> Sent: Monday, August 26, 2013 3:10 PM

> To: <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>

> Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen

> Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols

>

> Hello,

>

> AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room, running several hundred feet into the sub fab eventually connecting to the tools.

>

> We have been internally debating the necessary protocols and physical installations necessary  to ensure a safe and properly functioning delivery mechanism.

>

> These discussions have included the elimination of the central approach, replaced with a local gas cabinet and shorter runs since maintaining and being able to monitor line heaters on a several hundred foot of line, buried in plumbing up in the ceiling  is our primary concern.

>

> So, we are seeking a benchmark from existing facilities that use BCL3.

>

> Anyone care to volunteer to explain their installation and operating/safety protocols?

>

> Thanks

>

> --

> Dean A. Sutter

> Associate Director,

> Research Operations and Industry Engagements

>

> dean.sutter at ien.gatech.edu<mailto:dean.sutter at ien.gatech.edu>

> 404 894 3847 - Office

> 404 558 1844 - Cell

> www.ien.gatech.edu<http://www.ien.gatech.edu>

>

>

>

> _______________________________________________

> labnetwork mailing list

> labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>

> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork





--

Dean A. Sutter

Associate Director,

Research Operations and Industry Engagements



dean.sutter at ien.gatech.edu<mailto:dean.sutter at ien.gatech.edu>

404 894 3847 - Office

404 558 1844 - Cell

www.ien.gatech.edu<http://www.ien.gatech.edu>







_______________________________________________

labnetwork mailing list

labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>

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