From pgould at MIT.EDU Tue Feb 5 11:53:32 2013 From: pgould at MIT.EDU (Parker Gould) Date: Tue, 5 Feb 2013 11:53:32 -0500 Subject: [labnetwork] Tegal 803 Operation Manual Message-ID: Hello all, Our group has recently obtained an old Tegal 803 plasma etcher, but unfortunately it came with very little documentation. We've been told that an Operation Manual exists, but our attempts to locate one from several vendors and from Tegal/SPTS have been fruitless so far. If anyone knows about a manual for the 803, or know someone who might be able to locate one, we would greatly appreciate it. Thank you, Parker Gould Schmidt Group Lab MTL, MIT -------------- next part -------------- An HTML attachment was scrubbed... URL: From fouad.karouta at anu.edu.au Tue Feb 5 18:24:10 2013 From: fouad.karouta at anu.edu.au (Fouad Karouta) Date: Wed, 6 Feb 2013 10:24:10 +1100 Subject: [labnetwork] Tegal 803 Operation Manual In-Reply-To: References: Message-ID: <003c01ce03f7$e704f3f0$b50edbd0$@anu.edu.au> Dear Parker, We have here a Tegal 901e with a manual. If you think this might be of any help let me know. Regards, Fouad ********************************* Facility Manager ANFF ACT Node Research School of Physics and Engineering Australian National University ACT 0200, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Parker Gould Sent: Wednesday, 6 February 2013 3:54 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Tegal 803 Operation Manual Hello all, Our group has recently obtained an old Tegal 803 plasma etcher, but unfortunately it came with very little documentation. We've been told that an Operation Manual exists, but our attempts to locate one from several vendors and from Tegal/SPTS have been fruitless so far. If anyone knows about a manual for the 803, or know someone who might be able to locate one, we would greatly appreciate it. Thank you, Parker Gould Schmidt Group Lab MTL, MIT -------------- next part -------------- An HTML attachment was scrubbed... URL: From info at fabsurplus.com Wed Feb 6 04:45:27 2013 From: info at fabsurplus.com (Stephen CS Howe) Date: Wed, 06 Feb 2013 10:45:27 +0100 Subject: [labnetwork] Tegal 803 Operation Manual In-Reply-To: <003c01ce03f7$e704f3f0$b50edbd0$@anu.edu.au> References: <003c01ce03f7$e704f3f0$b50edbd0$@anu.edu.au> Message-ID: <1360143927.2602.49.camel@samsung> Dear Sirs, This guy in Arizona was doing refurbs on TEGAL last time I spoke to him. When you contact him, let him know it was me who sent you his way:- Web: http://www.glowresearch.org/ | E-mail : gordonwhit at cox.net gordonwhitlock at glowresearch.org 12014 S. 35th Ct. Phoenix, AZ. USA 85044 | Phone: 480-621-8405 | Cell: 480-710-6469 | Fax: 480-893-2076 If you need any help, let me know. I may be able to dig up a manual. However, I don't really do much with TEGAL. It's not my area of speciality. We normally charge $500 per manual, as we have to cover costs. If anyone is looking for old manuals, I have a few listed here, but not any for TEGAL:- http://www.fabsurplus.com/sdi_catalog/salesItemList.do?listTypeId=61 Yours sincerely, Stephen Howe Company Owner SDI Fabsurplus Group +1 830 388 1071 (Mobile) +39 335 710 7756 (Italy Mobile) Skype: Stephencshowe WWW.FABSURPLUS.COM Japan-Italy-Ireland-USA Contact us now to buy and sell used equipment and enjoy the benefits of cost-saving. PS I am also looking for the following:- Axcelis Optima HDX Axcelis GSD VHE AMAT 9500 XR 100 mm implanter disk BIORAD QS 2200 DNS SS80-BW Ebara FREX 200 for Cu HITACHI CG4100 KLA RS 55 KLA THERMAWAVE OP 7341 KLA HRP 240 KLA HRP 340 KLA SP1 DLS KLA ARCHER 10 KLA ASET F5X WITH SMIF Lam 9400 8 inch, with dsie module Lam alliance A6 HPT 4 CHAMBERS METRYX MENTOR OC23 Nanometrics 9000i Nextest Magnum NOVELLUS C1 200 MM NOVELLUS C2 DUAL SEQUEL ("as is") PRI Pod stocker, track and transporter cars, 8 inch SMIF Panasonic HT122 SPTS PEGASUS TEL ALPHA 8s nitride TEL DRM Unity M with 3 chambers CA DRM2 VARIAN Visiion 200 On Wed, 2013-02-06 at 10:24 +1100, Fouad Karouta wrote: > Dear Parker, > > > > We have here a Tegal 901e with a manual. If you think this might be of > any help let me know. > > Regards, Fouad > > > > ********************************* > > Facility Manager ANFF ACT Node > > Research School of Physics and Engineering > > Australian National University > > ACT 0200, Canberra, Australia > > Tel: + 61 2 6125 7174 > > Mob: + 61 451 046 412 > > Email: fouad.karouta at anu.edu.au > > > > From: labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Parker Gould > Sent: Wednesday, 6 February 2013 3:54 AM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Tegal 803 Operation Manual > > > > Hello all, > > > > > Our group has recently obtained an old Tegal 803 plasma etcher, but > unfortunately it came with very little documentation. We've been told > that an Operation Manual exists, but our attempts to locate one from > several vendors and from Tegal/SPTS have been fruitless so far. > > > > > > If anyone knows about a manual for the 803, or know someone who might > be able to locate one, we would greatly appreciate it. > > > > > > Thank you, > > > Parker Gould > > > > > > Schmidt Group Lab > > > MTL, MIT > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From savitha.p at ece.iisc.ernet.in Mon Feb 11 06:22:49 2013 From: savitha.p at ece.iisc.ernet.in (Savitha P) Date: Mon, 11 Feb 2013 16:52:49 +0530 Subject: [labnetwork] Oxide growth in Nitrogen Message-ID: <5d0af029dc1917735edf3912835de621.squirrel@www.ece.iisc.ernet.in> Dear Colleagues: We had done a N2 anneal in our atmospheric furnace for 10hrs at 1100 deg C, substrate was silicon <100>, P-type. The oxide thickness obtained was ~16nm (variation of 15.2 - 17.6nm). For one hr anneal, the thickness obtained was ~5nm. It would be really helpful if we could know the silicon dioxide thickness expected for N2 annealing experiments. The percentage of O2 impurity in our N2 is supposed to be <1.000 ppb according to our purifier specs. Regards, Savitha -- Dr.Savitha P Facility Technology Manager National Nanofabrication Centre Centre for Nano Science and Engineering (CeNSE) Indian Institute of Science Bangalore - 560012 Ph: +91 80 2293 3254 www.nano.iisc.ernet.in -- This message has been scanned for viruses and dangerous content by MailScanner, and is believed to be clean. From bob at eecs.berkeley.edu Mon Feb 11 12:41:15 2013 From: bob at eecs.berkeley.edu (Robert M. Hamilton) Date: Mon, 11 Feb 2013 09:41:15 -0800 Subject: [labnetwork] Oxide growth in Nitrogen In-Reply-To: <5d0af029dc1917735edf3912835de621.squirrel@www.ece.iisc.ernet.in> References: <5d0af029dc1917735edf3912835de621.squirrel@www.ece.iisc.ernet.in> Message-ID: <51192D3B.2000408@eecs.berkeley.edu> Savitha P., It is difficult to predict the purity of the N2 in your atmospheric process tube without knowing more about the geometry of the tube. Is it a horizontal or vertical furnace? Backstreaming will play a role in the furnace atmosphere. One presumes the tube has an exit opening(s) which ports into a scavenger. Back-diffusion/partial pressure laws will invariably increase O2, CO2 and water vapor partial pressures in the furnace environment. At Berkeley, we reduced O2 contamination by modifying our OEM's furnace tube exit port design. In addition to reducing overall exit orifice area, we increased the number of exit ports and positioned them symmetrically around the circumference for better cross-wafer uniformity. Our go/no go standard for N2 atmospheres in our atmospheric furnaces was >5 nm oxide/1000 C/12 hours. Also, the furnace pre-clean step is important. I'll defer to others on the labnetwork who are more qualified to discuss this. Bob Hamilton Bob Hamilton Marvel NanoLab University of CA at Berkeley Rm 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu (e-mail preferred) 510-809-8600 510-325-7557 (mobile - emergencies) On 2/11/2013 3:22 AM, Savitha P wrote: > Dear Colleagues: > > We had done a N2 anneal in our atmospheric furnace for 10hrs at 1100 deg > C, substrate was silicon <100>, P-type. The oxide thickness obtained was > ~16nm (variation of 15.2 - 17.6nm). For one hr anneal, the thickness > obtained was ~5nm. It would be really helpful if we could know the silicon > dioxide thickness expected for N2 annealing experiments. The percentage of > O2 impurity in our N2 is supposed to be <1.000 ppb according to our > purifier specs. > > Regards, > > Savitha > -------------- next part -------------- An HTML attachment was scrubbed... URL: From savitha.p at ece.iisc.ernet.in Wed Feb 13 04:48:46 2013 From: savitha.p at ece.iisc.ernet.in (Savitha P) Date: Wed, 13 Feb 2013 15:18:46 +0530 Subject: [labnetwork] Oxide growth in Nitrogen