[labnetwork] As, P and Boron implantations on service request basis

Leif Johansen lej at danchip.dtu.dk
Wed Jan 30 03:21:24 EST 2013


Hello Raghavan,

We have some people who use Ion Beam Services in France. http://www.ion-beam-services.com/
The people I have talked to are rather satisfied with the service there. As far as I understand, they can handle a variety of substrate sizes, including odd wafer pieces.

Best regards,

Leif

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of raghavan
Sent: 29. januar 2013 04:20
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] As, P and Boron implantations on service request basis

Hi All
As you all may know, an implantation tool in semiconductor cleanroom is a very expensive item. Many cleanrooms with great MEMS facility would still have an implantation tool missing. We too , in our NNfC cleanroom (http://sindhu.ece.iisc.ernet.in/nanofab/twikii/bin/view/Main/WebHome) have no such tool. I would like know  if there are any such centres in Asia /Europe that cater to universities and do implantation on request basis.
Thank you
Regards
Raghavan

*************************************************
Dr.Vijayaraghavan
Technology Manager
National Nanofabrication Centre
Centre for Nano Science and Engineering
Indian institute of Science ( IISc)
Bangalore - 560 012
India
Ph: 09663304316
***************************************************


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