[labnetwork] Red deposit in DRIE diffusion tube

[Matthieu Nannini, Dr.]

Dear colleagues,

We just noticed a weird red discoloration or deposit in our DRIE ceramic diffusion tube. Prior to last week the tube was more on the black-ish color side and it "suddenly" turned red, flaking over the wafers. Our tube seems to be due for a swap but still, anyone has encountered this kind of deposit ? We run regular Bosch processes as well as glass and fused silica etch using a little bit of methane. We suspect methane because the red color is can be seen in the methane gas port (left side hole) whereas the gas port for all other gases is clean. However that could a coincidence, we don't know !

Attached is a picture of the tube.

Thanks
[cid:41a50cc3-e90a-433b-ba50-a5d01be4a00b at campus.mcgill.ca]


-----------------------------------
Matthieu Nannini
McGill Nanotools Microfab
Manager
t: 514 398 3310
c: 514 758 3311
f: 514 398 8434
http://mnm.physics.mcgill.ca/
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