Message-ID: <8a2904e223026bc87bf57372edc4c4ac.squirrel@www.ece.iisc.ernet.in> Hello! We have a horizontal furnace, but the exhaust system is not a scavenger type. We have individual 1 inch exhaust tubes from each of the furnace, connecting to a common exhaust pipe which in turn is connected to a local scrubber system. There are 4 tubes in each of the furnace stack and we see this problem in all the tubes. When you say, the thickness is >5nm, could you please let me know what is the upper limits that you see and whether you do this experiments on the tubes in the stack and is there a trend in the thickness with respect to their position in the stack. Thanks and regards, Savitha > Savitha P., > > It is difficult to predict the purity of the N2 in your > atmospheric process tube without knowing more about the > geometry of the tube. Is it a horizontal or vertical furnace? > > Backstreaming will play a role in the furnace atmosphere. > One presumes the tube has an exit opening(s) which ports > into a scavenger. Back-diffusion/partial pressure laws will > invariably increase O2, CO2 and water vapor partial > pressures in the furnace environment. > > At Berkeley, we reduced O2 contamination by modifying our > OEM's furnace tube exit port design. In addition to reducing > overall exit orifice area, we increased the number of exit > ports and positioned them symmetrically around the > circumference for better cross-wafer uniformity. > > Our go/no go standard for N2 atmospheres in our atmospheric > furnaces was >5 nm oxide/1000 C/12 hours. > > Also, the furnace pre-clean step is important. I'll defer to > others on the labnetwork who are more qualified to discuss this. > > Bob Hamilton > > Bob Hamilton > Marvel NanoLab > University of CA at Berkeley > Rm 520 Sutardja Dai Hall > Berkeley, CA 94720-1754 > bob at eecs.berkeley.edu > (e-mail preferred) > 510-809-8600 > 510-325-7557 (mobile - emergencies) > > On 2/11/2013 3:22 AM, Savitha P wrote: >> Dear Colleagues: >> We had done a N2 anneal in our atmospheric furnace for 10hrs at 1100 >> deg >> C, substrate was silicon <100>, P-type. The oxide thickness obtained was >> ~16nm (variation of 15.2 - 17.6nm). For one hr anneal, the thickness obtained was ~5nm. It would be really helpful if we could know the silicon >> dioxide thickness expected for N2 annealing experiments. The percentage of >> O2 impurity in our N2 is supposed to be <1.000 ppb according to our purifier specs. >> Regards, >> Savitha > > > -- > This message has been scanned for viruses and > dangerous content by MailScanner, and is > believed to be clean. > > -- Dr.Savitha P Facility Technology Manager National Nanofabrication Centre Centre for Nano Science and Engineering (CeNSE) Indian Institute of Science Bangalore - 560012 Ph: +91 80 2293 3254 www.nano.iisc.ernet.in -- This message has been scanned for viruses and dangerous content by MailScanner, and is believed to be clean. From Thomas_Ferraguto at uml.edu Wed Feb 13 08:37:45 2013 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas) Date: Wed, 13 Feb 2013 13:37:45 +0000 Subject: [labnetwork] quick tool fit up survey Message-ID: Colleagues, We are currently in the midst of our tool fit up for our 4200 square foot clean room. At UML we pay for engineer stamped tool packages for every tool we are installing in our clean room (i.e. Schematic drawings, floor plan, electrical, plumbing, etc.) I would greatly appreciate it you could take a few minutes and answer the questions below , (This is in response to the question posed by Capital Planning, as to what other Universities require?) Note: I'm referring to process equipment (aligners, deposition equipment, e-beam lithography equipment, wet stations etc., that require high power, specialized piping and exhaust). Just bold or hi-lite the text in your answer. I am also open to any comments or suggestions ! Tool Fit Up Survey Enter Your Organization Are stamped engineering drawings for tool installs ? YES NO What documentation is required for tool installs? Mfg Cut Sheets Marked up drawings Local Permits Other Are you required to follow prevailing wage guidelines (Union) YES NO Who Coordinates Tool Installations: Clean room Staff Facilities Outside Contractor Other Who Performs the installation Clean room Staff Facilities Outside Contractor Combination Comments Best Regards P.S. I will happily share my findings on request. Thomas S. Ferraguto ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell 1 University Avenue Lowell MA 01854-5120 978-934-1809 land 617-755-0910 mobile 978-934-1014 fax -------------- next part -------------- An HTML attachment was scrubbed... URL: From bob at eecs.berkeley.edu Wed Feb 13 11:32:50 2013 From: bob at eecs.berkeley.edu (Robert M. Hamilton) Date: Wed, 13 Feb 2013 08:32:50 -0800 Subject: [labnetwork] Oxide growth in Nitrogen In-Reply-To: <8a2904e223026bc87bf57372edc4c4ac.squirrel@www.ece.iisc.ernet.in> References: <8a2904e223026bc87bf57372edc4c4ac.squirrel@www.ece.iisc.ernet.in> Message-ID: <511BC032.2070001@eecs.berkeley.edu> Savitha, Back diffusion via your exhaust port may be the issue with high wafer oxidation rates in your atmospheric . tube. It should be easy to install an orifice to test this. Assuming your N2 flow is ~10-20 slpm during load and remains high during anneals you should be able to live with ~ 3 mm orifice in the tube's exhaust. It can be a pretty primitive test - even aluminum foil. Bob H. Bob Hamilton Marvel NanoLab University of CA at Berkeley Rm 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu (e-mail preferred) 510-809-8600 510-325-7557 (mobile - emergencies) On 2/13/2013 1:48 AM, Savitha P wrote: > Hello! > > We have a horizontal furnace, but the exhaust system is not a scavenger > type. We have individual 1 inch exhaust tubes from each of the furnace, > connecting to a common exhaust pipe which in turn is connected to a local > scrubber system. There are 4 tubes in each of the furnace stack and we see > this problem in all the tubes. > > When you say, the thickness is >5nm, could you please let me know what is > the upper limits that you see and whether you do this experiments on the > tubes in the stack and is there a trend in the thickness with respect to > their position in the stack. > > Thanks and regards, > > Savitha > >> Savitha P., >> >> It is difficult to predict the purity of the N2 in your >> atmospheric process tube without knowing more about the >> geometry of the tube. Is it a horizontal or vertical furnace? >> >> Backstreaming will play a role in the furnace atmosphere. >> One presumes the tube has an exit opening(s) which ports >> into a scavenger. Back-diffusion/partial pressure laws will >> invariably increase O2, CO2 and water vapor partial >> pressures in the furnace environment. >> >> At Berkeley, we reduced O2 contamination by modifying our >> OEM's furnace tube exit port design. In addition to reducing >> overall exit orifice area, we increased the number of exit >> ports and positioned them symmetrically around the >> circumference for better cross-wafer uniformity. >> >> Our go/no go standard for N2 atmospheres in our atmospheric >> furnaces was >5 nm oxide/1000 C/12 hours. >> >> Also, the furnace pre-clean step is important. I'll defer to >> others on the labnetwork who are more qualified to discuss this. >> >> Bob Hamilton >> >> Bob Hamilton >> Marvel NanoLab >> University of CA at Berkeley >> Rm 520 Sutardja Dai Hall >> Berkeley, CA 94720-1754 >> bob at eecs.berkeley.edu >> (e-mail preferred) >> 510-809-8600 >> 510-325-7557 (mobile - emergencies) >> >> On 2/11/2013 3:22 AM, Savitha P wrote: >>> Dear Colleagues: >>> We had done a N2 anneal in our atmospheric furnace for 10hrs at 1100 >>> deg >>> C, substrate was silicon <100>, P-type. The oxide thickness obtained > was >>> ~16nm (variation of 15.2 - 17.6nm). For one hr anneal, the thickness > obtained was ~5nm. It would be really helpful if we could know the > silicon >>> dioxide thickness expected for N2 annealing experiments. The percentage of >>> O2 impurity in our N2 is supposed to be <1.000 ppb according to our > purifier specs. >>> Regards, >>> Savitha >> >> -- >> This message has been scanned for viruses and >> dangerous content by MailScanner, and is >> believed to be clean. >> >> > From kmcpeak at ethz.ch Wed Feb 13 14:59:35 2013 From: kmcpeak at ethz.ch (Kevin McPeak) Date: Wed, 13 Feb 2013 20:59:35 +0100 Subject: [labnetwork] Benchtop ultrasonicator suggestions Message-ID: Dear Colleagues, My lab at ETH is interested in purchasing a benchtop ultrasonicator primarily for cleaning Si (sometimes flat, sometimes with nanoscale features) and for sonicating during KOH etching (at 60 - 70 C). We currently have two Thermo Branson units (40 kHz) in the lab but they aren't able to heat past 55 C. Do any of you have suggestions on the following: 1). Recommended manufacturers (I have had good experience with a Crest unit in the past but other than that I am reliant on google searching) 2). Recommended frequencies (it seems that higher is better in general but we can't afford megasonic transducers - budget is max 3K CHF) As I mentioned we have two 40 kHz units. 