[labnetwork] MOCVD systems

Tue Sep 10 10:45:12 EDT 2013

Hi there!  We are considering the installation of a Veeco E300 MOCVD system into our cleanroom.  We have not had experience with this type of tool and would like to ask the community if they have a system of this type in their cleanroom or in another room due to its size.  Also, if you have any other concerns about operations, nuances, difficulty of operation, maintenance headaches, etc. I would be greatly appreciative.

See everyone at UGIM 2014!

Cheers!

Julia Aebersold, Ph.D.

MNTC Cleanroom Manager

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

(502) 852-1572

http://louisville.edu/micronano/
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