[labnetwork] Stress measurement tool vendors

[Morrison, Richard H., Jr.]

Check out ClassOne they sell refurbished Flexus tools and Brumbley South, I have dealt with both companies and they are very good.

Rick

Draper Laboratory
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Nathan Nelson - Fitzpatrick
Sent: Wednesday, October 02, 2013 9:42 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Stress measurement tool vendors

Hi Labnetwork,

We are presently looking into procuring a wafer stress measurement tool that is capable of handling 3"-6" wafers.  Unfortunately, we are having a hard time finding enough vendors for these tools to satisfy our procurement people.  I have already looked into the following vendors with mixed results:

Toho Technology:  Got a quote for the FLX-2320.
Frontier Semiconductor:  Received no feedback from two quote requests for the FSM-128.
BowOptic:  Their website appears to be offline, are they still in business?

>From searching the nnin.org tools database it looks like the FLX-2320 is the dominant tool out there.  Does anyone out there know of other vendors who manufacture similar competitive products?  Any ideas, advice or recommendations would be very welcome.

Thanks in advance,
  -Nathan

--
Nathan Nelson-Fitzpatrick  PhD
Nanofabrication Process Engineer
Quantum NanoFab
University of Waterloo
200 University Avenue West
Waterloo, ON   Canada  N2L 3G1
Ph: +1 519-888-4567 ext. 31796




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