132 kHz appears to be an affordable alternative, anyone have experience with this frequency? 3). Multi-frequency devices with a single transducer - is this a good idea or should each frequency really have its own transducer to maximize efficiency? Thanks in advance for your thoughts on this. Regards, Kevin McPeak -- Kevin McPeak Ph.D. Postdoctoral Researcher ETH Z?rich Optical Materials Engineering Laboratory Universit?tstrasse 6, CNB F121 CH-8092 Zurich, Switzerland Voice: +41 44 632 6594 Email: kmcpeak at ethz.ch From christophe.clement at polymtl.ca Mon Feb 18 17:00:44 2013 From: christophe.clement at polymtl.ca (=?iso-8859-1?Q?Christophe_Cl=E9ment?=) Date: Mon, 18 Feb 2013 17:00:44 -0500 (EST) Subject: [labnetwork] CMP pads storage Message-ID: <006601ce0e23$666c7070$33455150$@clement@polymtl.ca> Hi everyone, We, at polytechnic School of Montreal, are going to buy a refurbished CMP tools for our microfabrication lab: Strasbaugh 6EC. That will be our first experience with CMP. We?ve been told that we have to keep our different pads, as soon as they are utilized, under wet condition in a special cabinet. Some of you have maybe experience with such cabinet, if you can advice us regarding the design, size, water flow rate, how the pad are oriented (standing up or in a drawer...), that will be really appreciated! Also, if some of you has this tools, could you please describe utilities that need the tools? Such as DI water system, Slurry?s canister, recirculation pump... Thank you for your help! Christophe Cl?ment Technicien laboratoire Laboratoire de microfabrication (LMF) Groupe des Couches Minces (GCM) www.gcmlab.ca Ecole Polytechnique de Montr?al www.polymtl.ca D?partement de g?nie physique * 2900 Boulevard Edouard Monpetit Pavillon JAB Campus de l'Universit? de Montr?al Montr?al (Qu?bec) H3T 1J4 8 christophe.clement at polymtl.ca ( 514 340 4711 # 2417 -------------- next part -------------- An HTML attachment was scrubbed... URL: From khbeis at uw.edu Mon Feb 18 23:18:14 2013 From: khbeis at uw.edu (Michael Khbeis) Date: Mon, 18 Feb 2013 20:18:14 -0800 Subject: [labnetwork] CMP pads storage In-Reply-To: <006601ce0e23$666c7070$33455150$@clement@polymtl.ca> References: <006601ce0e23$666c7070$33455150$@clement@polymtl.ca> Message-ID: <40EDEAD4-65A5-488B-9B28-733431FC45AE@uw.edu> Christophe, There are a substantial amount of details regarding the operation and maintenance of a Strasbaugh 6EC and CMP in general. I can give you a few highlights and point you to a valuable resource, but feel free to ask me more specific questions as I had run a 6EC for the majority of 10 years and learned quite a bit along the way. First, always store CMP pads laying flat. Do not stand the box on end. I invested in multiple pad tables (removable anodized aluminum carrier) and swapped tables when changing from a SUBA IV to an IC-1000 k-groove/SUBA IV stack pad. The former for fine polish, the latter for metal/oxide CMP. When not in use, cover with the original plastic backing sheet and a spare table cover. They should be kept damp, but not soaked. Same for the VIPR polishing head. I would keep a small container and place the head in it with a little water when not in use. For facilities DI feed of course, stable compressed air, and slurry feeds. The slurry health maintenance is the most problematic area of R&D volume CMP. Without maintaining a proper humidification, avoiding shearing (e.g. peristaltic pumps), rapid pH swings, etc. the slurry will tend to agglomerate and cause scratching defects. I worked extensively with Axus Technologies in Tempe, AZ to develop a custom slurry health monitoring system that would keep our slurries in suspension for weeks. Until we employed this system, it was a challenge to get consistent results. Also, we were challenged in quality control of incoming slurry and obvious changes in chemistry/inconsistencies by the second tier distributors. Please feel free to contact me for more specific questions and concerns. Best regards, Dr. Michael Khbeis Associate Director Microfabrication Facility (MFF) University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (F) 206.221.1681 (C) 443.254.5192 khbeis at uw.edu http://www.engr.washington.edu/mff/ On Feb 18, 2013, at 2:00 PM, Christophe Cl?ment wrote: > Hi everyone, > > We, at polytechnic School of Montreal, are going to buy a refurbished CMP tools for our microfabrication lab: Strasbaugh 6EC. > That will be our first experience with CMP. We?ve been told that we have to keep our different pads, as soon as they are utilized, under wet condition in a special cabinet. > > Some of you have maybe experience with such cabinet, if you can advice us regarding the design, size, water flow rate, how the pad are oriented (standing up or in a drawer...), that will be really appreciated! > Also, if some of you has this tools, could you please describe utilities that need the tools? Such as DI water system, Slurry?s canister, recirculation pump... > > Thank you for your help! > > Christophe Cl?ment > Technicien laboratoire > Laboratoire de microfabrication (LMF) > Groupe des Couches Minces (GCM) www.gcmlab.ca > Ecole Polytechnique de Montr?al www.polymtl.ca > D?partement de g?nie physique > > * 2900 Boulevard Edouard Monpetit > Pavillon JAB > Campus de l'Universit? de Montr?al > Montr?al (Qu?bec) H3T 1J4 > > 8 christophe.clement at polymtl.ca > ( 514 340 4711 # 2417 > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- A non-text attachment was scrubbed... Name: smime.p7s Type: application/pkcs7-signature Size: 1345 bytes Desc: not available URL: From ds120 at gatech.edu Tue Feb 19 10:21:51 2013 From: ds120 at gatech.edu (Dean Sutter) Date: Tue, 19 Feb 2013 10:21:51 -0500 Subject: [labnetwork] DI Water Quality for Steam Humidifier - Seeking Input In-Reply-To: <006601ce0e23$666c7070$33455150$@clement@polymtl.ca> References: <006601ce0e23$666c7070$33455150$@clement@polymtl.ca> Message-ID: <5123988F.308@gatech.edu> We are feeding the nano/mirco cleanroom humidifiers with the same ultra-high purity grade DI purity as we do the processes. We are looking for ways to reduce our costs for DI water generation, filtration, and polishing. A majority of our ultra-pure DI water is used for humidification. Therefore, we are considering moving from ultra-pure DI to RO DI. Does anyone in the network have any airborne contamination empirical experience any airborne contamination issues with using lower grade and higher grade DI for steam in humidifiers? If so, what grade water was used? Thanks -- Dean A. Sutter Associate Director, Research Operations and Business Development Inst. of Electronics and Nanotechnologies Georgia Institute of Technology dean.sutter at ien.gatech.edu 404 894 3847 - Office 404 558 1844 - Cell www.ien.gatech.edu From betemc at rit.edu Thu Feb 21 13:26:01 2013 From: betemc at rit.edu (Bruce Tolleson) Date: Thu, 21 Feb 2013 13:26:01 -0500 Subject: [labnetwork] Gas delivery cylinders and lines Message-ID: Dear Labnetwork, What replacement cycles or life time expectancies do you have in place for bottled gasses and delivery lines, specifically for corrosive gasses like Cl2 and BCl3? Bruce E. Tolleson Rochester Institute of Technology 82 Lomb Memorial Drive, Bldg 17-2627 Rochester, NY 14623-5604 (585) 478-3836 [cid:image001.jpg at 01CE1036.FDD95440] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 2550 bytes Desc: image001.jpg URL: From tbritton at criticalsystemsinc.com Fri Feb 22 18:28:50 2013 From: tbritton at criticalsystemsinc.com (Tom Britton) Date: Fri, 22 Feb 2013 23:28:50 +0000 Subject: [labnetwork] Gas delivery cylinders and lines In-Reply-To: References: Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2EF1FEA7@P3PWEX2MB006.ex2.secureserver.net> Hello Bruce, The life of a corrosive gas system is a function of how clean you keep the gas. Moisture is the enemy of most corrosive gases, and it doesn't take much to wipe out your system. We've been reconditioning gas cabinets for 12 years now and have been around these systems for close to 30 years and we've seen systems that last a couple of weeks and others that are still running strong after 10 years. The difference between the two is how the systems are cared for. Here are a few things you can do to maximize the life of your gas systems: 1. Make sure to adequately cycle purge your gas cabinet when changing bottles. Always use the automated cycle purge function on your gas cabinet and set it to a minimum of 75 cycle purges. What this does is effectively remove the corrosive gas before you open the connection and allow atmosphere to enter the tubing, and then removes the atmosphere effectively after you install the bottle, before you reintroduce the corrosive gas. Your higher quality gas cabinets will pull a vacuum on the pigtail to the primary shutoff valve, before you open the gas cylinder, so you don't mix spec gas with N2. 