[labnetwork] 300 mm wafer coating capability

[Bob Henderson]

Try Brewer Science's CEE division. They make inexpensive coating systems
that work well. Bob Henderson

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Ferraguto, Thomas
Sent: Tuesday, April 29, 2014 12:08 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] 300 mm wafer coating capability

 

I have a customer that's looking for coating (spin coating) capability for
300mm wafers. 

 

Does anyone have a resource they could offer or recommend

 

Best Regards

 

 

Thomas S. Ferraguto

ETIC Nanofabrication Laboratory Director

University of Massachusetts Lowell

1 University Avenue

Lowell MA 01854-5120

978-934-1809 land

617-755-0910 mobile

978-934-1014 fax



 

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