From codreanu at udel.edu Tue Jun 4 09:25:15 2013 From: codreanu at udel.edu (Iulian Codreanu) Date: Tue, 04 Jun 2013 09:25:15 -0400 Subject: [labnetwork] final filter on makeup air units Message-ID: <51ADEABB.30203@udel.edu> Dear Colleagues, I am trying to convince some folks that having filters placed on the discharge side of a cleanroom makeup air unit (MAU) is not only a good idea but a must. I only have a MERV 8 and a MERV 14 on the intake side and I am pushing for HEPA filtration on the discharge side; your input carries a lot of weight and I hope you can help. My cleanroom is "two stories tall"; the makeup air discharges into the mechanical space (it houses the recirculating air units that push the air into the bay plenum boxes) that is above the the bay and chase cleanroom (no raised floor, sidewall air return). Can you please share your MAU filter configuration; it would be helpful to list all the filters in the unit and where they are located. Thank you very much. Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD Nanofab 149 Evans Hall Newark, DE 19716 302-831-2784 From mheiden at engr.ucr.edu Tue Jun 4 17:22:08 2013 From: mheiden at engr.ucr.edu (Mark Heiden) Date: Tue, 4 Jun 2013 14:22:08 -0700 Subject: [labnetwork] final filter on makeup air units In-Reply-To: <51ADEABB.30203@udel.edu> References: <51ADEABB.30203@udel.edu> Message-ID: <007e01ce6169$91aa23b0$b4fe6b10$@engr.ucr.edu> Iulian, We have a similar configuration at UC Riverside to the one that you described. Our experience was that the HEPA filters on the output of our MAU were problematic. Our system injects deionized steam into the air stream for humidity control which saturated the HEPA filters at the end of the MAU. FYI.. wet HEPA filters do not pass air. I suspect in very high humidity climates (we are in So. Cal. so that was not supposed to be an issue) even without steam injection, HEPA filters may collect too much moisture to flow. If your MAU system and the inlet air is dry and stays dry it may work. We "over" humidify coming out of the MAU so by the time that air is mixed with the less humid return air in the space it comes back through the re-circulation units at exactly 45%. Hope this helps, Mark Heiden UC Riverside Center for Nanoscale Science and Engineering NanoFab Cleanroom Manager (951) 827-2551 mheiden at engr.ucr.edu -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Tuesday, June 04, 2013 6:25 AM To: Fab Network Subject: [labnetwork] final filter on makeup air units Dear Colleagues, I am trying to convince some folks that having filters placed on the discharge side of a cleanroom makeup air unit (MAU) is not only a good idea but a must. I only have a MERV 8 and a MERV 14 on the intake side and I am pushing for HEPA filtration on the discharge side; your input carries a lot of weight and I hope you can help. My cleanroom is "two stories tall"; the makeup air discharges into the mechanical space (it houses the recirculating air units that push the air into the bay plenum boxes) that is above the the bay and chase cleanroom (no raised floor, sidewall air return). Can you please share your MAU filter configuration; it would be helpful to list all the filters in the unit and where they are located. Thank you very much. Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD Nanofab 149 Evans Hall Newark, DE 19716 302-831-2784 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From tribble at fas.harvard.edu Tue Jun 4 17:53:09 2013 From: tribble at fas.harvard.edu (Tribble, Thomas) Date: Tue, 4 Jun 2013 17:53:09 -0400 Subject: [labnetwork] final filter on makeup air units In-Reply-To: <51ADEABB.30203@udel.edu> References: <51ADEABB.30203@udel.edu> Message-ID: <3456A84829A8044899D2165963478C84D9254AE8B2@FASXCH01.fasmail.priv> Gentlepersons, My thoughts: The Harvard CNS setup is a very similar design, with recirculating fans delivering HEPA filtered air above the instrument bays and returning air through adjacent mechanical chases. The supply air and recirculating air are separate systems. The supply air intakes are located high on the building (8th floor - clean air) with air passing through MERV 8 pre-filters and MERV 15 final filters. Supply air volume varies with tools in use (gates open) and is balanced against exhaust to provide continuous 0.1 inch positive pressure relative to the area surrounding the cleanroom. These "factoids" are important because fans are notoriously "finicky" with respect to pressure drop restrictions on the suction side of the unit. Too much restriction and the fans "stall" or stop moving air. Putting high restriction HEPA filters on the discharge side of your recirculating units is the right design. Putting makeup air intakes high in the building is a "best practice." Running makeup air fans at less than full speed when volume demands of the equipment are less than 100% is good operating practice (and reduces the pressure drop across the supply air filters). The selection of efficiency for supply air pre and final filters depends on the fan curves for the fans you have installed, and the placement of the filter banks. There is a real possibility that trying to replace your MERV13's with HEPAs is not going to work. The filter banks are usually placed on the suction (temperamental) side of the fan. Chances are the engineers would have specified higher efficiency (higher pressure drop) final filters if the system design would have permitted. Work with your facility engineers. Get the fan curves for your fan (you need the air velocities for your system and pressures at those velocities), the pressure drop curves for the MERV 13, MERV15, and HEPA filters. Adding in the pressure drop from the pre-filters, heating and cooling coils, you should be able to calculate the maximum filtration that your fan can tolerate. If you can get HEPA filters into your supply air, I predict your electric consumption and filter replacement frequencies are going to increase. That may be ok if it solves a bigger problem. Thomas A. Tribble PE -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Tuesday, June 04, 2013 9:25 AM To: Fab Network Subject: [labnetwork] final filter on makeup air units Dear Colleagues, I am trying to convince some folks that having filters placed on the discharge side of a cleanroom makeup air unit (MAU) is not only a good idea but a must. I only have a MERV 8 and a MERV 14 on the intake side and I am pushing for HEPA filtration on the discharge side; your input carries a lot of weight and I hope you can help. My cleanroom is "two stories tall"; the makeup air discharges into the mechanical space (it houses the recirculating air units that push the air into the bay plenum boxes) that is above the the bay and chase cleanroom (no raised floor, sidewall air return). Can you please share your MAU filter configuration; it would be helpful to list all the filters in the unit and where they are located. Thank you very much. Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD Nanofab 149 Evans Hall Newark, DE 19716 302-831-2784 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From john.nibarger at nist.gov Tue Jun 4 19:00:27 2013 From: john.nibarger at nist.gov (Nibarger, John) Date: Tue, 4 Jun 2013 19:00:27 -0400 Subject: [labnetwork] final filter on makeup air units In-Reply-To: <51ADEABB.30203@udel.edu> Message-ID: We have a new (< 2 years old) HDR designed ISO 5 cleanroom here in NIST Boulder that has the following filter sequence in the make-up air unit (MAU): MERV 7 (30%) MERV 13 (85%) Carbon Filter MERV 7 (35%) Conditioning (preheat coil, humidifier, cooling coils, fans, reheat coil) HEPA Filter This air is pushed to a mechanical space with recirculation units for each bay. Without the final HEPA's in the MAU the cleanroom ceiling HEPA's will load up comparatively sooner. At least in our configuration it will be much easier to replace the MAU HEPA's over the ceiling HEPA's. Cheers, John John P. Nibarger, Ph.D. Manager, Boulder Micro-Fabrication Facility National Institute of Standards and Technology 325 Broadway, MS 817.03 Boulder, CO 80305 303-497-4575 (phone) 303-497-3042 (fax) john.nibarger at nist.gov On 6/4/13 7:25 AM, "Iulian Codreanu" wrote: >Dear Colleagues, > >I am trying to convince some folks that having filters placed on the >discharge side of a cleanroom makeup air unit (MAU) is not only a good >idea but a must. I only have a MERV 8 and a MERV 14 on the intake >side and I am pushing for HEPA filtration on the discharge side; your >input carries a lot of weight and I hope you can help. > >My cleanroom is "two stories tall"; the makeup air discharges into the >mechanical space (it houses the recirculating air units that push the >air into the bay plenum boxes) that is above the the bay and chase >cleanroom (no raised floor, sidewall air return). > >Can you please share your MAU filter configuration; it would be helpful >to list all the filters in the unit and where they are located. > >Thank you very much. > >Iulian > >-- >iulian Codreanu, Ph.D. >Director of Operations, UD Nanofab >149 Evans Hall >Newark, DE 19716 >302-831-2784 > > >_______________________________________________ >labnetwork mailing list >labnetwork at mtl.mit.edu >https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From schweig at umich.edu Wed Jun 5 07:36:53 2013 From: schweig at umich.edu (Dennis Schweiger) Date: Wed, 5 Jun 2013 07:36:53 -0400 Subject: [labnetwork] final filter on makeup air units In-Reply-To: <51ADEABB.30203@udel.edu> References: <51ADEABB.30203@udel.edu> Message-ID: <-7273596404751829613@unknownmsgid> Iulian, This is what we're running at UofMichigan on our air handlers. Make up air MERV-8 prefilter at inlet MERV-14 filter cartridge behind prefilter MERV-17 at discharge into clean plenum space, humidity injection is done after this filter Recirculating unit MERV-14 at inlet HEPA discharge at ceiling grid Dennis 586.531.3030 Cell On Jun 4, 2013, at 3:46 PM, Iulian Codreanu wrote: > Dear Colleagues, > > I am trying to convince some folks that having filters placed on the discharge side of a cleanroom makeup air unit (MAU) is not only a good idea but a must. I only have a MERV 8 and a MERV 14 on the intake side and I am pushing for HEPA filtration on the discharge side; your input carries a lot of weight and I hope you can help. > > My cleanroom is "two stories tall"; the makeup air discharges into the mechanical space (it houses the recirculating air units that push the air into the bay plenum boxes) that is above the the bay and chase cleanroom (no raised floor, sidewall air return). > > Can you please share your MAU filter configuration; it would be helpful to list all the filters in the unit and where they are located. > > Thank you very much. > > Iulian > > -- > iulian Codreanu, Ph.D. > Director of Operations, UD Nanofab > 149 Evans Hall > Newark, DE 19716 > 302-831-2784 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From ccheney at infinityhps.com Mon Jun 10 14:14:54 2013 From: ccheney at infinityhps.com (Craig Cheney) Date: Mon, 10 Jun 2013 13:14:54 -0500 Subject: [labnetwork] Recommendations for Equipment Maintenance software? Message-ID: <00ba01ce6606$7959d390$6c0d7ab0$@infinityhps.com> Mark, I have used software from a company called PMC, they now have an extensive list of solutions depending on your situation. Here is a link for you. http://pmcsoftware.com/ Good Luck, Craig Cheney Description: cid:image001.jpg at 01C7E19F.47FFBAE0 Desk: (608)834-4200 Fax: (608)834-4299 Cell: (608)438-8714 This e-mail transmission and any attachments to it are intended solely for the use of the individual or entity to whom it is addressed and may contain confidential and privileged information. If you are not the intended recipient, your use, forwarding, printing, storing, disseminating, distribution, or copying of this communication is prohibited. If you received this communication in error, please notify the sender immediately by replying to this message and delete it from your computer. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 5517 bytes Desc: not available URL: From julia.aebersold at louisville.edu Mon Jun 10 16:08:48 2013 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Mon, 10 Jun 2013 20:08:48 +0000 Subject: [labnetwork] 100% Silane Bottle Changing Message-ID: We are hooking up a new polysilicon tube and are working with 100% Silane. I am seeking information on protocol and standard operating procedures (SOP's) on how other groups and institutions perform this the process of changing their Silane bottle and leak checks. We have our gas cabinet information, but due to the dangerous nature of this gas more I would like to gather information from other folks that have worked with this gas extensively. A written response to my e-mail is fine, but links to sites with official protocol and SOP's would be preferred. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From elliscd at auburn.edu Mon Jun 10 20:14:32 2013 From: elliscd at auburn.edu (Charles Ellis) Date: Tue, 11 Jun 2013 00:14:32 +0000 Subject: [labnetwork] 100% Silane Bottle Changing In-Reply-To: References: Message-ID: <0085DF4B-99C6-4EF0-BC79-2E5A4117E5F1@auburn.edu> We run 4% silane - takes a little longer, but the films look good and much less dangerous. On Jun 10, 2013, at 6:53 PM, "Aebersold,Julia W." > wrote: We are hooking up a new polysilicon tube and are working with 100% Silane. I am seeking information on protocol and standard operating procedures (SOP?s) on how other groups and institutions perform this the process of changing their Silane bottle and leak checks. We have our gas cabinet information, but due to the dangerous nature of this gas more I would like to gather information from other folks that have worked with this gas extensively. A written response to my e-mail is fine, but links to sites with official protocol and SOP?s would be preferred. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From laura at inti.gob.ar Tue Jun 11 08:16:28 2013 From: laura at inti.gob.ar (Laura Malatto) Date: Tue, 11 Jun 2013 09:16:28 -0300 Subject: [labnetwork] 100% Silane Bottle Changing In-Reply-To: References: Message-ID: <51B7151C.3060704@inti.gob.ar> Dear All, Information for manipulation of 2% Silane bottle will also be appreciated!. We are a research group and is the first time we will work with silane. We are installing a PECVD, and we are deciding between 100% silane and 2% silane/N2. We will probably select low concentration as it is less dangerous. Any recomendation / link / book will be very appreciated! Many thanks, Laura _____________________________________________ Ing. Laura Malatto Jefe de Laboratorio Procesos Microelectr?nicos INTI-Micro y Nanoelectr?nica del Bicentenario (CMNB) PTM - Ed. 42 Buenos Aires - Argentina TEL:(+5411) 4724 6430 FAX:(+5411) 4754 5194 _____________________________________________ 0800 444 4004 | www.inti.gob.ar El 10/06/2013 05:08 p.m., Aebersold,Julia W. escribi?: > > We are hooking up a new polysilicon tube and are working with 100% > Silane. I am seeking information on protocol and standard operating > procedures (SOP's) on how other groups and institutions perform this > the process of changing their Silane bottle and leak checks. We have > our gas cabinet information, but due to the dangerous nature of this > gas more I would like to gather information from other folks that have > worked with this gas extensively. > > A written response to my e-mail is fine, but links to sites with > official protocol and SOP's would be preferred. > > Cheers! > > Julia Aebersold, Ph.D. > > MNTC Cleanroom Manager > > Shumaker Research Building, Room 233 > > 2210 South Brook Street > > University of Louisville > > Louisville, KY 40292 > > 502-852-1572 > > http://louisville.edu/micronano/** > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Tue Jun 11 10:17:25 2013 From: schweig at umich.edu (Dennis Schweiger) Date: Tue, 11 Jun 2013 10:17:25 -0400 Subject: [labnetwork] 100% Silane Bottle Changing In-Reply-To: References: Message-ID: Julia, we have two cylinders of 100% Silane supporting our lab(s). We try to get our bottle change-out cadence for all of our HPM's to about 12 months, which means that for some of the HPM materials we're using, we're short-filling the cylinder. All of our DISS compatible, HPM gas cylinder cabinets are fully automatic and have preprogrammed procedures for Prepurge, Cylinder Changeout, and Postpurge, cycles (all of these were set up by the cabinet vendor). In addition our HPM gas cylinders are set up with a 0.010" orifice right in the DISS connector. We also have an extensive array of gas detection in each of our gas cabinets, as well as through-out the fab areas. Typically, when we do a cylinder changeout of any "hydride" material, we'll use the buddy system, and depending on the gas, we'll be in supplied air as a precaution, with independent point-of-use gas detection sniffing at the DISS connections as we open them up. All of our HPM cylinders get an in-board Helium leak check when the new cylinder is installed. We've only had a problem one time, many, many, many years ago, with an older automatic cabinet. There was a programming issue in the valve sequence, and it vented the high pressure side of the regulator up the stack, where the Silane detonated, while a cylinder prepurge was being performed. No one was hurt, but there was a lot of wide-eyed individuals around after that happened. Dennis Schweiger Facilities Manager University of Michigan Lurie Nanofabrication Facility 1301 Beal Ave. Ann Arbor, Michigan 48109 734.647.2055 Ofc "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong? On Mon, Jun 10, 2013 at 4:08 PM, Aebersold,Julia W. < julia.aebersold at louisville.edu> wrote: > We are hooking up a new polysilicon tube and are working with 100% > Silane. I am seeking information on protocol and standard operating > procedures (SOP?s) on how other groups and institutions perform this the > process of changing their Silane bottle and leak checks. We have our gas > cabinet information, but due to the dangerous nature of this gas more I > would like to gather information from other folks that have worked with > this gas extensively.**** > > ** ** > > A written response to my e-mail is fine, but links to sites with official > protocol and SOP?s would be preferred.**** > > ** ** > > Cheers!**** > > ** ** > > Julia Aebersold, Ph.D. **** > > MNTC Cleanroom Manager**** > > Shumaker Research Building, Room 233**** > > 2210 South Brook Street**** > > University of Louisville**** > > Louisville, KY 40292**** > > ** ** > > 502-852-1572**** > > http://louisville.edu/micronano/** > > ** ** > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From vamsinittala at gmail.com Tue Jun 11 12:01:28 2013 From: vamsinittala at gmail.com (N P VAMSI KRISHNA) Date: Tue, 11 Jun 2013 21:31:28 +0530 Subject: [labnetwork] 100% Silane Bottle Changing In-Reply-To: References: Message-ID: Dear Colleagues, Here are the basic instructions our people follow during hooking up of a 100% Pure Silane Cylinder. 1. The Silane gas cabinet system should have pneumatic arrangement, which should operate through PLC. 2. Venturi is must needed at cabinet to ensure 100% purge up & purge down of Silane gas. 3. All Leak Detectors should be calibrated. 4. Exhaust fan must be fitted near the gas cabinet and cabinet is stationed far from the fab and at a highly naturally ventilated area. 5. Enclosure needed around the cabinet. 6. No extra valves provided other than DISS connector to cylinder end. 7. Water Sprinkler lines should be connected. 8. Sequence of operation of all the valves at cabinet need to be cross checked with Gas cabinet supplier. 9. Wear Fire jacket is must during installation. While servicing and operating Face shield and gloves. 10. Do the trial run minimum 2 times before opening the cylinder for usage. 11.Test all the safety instruments & all alarms are triggering correctly. 12.In case, any valve malfunctions/leaks found or does not operate, press the Emergency Stop at cabinet. 13.Flame proof lights should be used neat the cabinet. Also other materials in and around the cabinet should be flame proof. 14. MSDS must be provided. 15. Two people/workers a shift has to be recruited inorder to monitor, log & take care all the critical parameters involved. Hope it helps !!! Thanks & Best regards, vamsi On Tue, Jun 11, 2013 at 1:38 AM, Aebersold,Julia W. < julia.aebersold at louisville.edu> wrote: > We are hooking up a new polysilicon tube and are working with 100% > Silane. I am seeking information on protocol and standard operating > procedures (SOP?s) on how other groups and institutions perform this the > process of changing their Silane bottle and leak checks. We have our gas > cabinet information, but due to the dangerous nature of this gas more I > would like to gather information from other folks that have worked with > this gas extensively.**** > > ** ** > > A written response to my e-mail is fine, but links to sites with official > protocol and SOP?s would be preferred.**** > > ** ** > > Cheers!**** > > ** ** > > Julia Aebersold, Ph.D. **** > > MNTC Cleanroom Manager**** > > Shumaker Research Building, Room 233**** > > 2210 South Brook Street**** > > University of Louisville**** > > Louisville, KY 40292**** > > ** ** > > 502-852-1572**** > > http://louisville.edu/micronano/** > > ** ** > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- Thanks & Regards, *Vamsi Krishna* Sr.Facility Technologist - Process Integration National Nano Fabrication Center Center for Nano Science and Engineering (CeNSE) Indian Institute of Science(IISc) Bangalore 560012, INDIA Mobile: +91 9880988239 *A bird sitting on the branch of a tree is not afraid of the branch shaking or breaking, because it trusts not the branches but its OWN WINGS. * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tbritton at criticalsystemsinc.com Tue Jun 11 12:04:55 2013 From: tbritton at criticalsystemsinc.com (Tom Britton) Date: Tue, 11 Jun 2013 16:04:55 +0000 Subject: [labnetwork] 100% Silane Bottle Changing In-Reply-To: <51B7151C.3060704@inti.gob.ar> References: <51B7151C.3060704@inti.gob.ar> Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2EFB093E@P3PWEX2MB010.ex2.secureserver.net> Hi Laura, I've asked our Operations Manager write a "Silane Cylinder Change Out Procedure" that we can send to you. Our Operations Manager, Troy Reese, was the Facilities Manager for ON Semiconductor before he came to us recently, and will be transcribing the procedure he developed while at ON Semi. For any other questions you may have regarding gas delivery and abatement issues, I invite you, or anyone on the labnetwork to submit questions to our "Ask an Expert" section of the "Knowledge Center" on our website. This is a Free service where the questions are presented to known industry experts (Facilities Managers, A&E Engineers, UHP Contractors, etc.), so you can trust the information you receive is sound. Here is the link: http://www.criticalsystemsinc.com/knowledge-center.html I should have this procedure for you shortly. Have a great day, Tom Britton Director of Sales Critical Systems, Inc. 7000 W. Victory Road Boise, ID 83709 Direct: 208-890-1417 Shop: 877-572-5515 www.criticalsystemsinc.com "World Leader in UHP Reconditioned Gas Delivery & Abatement Technologies" From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Laura Malatto Sent: Tuesday, June 11, 2013 6:16 AM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] 100% Silane Bottle Changing Dear All, Information for manipulation of 2% Silane bottle will also be appreciated!. We are a research group and is the first time we will work with silane. We are installing a PECVD, and we are deciding between 100% silane and 2% silane/N2. We will probably select low concentration as it is less dangerous. Any recomendation / link / book will be very appreciated! Many thanks, Laura _____________________________________________ Ing. Laura Malatto Jefe de Laboratorio Procesos Microelectr?nicos INTI-Micro y Nanoelectr?nica del Bicentenario (CMNB) PTM - Ed. 42 Buenos Aires - Argentina TEL:(+5411) 4724 6430 FAX:(+5411) 4754 5194 _____________________________________________ 0800 444 4004 | www.inti.gob.ar El 10/06/2013 05:08 p.m., Aebersold,Julia W. escribi?: We are hooking up a new polysilicon tube and are working with 100% Silane. I am seeking information on protocol and standard operating procedures (SOP's) on how other groups and institutions perform this the process of changing their Silane bottle and leak checks. We have our gas cabinet information, but due to the dangerous nature of this gas more I would like to gather information from other folks that have worked with this gas extensively. A written response to my e-mail is fine, but links to sites with official protocol and SOP's would be preferred. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Tue Jun 11 13:00:14 2013 From: codreanu at udel.edu (Iulian Codreanu) Date: Tue, 11 Jun 2013 13:00:14 -0400 Subject: [labnetwork] electrical advice Message-ID: <51B7579E.7070901@udel.edu> Dear Colleagues, I hope you can provide some sanity checks on the 208 V power panel calculations I am doing. - I get the voltage, number of phases, and what I call full load amps from the equipment nameplates, utility specs, installation manuals, etc. - I calculate the required kVAs (taking into account the number of phases). - I add up the kVAs for all the tools on my list. - I assume that, on average, only 50% of the estimated kVA is actually used during the tool operation. - I add 25% of extra capacity. The above approach yields 660 kVA. I hope you can weight on: - Is the "50% current draw" assumption a reasonable one? - How does 660 kVA compare to your installed capacity? - Should I allow for a diversity factor (not all the tools will be used at the same time) or do you think that the 50% already covers it (the cleanroom tools will be on all the time whether or nor they are used)? If you think that a diversity factor is OK what percentage would you recommend? Thank you very much for your valuable input! Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD Nanofab 149 Evans Hall Newark, DE 19716 302-831-2784 From tbritton at criticalsystemsinc.com Tue Jun 11 13:27:49 2013 From: tbritton at criticalsystemsinc.com (Tom Britton) Date: Tue, 11 Jun 2013 17:27:49 +0000 Subject: [labnetwork] 100% Silane Bottle Changing In-Reply-To: <51B7151C.3060704@inti.gob.ar> References: <51B7151C.3060704@inti.gob.ar> Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2EFB0B6F@P3PWEX2MB010.ex2.secureserver.net> Hello Laura, Here is what we offer from Critical Systems. These practices come from a production environment, but should be well suited for use at your facility. SiH4 Cylinder Change Scope: This covers the basic steps of changing a SiH4 Cylinder, recommended Personal Protective Equipment (PPE), best known methods used in the industry and is not intended as a Procedure. Cylinder Change Sequence: 1. Cylinder Valve Shutoff Test 2. Pre Purge 3. Cylinder Change 4. Post Purge 5. Gas Introduction 1. Cylinder Valve Shutoff Test: 1. Close Cylinder Valve: * Remove quick disconnect from cylinder valve. Quick disconnect connects to top of cylinder valve. SiH4 cylinder should be equipped with an Air operated cylinder valve (Normally Closed) * Rotate knurled handle on valve approximately 90 degrees (verify direction of rotation with arrow and label located either on the side of the cylinder valve or the top of the cylinder valve.) 2. Pre Purge * Auto purge should be set up to perform 60 cycles of pressure at a minimum of 80 psi and vacuum -12 3. Cylinder change: Recommended equipment and Personal Protective Equipment * Recommended Personal Protective Equipment ? Nomex hood; should cover head, face (over nose and mouth) and neck area ? Nomex Smock ? Safety Glasses ? Face Shield ? Gloves (gauntlet style leather) ? Handheld leak checker specific to SIH4 (ppm level detection) * Buddy System: Always use two people to change cylinder. ? Disconnect pigtail from cylinder valve through window with door closed and latched, ? One person uses leak checker to verify cylinder valve one person to disconnect cylinder. ? Place cap on cylinder valve prior removing from cabinet ? Place cylinder cap on cylinder prior to removing from cabinet. ? Always use new DISS Gasket when installing new cylinder 4. Post Purge * Auto purge should be set up for a minimum of 60 purge cycles to remove all atmosphere or moisture introduced during cylinder change. 5. Gas Introduction * Rotate cylinder valve or knurled handle as per directions on either the side of the cylinder valve or the top of the cylinder valve. * Attach quick disconnect fitting or airline. * When cylinder pressure is indicated on PT-1 use handheld leak checker on pigtail connection to cylinder valve verify no leaks. If you have any questions, please let me know. Tom Britton Director of Sales Critical Systems, Inc. 7000 W. Victory Road Boise, ID 83709 Direct: 208-890-1417 Shop: 877-572-5515 www.criticalsystemsinc.com "World Leader in UHP Reconditioned Gas Delivery & Abatement Technologies" From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Laura Malatto Sent: Tuesday, June 11, 2013 6:16 AM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] 100% Silane Bottle Changing Dear All, Information for manipulation of 2% Silane bottle will also be appreciated!. We are a research group and is the first time we will work with silane. We are installing a PECVD, and we are deciding between 100% silane and 2% silane/N2. We will probably select low concentration as it is less dangerous. Any recomendation / link / book will be very appreciated! Many thanks, Laura _____________________________________________ Ing. Laura Malatto Jefe de Laboratorio Procesos Microelectr?nicos INTI-Micro y Nanoelectr?nica del Bicentenario (CMNB) PTM - Ed. 42 Buenos Aires - Argentina TEL:(+5411) 4724 6430 FAX:(+5411) 4754 5194 _____________________________________________ 0800 444 4004 | www.inti.gob.ar El 10/06/2013 05:08 p.m., Aebersold,Julia W. escribi?: We are hooking up a new polysilicon tube and are working with 100% Silane. I am seeking information on protocol and standard operating procedures (SOP's) on how other groups and institutions perform this the process of changing their Silane bottle and leak checks. We have our gas cabinet information, but due to the dangerous nature of this gas more I would like to gather information from other folks that have worked with this gas extensively. A written response to my e-mail is fine, but links to sites with official protocol and SOP's would be preferred. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Tue Jun 11 15:19:54 2013 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Tue, 11 Jun 2013 19:19:54 +0000 Subject: [labnetwork] 100% Silane Bottle Changing In-Reply-To: <9820889A26AAC34EBEB01D62DFCEEB2EFB093E@P3PWEX2MB010.ex2.secureserver.net> References: <51B7151C.3060704@inti.gob.ar>, <9820889A26AAC34EBEB01D62DFCEEB2EFB093E@P3PWEX2MB010.ex2.secureserver.net> Message-ID: I wish to thank you everyone for their input on changing out 100% Silane bottles. It will take me a while to wade through all of the information and I will update everyone later what we plan to do at our facility. Its great to get this kind of help when dealing with this very nasty and dangerous gas. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager University of Louisville 2210 South Brook Street Shumaker Research Building, Room 233 Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Tue Jun 11 16:31:15 2013 From: codreanu at udel.edu (Iulian Codreanu) Date: Tue, 11 Jun 2013 16:31:15 -0400 Subject: [labnetwork] 100% Silane Bottle Changing In-Reply-To: <9820889A26AAC34EBEB01D62DFCEEB2EFB0B6F@P3PWEX2MB010.ex2.secureserver.net> References: <51B7151C.3060704@inti.gob.ar> <9820889A26AAC34EBEB01D62DFCEEB2EFB0B6F@P3PWEX2MB010.ex2.secureserver.net> Message-ID: <51B78913.3010205@udel.edu> There may be a slightly safer way for leak checking the pigtail to cylinder valve connection. This is done by filling the pigtail with a He containing gas as part of the Post Purge (this can be included in the Post Purge sequence by the gas cabinet manufacturer) and using a hand held He leak checker. I use He or a H2/N2 mixture for the purge gas; this is more expensive than N2 but worth it. With Silane and other high pressure nasty gases I do both a low pressure leak check and a high pressure leak check. iulian Codreanu, Ph.D. Director of Operations, UD Nanofab 149 Evans Hall Newark, DE 19716 302-831-2784 On 6/11/2013 1:27 PM, Tom Britton wrote: > > Hello Laura, > > Here is what we offer from Critical Systems. These practices come from > a production environment, but should be well suited for use at your > facility. > > *SiH4 Cylinder Change* > > *Scope:* This covers the basic steps of changing a SiH4 Cylinder, > recommended Personal Protective Equipment (PPE), best known methods > used in the industry and is not intended as a Procedure. > > *Cylinder Change Sequence*: > > 1. Cylinder Valve Shutoff Test > 2. Pre Purge > 3. Cylinder Change > 4. Post Purge > 5. Gas Introduction > > *1. Cylinder Valve Shutoff Test:* > > 1. Close Cylinder Valve: > * Remove quick disconnect from cylinder valve. Quick disconnect > connects to top of cylinder valve. SiH4 cylinder should be > equipped with an Air operated cylinder valve (Normally Closed) > * Rotate knurled handle on valve approximately 90 degrees > (verify direction of rotation with arrow and label located > either on the side of the cylinder valve or the top of the > cylinder valve.) > > *2. Pre Purge* > > * Auto purge should be set up to perform 60 cycles of pressure > at a minimum of 80 psi and vacuum -12 > > *3. Cylinder change*: Recommended equipment and Personal Protective > Equipment > > * Recommended Personal Protective Equipment > > ?Nomex hood; should cover head, face (over nose and mouth) and neck area > > ?Nomex Smock > > ?Safety Glasses > > ?Face Shield > > ?Gloves (gauntlet style leather) > > ?Handheld leak checker specific to SIH4 (ppm level detection) > > * Buddy System: Always use two people to change cylinder. > > ?Disconnect pigtail from cylinder valve through window with door > closed and latched, > > ?One person uses leak checker to verify cylinder valve one person to > disconnect cylinder. > > ?Place cap on cylinder valve prior removing from cabinet > > ?Place cylinder cap on cylinder prior to removing from cabinet. > > ?Always use new DISS Gasket when installing new cylinder > > *4. Post Purge * > > * Auto purge should be set up for a minimum of 60 purge cycles > to remove all atmosphere or moisture introduced during > cylinder change. > > *5. Gas Introduction* > > * Rotate cylinder valve or knurled handle as per directions on > either the side of the cylinder valve or the top of the > cylinder valve. > * Attach quick disconnect fitting or airline. > * When cylinder pressure is indicated on PT-1 use handheld leak > checker on pigtail connection to cylinder valve verify no leaks. > > If you have any questions, please let me know. > > Tom Britton > > Director of Sales > > Critical Systems, Inc. > > 7000 W. Victory Road > > Boise, ID 83709 > > Direct: 208-890-1417 > > Shop: 877-572-5515 > > www.criticalsystemsinc.com > > / "World Leader in UHP Reconditioned / > > / Gas Delivery & Abatement Technologies"/ > > *From:*labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Laura Malatto > *Sent:* Tuesday, June 11, 2013 6:16 AM > *To:* labnetwork at mtl.mit.edu > *Subject:* Re: [labnetwork] 100% Silane Bottle Changing > > Dear All, > > Information for manipulation of 2% Silane bottle will also be > appreciated!. We are a research group and is the first time we will > work with silane. We are installing a PECVD, and we are deciding > between 100% silane and 2% silane/N2. We will probably select low > concentration as it is less dangerous. > Any recomendation / link / book will be very appreciated! > > Many thanks, Laura > > > _____________________________________________ > Ing. Laura Malatto > Jefe de Laboratorio > Procesos Microelectr?nicos > INTI-Micro y Nanoelectr?nica del Bicentenario (CMNB) > PTM - Ed. 42 > Buenos Aires - Argentina > TEL:(+5411) 4724 6430 > FAX:(+5411) 4754 5194 > _____________________________________________ > 0800 444 4004 |www.inti.gob.ar > > El 10/06/2013 05:08 p.m., Aebersold,Julia W. escribi?: > > We are hooking up a new polysilicon tube and are working with 100% > Silane. I am seeking information on protocol and standard > operating procedures (SOP's) on how other groups and institutions > perform this the process of changing their Silane bottle and leak > checks. We have our gas cabinet information, but due to the > dangerous nature of this gas more I would like to gather > information from other folks that have worked with this gas > extensively. > > A written response to my e-mail is fine, but links to sites with > official protocol and SOP's would be preferred. > > Cheers! > > Julia Aebersold, Ph.D. > > MNTC Cleanroom Manager > > Shumaker Research Building, Room 233 > > 2210 South Brook Street > > University of Louisville > > Louisville, KY 40292 > > 502-852-1572 > > http://louisville.edu/micronano/ > > > > > _______________________________________________ > > labnetwork mailing list > > labnetwork at mtl.mit.edu > > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From tbritton at criticalsystemsinc.com Tue Jun 11 20:26:37 2013 From: tbritton at criticalsystemsinc.com (Tom Britton) Date: Wed, 12 Jun 2013 00:26:37 +0000 Subject: [labnetwork] 100% Silane Bottle Changing In-Reply-To: <51B78913.3010205@udel.edu> References: <51B7151C.3060704@inti.gob.ar> <9820889A26AAC34EBEB01D62DFCEEB2EFB0B6F@P3PWEX2MB010.ex2.secureserver.net> <51B78913.3010205@udel.edu> Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2EFB249A@P3PWEX2MB010.ex2.secureserver.net> Hello Iulian, You are correct regarding the helium leak check portion of the procedure. The Helium leak check wasn't included in our write-up because that is a standard procedure with all cylinder changes. Most gas cabinet controllers, like our Air Products controllers, will prompt for an outboard leak check on cylinder connection after a sequence of events post Cylinder Change. At this time a leak checker capable of detecting Helium, if they are using a mixed gas, should be used. I should have been more clear that this was additional to standard cylinder change procedures. Sorry if this caused any confusion. Any other questions or comments, feel free to respond Best regards, Tom Britton Director of Sales Critical Systems, Inc. 7000 W. Victory Road Boise, ID 83709 Direct: 208-890-1417 Shop: 877-572-5515 www.criticalsystemsinc.com "World Leader in UHP Reconditioned Gas Delivery & Abatement Technologies" From: Iulian Codreanu [mailto:codreanu at udel.edu] Sent: Tuesday, June 11, 2013 2:31 PM To: Tom Britton Cc: Fab Network Subject: Re: [labnetwork] 100% Silane Bottle Changing There may be a slightly safer way for leak checking the pigtail to cylinder valve connection. This is done by filling the pigtail with a He containing gas as part of the Post Purge (this can be included in the Post Purge sequence by the gas cabinet manufacturer) and using a hand held He leak checker. I use He or a H2/N2 mixture for the purge gas; this is more expensive than N2 but worth it. With Silane and other high pressure nasty gases I do both a low pressure leak check and a high pressure leak check. iulian Codreanu, Ph.D. Director of Operations, UD Nanofab 149 Evans Hall Newark, DE 19716 302-831-2784 On 6/11/2013 1:27 PM, Tom Britton wrote: Hello Laura, Here is what we offer from Critical Systems. These practices come from a production environment, but should be well suited for use at your facility. SiH4 Cylinder Change Scope: This covers the basic steps of changing a SiH4 Cylinder, recommended Personal Protective Equipment (PPE), best known methods used in the industry and is not intended as a Procedure. Cylinder Change Sequence: 1. Cylinder Valve Shutoff Test 2. Pre Purge 3. Cylinder Change 4. Post Purge 5. Gas Introduction 1. Cylinder Valve Shutoff Test: 1. Close Cylinder Valve: * Remove quick disconnect from cylinder valve. Quick disconnect connects to top of cylinder valve. SiH4 cylinder should be equipped with an Air operated cylinder valve (Normally Closed) * Rotate knurled handle on valve approximately 90 degrees (verify direction of rotation with arrow and label located either on the side of the cylinder valve or the top of the cylinder valve.) 2. Pre Purge * Auto purge should be set up to perform 60 cycles of pressure at a minimum of 80 psi and vacuum -12 3. Cylinder change: Recommended equipment and Personal Protective Equipment * Recommended Personal Protective Equipment ? Nomex hood; should cover head, face (over nose and mouth) and neck area ? Nomex Smock ? Safety Glasses ? Face Shield ? Gloves (gauntlet style leather) ? Handheld leak checker specific to SIH4 (ppm level detection) * Buddy System: Always use two people to change cylinder. ? Disconnect pigtail from cylinder valve through window with door closed and latched, ? One person uses leak checker to verify cylinder valve one person to disconnect cylinder. ? Place cap on cylinder valve prior removing from cabinet ? Place cylinder cap on cylinder prior to removing from cabinet. ? Always use new DISS Gasket when installing new cylinder 4. Post Purge * Auto purge should be set up for a minimum of 60 purge cycles to remove all atmosphere or moisture introduced during cylinder change. 5. Gas Introduction * Rotate cylinder valve or knurled handle as per directions on either the side of the cylinder valve or the top of the cylinder valve. * Attach quick disconnect fitting or airline. * When cylinder pressure is indicated on PT-1 use handheld leak checker on pigtail connection to cylinder valve verify no leaks. If you have any questions, please let me know. Tom Britton Director of Sales Critical Systems, Inc. 7000 W. Victory Road Boise, ID 83709 Direct: 208-890-1417 Shop: 877-572-5515 www.criticalsystemsinc.com "World Leader in UHP Reconditioned Gas Delivery & Abatement Technologies" From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Laura Malatto Sent: Tuesday, June 11, 2013 6:16 AM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] 100% Silane Bottle Changing Dear All, Information for manipulation of 2% Silane bottle will also be appreciated!. We are a research group and is the first time we will work with silane. We are installing a PECVD, and we are deciding between 100% silane and 2% silane/N2. We will probably select low concentration as it is less dangerous. Any recomendation / link / book will be very appreciated! Many thanks, Laura _____________________________________________ Ing. Laura Malatto Jefe de Laboratorio Procesos Microelectr?nicos INTI-Micro y Nanoelectr?nica del Bicentenario (CMNB) PTM - Ed. 42 Buenos Aires - Argentina TEL:(+5411) 4724 6430 FAX:(+5411) 4754 5194 _____________________________________________ 0800 444 4004 | www.inti.gob.ar El 10/06/2013 05:08 p.m., Aebersold,Julia W. escribi?: We are hooking up a new polysilicon tube and are working with 100% Silane. I am seeking information on protocol and standard operating procedures (SOP's) on how other groups and institutions perform this the process of changing their Silane bottle and leak checks. We have our gas cabinet information, but due to the dangerous nature of this gas more I would like to gather information from other folks that have worked with this gas extensively. A written response to my e-mail is fine, but links to sites with official protocol and SOP's would be preferred. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Wed Jun 19 12:53:13 2013 From: codreanu at udel.edu (Iulian Codreanu) Date: Wed, 19 Jun 2013 12:53:13 -0400 Subject: [labnetwork] ambient gas detection for bulkheaded tools Message-ID: <51C1E1F9.8090506@udel.edu> Dear Colleagues, I am trying to figure out how the handle the detection of hazardous gases in the ambient when part of the tool is in the chase and part in the bay. The connection between the tool and the line(s) carrying the gas(es) would be in the chase so it would make sense to monitor that area. What are your thoughts on providing detectors on the bay side of the wall as well? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD Nanofab 149 Evans Hall Newark, DE 19716 302-831-2784 From schweig at umich.edu Wed Jun 19 16:10:52 2013 From: schweig at umich.edu (Dennis Schweiger) Date: Wed, 19 Jun 2013 16:10:52 -0400 Subject: [labnetwork] ambient gas detection for bulkheaded tools In-Reply-To: <51C1E1F9.8090506@udel.edu> References: <51C1E1F9.8090506@udel.edu> Message-ID: <5447736075326858701@unknownmsgid> Iulian, 1) Are your tools load locked? 2) Which side of the wall is the process chamber on? 3) Is your cleanroom raised floor, or low side wall, return? Thanks, Dennis 586.531.3030 Cell On Jun 19, 2013, at 4:05 PM, Iulian Codreanu wrote: > Dear Colleagues, > > I am trying to figure out how the handle the detection of hazardous gases in the ambient when part of the tool is in the chase and part in the bay. The connection between the tool and the line(s) carrying the gas(es) would be in the chase so it would make sense to monitor that area. What are your thoughts on providing detectors on the bay side of the wall as well? > > Thank you very much for your help. > > Iulian > > -- > iulian Codreanu, Ph.D. > Director of Operations, UD Nanofab > 149 Evans Hall > Newark, DE 19716 > 302-831-2784 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From hathaway at cns.fas.harvard.edu Wed Jun 19 16:33:11 2013 From: hathaway at cns.fas.harvard.edu (Mac Hathaway) Date: Wed, 19 Jun 2013 16:33:11 -0400 Subject: [labnetwork] ambient gas detection for bulkheaded tools In-Reply-To: <51C1E1F9.8090506@udel.edu> References: <51C1E1F9.8090506@udel.edu> Message-ID: <51C21587.20104@cns.fas.harvard.edu> Hi Iulian, At Harvard CNS, we monitor for toxics about 6 inches in from the back wall, on the cleanroom side, adjacent to the tool in question, to pick up ambient leaks in the "working space". We also monitor "exhausted enclosures", typically the "gas box" where the VCR connected gases mate to the shut-off valves and MFCs at the back of the system. As fittings are the most likely leak points, these are generally all within the enclosed and exhausted space inside the system, and represent a different level of risk compared to ambient leaks. Thus, these monitoring points generate a local evacuation (cleanroom only), while ambient leaks are generate a building-wide evacuation. The placement for the ambient detection points was based on where the technician would be (the "breathing space"), where the leak could come from (open chamber being considered most likely), and where the monitoring tubes won't be too much in the way. We used swagelok bulk-head fittings mounted to the wall, with the plastic sample tubing (for our remotely located sensors) sticking out through the slightly larger diameter stainless bulkhead tubing. Looks tidy, and supports and protects the tubing reasonably well. We debated locating sampling points inside the bay, just outside the gratings at the base of the wall, and even directly below the wall in the room outflow, and chose our current configuration as the best compromise between response time (closer to source, less dilution), and most comprehensive coverage (further from source allows gases to diffuse sideways, so one sensor could see more "area" but concentrations would be lower). Mac Hathaway Harvard CNS On 6/19/2013 12:53 PM, Iulian Codreanu wrote: > Dear Colleagues, > > I am trying to figure out how the handle the detection of hazardous > gases in the ambient when part of the tool is in the chase and part in > the bay. The connection between the tool and the line(s) carrying the > gas(es) would be in the chase so it would make sense to monitor that > area. What are your thoughts on providing detectors on the bay side of > the wall as well? > > Thank you very much for your help. > > Iulian > From codreanu at udel.edu Wed Jun 19 16:43:28 2013 From: codreanu at udel.edu (Iulian Codreanu) Date: Wed, 19 Jun 2013 16:43:28 -0400 Subject: [labnetwork] ambient gas detection for bulkheaded tools In-Reply-To: <5447736075326858701@unknownmsgid> References: <51C1E1F9.8090506@udel.edu> <5447736075326858701@unknownmsgid> Message-ID: <51C217F0.8010201@udel.edu> Hi Dennis. Since I have to purchase the tools I cannot give definite answers on the first two questions. 