2. Make sure that you have the "trickle purge" option for the process purge enabled, and that you quickly change cylinders. The trickle purge allows a small amount of nitrogen to fill the tube during the cylinder change so atmosphere can't migrate up the pigtail, while the quick cylinder change minimizes the time that the tubing is open to atmosphere. 3. Always use DISS fittings for both the spec gas AND purge gas. No CGA fittings! With DISS fittings you get a high purity connection as opposed to the friction seal of a CGA, and with the DISS it is also assured you get a higher purity purge gas which lowers the moisture content of the nitrogen. 4. Make sure you get UHP grade spec gas and nitrogen, as the purity is higher therefore the moisture is lower. 5. Keep your cylinders, as well as your gas cabinets, in a climate controlled room. You're in New York, so if you leave your cylinders in a cold room and hook them up to a warm system, you'll have an issue with moisture. 6. Make sure you have a dedicated purge cylinder per gas cabinet. Don't connect all the cabinets to a house purge or 1 purge bottle. The reason is the potential of contaminating your N2 if you lose a check valve and back stream spec gas into your N2 supply. Note: If you have a contaminated gas line, you will most likely first see it in the regulator. The pressure will begin to "creep" and the regulator won't shut off. This is because moisture falls out at the pressure drops, and corrosion starts to build on the poppet at the seat interference area, on the diaphragm and downstream of the seat. Replacing the regulator won't help as your line is contaminated. At this point you would have to rebuild your gas panel, and quite possibly your gas line to the tool. These are a couple of ways that you keep you system clean and moisture free which allows your gas systems to stay trouble free. If you need any direct help, please let me know. I'd be happy to help wherever I can. Best to you sir, and good luck. I hope this helps. Tom Britton Sales Manager Critical Systems, Inc. 7000 W. Victory Road Boise, ID 83709 Direct: 208-890-1417 Shop: 877-572-5515 www.criticalsystemsinc.com "World Leader in UHP Reconditioned Gas Delivery & Abatement Technologies" From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bruce Tolleson Sent: Thursday, February 21, 2013 11:26 AM To: LABNET MIT Subject: [labnetwork] Gas delivery cylinders and lines Dear Labnetwork, What replacement cycles or life time expectancies do you have in place for bottled gasses and delivery lines, specifically for corrosive gasses like Cl2 and BCl3? Bruce E. Tolleson Rochester Institute of Technology 82 Lomb Memorial Drive, Bldg 17-2627 Rochester, NY 14623-5604 (585) 478-3836 [http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 2550 bytes Desc: image001.jpg URL: From rmorrison at draper.com Mon Feb 25 13:33:12 2013 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Mon, 25 Feb 2013 18:33:12 +0000 Subject: [labnetwork] question on Particle Monitoring Message-ID: Hi All, The new Cleanroom at Draper has been operational since November. We are trying to satisfy the ISO standard for particle monitoring. In my mind it is more important to choose monitoring points by areas where wafers are exposed to the cleanroom atmosphere. So load stations, microscopes ect. If you follow the ISO requirements it breaks the space into square meter sections and you measure in that section, regardless of what goes on in that area. I was wondering what members of this group did for particle monitoring locations. The other factor is, how many samples you take to be 95% confident in the room specification. The total air volume at one location must be enough that you have 95% confidence of capturing an out of specification reading, this equates to 2.8 liters. It seems to me that a Class 10 room needs many more samples at a location than a class 1000 room, any thoughts? Thanks Rick Draper Laboratory Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 -------------- next part -------------- An HTML attachment was scrubbed... URL: From hughes at illinois.edu Mon Feb 25 14:41:05 2013 From: hughes at illinois.edu (Hughes, John S) Date: Mon, 25 Feb 2013 19:41:05 +0000 Subject: [labnetwork] Logging and Access Control of Legacy Equipment Message-ID: Hi Everyone, We have a lot of process tools that are old enough not to have any computer control, or the computer control available does not provide login records and/or access control. We've been looking at what it would take to provide this functionality in an all-inclusive way for about twenty years, but for various reasons it has not yet been done. I'm aware of a number of ways to accomplish what we want, but with all the new technology now available, I thought I'd first ask the Labnetwork community for some recommendations. Needless to say, we don't have unlimited funding or manpower to implement the project. Our minimum requirements are: ? Each tool user would be required to provide a unique login and password in order to operate the process tool. (The tool would be inoperable unless an approved user logged in.) ? Information about the user's identity, and the log-in and log-out times would be permanently recorded, and the information would be easily exported into a spreadsheet or database. ? Additional entry fields (or perhaps check-box selections) providing information pertinent to the process being performed on the tool could also be required (and stored). We have long used a fairly elaborate door access control system (Pro-Watch 3.80, w/ RFID card readers) that has been well integrated into our in-house accounting program. We would eventually like to the have the Pro-Watch and accounting programs make use of the tool usage data, and perhaps vice-versa. (Pro-Watch has some hardware control capabilities.) Any suggestions would be much appreciated. Thanks, John ------------------------------------------------------------- John S. Hughes Office: (217) 333-4674 Associate Director FAX: (217) 244-6375 Laboratory Operations hughes at illinois.edu Micro and Nanotechnology Laboratory University of Illinois at Urbana-Champaign 2000E Micro and Nanotechnology Laboratory 208 North Wright Street Urbana, Illinois 61801 http://mntl.illinois.edu ------------------------------------------------------------- -------------- next part -------------- An HTML attachment was scrubbed... URL: From ryant at nanofab.utah.edu Mon Feb 25 19:10:30 2013 From: ryant at nanofab.utah.edu (Ryan Taylor) Date: Mon, 25 Feb 2013 17:10:30 -0700 Subject: [labnetwork] Logging and Access Control of Legacy Equipment In-Reply-To: References: Message-ID: <512BFD76.3080709@nanofab.utah.edu> Hi John, We are using OpenCoral to meet those requirements at our lab. The enforcement mechanism is accomplished one of two ways. We are using network-capable interlock boxes to that are physically wired into some tools. For others, we are using a home-grown "software interlock" that runs on windows and locks the screen and keyboard until someone authenticates successfully. We've been able to use that system to lock windows 98, XP and windows 7. There's a bit more information about the hardware interlocks on our web page (http://coral.nanofab.utah.edu/lab/docs/get_doc/interlocks). Though, we built our own interlock box solution, I believe the latest version of OpenCoral has built-in support for a similar system. I would be happy to share the software for the software interlocks too, if you are interested. I could also share some of the techniques we've used for dealing with our logs for billing (we also charge for time in our lab, but we are moving toward a billing system based solely on tool usage). Thanks, Ryan Taylor -- --------- Ryan Taylor Software Systems Development Engineer University of Utah Nanofab www.nanofab.utah.edu Phone: (801) 587-0671 Email: ryant at nanofab.utah.edu On 2/25/13 12:41 PM, Hughes, John S wrote: > > Hi Everyone, > > We have a lot of process tools that are old enough not to have any > computer control, or the computer control available does not provide > login records and/or access control. We've been looking at what it > would take to provide this functionality in an all-inclusive way for > about twenty years, but for various reasons it has not yet been done. > > I'm aware of a number of ways to accomplish what we want, but with all > the new technology now available, I thought I'd first ask the > Labnetwork community for some recommendations. Needless to say, we > don't have unlimited funding or manpower to implement the project. > > Our minimum requirements are: > > . Each tool user would be required to provide a unique login and > password in order to operate the process tool. (The tool would be > inoperable unless an approved user logged in.) > > . Information about the user's identity, and the log-in and log-out > times would be permanently recorded, and the information would be > easily exported into a spreadsheet or database. > > . Additional entry fields (or perhaps check-box selections) providing > information pertinent to the process being performed on the tool could > also be required (and stored). > > We have long used a fairly elaborate door access control system > (Pro-Watch 3.80, w/ RFID card readers) that has been well integrated > into our in-house accounting program. We would eventually like to the > have the Pro-Watch and accounting programs make use of the tool usage > data, and perhaps vice-versa. (Pro-Watch has some hardware control > capabilities.) > > Any suggestions would be much appreciated. > > Thanks, > John > > ------------------------------------------------------------- > John S. Hughes Office: (217) 333-4674 > Associate Director FAX: (217) 244-6375 > Laboratory Operations hughes at illinois.edu > Micro and Nanotechnology Laboratory > University of Illinois at Urbana-Champaign > 2000E Micro and Nanotechnology Laboratory > 208 North Wright Street > Urbana, Illinois 61801 http://mntl.illinois.edu > ------------------------------------------------------------- > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Tue Feb 26 08:27:06 2013 From: schweig at umich.edu (Dennis Schweiger) Date: Tue, 26 Feb 2013 08:27:06 -0500 Subject: [labnetwork] Gas delivery cylinders and lines In-Reply-To: <9820889A26AAC34EBEB01D62DFCEEB2EF1FEA7@P3PWEX2MB006.ex2.secureserver.net> References: <9820889A26AAC34EBEB01D62DFCEEB2EF1FEA7@P3PWEX2MB006.ex2.secureserver.net> Message-ID: Bruce, everything Tom has stated is right on the money in regarding longevity of a corrosive gas delivery system. Here at the University of Michigan our Chlorine, Boron Trichloride, and Ammonia, systems have been in use since about 2002, and look just as good as the day we installed them. We use all automated cabinets, DISS cylinder connections (CGA is crazy for any HPM material like this), and shoot for a bottle change cadence of about every 12-18 months (short filling the cylinders so that the product life isn't compromised). You're welcome to stop by and have a look if you're ever up this way. Dennis Schweiger Lurie Nanofabrication Facility University of Michigan 734.647.2055 Ofc On Fri, Feb 22, 2013 at 6:28 PM, Tom Britton < tbritton at criticalsystemsinc.com> wrote: > Hello Bruce,**** > > ** ** > > The life of a corrosive gas system is a function of how clean you keep the > gas. Moisture is the enemy of most corrosive gases, and it doesn't take > much to wipe out your system. We've been reconditioning gas cabinets for 12 > years now and have been around these systems for close to 30 years and > we've seen systems that last a couple of weeks and others that are still > running strong after 10 years. The difference between the two is how the > systems are cared for.**** > > ** ** > > Here are a few things you can do to maximize the life of your gas systems: > **** > > ** ** > > 1. Make sure to adequately cycle purge your gas cabinet when changing > bottles. Always use the automated cycle purge function on your gas cabinet > and set it to a minimum of 75 cycle purges. What this does is effectively > remove the corrosive gas before you open the connection and allow > atmosphere to enter the tubing, and then removes the atmosphere effectively > after you install the bottle, before you reintroduce the corrosive gas. > Your higher quality gas cabinets will pull a vacuum on the pigtail to the > primary shutoff valve, before you open the gas cylinder, so you don't mix > spec gas with N2.**** > > ** ** > > 2. Make sure that you have the "trickle purge" option for the process > purge enabled, and that you quickly change cylinders. The trickle purge > allows a small amount of nitrogen to fill the tube during the cylinder > change so atmosphere can't migrate up the pigtail, while the quick cylinder > change minimizes the time that the tubing is open to atmosphere.**** > > ** ** > > 3. Always use DISS fittings for both the spec gas AND purge gas. No CGA > fittings! With DISS fittings you get a high purity connection as opposed to > the friction seal of a CGA, and with the DISS it is also assured you get a > higher purity purge gas which lowers the moisture content of the nitrogen. > **** > > ** ** > > 4. Make sure you get UHP grade spec gas and nitrogen, as the purity is > higher therefore the moisture is lower.**** > > ** ** > > 5. Keep your cylinders, as well as your gas cabinets, in a climate > controlled room. You're in New York, so if you leave your cylinders in a > cold room and hook them up to a warm system, you'll have an issue with > moisture.**** > > ** ** > > 6. Make sure you have a dedicated purge cylinder per gas cabinet. Don't > connect all the cabinets to a house purge or 1 purge bottle. The reason is > the potential of contaminating your N2 if you lose a check valve and back > stream spec gas into your N2 supply. **** > > ** ** > > Note: If you have a contaminated gas line, you will most likely first see > it in the regulator. The pressure will begin to "creep" and the regulator > won't shut off. This is because moisture falls out at the pressure drops, > and corrosion starts to build on the poppet at the seat interference area, > on the diaphragm and downstream of the seat. Replacing the regulator won't > help as your line is contaminated. At this point you would have to rebuild > your gas panel, and quite possibly your gas line to the tool.**** > > ** ** > > These are a couple of ways that you keep you system clean and moisture > free which allows your gas systems to stay trouble free. If you need any > direct help, please let me know. I'd be happy to help wherever I can.**** > > ** ** > > Best to you sir, and good luck. I hope this helps.**** > > ** ** > > Tom Britton**** > > Sales Manager**** > > Critical Systems, Inc.**** > > 7000 W. Victory Road**** > > Boise, ID 83709**** > > Direct: 208-890-1417**** > > Shop: 877-572-5515**** > > www.criticalsystemsinc.com**** > > ** ** > > *"World Leader in UHP Reconditioned Gas* > > * Delivery & Abatement Technologies"* > > ** ** > > ** ** > > ** ** > > *From:* labnetwork-bounces at mtl.mit.edu [mailto: > labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Bruce Tolleson > *Sent:* Thursday, February 21, 2013 11:26 AM > *To:* LABNET MIT > *Subject:* [labnetwork] Gas delivery cylinders and lines**** > > ** ** > > Dear Labnetwork,**** > > What replacement cycles or life time expectancies do you have in place > for bottled gasses and delivery lines, specifically for corrosive gasses > like Cl2 and BCl3?