[labnetwork] CVD of silicon nanowires: vendors & particular safety considerations

[Vito Logiudice]

Dear Colleagues,

A colleague is interested in setting up a lab which will include silicon nanowire growth via CVD. I would appreciate the community's feedback on possible equipment vendors as well as insights on any particular operational & safety considerations related to setting up such a capability. While we have in-house experience with typical PECVD & LPCVD processes for SiN, PolySi, etc., none of us here have worked with such nanowire growth systems. We would greatly appreciate hearing from those of you whom have.

Thank you

Regards,
Vito Logiudice
--
Vito Logiudice  M.A.Sc., P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
200 University Avenue West
Waterloo, ON      Canada   N2L 3G1
Tel:  1-519-888-4567  ext. 38703
Email: vlogiudi at uwaterloo.ca<mailto:vlogiudi at uwaterloo.ca>
Website: https://qncfab.uwaterloo.ca/
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