1) I hope that all of them will be loadlocked but I have to allow for the possibility that some of them will not be. 2) The chamber could be on either side. 3) Low side wall (12" opening above floor) return. Thank you for your help. Iulian iulian Codreanu, Ph.D. Director of Operations, UD Nanofab 149 Evans Hall Newark, DE 19716 302-831-2784 On 6/19/2013 4:10 PM, Dennis Schweiger wrote: > Iulian, > > 1) Are your tools load locked? > > 2) Which side of the wall is the process chamber on? > > 3) Is your cleanroom raised floor, or low side wall, return? > > Thanks, > > Dennis > 586.531.3030 Cell > > On Jun 19, 2013, at 4:05 PM, Iulian Codreanu wrote: > >> Dear Colleagues, >> >> I am trying to figure out how the handle the detection of hazardous gases in the ambient when part of the tool is in the chase and part in the bay. The connection between the tool and the line(s) carrying the gas(es) would be in the chase so it would make sense to monitor that area. What are your thoughts on providing detectors on the bay side of the wall as well? >> >> Thank you very much for your help. >> >> Iulian >> >> -- >> iulian Codreanu, Ph.D. >> Director of Operations, UD Nanofab >> 149 Evans Hall >> Newark, DE 19716 >> 302-831-2784 >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From spaolini at cns.fas.harvard.edu Wed Jun 19 18:39:20 2013 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Wed, 19 Jun 2013 18:39:20 -0400 Subject: [labnetwork] ambient gas detection for bulkheaded tools In-Reply-To: <51C1E1F9.8090506@udel.edu> References: <51C1E1F9.8090506@udel.edu> Message-ID: <8F95EA77ACBF904A861E580B44288EFD9CA20B2DA6@FASXCH02.fasmail.priv> We here at Harvard use ambient points in the bays as well as points within the gas network of all bulkheaded tools that use toxic/ flammable gases. We monitor the bay side by installing bored through 3/8" Swagelok bulkhead unions through the wall panel and push the 1/4" Teflon "sniffers" about 6" into the bay side. Placement of the sniffers is a combination of where the chambers and people are. We have very fast response from our detection due to good placement, an engineer here (OK, it's me) has accidently set them off while forgetting to disarm them before opening a chamber. As embarrassing as these evacuations are, they are proof positive that the system is protecting the occupants of the lab. Steve Paolini Harvard University Center for Nanoscale Systems spaolini at cns.fas.harvard.edu -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Wednesday, June 19, 2013 12:53 PM To: Fab Network Subject: [labnetwork] ambient gas detection for bulkheaded tools Dear Colleagues, I am trying to figure out how the handle the detection of hazardous gases in the ambient when part of the tool is in the chase and part in the bay. The connection between the tool and the line(s) carrying the gas(es) would be in the chase so it would make sense to monitor that area. What are your thoughts on providing detectors on the bay side of the wall as well? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD Nanofab 149 Evans Hall Newark, DE 19716 302-831-2784 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From rmorrison at draper.com Thu Jun 20 06:01:11 2013 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Thu, 20 Jun 2013 10:01:11 +0000 Subject: [labnetwork] ambient gas detection for bulkheaded tools In-Reply-To: <51C1E1F9.8090506@udel.edu> References: <51C1E1F9.8090506@udel.edu> Message-ID: Hi Iulian, When we have a bulk-head tool we have gas sensors at the load station, vacuum pump exhaust and the area where the gases enter the tool and/or the cabinet area where the gas lines run. Most tools exhaust the space where the gas line runs so we will monitor that exhaust flow. Rick Draper Laboratory Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: Wednesday, June 19, 2013 12:53 PM To: Fab Network Subject: [labnetwork] ambient gas detection for bulkheaded tools Dear Colleagues, I am trying to figure out how the handle the detection of hazardous gases in the ambient when part of the tool is in the chase and part in the bay. The connection between the tool and the line(s) carrying the gas(es) would be in the chase so it would make sense to monitor that area. What are your thoughts on providing detectors on the bay side of the wall as well? Thank you very much for your help. Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD Nanofab 149 Evans Hall Newark, DE 19716 302-831-2784 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From schweig at umich.edu Thu Jun 20 07:30:16 2013 From: schweig at umich.edu (Dennis Schweiger) Date: Thu, 20 Jun 2013 07:30:16 -0400 Subject: [labnetwork] ambient gas detection for bulkheaded tools In-Reply-To: <51C217F0.8010201@udel.edu> References: <51C1E1F9.8090506@udel.edu> <5447736075326858701@unknownmsgid> <51C217F0.8010201@udel.edu> Message-ID: Iulian, here at UofMichigan, we're not sampling in any of the breathing air spaces directly for the clean room. Any time we've tried that, the results were inconclusive, and ineffective. We just move too much air around. We are sampling in some of the more "static" spaces, subfab, hallways in front of, and behind, the clean room. Typically all of our gas detection is done in the exhausted enclosures. That's where the breakable connections are, and we're constantly pulling fab air into them. One of the things we are doing is looking for gases in cabinets that wouldn't have that gas there, in effect sampling the fab air coming into the enclosures. For example, in an Ammonia cabinet, we might be looking for BCl3, HBr, Cl2, DCS, and hydrides, in addition to the amines for Ammonia. Dennis 734.647.2055 Ofc "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong? On Wed, Jun 19, 2013 at 4:43 PM, Iulian Codreanu wrote: > Hi Dennis. > > Since I have to purchase the tools I cannot give definite answers on the > first two questions. > > 1) I hope that all of them will be loadlocked but I have to allow for the > possibility that some of them will not be. > > 2) The chamber could be on either side. > > 3) Low side wall (12" opening above floor) return. > > Thank you for your help. > > Iulian > > iulian Codreanu, Ph.D. > Director of Operations, UD Nanofab > 149 Evans Hall > Newark, DE 19716 > 302-831-2784 > > On 6/19/2013 4:10 PM, Dennis Schweiger wrote: > >> Iulian, >> >> 1) Are your tools load locked? >> >> 2) Which side of the wall is the process chamber on? >> >> 3) Is your cleanroom raised floor, or low side wall, return? >> >> Thanks, >> >> Dennis >> 586.531.3030 Cell >> >> On Jun 19, 2013, at 4:05 PM, Iulian Codreanu wrote: >> >> Dear Colleagues, >>> >>> I am trying to figure out how the handle the detection of hazardous >>> gases in the ambient when part of the tool is in the chase and part in the >>> bay. The connection between the tool and the line(s) carrying the gas(es) >>> would be in the chase so it would make sense to monitor that area. What >>> are your thoughts on providing detectors on the bay side of the wall as >>> well? >>> >>> Thank you very much for your help. >>> >>> Iulian >>> >>> -- >>> iulian Codreanu, Ph.D. >>> Director of Operations, UD Nanofab >>> 149 Evans Hall >>> Newark, DE 19716 >>> 302-831-2784 >>> >>> >>> ______________________________**_________________ >>> labnetwork mailing list >>> labnetwork at mtl.mit.edu >>> https://www-mtl.mit.edu/**mailman/listinfo.cgi/**labnetwork >>> >> > -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Thu Jun 20 13:15:24 2013 From: shott at stanford.edu (John Shott) Date: Thu, 20 Jun 2013 10:15:24 -0700 Subject: [labnetwork] ambient gas detection for bulkheaded tools In-Reply-To: <51C1E1F9.8090506@udel.edu> References: <51C1E1F9.8090506@udel.edu> Message-ID: <51C338AC.7060509@stanford.edu> Iulian: Although we don't have much in the way of bulkheaded tools, I'd like to offer a couple of comments to the already good points made by a number of my respected colleagues. In particular, like many of the other sites, most of our detectors are monitoring enclosed/exhausted spaces associated with tools, although we do tend to use a smaller number of "room air" detectors as something of a backup. For example, in an aisle with a number of chlorine etchers, we tend to have one chlorine detector in each tool exhaust and then a single chlorine detector sniffing the room air in that aisle. For all of this to work ... and this may depend on your local codes, but is certainly the rule in Santa Clara County and, I believe, throughout California ... the alarm limit of your detectors monitoring the exhausted spaces need to be set to the PEL of the gas (the requirement for occupied areas), rather than 1/2 IDLH (the requirement for unoccupied areas). While that still may take a bit of discussion with your AHJ, Santa Clara County tends to be quite strict in their interpretations but have allowed a single detector in an exhausted space to do "double duty" as both monitoring for leaks in the exhausted space of the tool and in the nearby room area as long as the alarm limit is set to the PEL of that gas. Certainly in California, code tells you when you need to have a detector, but does not specify where that detector is located. Note: if your pump exhaust goes into this same exhaust area rather than to some sort of dedicated treatment system, make sure that the pump exhaust enters downstream of your detection point so that normal tool operation does not set off an alarm. Thanks, John On 6/19/2013 9:53 AM, Iulian Codreanu wrote: > Dear Colleagues, > > I am trying to figure out how the handle the detection of hazardous > gases in the ambient when part of the tool is in the chase and part in > the bay. The connection between the tool and the line(s) carrying the > gas(es) would be in the chase so it would make sense to monitor that > area. What are your thoughts on providing detectors on the bay side > of the wall as well? > > Thank you very much for your help. > > Iulian From fouad.karouta at anu.edu.au Thu Jun 20 19:30:37 2013 From: fouad.karouta at anu.edu.au (Fouad Karouta) Date: Fri, 21 Jun 2013 09:30:37 +1000 Subject: [labnetwork] Hafnium in e-beam Message-ID: <001601ce6e0e$2b247490$816d5db0$@anu.edu.au> Hi all, We have received a request from a user who wants to deposit Hf in our e-beam evaporator. So far we only have available in the system: Al, Ti, Ni, Ge, Pt, Au, Pd, Cr and it is mainly used for contacting III-V semiconductors. I wonder to share possible experience of someone who has deposited Hf in an e-beam evaporator and whether it can raise any concerns. Thanks, Fouad Karouta ********************************* Facility Manager ANFF ACT Node Research School of Physics and Engineering Australian National University ACT 0200, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au -------------- next part -------------- An HTML attachment was scrubbed... URL: From adithiumamaheswar at gmail.com Fri Jun 21 07:25:44 2013 From: adithiumamaheswar at gmail.com (Adithi Umamaheswara) Date: Fri, 21 Jun 2013 16:55:44 +0530 Subject: [labnetwork] SiC stress Message-ID: Dear Sir/Madam I have deposited Amorphous Silicon Carbide using PECVD (OXFORD INSTRUMENTS PLASMA LAB SYSTEM 100). I did the Stress measurement using DEKTAK; I found that the SiC layer had both compressive stress and tensile stress. Getting both compressive stress and tensile stress on same SiC layer, is this normal? Deposition temperature: 400?C. Pressure: 1400 mT. Requesting for a reply asap. With Regards, Adithi.U Facility Technologist, National Nano Fabrication Centre, CeNSE, Indian Institute of Science Bangalore -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Fri Jun 21 17:49:51 2013 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Fri, 21 Jun 2013 21:49:51 +0000 Subject: [labnetwork] SiC stress In-Reply-To: References: Message-ID: This doesn't sound quite right or you are getting a non-uniform deposition. We use a Toho laser stress measurement system for measuring thin film stress from our Oxford PECVD (same system as yours). Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Adithi Umamaheswara Sent: Friday, June 21, 2013 7:26 AM To: labnetwork at mtl.mit.edu Cc: iisc mcc Subject: [labnetwork] SiC stress Dear Sir/Madam I have deposited Amorphous Silicon Carbide using PECVD (OXFORD INSTRUMENTS PLASMA LAB SYSTEM 100). I did the Stress measurement using DEKTAK; I found that the SiC layer had both compressive stress and tensile stress. Getting both compressive stress and tensile stress on same SiC layer, is this normal? Deposition temperature: 400?C. Pressure: 1400 mT. Requesting for a reply asap. With Regards, Adithi.U Facility Technologist, National Nano Fabrication Centre, CeNSE, Indian Institute of Science Bangalore -------------- next part -------------- An HTML attachment was scrubbed... URL: From everly at usf.edu Mon Jun 24 12:23:06 2013 From: everly at usf.edu (Everly, Richard) Date: Mon, 24 Jun 2013 12:23:06 -0400 Subject: [labnetwork] gowning services and laundering vs. disposable Message-ID: NREC at USF operates a class 1000 cleanroom servicing about 10-20 students per week with about 40-60 cleanroom entries per week. We have 3 sets of 20 gowns that we rotate out at regular intervals for cleaning. We currently have our gowns cleaned by mail order but the current vendor wants to increase our contract rate by 10X the current amount, needless to say, this is not in our budget! The current company only seems interested in servicing high volume accounts and they want to move us to a minimum billing fee, based on their other clients usage. Right now I'm looking for alternate companies that service the southeast market that will rent/repair and launder gowns via mail order for a smaller operation like ours. We've tried to contact several vendors but we've have not received any replies, based on this lackluster response I can only assume that the economy has picked up so well that they can afford to turn away business! We've always used laundry services and purchased/rented our own gowns, but I'm entertaining the idea of the standard coverall disposables but I have a few questions regarding their use that your feedback will help me determine if they will be cost effective for a smaller operation like ours. 1. would you consider using the disposable gown more than once, as long as they are not torn/tattered or soiled? it seems to me they would last for a few days or maybe even a week. 2. if you use disposables what is your policy regarding these gowns and replacement? 3. what brands/suppliers could you recommend. (I know there are many out there but I'm relying on the vast experience of Labnet to narrow down the playing field to a handful of contenders) Respectfully, Richard Everly Research Engineer Nanotechnology Research and Education Center (NREC) University of South Florida Mailstop ENB 118 4202 E. Fowler Ave Tampa, FL 33620 PH: 813-974-5365 FAX: 813-974-3610 everly at usf.edu www.nrec.usf.edu From kmcpeak at ethz.ch Mon Jun 24 13:18:02 2013 From: kmcpeak at ethz.ch (Kevin McPeak) Date: Mon, 24 Jun 2013 19:18:02 +0200 Subject: [labnetwork] II-VI Semiconductor Dry Etching Message-ID: Dear Colleagues, My laboratory at ETH Zurich is interested in plasma etching films of various II-VI semiconductor materials, specifically: CdSe, CdS, ZnSe and ZnS. Due to the toxicity of these materials (specifically the Cd based compounds) we are having a hard time finding a cleanroom/machine that will allow this work. The gases we require for plasma etching these materials are CH4 and H2. Ideally, we are looking for an individual or group that has experience etching these materials that is interested in collaborating with us. I would be happy to provide more details about our project with interested parties. Please let me know if you are interested. Regards, Kevin McPeak -- Kevin McPeak Ph.D. Postdoctoral Researcher ETH Z?rich Optical Materials Engineering Laboratory Universit?tstrasse 6, CNB F121 CH-8092 Zurich, Switzerland Voice: +41 44 632 6594 Email: kmcpeak at ethz.ch From len.olona at ou.edu Mon Jun 24 13:49:49 2013 From: len.olona at ou.edu (Olona, Leonard E.) Date: Mon, 24 Jun 2013 17:49:49 +0000 Subject: [labnetwork] PTB SALES Alcatel 2005SD Message-ID: <5F2FCA81-F21C-42D9-B324-634CEE0E34D0@ou.edu> Hello fellow colleagues, Can anyone provide us with feedback regarding a vacuum company called PTB Sales? We are looking to purchase a small roughing pump for an LN2 vacuum jacketed line. PTB has a decent price for a refurbished pump. Just wanted to get a feel for how well the company and its equipment service performs. Thank you, Leonard Olona Cleanroom Manager University of Oklahoma 110 West Boyd Norman, Oklahoma 73019 Desk (405) 325-4374 Cell. (405) 630-9068 Len.olona at ou.edu From tbritton at criticalsystemsinc.com Mon Jun 24 16:13:34 2013 From: tbritton at criticalsystemsinc.com (Tom Britton) Date: Mon, 24 Jun 2013 20:13:34 +0000 Subject: [labnetwork] PTB SALES Alcatel 2005SD In-Reply-To: <5F2FCA81-F21C-42D9-B324-634CEE0E34D0@ou.edu> References: <5F2FCA81-F21C-42D9-B324-634CEE0E34D0@ou.edu> Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2EFBDA1D@P3PWEX2MB010.ex2.secureserver.net> We buy reconditioned Edwards and Norcal manual gate valves from them and the quality has always been good. They aren't the fastest people, so don't expect really good customer service, but their product is good and the prices are well. I have not bought pumps though. Take care, Tom Britton Director of Sales Critical Systems, Inc. 7000 W. Victory Road Boise, ID 83709 Direct: 208-890-1417 Shop: 877-572-5515 www.criticalsystemsinc.com "World Leader in UHP Reconditioned Gas Delivery & Abatement Technologies" -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Olona, Leonard E. Sent: Monday, June 24, 2013 11:50 AM To: labnetwork at mtl.mit.edu Cc: Johnson, Matthew B.; Teasdale, Nolan D.; Keay, Joel C. Subject: [labnetwork] PTB SALES Alcatel 2005SD Hello fellow colleagues, Can anyone provide us with feedback regarding a vacuum company called PTB Sales? We are looking to purchase a small roughing pump for an LN2 vacuum jacketed line. PTB has a decent price for a refurbished pump. Just wanted to get a feel for how well the company and its equipment service performs. Thank you, Leonard Olona Cleanroom Manager University of Oklahoma 110 West Boyd Norman, Oklahoma 73019 Desk (405) 325-4374 Cell. (405) 630-9068 Len.olona at ou.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrweaver at purdue.edu Mon Jun 24 17:03:30 2013 From: jrweaver at purdue.edu (Weaver, John R) Date: Mon, 24 Jun 2013 21:03:30 +0000 Subject: [labnetwork] gowning services and laundering vs. disposable In-Reply-To: References: Message-ID: <6A848421F695C54A9210C1A873C96AC207C3986E@WPVEXCMBX04.purdue.lcl> Richard - I have not had good luck with any disposable gowns. While you may find that aerosol particle counts are not significantly affected - as long as the change-out is frequent and the gowns are maintained in good condition - surface particles and fibers tend to be a serious issue. The coated Tyvek is certainly superior to uncoated, but even with the coating fibers break loose on wearing. Additionally, the fragility of the garment is also a significant issue - bumping against a sharp corner on a piece of equipment is enough to tear the garment and give you a shower of particles and fibers. Have you tried Environmental Products Warehouse (WWW.EPWHSE.NET)? I know they do quite a bit of mail-order business with their laundry and don't charge what the "big names" charge. John John R. Weaver Facility Manager Birck Nanotechnology Center Purdue University (765) 494-5494 jrweaver at purdue.edu -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Everly, Richard Sent: Monday, June 24, 2013 12:23 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] gowning services and laundering vs. disposable NREC at USF operates a class 1000 cleanroom servicing about 10-20 students per week with about 40-60 cleanroom entries per week. We have 3 sets of 20 gowns that we rotate out at regular intervals for cleaning. We currently have our gowns cleaned by mail order but the current vendor wants to increase our contract rate by 10X the current amount, needless to say, this is not in our budget! The current company only seems interested in servicing high volume accounts and they want to move us to a minimum billing fee, based on their other clients usage. Right now I'm looking for alternate companies that service the southeast market that will rent/repair and launder gowns via mail order for a smaller operation like ours. We've tried to contact several vendors but we've have not received any replies, based on this lackluster response I can only assume that the economy has picked up so well that they can afford to turn away business! We've always used laundry services and purchased/rented our own gowns, but I'm entertaining the idea of the standard coverall disposables but I have a few questions regarding their use that your feedback will help me determine if they will be cost effective for a smaller operation like ours. 1. would you consider using the disposable gown more than once, as long as they are not torn/tattered or soiled? it seems to me they would last for a few days or maybe even a week. 2. if you use disposables what is your policy regarding these gowns and replacement? 3. what brands/suppliers could you recommend. (I know there are many out there but I'm relying on the vast experience of Labnet to narrow down the playing field to a handful of contenders) Respectfully, Richard Everly Research Engineer Nanotechnology Research and Education Center (NREC) University of South Florida Mailstop ENB 118 4202 E. Fowler Ave Tampa, FL 33620 PH: 813-974-5365 FAX: 813-974-3610 everly at usf.edu www.nrec.usf.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From spaolini at cns.fas.harvard.edu Mon Jun 24 17:18:37 2013 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Mon, 24 Jun 2013 17:18:37 -0400 Subject: [labnetwork] PTB SALES Alcatel 2005SD In-Reply-To: <5F2FCA81-F21C-42D9-B324-634CEE0E34D0@ou.edu> References: <5F2FCA81-F21C-42D9-B324-634CEE0E34D0@ou.edu> Message-ID: <8F95EA77ACBF904A861E580B44288EFD9CA20B3074@FASXCH02.fasmail.priv> I have bought pumps from them for years and was always satisfied. Steve Paolini Harvard University Center for Nanoscale Systems -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Olona, Leonard E. Sent: Monday, June 24, 2013 1:50 PM To: labnetwork at mtl.mit.edu Cc: Johnson, Matthew B.; Teasdale, Nolan D.; Keay, Joel C. Subject: [labnetwork] PTB SALES Alcatel 2005SD Hello fellow colleagues, Can anyone provide us with feedback regarding a vacuum company called PTB Sales? We are looking to purchase a small roughing pump for an LN2 vacuum jacketed line. PTB has a decent price for a refurbished pump. Just wanted to get a feel for how well the company and its equipment service performs. Thank you, Leonard Olona Cleanroom Manager University of Oklahoma 110 West Boyd Norman, Oklahoma 73019 Desk (405) 325-4374 Cell. (405) 630-9068 Len.olona at ou.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From bob.henderson at etchedintimeinc.com Mon Jun 24 20:08:12 2013 From: bob.henderson at etchedintimeinc.com (Bob Henderson) Date: Mon, 24 Jun 2013 17:08:12 -0700 Subject: [labnetwork] PTB SALES Alcatel 2005SD In-Reply-To: <5F2FCA81-F21C-42D9-B324-634CEE0E34D0@ou.edu> References: <5F2FCA81-F21C-42D9-B324-634CEE0E34D0@ou.edu> Message-ID: <000f01ce7138$17b26e80$47174b80$@henderson@etchedintimeinc.com> Leonard: We have used PTB sales for a variety of rebuilds on pumps cryopumps and have purchased some of their used vacuum equipment over the years. We have always found them to be straight forward and when something needed to be repaired under their warranty we had no problems with their service. Bob Henderson EITI -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Olona, Leonard E. Sent: Monday, June 24, 2013 10:50 AM To: labnetwork at mtl.mit.edu Cc: Johnson, Matthew B.; Teasdale, Nolan D.; Keay, Joel C. Subject: [labnetwork] PTB SALES Alcatel 2005SD Hello fellow colleagues, Can anyone provide us with feedback regarding a vacuum company called PTB Sales? We are looking to purchase a small roughing pump for an LN2 vacuum jacketed line. PTB has a decent price for a refurbished pump. Just wanted to get a feel for how well the company and its equipment service performs. Thank you, Leonard Olona Cleanroom Manager University of Oklahoma 110 West Boyd Norman, Oklahoma 73019 Desk (405) 325-4374 Cell. (405) 630-9068 Len.olona at ou.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From schweig at umich.edu Tue Jun 25 07:30:00 2013 From: schweig at umich.edu (Dennis Schweiger) Date: Tue, 25 Jun 2013 07:30:00 -0400 Subject: [labnetwork] gowning services and laundering vs. disposable Message-ID: Richard, good morning. Here at UofMichigan we use all launderable suits for regular entry, and we'll issue disposable suits to the one-off entry, the occasional contractor that needs to enter, or if there is a potential for damage to our launderable garments. We've been using Cintas since about 2008, when we migrated from all disposable to the laundry service. It's not the cure-all, be-all, but it is working for us. the hardest part is keeping the inventory adjusted to accommodate the variety in user sizes. I've attached a snapshot of what we have had cleaned for the last 8 weeks. It costs us about $1,100/week for the laundry service at our current usage levels. All of the suits are pulled every Monday morning when we do lab clean, and Cintas delivers the clean product later that day. Now that our inventory is "correct" we don't have to worry too much about running out of a size/garment. Years ago, when we were using disposable, the changeout of the suits was up to the user...........you'd see the entire spectrum in the cleanroom in regard to wear levels......from torn suits to new ones every single day. One of the advantages of using the washable garments for us is that it allowed us to modify them with fasteners on the back so that we can slowly migrate to name tags (sports jersey style) for all of the users as a way to easily identify who's in the cleanroom with our video cameras. Currently only our staff have the back tags. For the disposable suits we use on occasion, we're currently using a Dupont Tyvek (Micro-Clean 2-1-2) product, but are actively looking at a Kimberly Clark A5 product. Dennis Schweiger University of Michigan Lurie Nanofabrication Facility 734.647.2055 Ofc "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong? On Mon, Jun 24, 2013 at 12:23 PM, Everly, Richard wrote: > NREC at USF operates a class 1000 cleanroom servicing about 10-20 students > per week with about 40-60 cleanroom entries per week. We have 3 sets of 20 > gowns that we rotate out at regular intervals for cleaning. We currently > have our gowns cleaned by mail order but the current vendor wants to > increase our contract rate by 10X the current amount, needless to say, this > is not in our budget! The current company only seems interested in > servicing high volume accounts and they want to move us to a minimum > billing fee, based on their other clients usage. > > Right now I'm looking for alternate companies that service the southeast > market that will rent/repair and launder gowns via mail order for a smaller > operation like ours. We've tried to contact several vendors but we've have > not received any replies, based on this lackluster response I can only > assume that the economy has picked up so well that they can afford to turn > away business! > > We've always used laundry services and purchased/rented our own gowns, but > I'm entertaining the idea of the standard coverall disposables but I have a > few questions regarding their use that your feedback will help me determine > if they will be cost effective for a smaller operation like ours. > > 1. would you consider using the disposable gown more than once, as long as > they are not torn/tattered or soiled? it seems to me they would last for a > few days or maybe even a week. > 2. if you use disposables what is your policy regarding these gowns and > replacement? > 3. what brands/suppliers could you recommend. (I know there are many out > there but I'm relying on the vast experience of Labnet to narrow down the > playing field to a handful of contenders) > > Respectfully, > > > Richard Everly > Research Engineer > Nanotechnology Research and Education Center (NREC) > University of South Florida > Mailstop ENB 118 > 4202 E. Fowler Ave > Tampa, FL 33620 > > PH: 813-974-5365 > FAX: 813-974-3610 > everly at usf.edu > www.nrec.usf.edu > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: U Of M Weekly usage snapshot - Cintas suits.pdf Type: application/pdf Size: 12094 bytes Desc: not available URL: From codreanu at udel.edu Tue Jun 25 10:02:53 2013 From: codreanu at udel.edu (Iulian Codreanu) Date: Tue, 25 Jun 2013 10:02:53 -0400 Subject: [labnetwork] PTB SALES Alcatel 2005SD In-Reply-To: <5F2FCA81-F21C-42D9-B324-634CEE0E34D0@ou.edu> References: <5F2FCA81-F21C-42D9-B324-634CEE0E34D0@ou.edu> Message-ID: <51C9A30D.7040703@udel.edu> Len, I bought a cryo pump and a He compressor from them about 5 years ago. Generally satisfied with their service. Iulian iulian Codreanu, Ph.D. Director of Operations, UD Nanofab 149 Evans Hall Newark, DE 19716 302-831-2784 On 6/24/2013 1:49 PM, Olona, Leonard E. wrote: > Hello fellow colleagues, > > Can anyone provide us with feedback regarding a vacuum company called PTB Sales? > > We are looking to purchase a small roughing pump for an LN2 vacuum jacketed line. > > PTB has a decent price for a refurbished pump. Just wanted to get a feel for how well the company and its equipment service performs. > > Thank you, > > Leonard Olona > Cleanroom Manager > University of Oklahoma > 110 West Boyd > Norman, Oklahoma > 73019 > Desk (405) 325-4374 > Cell. (405) 630-9068 > Len.olona at ou.edu > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From gpl107 at psu.edu Tue Jun 25 13:36:53 2013 From: gpl107 at psu.edu (Lavallee, Guy P.) Date: Tue, 25 Jun 2013 17:36:53 +0000 Subject: [labnetwork] PTB SALES Alcatel 2005SD In-Reply-To: <000f01ce7138$17b26e80$47174b80$@henderson@etchedintimeinc.com> References: <5F2FCA81-F21C-42D9-B324-634CEE0E34D0@ou.edu> <000f01ce7138$17b26e80$47174b80$@henderson@etchedintimeinc.com> Message-ID: Hi Leonard, We here at PSU have also been using PTB for a very long time and have been extremely happy with them. Over the years we have had issues with very few parts that have arrived in a non-operation state for one reason or another and they have always sent us a replacement. Guy Lavallee Penn State University's Nanofabrication Laboratory Lead Etch / Facilitites Engineer Materials Research Institute N-105 Millennium Science Complex (MSC Bldg) University Park, PA 16802 Email: gpl107 at psu.edu Phone: 814-865-9339 Cell: 814-777-0719 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bob Henderson Sent: Monday, June 24, 2013 8:08 PM To: 'Olona, Leonard E.'; labnetwork at mtl.mit.edu Cc: 'Johnson, Matthew B.'; 'Teasdale, Nolan D.'; 'Keay, Joel C.' Subject: Re: [labnetwork] PTB SALES Alcatel 2005SD Leonard: We have used PTB sales for a variety of rebuilds on pumps cryopumps and have purchased some of their used vacuum equipment over the years. We have always found them to be straight forward and when something needed to be repaired under their warranty we had no problems with their service. Bob Henderson EITI -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Olona, Leonard E. Sent: Monday, June 24, 2013 10:50 AM To: labnetwork at mtl.mit.edu Cc: Johnson, Matthew B.; Teasdale, Nolan D.; Keay, Joel C. Subject: [labnetwork] PTB SALES Alcatel 2005SD Hello fellow colleagues, Can anyone provide us with feedback regarding a vacuum company called PTB Sales? We are looking to purchase a small roughing pump for an LN2 vacuum jacketed line. PTB has a decent price for a refurbished pump. Just wanted to get a feel for how well the company and its equipment service performs. Thank you, Leonard Olona Cleanroom Manager University of Oklahoma 110 West Boyd Norman, Oklahoma 73019 Desk (405) 325-4374 Cell. (405) 630-9068 Len.olona at ou.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From hughes at illinois.edu Tue Jun 25 14:25:36 2013 From: hughes at illinois.edu (Hughes, John S) Date: Tue, 25 Jun 2013 18:25:36 +0000 Subject: [labnetwork] gowning services and laundering vs. disposable In-Reply-To: References: Message-ID: Hello Richard, I'll add some slight variations to what you've already heard. We at MNTL use launderable garments, which we own. We originally started with Tyvek disposables, then went to Aramark Cleanroom Services, where they owned the garments. Then, because I didn't like Aramark, we went to ALSCO Cleanroom Services. ALSCO was bought out by Aramark, giving me the justification to buy our own garments and contract with a different laundering service, TEK Products. As Dennis Schweiger mentioned, coming to the right inventory numbers can be very tricky, and our user base has been steadily increasing (~260 users now), making it even more challenging. One big difference in our methods, though, pertains to when we send the garments out for laundering. Each of our cleanroom users has their own cube locker for their garments. Our users are in the cleanrooms anywhere from 0-60+ hours/week, i.e., there's tremendous variability. Rather than change out all the garments on a weekly basis, we use our keycard entry system to track an individual's cleanroom time, and when they reach a (somewhat arbitrary) limit, an email is sent to them letting them know how long it has been since their last garment change. In the email they are asked to acknowledge that they will change out their garment set the next time they come in the cleanrooms, by hitting a button on a web page they are directed to. Clicking the "I agree to change my garments" button resets their timer. It's not foolproof. People could ignore the email, for example, but they'll get another one every day until they respond (and we'll know if they don't, since the emails are also sent to certain MNTL staff). And there's really nothing for them to gain by not changing out their garments on a regular basis. -- John ------------------------------------------------------------- John S. Hughes Office: (217) 333-4674 Associate Director FAX: (217) 244-6375 Laboratory Operations hughes at illinois.edu Micro and Nanotechnology Laboratory University of Illinois at Urbana-Champaign 2000E Micro and Nanotechnology Laboratory 208 North Wright Street Urbana, Illinois 61801 http://mntl.illinois.edu ------------------------------------------------------------- On Jun 24, 2013, at 11:23 AM, "Everly, Richard" > wrote: NREC at USF operates a class 1000 cleanroom servicing about 10-20 students per week with about 40-60 cleanroom entries per week. We have 3 sets of 20 gowns that we rotate out at regular intervals for cleaning. We currently have our gowns cleaned by mail order but the current vendor wants to increase our contract rate by 10X the current amount, needless to say, this is not in our budget! The current company only seems interested in servicing high volume accounts and they want to move us to a minimum billing fee, based on their other clients usage. Right now I'm looking for alternate companies that service the southeast market that will rent/repair and launder gowns via mail order for a smaller operation like ours. We've tried to contact several vendors but we've have not received any replies, based on this lackluster response I can only assume that the economy has picked up so well that they can afford to turn away business! We've always used laundry services and purchased/rented our own gowns, but I'm entertaining the idea of the standard coverall disposables but I have a few questions regarding their use that your feedback will help me determine if they will be cost effective for a smaller operation like ours. 1. would you consider using the disposable gown more than once, as long as they are not torn/tattered or soiled? it seems to me they would last for a few days or maybe even a week. 2. if you use disposables what is your policy regarding these gowns and replacement? 3. what brands/suppliers could you recommend. (I know there are many out there but I'm relying on the vast experience of Labnet to narrow down the playing field to a handful of contenders) Respectfully, Richard Everly Research Engineer Nanotechnology Research and Education Center (NREC) University of South Florida Mailstop ENB 118 4202 E. Fowler Ave Tampa, FL 33620 PH: 813-974-5365 FAX: 813-974-3610 everly at usf.edu www.nrec.usf.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From swagoner at binghamton.edu Thu Jun 27 14:39:46 2013 From: swagoner at binghamton.edu (Shawn Wagoner) Date: Thu, 27 Jun 2013 14:39:46 -0400 Subject: [labnetwork] silane in gas cabinet Message-ID: <018c01ce7365$b35f6e30$1a1e4a90$@edu> Hello, Here in my lab we have a PECVD system that uses 2%silane in argon. The cylinder is in a cabinet in the service chase. The silane shares this cabinet with a bottle of ammonia. The cabinet is connected to the general exhaust that is used throughout the lab. I don't really like the setup but this is how the system was running when I was hired and came to the university. This setup is different from my industrial experience where the silane was outdoors in a bunker. The lab will be moving to a larger cleanroom space. While I will not have an outdoor bunker at the new facility, I will take this opportunity to improve the situation. I intend to purchase a new cabinet for the 2%silane that will allow me to use a cylinder with a pneumatic valve, DISS fitting and a dedicated purge cylinder. This is more in line with my prior experience. Are there any concerns or issues with connecting the cabinet to the common exhaust? Again this new lab only has general exhaust that runs throughout the entire lab. Thanks Shawn Wagoner Shawn Wagoner Director Nanofabrication Laboratory at Binghamton University 607-777-6131 -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Fri Jun 28 11:39:36 2013 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Fri, 28 Jun 2013 15:39:36 +0000 Subject: [labnetwork] silane in gas cabinet In-Reply-To: <018c01ce7365$b35f6e30$1a1e4a90$@edu> References: <018c01ce7365$b35f6e30$1a1e4a90$@edu> Message-ID: Shawn, our facility runs a completely separate Silane exhaust line that is not connected in any manner with our independent acids or solvent exhaust systems. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shawn Wagoner Sent: Thursday, June 27, 2013 2:40 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] silane in gas cabinet Hello, Here in my lab we have a PECVD system that uses 2%silane in argon. The cylinder is in a cabinet in the service chase. The silane shares this cabinet with a bottle of ammonia. The cabinet is connected to the general exhaust that is used throughout the lab. I don't really like the setup but this is how the system was running when I was hired and came to the university. This setup is different from my industrial experience where the silane was outdoors in a bunker. The lab will be moving to a larger cleanroom space. While I will not have an outdoor bunker at the new facility, I will take this opportunity to improve the situation. I intend to purchase a new cabinet for the 2%silane that will allow me to use a cylinder with a pneumatic valve, DISS fitting and a dedicated purge cylinder. This is more in line with my prior experience. Are there any concerns or issues with connecting the cabinet to the common exhaust? Again this new lab only has general exhaust that runs throughout the entire lab. Thanks Shawn Wagoner Shawn Wagoner Director Nanofabrication Laboratory at Binghamton University 607-777-6131 -------------- next part -------------- An HTML attachment was scrubbed... URL: From tbritton at criticalsystemsinc.com Fri Jun 28 12:48:07 2013 From: tbritton at criticalsystemsinc.com (Tom Britton) Date: Fri, 28 Jun 2013 16:48:07 +0000 Subject: [labnetwork] silane in gas cabinet In-Reply-To: <018c01ce7365$b35f6e30$1a1e4a90$@edu> References: <018c01ce7365$b35f6e30$1a1e4a90$@edu> Message-ID: <9820889A26AAC34EBEB01D62DFCEEB2EFCC97B@P3PWEX2MB006.ex2.secureserver.net> Hello Shawn, The short answer is yes, you can connect the cabinet exhaust from two gases to the general exhaust. The long answer is as follows: The two gases in the same cabinet, as you have noted, isn't correct. 2% silane is right on the edge of being classified either as a flammable (1.39% to <2%) or a pyrophoric (2% to 30%). Your ammonia is classified as a Toxic/Corrosive. It also has Flammable characteristics. These can share a general exhaust but should never share a common exhaust from the same cabinet, a common panel, purge or venturi as the potential for cross contamination is very real here. Whether you choose to classify your silane as a pyrophoric or a flammable in this case is up to your safety department. Since 2% is right on the edge, you most likely would not violate the UFC by classifying this as a flammable, but you do need to separate the two cylinders. Most companies put their silane gases in a separate bunker than the other gases. This is how you said you did it at your previous company, which was correct. Having silane separate, with the gas systems complying to CGA Code G-13, would give you the pneumatic cylinder valve, the high flow door (if the cylinder is inside a gas cabinet), the UVIR, regulator bonnets kits and the restricted flow orifice in the cylinder. We can help size the RFO if you would like. If you need pricing on the cabinets, please let me know. Good luck with your project sir. Tom Britton Director of Sales Critical Systems, Inc. 7000 W. Victory Road Boise, ID 83709 Direct: 208-890-1417 Shop: 877-572-5515 www.criticalsystemsinc.com "World Leader in UHP Reconditioned Gas Delivery & Abatement Technologies" From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shawn Wagoner Sent: Thursday, June 27, 2013 12:40 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] silane in gas cabinet Hello, Here in my lab we have a PECVD system that uses 2%silane in argon. The cylinder is in a cabinet in the service chase. The silane shares this cabinet with a bottle of ammonia. The cabinet is connected to the general exhaust that is used throughout the lab. I don't really like the setup but this is how the system was running when I was hired and came to the university. This setup is different from my industrial experience where the silane was outdoors in a bunker. The lab will be moving to a larger cleanroom space. While I will not have an outdoor bunker at the new facility, I will take this opportunity to improve the situation. I intend to purchase a new cabinet for the 2%silane that will allow me to use a cylinder with a pneumatic valve, DISS fitting and a dedicated purge cylinder. This is more in line with my prior experience. Are there any concerns or issues with connecting the cabinet to the common exhaust? Again this new lab only has general exhaust that runs throughout the entire lab. Thanks Shawn Wagoner Shawn Wagoner Director Nanofabrication Laboratory at Binghamton University 607-777-6131 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Fri Jun 28 13:31:58 2013 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Fri, 28 Jun 2013 17:31:58 +0000 Subject: [labnetwork] silane in gas cabinet In-Reply-To: <018c01ce7365$b35f6e30$1a1e4a90$@edu> References: <018c01ce7365$b35f6e30$1a1e4a90$@edu> Message-ID: Hi, Here at Draper we have one exhaust stream for Solvents and one for Corrosive. Silane ends up on the corrosive side. I do not think that you want to mix gases that combust with air in a duct with solvents. Sounds like an accident waiting to happen. Is your duct work plastic or metal? If it is metal I would not be surprised if you have lots of corrosion in a common system. I would be very careful and at least consult the Universities Insurance carrier for an opinion and read up on the NFPA and building codes for your area. Rick Draper Laboratory Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shawn Wagoner Sent: Thursday, June 27, 2013 2:40 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] silane in gas cabinet Hello, Here in my lab we have a PECVD system that uses 2%silane in argon. The cylinder is in a cabinet in the service chase. The silane shares this cabinet with a bottle of ammonia. The cabinet is connected to the general exhaust that is used throughout the lab. I don't really like the setup but this is how the system was running when I was hired and came to the university. This setup is different from my industrial experience where the silane was outdoors in a bunker. The lab will be moving to a larger cleanroom space. While I will not have an outdoor bunker at the new facility, I will take this opportunity to improve the situation. I intend to purchase a new cabinet for the 2%silane that will allow me to use a cylinder with a pneumatic valve, DISS fitting and a dedicated purge cylinder. This is more in line with my prior experience. Are there any concerns or issues with connecting the cabinet to the common exhaust? Again this new lab only has general exhaust that runs throughout the entire lab. Thanks Shawn Wagoner Shawn Wagoner Director Nanofabrication Laboratory at Binghamton University 607-777-6131 -------------- next part -------------- An HTML attachment was scrubbed... URL: