[labnetwork] KOH Tank Design

[Tom Reynolds]

We also have this Modutek bath at UCSB for our heated KOH and have been
satisfied with the results. The drains valves need cleaning periodically,
but that is not uncommon.

 

Thanks,  Tom

--------------------------------------------------------------

Tom Reynolds,  Lab Manager

UCSB Nanofabrication Facility

Electrical and Computer Engineering Dept.

Engineering Science Bldg #225, Room 1109E

Santa Barbara, CA 93106

805-893-3918 x215  office

805-451-3979  cell

805-893-3918  fax

reynolds at ece.ucsb.edu

 

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Kuhn, Jeffrey G
Sent: Tuesday, July 23, 2013 4:32 AM
To: 'Tony L Olsen'; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] KOH Tank Design

 

Tony,

 

A couple of years ago we installed a dedicated KOH bath inside a fume hood
for some of our research folks. The bath is made by Modutek and is
electrically heated. The tank itself is quartz and has a Teflon liner. There
is also a coil of tubing around the top that flows cold water in order to
condense vapors and return them to the tank. The tank uses a magnetic
stirrer (air or N2 powered) for stirring. We had some issues initially with
the tank as supplied but those issues have been resolved.

 

Please feel free to contact me privately if you’d like more details.

 

Regards,

 

Jeff Kuhn

Facility Engineer

Birck Nanotechnology Center

Purdue University

1205 W. State St.

West Lafayette, IN 47907

Ph:  (765) 496-8329

Fax: (765) 496-2018

 

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Tony L Olsen
Sent: Monday, July 22, 2013 6:03 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] KOH Tank Design

 

Dear Labnetwork

 

We are building a new wet bench and would like to include a dedicated KOH
etch bath to replace the current methodology of glassware with stir bars on
a hotplate.  We generally use a bath of 80°C.

Our wetbench vendor initially quoted a recirculated bath in a stainless
steel tank.  We are concerned about the stainless, nor do we believe the
Teflon or PVDF wetted surfaces in the proposed diaphragm pump will hold up
to the hot KOH.  Another option we are aware of is a quartz tank heated
externally by recirculated water.  I’m certain there are other options, too.

Can you share your experience with dedicated KOH baths?  What is the
configuration?  What are the materials?  How do you mix/stir the bath?  What
problems have you experienced?  What would you do next time?

 

Thank You,

tonyO

 

 

Tony Olsen

Nanofab Cleanroom Supervisor/Process Engineer

36 S Wasatch Dr, Suite 2500 SMBB

Salt Lake City,  UT  84112

801-587-0651 office

801-587-3077 fax

 <http://www.nanofab.utah.edu/> www.nanofab.utah.edu

 

 

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