[labnetwork] UARK Under-utilized equipment list

[Errol V. Porter]

Greetings,

As per Mark Heiden's request, I am posting the one tool that fits the criteria described;

JEOL JBX 5500FS E-beam writer

A.      Piece, 50mm, & 100mm cassette's available. (Last service 08/2013)

B.      PMMA primary resist used and characterized.

a.       Primary mode - 4: 50kV, Aperture 2 {1 nA current}

C.      Utilizing Microsoft PC driven software for calibration, design and exposure.

a.       Readily interchangeable to UNIX version for users experienced with that GUI

D.      LINKCAD 7.0 DXF to GDSII  software conversion available on adjacent computer

E.       Recommended third party Beam exposure software not purchased

F.       In-house exposure, Cr/Au metallization and PG Remover lift off service available for samples in wafer form.

a.       Detailed in-situ traveler used during service available upon request.

Regards,

Errol Porter
University of Arkansas / HiDEC
700 W. Research Center Blvd
Fayetteville, AR 72701
Tel. (479) 575-2519
Mobile: (479) 236-0693
Fax (479) 575-2719
email: evporte at uark.edu<mailto:evporte at uark.edu>
http://www.hidec.uark.edu<http://www.hidec.uark.edu/>

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