[labnetwork] Bosch etch foreline and pump powder residue question...

[Aebersold,Julia W.]

Ian, we noticed the same when we had to replace our turbo pump (very expensive) and were careful with the byproducts from the buildup from the etching process.  It is recommended and we installed a heater on the line from the roughing/backing pump to the turbo, so that the byproducts do not condense and are properly exhausted.   The particles can also buildup on your foreline valve causing it to become stuck or not actuate.

Cheers!

Julia Aebersold, Ph.D.
MNTC Cleanroom Manager
Shumaker Research Building, Room 233
2210 South Brook Street
University of Louisville
Louisville, KY  40292

502-852-1572
http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ian Harvey
Sent: Monday, November 04, 2013 6:36 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Bosch etch foreline and pump powder residue question...

Dear Labnetwork colleagues,

We are installing a used STS DRIE tool acquired from the used tool market and used for Bosch-Si etch.

We are unsettled by the large amount of white powder collected in the foreline and inside the large turbopump.  The turbo is becoming unbalanced as flakes come off, and we are getting ready to trade in the large maglev pump for a refurb, and clean the forelines.

Does anyone have experience with what the powder is (F-C-S-O / EDS analysis attached), its risks, and how to safely manage it during pump removal, packing and declaration for shipping?

Thanks!

Ian

********************************************
Ian R. Harvey, Ph.D.
Associate Director, Utah Nanofab
 &
Micron Microscopy Core
2511 SMBB (USTAR)
University of Utah
801/585-6162 (voicemail)
801/581-5676 (lab main number)
www.nanofab.utah.edu<http://www.nanofab.utah.edu>

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