**** > > ** ** > > Bruce E. Tolleson**** > > Rochester Institute of Technology**** > > 82 Lomb Memorial Drive, Bldg 17-2627**** > > Rochester, NY 14623-5604**** > > (585) 478-3836**** > > [image: http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]**** > > ** ** > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 2550 bytes Desc: not available URL: From hughes at illinois.edu Tue Feb 26 11:11:22 2013 From: hughes at illinois.edu (Hughes, John S) Date: Tue, 26 Feb 2013 16:11:22 +0000 Subject: [labnetwork] Logging and Access Control of Legacy Equipment In-Reply-To: <512BFD76.3080709@nanofab.utah.edu> References: <512BFD76.3080709@nanofab.utah.edu> Message-ID: Hi Ryan, Thanks for your input. OpenCoral appears to accomplish for you the things we'd also like to do. I've been aware of Coral as a possible solution for a long time, but as I mentioned, we've developed over many years a very elaborate (door) access/accounting/billing program using ProWatch. We will look more closely at switching to OpenCoral or Badger, but I'm hoping I can add the elements for tool access and data logging to our existing system rather than starting completely over. (Our business office might rebel.) I really like the way your interlock boxes work (and look). More details about how those were configured would be appreciated, and the software interlocks as well. Unfortunately for us, assistance from our (now college-wide) IT group to work on a project like this may be difficult to come by, due to a recent reorganization and staff/budget cuts. I expect we'll need to set this up as a lab-funded project, contracting the programming work, perhaps coordinating with the CS department to find some student help. (Always a bit risky.) Any guesses on how much time you've invested so far on the programming side of things? Like you, we are also wanting to move away from time-in-the-cleanroom charges to tool-use charges, and the success of this project is critical for that transition to take place. Thanks again, John ------------------------------------------------------------- John S. Hughes Office: (217) 333-4674 Associate Director FAX: (217) 244-6375 Laboratory Operations hughes at illinois.edu Micro and Nanotechnology Laboratory University of Illinois at Urbana-Champaign 2000E Micro and Nanotechnology Laboratory 208 North Wright Street Urbana, Illinois 61801 http://mntl.illinois.edu ------------------------------------------------------------- On Feb 25, 2013, at 6:10 PM, Ryan Taylor > wrote: Hi John, We are using OpenCoral to meet those requirements at our lab. The enforcement mechanism is accomplished one of two ways. We are using network-capable interlock boxes to that are physically wired into some tools. For others, we are using a home-grown "software interlock" that runs on windows and locks the screen and keyboard until someone authenticates successfully. We've been able to use that system to lock windows 98, XP and windows 7. There's a bit more information about the hardware interlocks on our web page (http://coral.nanofab.utah.edu/lab/docs/get_doc/interlocks). Though, we built our own interlock box solution, I believe the latest version of OpenCoral has built-in support for a similar system. I would be happy to share the software for the software interlocks too, if you are interested. I could also share some of the techniques we've used for dealing with our logs for billing (we also charge for time in our lab, but we are moving toward a billing system based solely on tool usage). Thanks, Ryan Taylor -- --------- Ryan Taylor Software Systems Development Engineer University of Utah Nanofab www.nanofab.utah.edu Phone: (801) 587-0671 Email: ryant at nanofab.utah.edu On 2/25/13 12:41 PM, Hughes, John S wrote: Hi Everyone, We have a lot of process tools that are old enough not to have any computer control, or the computer control available does not provide login records and/or access control. We've been looking at what it would take to provide this functionality in an all-inclusive way for about twenty years, but for various reasons it has not yet been done. I'm aware of a number of ways to accomplish what we want, but with all the new technology now available, I thought I'd first ask the Labnetwork community for some recommendations. Needless to say, we don't have unlimited funding or manpower to implement the project. Our minimum requirements are: ? Each tool user would be required to provide a unique login and password in order to operate the process tool. (The tool would be inoperable unless an approved user logged in.) ? Information about the user's identity, and the log-in and log-out times would be permanently recorded, and the information would be easily exported into a spreadsheet or database. ? Additional entry fields (or perhaps check-box selections) providing information pertinent to the process being performed on the tool could also be required (and stored). We have long used a fairly elaborate door access control system (Pro-Watch 3.80, w/ RFID card readers) that has been well integrated into our in-house accounting program. We would eventually like to the have the Pro-Watch and accounting programs make use of the tool usage data, and perhaps vice-versa. (Pro-Watch has some hardware control capabilities.) Any suggestions would be much appreciated. Thanks, John ------------------------------------------------------------- John S. Hughes Office: (217) 333-4674 Associate Director FAX: (217) 244-6375 Laboratory Operations hughes at illinois.edu Micro and Nanotechnology Laboratory University of Illinois at Urbana-Champaign 2000E Micro and Nanotechnology Laboratory 208 North Wright Street Urbana, Illinois 61801 http://mntl.illinois.edu ------------------------------------------------------------- _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From ryant at nanofab.utah.edu Tue Feb 26 13:56:39 2013 From: ryant at nanofab.utah.edu (Ryan Taylor) Date: Tue, 26 Feb 2013 11:56:39 -0700 Subject: [labnetwork] Logging and Access Control of Legacy Equipment In-Reply-To: References: <512BFD76.3080709@nanofab.utah.edu> Message-ID: <512D0567.9090904@nanofab.utah.edu> Hi John, I've been using trac to document the projects that we've undertaken for extending OpenCoral. Luckily, most of the hard work has already been done in the Coral software and we've mostly added adapters or small web service layers to extend the functionality. You can check out the documentation that I've put together at: http://nanoproject.eng.utah.edu/ClearLockInterlock/wiki for the software interlocking and http://nanoproject.eng.utah.edu/HardwareServerProxy for the hardware interlocking Being so close to the software, I'm not sure if the documentation I've created always has enough detail to be clear to an outside party so let me know if you find it lacking in any way and I will fill it in. I think that coral wouldn't necessarily need to replace your current system if you just wanted to use it for equipment interlocking, but there would be some work involved in sync'ing users, roles, equipment, etc. In my experience, the biggest pain point for using OpenCoral is the initial installation and configuration. Once you get it configured and running, it is relatively low maintenance. From what I understand, the Badger project has put a lot of work into making that part of the process as simple as possible. Please let me know if there's anything else I can help with. Thanks, Ryan On 2/26/13 9:11 AM, Hughes, John S wrote: > > Hi Ryan, > > Thanks for your input. > > OpenCoral appears to accomplish for you the things we'd also like to > do. I've been aware of Coral as a possible solution for a long time, > but as I mentioned, we've developed over many years a very elaborate > (door) access/accounting/billing program using ProWatch. We will look > more closely at switching to OpenCoral or Badger, but I'm hoping I can > add the elements for tool access and data logging to our existing > system rather than starting completely over. (Our business office > might rebel.) > > I really like the way your interlock boxes work (and look). More > details about how those were configured would be appreciated, and the > software interlocks as well. Unfortunately for us, assistance from our > (now college-wide) IT group to work on a project like this may be > difficult to come by, due to a recent reorganization and staff/budget > cuts. I expect we'll need to set this up as a lab-funded project, > contracting the programming work, perhaps coordinating with the CS > department to find some student help. (Always a bit risky.) Any > guesses on how much time you've invested so far on the programming > side of things? > > Like you, we are also wanting to move away from time-in-the-cleanroom > charges to tool-use charges, and the success of this project is > critical for that transition to take place. > > Thanks again, > John > > ------------------------------------------------------------- > John S. Hughes Office: (217) 333-4674 > Associate Director FAX: (217) 244-6375 > Laboratory Operations hughes at illinois.edu > Micro and Nanotechnology Laboratory > University of Illinois at Urbana-Champaign > 2000E Micro and Nanotechnology Laboratory > 208 North Wright Street > Urbana, Illinois 61801 http://mntl.illinois.edu > ------------------------------------------------------------- > > On Feb 25, 2013, at 6:10 PM, Ryan Taylor > > wrote: > >> Hi John, >> >> We are using OpenCoral to meet those requirements at our lab. The >> enforcement mechanism is accomplished one of two ways. We are using >> network-capable interlock boxes to that are physically wired into >> some tools. For others, we are using a home-grown "software >> interlock" that runs on windows and locks the screen and keyboard >> until someone authenticates successfully. We've been able to use >> that system to lock windows 98, XP and windows 7. There's a bit more >> information about the hardware interlocks on our web page >> (http://coral.nanofab.utah.edu/lab/docs/get_doc/interlocks). Though, >> we built our own interlock box solution, I believe the latest version >> of OpenCoral has built-in support for a similar system. >> >> I would be happy to share the software for the software interlocks >> too, if you are interested. I could also share some of the >> techniques we've used for dealing with our logs for billing (we also >> charge for time in our lab, but we are moving toward a billing system >> based solely on tool usage). >> >> Thanks, >> Ryan Taylor >> >> >> >> -- >> --------- >> Ryan Taylor >> Software Systems Development Engineer >> University of Utah Nanofab >> www.nanofab.utah.edu >> Phone: (801) 587-0671 >> Email:ryant at nanofab.utah.edu >> >> >> On 2/25/13 12:41 PM, Hughes, John S wrote: >>> >>> Hi Everyone, >>> >>> We have a lot of process tools that are old enough not to have any >>> computer control, or the computer control available does not provide >>> login records and/or access control. We've been looking at what it >>> would take to provide this functionality in an all-inclusive way for >>> about twenty years, but for various reasons it has not yet been done. >>> >>> I'm aware of a number of ways to accomplish what we want, but with >>> all the new technology now available, I thought I'd first ask the >>> Labnetwork community for some recommendations. Needless to say, we >>> don't have unlimited funding or manpower to implement the project. >>> >>> Our minimum requirements are: >>> >>> . Each tool user would be required to provide a unique login and >>> password in order to operate the process tool. (The tool would be >>> inoperable unless an approved user logged in.) >>> >>> . Information about the user's identity, and the log-in and log-out >>> times would be permanently recorded, and the information would be >>> easily exported into a spreadsheet or database. >>> >>> . Additional entry fields (or perhaps check-box selections) >>> providing information pertinent to the process being performed on >>> the tool could also be required (and stored). >>> >>> We have long used a fairly elaborate door access control system >>> (Pro-Watch 3.80, w/ RFID card readers) that has been well integrated >>> into our in-house accounting program. We would eventually like to >>> the have the Pro-Watch and accounting programs make use of the tool >>> usage data, and perhaps vice-versa. (Pro-Watch has some hardware >>> control capabilities.) >>> >>> Any suggestions would be much appreciated. >>> >>> Thanks, >>> John >>> >>> ------------------------------------------------------------- >>> John S. Hughes Office: (217) 333-4674 >>> Associate Director FAX: (217) 244-6375 >>> Laboratory Operations hughes at illinois.edu >>> Micro and Nanotechnology Laboratory >>> University of Illinois at Urbana-Champaign >>> 2000E Micro and Nanotechnology Laboratory >>> 208 North Wright Street >>> Urbana, Illinois 61801 http://mntl.illinois.edu >>> >>> ------------------------------------------------------------- >>> >>> >>> >>> _______________________________________________ >>> labnetwork mailing list >>> labnetwork at mtl.mit.edu >>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- --------- Ryan Taylor Software Systems Development Engineer University of Utah Nanofab www.nanofab.utah.edu Phone: (801) 587-0671 Email: ryant at nanofab.utah.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From diadiuk at MIT.EDU Wed Feb 27 09:23:42 2013 From: diadiuk at MIT.EDU (Vicky Diadiuk) Date: Wed, 27 Feb 2013 09:23:42 -0500 Subject: [labnetwork] Logging and Access Control of Legacy Equipment In-Reply-To: References: <512BFD76.3080709@nanofab.utah.edu> Message-ID: Hi, indeed, CORAL wld do what you need, including the too by tool access. We use a separate lab-access database & card system, which CORAL doesn't kmow or care about. W added a back end for billing, etc, so if you have a system that does that already, you can probably use the raw tool data from CORAL as its input. More info is in http://www.opencoral.org/ Gd luck, Vicky On Feb 26, 2013, at 11:11 AM, Hughes, John S wrote: > > Hi Ryan, > > Thanks for your input. > > OpenCoral appears to accomplish for you the things we'd also like to do. I've been aware of Coral as a possible solution for a long time, but as I mentioned, we've developed over many years a very elaborate (door) access/accounting/billing program using ProWatch. We will look more closely at switching to OpenCoral or Badger, but I'm hoping I can add the elements for tool access and data logging to our existing system rather than starting completely over. (Our business office might rebel.) > > I really like the way your interlock boxes work (and look). More details about how those were configured would be appreciated, and the software interlocks as well. Unfortunately for us, assistance from our (now college-wide) IT group to work on a project like this may be difficult to come by, due to a recent reorganization and staff/budget cuts. I expect we'll need to set this up as a lab-funded project, contracting the programming work, perhaps coordinating with the CS department to find some student help. (Always a bit risky.) Any guesses on how much time you've invested so far on the programming side of things? > > Like you, we are also wanting to move away from time-in-the-cleanroom charges to tool-use charges, and the success of this project is critical for that transition to take place. > > Thanks again, > John > > ------------------------------------------------------------- > John S. Hughes Office: (217) 333-4674 > Associate Director FAX: (217) 244-6375 > Laboratory Operations hughes at illinois.edu > Micro and Nanotechnology Laboratory > University of Illinois at Urbana-Champaign > 2000E Micro and Nanotechnology Laboratory > 208 North Wright Street > Urbana, Illinois 61801 http://mntl.illinois.edu > ------------------------------------------------------------- > > On Feb 25, 2013, at 6:10 PM, Ryan Taylor > wrote: > >> Hi John, >> >> We are using OpenCoral to meet those requirements at our lab. The enforcement mechanism is accomplished one of two ways. We are using network-capable interlock boxes to that are physically wired into some tools. For others, we are using a home-grown "software interlock" that runs on windows and locks the screen and keyboard until someone authenticates successfully. We've been able to use that system to lock windows 98, XP and windows 7. There's a bit more information about the hardware interlocks on our web page (http://coral.nanofab.utah.edu/lab/docs/get_doc/interlocks). Though, we built our own interlock box solution, I believe the latest version of OpenCoral has built-in support for a similar system. >> >> I would be happy to share the software for the software interlocks too, if you are interested. I could also share some of the techniques we've used for dealing with our logs for billing (we also charge for time in our lab, but we are moving toward a billing system based solely on tool usage). >> >> Thanks, >> Ryan Taylor >> >> >> >> -- >> --------- >> Ryan Taylor >> Software Systems Development Engineer >> University of Utah Nanofab >> www.nanofab.utah.edu >> Phone: (801) 587-0671 >> Email: ryant at nanofab.utah.edu >> >> >> On 2/25/13 12:41 PM, Hughes, John S wrote: >>> >>> Hi Everyone, >>> >>> We have a lot of process tools that are old enough not to have any computer control, or the computer control available does not provide login records and/or access control. We've been looking at what it would take to provide this functionality in an all-inclusive way for about twenty years, but for various reasons it has not yet been done. >>> >>> I'm aware of a number of ways to accomplish what we want, but with all the new technology now available, I thought I'd first ask the Labnetwork community for some recommendations. Needless to say, we don't have unlimited funding or manpower to implement the project. >>> >>> Our minimum requirements are: >>> >>> ? Each tool user would be required to provide a unique login and password in order to operate the process tool. (The tool would be inoperable unless an approved user logged in.) >>> >>> ? Information about the user's identity, and the log-in and log-out times would be permanently recorded, and the information would be easily exported into a spreadsheet or database. >>> >>> ? Additional entry fields (or perhaps check-box selections) providing information pertinent to the process being performed on the tool could also be required (and stored). >>> >>> We have long used a fairly elaborate door access control system (Pro-Watch 3.80, w/ RFID card readers) that has been well integrated into our in-house accounting program. We would eventually like to the have the Pro-Watch and accounting programs make use of the tool usage data, and perhaps vice-versa. (Pro-Watch has some hardware control capabilities.) >>> >>> Any suggestions would be much appreciated. >>> >>> Thanks, >>> John >>> >>> ------------------------------------------------------------- >>> John S. Hughes Office: (217) 333-4674 >>> Associate Director FAX: (217) 244-6375 >>> Laboratory Operations hughes at illinois.edu >>> Micro and Nanotechnology Laboratory >>> University of Illinois at Urbana-Champaign >>> 2000E Micro and Nanotechnology Laboratory >>> 208 North Wright Street >>> Urbana, Illinois 61801 http://mntl.illinois.edu >>> ------------------------------------------------------------- >>> >>> >>> >>> _______________________________________________ >>> labnetwork mailing list >>> labnetwork at mtl.mit.edu >>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From Thomas_Ferraguto at uml.edu Wed Feb 27 10:06:21 2013 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas) Date: Wed, 27 Feb 2013 15:06:21 +0000 Subject: [labnetwork] Clean Room Certification Message-ID: Colleagues! Anyone who wants a copy of survey results in regard to TOOL FITUP , just send me an e-mail and I'll send you the spread sheet (9 Respondents) (Organizations are not named) Another survey... How often do you have 3rd party certifications of your cleanroom (if at all)? What Items below do you "Certify" When You do Certify? Item Yes No Hepafilter leak test Air Flow Velocity/ Uniformity Test Air Flow Visualization (Parallelism) Test Temperature & Humidity Sound Level Test Light Level Test Floor Conductivity Test Electromagnetic Interference Test Electrostatic Discharge Test Airborne Particle Test Once again! I'll share the summarized information on request. Thank you all for your help ! The information is extremely valuable. Best Thomas S. Ferraguto ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell 1 University Avenue Lowell MA 01854-5120 978-934-1809 land 617-755-0910 mobile 978-934-1014 fax -------------- next part -------------- An HTML attachment was scrubbed... URL: From hughes at illinois.edu Wed Feb 27 10:27:15 2013 From: hughes at illinois.edu (Hughes, John S) Date: Wed, 27 Feb 2013 15:27:15 +0000 Subject: [labnetwork] Logging and Access Control of Legacy Equipment In-Reply-To: References: <512BFD76.3080709@nanofab.utah.edu> Message-ID: Thanks Vicky, We'll definitely check out OpenCoral more thoroughly. We already have a very nice tool reservation system in place, as well as the lab access and billing programs already mentioned. If we can select just the tool access parts of OpenCoral and integrate it with what we already have, it should be very helpful. -- John On Feb 27, 2013, at 8:23 AM, Vicky Diadiuk > wrote: Hi, indeed, CORAL wld do what you need, including the too by tool access. We use a separate lab-access database & card system, which CORAL doesn't kmow or care about. W added a back end for billing, etc, so if you have a system that does that already, you can probably use the raw tool data from CORAL as its input. More info is in http://www.opencoral.org/ Gd luck, Vicky On Feb 26, 2013, at 11:11 AM, Hughes, John S wrote: Hi Ryan, Thanks for your input. OpenCoral appears to accomplish for you the things we'd also like to do. I've been aware of Coral as a possible solution for a long time, but as I mentioned, we've developed over many years a very elaborate (door) access/accounting/billing program using ProWatch. We will look more closely at switching to OpenCoral or Badger, but I'm hoping I can add the elements for tool access and data logging to our existing system rather than starting completely over. (Our business office might rebel.) I really like the way your interlock boxes work (and look). More details about how those were configured would be appreciated, and the software interlocks as well. Unfortunately for us, assistance from our (now college-wide) IT group to work on a project like this may be difficult to come by, due to a recent reorganization and staff/budget cuts. I expect we'll need to set this up as a lab-funded project, contracting the programming work, perhaps coordinating with the CS department to find some student help. (Always a bit risky.) Any guesses on how much time you've invested so far on the programming side of things? Like you, we are also wanting to move away from time-in-the-cleanroom charges to tool-use charges, and the success of this project is critical for that transition to take place. Thanks again, John ------------------------------------------------------------- John S. Hughes Office: (217) 333-4674 Associate Director FAX: (217) 244-6375 Laboratory Operations hughes at illinois.edu Micro and Nanotechnology Laboratory University of Illinois at Urbana-Champaign 2000E Micro and Nanotechnology Laboratory 208 North Wright Street Urbana, Illinois 61801 http://mntl.illinois.edu ------------------------------------------------------------- On Feb 25, 2013, at 6:10 PM, Ryan Taylor > wrote: Hi John, We are using OpenCoral to meet those requirements at our lab. The enforcement mechanism is accomplished one of two ways. We are using network-capable interlock boxes to that are physically wired into some tools. For others, we are using a home-grown "software interlock" that runs on windows and locks the screen and keyboard until someone authenticates successfully. We've been able to use that system to lock windows 98, XP and windows 7. There's a bit more information about the hardware interlocks on our web page (http://coral.nanofab.utah.edu/lab/docs/get_doc/interlocks). Though, we built our own interlock box solution, I believe the latest version of OpenCoral has built-in support for a similar system. I would be happy to share the software for the software interlocks too, if you are interested. I could also share some of the techniques we've used for dealing with our logs for billing (we also charge for time in our lab, but we are moving toward a billing system based solely on tool usage). Thanks, Ryan Taylor -- --------- Ryan Taylor Software Systems Development Engineer University of Utah Nanofab www.nanofab.utah.edu Phone: (801) 587-0671 Email: ryant at nanofab.utah.edu On 2/25/13 12:41 PM, Hughes, John S wrote: Hi Everyone, We have a lot of process tools that are old enough not to have any computer control, or the computer control available does not provide login records and/or access control. We've been looking at what it would take to provide this functionality in an all-inclusive way for about twenty years, but for various reasons it has not yet been done. I'm aware of a number of ways to accomplish what we want, but with all the new technology now available, I thought I'd first ask the Labnetwork community for some recommendations. Needless to say, we don't have unlimited funding or manpower to implement the project. Our minimum requirements are: ? Each tool user would be required to provide a unique login and password in order to operate the process tool. (The tool would be inoperable unless an approved user logged in.) ? Information about the user's identity, and the log-in and log-out times would be permanently recorded, and the information would be easily exported into a spreadsheet or database. ? Additional entry fields (or perhaps check-box selections) providing information pertinent to the process being performed on the tool could also be required (and stored). We have long used a fairly elaborate door access control system (Pro-Watch 3.80, w/ RFID card readers) that has been well integrated into our in-house accounting program. We would eventually like to the have the Pro-Watch and accounting programs make use of the tool usage data, and perhaps vice-versa. (Pro-Watch has some hardware control capabilities.) Any suggestions would be much appreciated. Thanks, John ------------------------------------------------------------- John S. Hughes Office: (217) 333-4674 Associate Director FAX: (217) 244-6375 Laboratory Operations hughes at illinois.edu Micro and Nanotechnology Laboratory University of Illinois at Urbana-Champaign 2000E Micro and Nanotechnology Laboratory 208 North Wright Street Urbana, Illinois 61801 http://mntl.illinois.edu ------------------------------------------------------------- _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: