[labnetwork] BCL3 - Gas Line Heaters and Protocols

[Tom Britton]

Hello Dean,



I asked my Ops Manager how he dealt with BCl3 in a production Fab. He was the gas manager for ON Semi for 15 years, and has used BCl3, without issue, for most of his tenure there.



Here's what I got from him:



Chill the cylinders to 65F, remove regulators from the gas cabinet, temp control line from gas cabinet to VMB( 77 F +- 3F.) Regulators should be installed in VMB to reduce line pressure from VMB to Tool, temp from VMB to tool to around  83F+- 4F.  Basically an increase in line temp from source to point of use and a decrease in pressure this system will flow flawlessly at distances upwards of 5 to 600'.  I would recommend using 3/8" tubing from the gas cabinet to the VMB. After that it doesn't matter on size unless large amounts of BCL3 is used in process. The key factor is not using a regulator in the gas cabinet it is not necessary and will cause a heat sink. The VMB does not require temp control unless the environment its located in is below ambient.



Hope it helps.

Sincerely,

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208-890-1417
Office: 877-572-5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>

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-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dean Sutter
Sent: Tuesday, August 27, 2013 6:04 AM
To: <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] BCL3 - Gas Line Heaters and Protocols



Thanks to all for your responses.



The information will be helpful.



Best regards







On 8/27/2013 6:07 AM, Morrison, Richard H., Jr. wrote:

> Hi,

>

> At Draper Laboratory we placed the BCL3 cabinet next to the tool. We did not want  to bother with heated lines and all the plumbing involved. The closer the better.

>

> Rick

>

>

> Draper Laboratory

> Group Leader Microfabrication Operations

> 555 Technology Square

> Cambridge Ma, 02139-3563

>

> www.draper.com<http://www.draper.com>

> rmorrison at draper.com<mailto:rmorrison at draper.com>

> W 617-258-3420

> C 508-930-3461

>

>

>

> -----Original Message-----

> From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dean Sutter

> Sent: Monday, August 26, 2013 3:10 PM

> To: <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>

> Cc: Rose, Robert W; Michael Sullivan; Vinh Nguyen

> Subject: [labnetwork] BCL3 - Gas Line Heaters and Protocols

>

> Hello,

>

> AT GT Nano we have a hard plumbed BCL3 line coming from a central gas room, running several hundred feet into the sub fab eventually connecting to the tools.

>

> We have been internally debating the necessary protocols and physical installations necessary  to ensure a safe and properly functioning delivery mechanism.

>

> These discussions have included the elimination of the central approach, replaced with a local gas cabinet and shorter runs since maintaining and being able to monitor line heaters on a several hundred foot of line, buried in plumbing up in the ceiling  is our primary concern.

>

> So, we are seeking a benchmark from existing facilities that use BCL3.

>

> Anyone care to volunteer to explain their installation and operating/safety protocols?

>

> Thanks

>

> --

> Dean A. Sutter

> Associate Director,

> Research Operations and Industry Engagements

>

> dean.sutter at ien.gatech.edu<mailto:dean.sutter at ien.gatech.edu>

> 404 894 3847 - Office

> 404 558 1844 - Cell

> www.ien.gatech.edu<http://www.ien.gatech.edu>

>

>

>

> _______________________________________________

> labnetwork mailing list

> labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>

> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork





--

Dean A. Sutter

Associate Director,

Research Operations and Industry Engagements



dean.sutter at ien.gatech.edu<mailto:dean.sutter at ien.gatech.edu>

404 894 3847 - Office

404 558 1844 - Cell

www.ien.gatech.edu<http://www.ien.gatech.edu>







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