[labnetwork] ASE alumina chamber clean procedure

[Morrison, Richard H., Jr.]

Hi,

Here at Draper we use very fine beads to bead blast the cylinder. Then a wipe down with 70% IPA/ 35% DI dry and install. After it is installed we perform a condition, which is just a series of etch/passivation steps. We perform this every year during the annual PM.

Hope this helps.

Rick


Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Errol V. Porter
Sent: Monday, May 06, 2013 3:00 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] ASE alumina chamber clean procedure

Greetings,

I am cleaning an alumina cylinder from an STS (now STPS) advanced silicon etcher and looking for advice on the proper procedure to remove the interior coating. I remember the OEM indicating only a CO2 blast cleaning is needed. I have a reputable vendor indicating a bead-blast, chemical clean, detail and bake is needed to properly condition the part. Has anyone else had to clean an STS ASE alumina chamber before and if so, what procedure/vendor did you use to properly clean the cylinder?

Regards,

Errol Porter
University of Arkansas / HiDEC
700 W. Research Center Blvd
Fayetteville, AR 72701
Tel. (479) 575-2519
Mobile: (479) 236-0693
Fax (479) 575-2719
email: evporte at uark.edu<mailto:evporte at uark.edu>
http://www.hidec.uark.edu<http://www.hidec.uark.edu/>

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