From birkanb at sabanciuniv.edu Tue Dec 2 03:26:05 2014 From: birkanb at sabanciuniv.edu (Burak Birkan) Date: Tue, 02 Dec 2014 10:26:05 +0200 Subject: [labnetwork] Handheld particle Counters Message-ID: <547D779D.9070505@sabanciuniv.edu> Dear All, We are in need of a new Hand-held particle counter for our cleanroom, (ISO5-ISO8; 8600 ft2) We plan to use it for the check of ISO5-6 areas before daily routine. We appreciate if you will share your experience about it. -what are the critical factors for choosing one? ( particle counting range, sensitivity, sampling time; etc? -can you sugggest alternative models that you might be using. Thanks in advance, Best Regards. BB -- Burak Birkan Sabanc? University Nanotechnology Research and Application Center Orta Mahalle, ?niversite Caddesi No: 27 34956 Tuzla-?stanbul Office: 0 216 483 9620 Fax: 0 216 483 9885 web:sunum.sabanciuniv.edu Email: birkanb at sabanciuniv.edu From diadiuk at mit.edu Thu Dec 4 08:26:41 2014 From: diadiuk at mit.edu (Vicky Diadiuk) Date: Thu, 4 Dec 2014 08:26:41 -0500 Subject: [labnetwork] Url In-Reply-To: References: Message-ID: Hi, Sure: it's labnetwork at mtl.mit.edu The conf I mentioned is: http://www.cns.fas.harvard.edu/UGIM2014/ the next one will be in 2016 in Utah Best, Vicky On Dec 4, 2014, at 7:56 AM, Panagiotis Dimitrakis wrote: > Goodmorning Vicky > Sorry for my delay but i was running all these days > with the symposium organization. > Good you please send me the url for the website > for cleanroom managers you told me the other days. > > Kind regards > Panos > > -- > Panagiotis Dimitrakis, PhD > Cleanroom Facility Manager > Microelectronics Division > Institute of Advanced Materials, Physicochemical Processes. > Nanotechnology and Microsystems > NCSR "Demokritos" > P. Grigoriou & Neapoleos > P.O.Box 60037 > 153 10 Aghia Paraskevi > GREECE > Tel: +302106503118 > FAX:+302106511723 > URL: http://www.imel.demokritos.gr -------------- next part -------------- An HTML attachment was scrubbed... URL: From bernard at mtl.mit.edu Thu Dec 4 08:56:10 2014 From: bernard at mtl.mit.edu (Bernard Alamariu) Date: Thu, 04 Dec 2014 08:56:10 -0500 Subject: [labnetwork] AGA 8108 RTP for sale Message-ID: <548067FA.3020804@mtl.mit.edu> Hello, We have a fully operational RTP machine for sale: - AG Associates Heatpulse 8108 - Installed into a Class 10 clean room, and used for CMOS processing, only. - Automatic 6" wafers handling. - Gasses: N2, O2, N2O, NH3, Ar / MFC range : 20SLPM. - Pyrometer temperature control: 400C - 1200C The machine was professionally maintained; the service company info available. Please let us know if you have an interest into this system. Thanks, Bernard Bernard Alamariu Research Engineer MTL - MIT bernard at mtl.mit.edu (617)253-8811 -------------- next part -------------- A non-text attachment was scrubbed... Name: RTP_Si.jpg Type: image/jpeg Size: 1500712 bytes Desc: not available URL: From Kolin.Brown at mail.wvu.edu Thu Dec 4 13:02:31 2014 From: Kolin.Brown at mail.wvu.edu (Kolin Brown) Date: Thu, 4 Dec 2014 18:02:31 +0000 Subject: [labnetwork] Piranha Bath Alternatives or Substitutes Message-ID: To all: Currently our Environmental Health and Safety office is creating new disposal procedures for Piranha Bath. They are also encouraging us to find alternative processes. In the past at WVU, we used SummaClean by Malinkrodt Baker as a substitute; however, this product was discontinued about a year ago. Does anyone know of any other Piranha bath substitutes? Kolin Brown -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrweaver at purdue.edu Thu Dec 4 14:20:33 2014 From: jrweaver at purdue.edu (Weaver, John R) Date: Thu, 4 Dec 2014 19:20:33 +0000 Subject: [labnetwork] Url In-Reply-To: References: Message-ID: <6A848421F695C54A9210C1A873C96AC2250DD9F1@WPVEXCMBX04.purdue.lcl> Panos - A lot of the UGIM people come to the IEST meeting in May, especially in non-UGIM years. We have an "Operations" track that is similar to UGIM in the odd-numbered years. You can find the information at iest.org => Meetings => ESTECH 2015. John From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vicky Diadiuk Sent: Thursday, December 04, 2014 8:27 AM To: Panagiotis Dimitrakis Cc: labnetwork at mtl.mit.edu Network Subject: Re: [labnetwork] Url Hi, Sure: it's labnetwork at mtl.mit.edu The conf I mentioned is: http://www.cns.fas.harvard.edu/UGIM2014/ the next one will be in 2016 in Utah Best, Vicky On Dec 4, 2014, at 7:56 AM, Panagiotis Dimitrakis wrote: Goodmorning Vicky Sorry for my delay but i was running all these days with the symposium organization. Good you please send me the url for the website for cleanroom managers you told me the other days. Kind regards Panos -- Panagiotis Dimitrakis, PhD Cleanroom Facility Manager Microelectronics Division Institute of Advanced Materials, Physicochemical Processes. Nanotechnology and Microsystems NCSR "Demokritos" P. Grigoriou & Neapoleos P.O.Box 60037 153 10 Aghia Paraskevi GREECE Tel: +302106503118 FAX:+302106511723 URL: http://www.imel.demokritos.gr -------------- next part -------------- An HTML attachment was scrubbed... URL: From matthieu.nannini at mcgill.ca Thu Dec 4 16:15:09 2014 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Thu, 4 Dec 2014 16:15:09 -0500 Subject: [labnetwork] Piranha Bath Alternatives or Substitutes In-Reply-To: References: Message-ID: We used http://www.cyantek.com/nano-strip.php in the past but it?s not much different than Piranha. Matthieu Le 2014-12-04 ? 13:02, Kolin Brown a ?crit : > To all: > > Currently our Environmental Health and Safety office is creating new disposal procedures for Piranha Bath. They are also encouraging us to find alternative processes. In the past at WVU, we used SummaClean by Malinkrodt Baker as a substitute; however, this product was discontinued about a year ago. Does anyone know of any other Piranha bath substitutes? > > Kolin Brown > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From sbhas at uchicago.edu Thu Dec 4 16:29:24 2014 From: sbhas at uchicago.edu (Shivakumar Bhaskaran) Date: Thu, 4 Dec 2014 21:29:24 +0000 Subject: [labnetwork] Piranha Bath Alternatives or Substitutes In-Reply-To: References: Message-ID: I use Nanostrip, mostly of the users at UIUC moved to nanostrip. http://www.cyantek.com/nano-strip.php --Shiva Shivakumar Bhaskaran Searle CleanRoom Manager University of Chicago 5735 S.Ellis, Room 032 Chicago-60637 Ph:773-795-2297 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kolin Brown Sent: Thursday, December 04, 2014 12:03 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Piranha Bath Alternatives or Substitutes To all: Currently our Environmental Health and Safety office is creating new disposal procedures for Piranha Bath. They are also encouraging us to find alternative processes. In the past at WVU, we used SummaClean by Malinkrodt Baker as a substitute; however, this product was discontinued about a year ago. Does anyone know of any other Piranha bath substitutes? Kolin Brown -------------- next part -------------- An HTML attachment was scrubbed... URL: From spaolini at cns.fas.harvard.edu Thu Dec 4 16:36:42 2014 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Thu, 4 Dec 2014 21:36:42 +0000 Subject: [labnetwork] Piranha Bath Alternatives or Substitutes In-Reply-To: References: Message-ID: Kolin, I'm not sure what alternatives are as effective as piranha but I can suggest a couple of methods of safely disposing it, that's assuming you have electro-fusion welded polypropylene drain lines leading to a PH treatment hold. My first choice would be to have a dedicated disposal sink with a dilution drain valve. These valves use city water to mix with the waste at a rate that is much too water rich to enhance more exothermic heat from the sulfuric. Dilution rates vary for the intended purpose, in other words, ratios of 20:1 will ensure a much cooler and diluted waste stream but will drain twice as slow as 10:1. Generally, this type of piping will be OK at temperatures up to 120 Deg. C. and the 20:1 dilution will lessen the shock to the treatment tank. I am reluctant to suggest the second choice as it has a tendency to be less than perfectly safe and that would be the use of an aspirator. Aspirators have built in dilution as a result of the water needed to create the venturi effect. The reason I am reluctant to suggest their use is because of the Teflon "dip" tube used in submerging into the waste, the tube can spring out of the container and "fling" droplets of waste to an undesired place such as a person. I recall some meetings that I had with a particularly large industrial insurance company and how their representatives shunned the use of aspirators and I tend to agree with them. Best of luck, Steve Paolini Equipment Dood Harvard University Center for Nanoscale systems From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kolin Brown Sent: Thursday, December 04, 2014 1:03 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Piranha Bath Alternatives or Substitutes To all: Currently our Environmental Health and Safety office is creating new disposal procedures for Piranha Bath. They are also encouraging us to find alternative processes. In the past at WVU, we used SummaClean by Malinkrodt Baker as a substitute; however, this product was discontinued about a year ago. Does anyone know of any other Piranha bath substitutes? Kolin Brown -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Thu Dec 4 16:40:35 2014 From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu) Date: Thu, 4 Dec 2014 21:40:35 +0000 Subject: [labnetwork] Piranha Bath Alternatives or Substitutes In-Reply-To: References: Message-ID: Our facility uses Nanostrip. Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kolin Brown Sent: Thursday, December 4, 2014 1:03 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Piranha Bath Alternatives or Substitutes To all: Currently our Environmental Health and Safety office is creating new disposal procedures for Piranha Bath. They are also encouraging us to find alternative processes. In the past at WVU, we used SummaClean by Malinkrodt Baker as a substitute; however, this product was discontinued about a year ago. Does anyone know of any other Piranha bath substitutes? Kolin Brown -------------- next part -------------- An HTML attachment was scrubbed... URL: From bernard at mtl.mit.edu Thu Dec 4 19:05:41 2014 From: bernard at mtl.mit.edu (Bernard Alamariu) Date: Thu, 04 Dec 2014 19:05:41 -0500 Subject: [labnetwork] Piranha Bath Alternatives or Substitutes In-Reply-To: References: Message-ID: <5480F6D5.8050306@mtl.mit.edu> Hello, Nanostrip cannot replace Piranha for overall semiconductor substrate cleaning. Nonostrip DOES NOT clean METALS! Pirnha 3:1 H2SO4:H2O2 is a strong acid , cleaning solution for BOTH METAL & ORGANIC contaminants, with an intense hot surfactant action too. It was the cleaning "workhorse" of the semiconductor industry for decades. It was replaced by RCA clean for some applications and still used on large scale; actually the RCA Qurtzware and Teflonware are clened by Pirnaha too. Nanostrip could be used for Photoresist or other organic materials removal indeed, but that is all. There is a false impression that Nanostrip is somehow a weak Piranha; it is not as its reaction with metals is inhibited. It does not even compare with the well known Caro etch, which is a weak Pirnaha ( 1:3) used in the past to final clean the Al pads before sinter ( before the Asher was inveneted), etc. Thanks, Bernard On 12/4/14 1:02 PM, Kolin Brown wrote: > > To all: > > Currently our Environmental Health and Safety office is creating new > disposal procedures for Piranha Bath. They are also encouraging us to > find alternative processes. In the past at WVU, we used SummaClean by > Malinkrodt Baker as a substitute; however, this product was > discontinued about a year ago. Does anyone know of any other Piranha > bath substitutes? > > Kolin Brown > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From Thomas_Ferraguto at uml.edu Tue Dec 9 10:04:20 2014 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas) Date: Tue, 9 Dec 2014 15:04:20 +0000 Subject: [labnetwork] Job Opening at UMass Lowell SEM/FIB- EBeam Specialist Message-ID: Colleagues , We have a Job opening at UMass for a SEM/FIB and E-Beam Tech. 2/3rd of the work will be outside of the clean room in our new Characterization suite on the JEOL FESEM and the Zeiss FIB. The other 1/3 of the job will be in clean room on the Raith 150two E-Beam Write Tool. https://jobs.uml.edu/applicants/jsp/shared/frameset/Frameset.jsp?time=1418136636795 Feel free to call me directly with questions. Best Thomas S. Ferraguto Saab ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell 1 University Avenue Lowell MA 01854-5120 978-934-1809 land 617-755-0910 mobile 978-934-1014 fax [cid:image002.png at 01D01397.7F9D5070] -------------- next part -------------- A non-text attachment was scrubbed... Name: UML Job Description SEM Dec2014.pdf Type: application/octet-stream Size: 103738 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: application/octet-stream Size: 57996 bytes Desc: not available URL: From spaolini at cns.fas.harvard.edu Tue Dec 9 17:55:18 2014 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Tue, 9 Dec 2014 22:55:18 +0000 Subject: [labnetwork] Looking for XeF2 Message-ID: Dear colleagues, Just recently, my custom made Xenon Difluoride etcher has become popular with many of my users and I found myself in the horrible and embarrassing predicament of running out of etchant. Since this is somewhat of a specialty item, lead times are astronomical. Is there anybody out there that can lend me a sample cylinder? I will replace it with an identical new one. The cylinder is aluminum and is 2" diameter by 10.5" long measured from the bottom to the centerline of the male VCR fitting on the valve. Similar or not so similar cylinders can be fitted, it's just a matter of finding one. Thank you in advance. Steve Paolini Equipment Dood Harvard University Center for Nanoscale systems Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From khbeis at uw.edu Wed Dec 10 00:06:33 2014 From: khbeis at uw.edu (Michael Khbeis) Date: Tue, 9 Dec 2014 21:06:33 -0800 Subject: [labnetwork] Looking for XeF2 In-Reply-To: References: Message-ID: Steve, Call Pelchem in South Africa, I found them to be very responsive and economical when in short order. Best, Dr. Michael Khbeis Associate Director, Washington Nanofabrication Facility (WNF) National Nanotechnology Infrastructure Network (NNIN) University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (F) 206.221.1681 (C) 443.254.5192 khbeis at uw.edu www.wnf.washington.edu/ > On Dec 9, 2014, at 2:55 PM, Paolini, Steven wrote: > > Dear colleagues, > Just recently, my custom made Xenon Difluoride etcher has become popular with many of my users and I found myself in the horrible and embarrassing predicament of running out of etchant. Since this is somewhat of a specialty item, lead times are astronomical. Is there anybody out there that can lend me a sample cylinder? I will replace it with an identical new one. The cylinder is aluminum and is 2? diameter by 10.5? long measured from the bottom to the centerline of the male VCR fitting on the valve. Similar or not so similar cylinders can be fitted, it?s just a matter of finding one. > Thank you in advance. > Steve Paolini > Equipment Dood > Harvard University Center for Nanoscale systems > > Steve Paolini > Principal Equipment Engineer > Harvard University Center for Nanoscale Systems > 617- 496- 9816 > spaolini at cns.fas.harvard.edu > www.cns.fas.harvard.edu > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From shott at stanford.edu Wed Dec 10 08:43:50 2014 From: shott at stanford.edu (John Shott) Date: Wed, 10 Dec 2014 05:43:50 -0800 Subject: [labnetwork] Fwd: Re: Looking for XeF2 In-Reply-To: <201412100719.sBA7F2Ir022432@pps03-smtp.stanford.edu> References: <201412100719.sBA7F2Ir022432@pps03-smtp.stanford.edu> Message-ID: <54884E16.2050509@stanford.edu> Steve: Our etch guy, Elmer Enriquez, has a spare 600g Al cylinder of XeF2 on the shelf. If you have no better, closer offer, we can send you that one. While I haven't checked, I suspect that this can only sent by truck which will take a few days from California, but we should be able to get it on a truck today, if desired. Elmer will contact you directly do discuss details. Have a good day, John -------- Forwarded Message -------- Subject: Re: [labnetwork] Looking for XeF2 Date: Wed, 10 Dec 2014 07:17:43 +0000 From: elmere at stanford.edu To: John Shott CC: Mary Tang Hi John, Yes, we do have a spare, 600 g, in an Al cylinder. I can try to ship it out tomorrow. I purchased this cylinder from Synquest. I'll send the contact info tomorrow as well. Elmer Sent from Windows Mail *From:* John Shott *Sent:* ?Tuesday?, ?December? ?9?, ?2014 ?5?:?49? ?PM *To:* Elmer Enriquez *Cc:* Mary Tang Elmer: Do we have any spare XeF2 on hand that we might be able to loan Steve Paolini at Harvard? If so, I'm sure that he'd be more than grateful. Alternatively, if you have any suppliers that he may not be aware of, I'm sure that would help too. Thanks, John -------- Forwarded Message -------- Subject: [labnetwork] Looking for XeF2 Date: Tue, 9 Dec 2014 22:55:18 +0000 From: Paolini, Steven To: Fab Network (labnetwork at mtl.mit.edu) Dear colleagues, Just recently, my custom made Xenon Difluoride etcher has become popular with many of my users and I found myself in the horrible and embarrassing predicament of running out of etchant. Since this is somewhat of a specialty item, lead times are astronomical. Is there anybody out there that can lend me a sample cylinder? I will replace it with an identical new one. The cylinder is aluminum and is 2? diameter by 10.5? long measured from the bottom to the centerline of the male VCR fitting on the valve. Similar or not so similar cylinders can be fitted, it?s just a matter of finding one. Thank you in advance. Steve Paolini Equipment Dood Harvard University Center for Nanoscale systems Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Wed Dec 10 09:11:28 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Wed, 10 Dec 2014 14:11:28 +0000 Subject: [labnetwork] Looking for XeF2 In-Reply-To: References: Message-ID: The material is only available from Pellchem in South Africa, we got the past bottle through Middlesex Gas (Draper supplier of gases). Rick From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven Sent: Tuesday, December 09, 2014 5:55 PM To: Fab Network (labnetwork at mtl.mit.edu) Subject: [labnetwork] Looking for XeF2 Dear colleagues, Just recently, my custom made Xenon Difluoride etcher has become popular with many of my users and I found myself in the horrible and embarrassing predicament of running out of etchant. Since this is somewhat of a specialty item, lead times are astronomical. Is there anybody out there that can lend me a sample cylinder? I will replace it with an identical new one. The cylinder is aluminum and is 2" diameter by 10.5" long measured from the bottom to the centerline of the male VCR fitting on the valve. Similar or not so similar cylinders can be fitted, it's just a matter of finding one. Thank you in advance. Steve Paolini Equipment Dood Harvard University Center for Nanoscale systems Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From csmiller at anl.gov Wed Dec 10 09:30:16 2014 From: csmiller at anl.gov (Miller, Christina S.) Date: Wed, 10 Dec 2014 14:30:16 +0000 Subject: [labnetwork] Looking for XeF2 In-Reply-To: References: Message-ID: <3A3CA1470756B442A67E39DE9E75F7B3638727F7@BUTKUS.anl.gov> I got a bottle from Air Products. You have to ask about it. Suzanne From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr. Sent: Wednesday, December 10, 2014 8:11 AM To: Paolini, Steven; Fab Network (labnetwork at mtl.mit.edu) Subject: Re: [labnetwork] Looking for XeF2 The material is only available from Pellchem in South Africa, we got the past bottle through Middlesex Gas (Draper supplier of gases). Rick From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven Sent: Tuesday, December 09, 2014 5:55 PM To: Fab Network (labnetwork at mtl.mit.edu) Subject: [labnetwork] Looking for XeF2 Dear colleagues, Just recently, my custom made Xenon Difluoride etcher has become popular with many of my users and I found myself in the horrible and embarrassing predicament of running out of etchant. Since this is somewhat of a specialty item, lead times are astronomical. Is there anybody out there that can lend me a sample cylinder? I will replace it with an identical new one. The cylinder is aluminum and is 2" diameter by 10.5" long measured from the bottom to the centerline of the male VCR fitting on the valve. Similar or not so similar cylinders can be fitted, it's just a matter of finding one. Thank you in advance. Steve Paolini Equipment Dood Harvard University Center for Nanoscale systems Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From mcrain3 at gmail.com Wed Dec 10 09:48:12 2014 From: mcrain3 at gmail.com (mark crain) Date: Wed, 10 Dec 2014 09:48:12 -0500 Subject: [labnetwork] Looking for XeF2 In-Reply-To: References: Message-ID: I see that xenon difluoride can be purchased from Alfa Aesar. Has anyone consulted with the chemical supplier, their chemistry departments, or environmental health and safety to develop a protocol for reloading the canister with the crystals? Best Regards, Mark Mark Crain University of Louisville On Wed, Dec 10, 2014 at 9:11 AM, Morrison, Richard H., Jr. < rmorrison at draper.com> wrote: > The material is only available from Pellchem in South Africa, we got the > past bottle through Middlesex Gas (Draper supplier of gases). > > > > Rick > > > > > > *From:* labnetwork-bounces at mtl.mit.edu [mailto: > labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Paolini, Steven > *Sent:* Tuesday, December 09, 2014 5:55 PM > *To:* Fab Network (labnetwork at mtl.mit.edu) > *Subject:* [labnetwork] Looking for XeF2 > > > > Dear colleagues, > > Just recently, my custom made Xenon Difluoride etcher has become > popular with many of my users and I found myself in the horrible and > embarrassing predicament of running out of etchant. Since this is somewhat > of a specialty item, lead times are astronomical. Is there anybody out > there that can lend me a sample cylinder? I will replace it with an > identical new one. The cylinder is aluminum and is 2? diameter by 10.5? > long measured from the bottom to the centerline of the male VCR fitting on > the valve. Similar or not so similar cylinders can be fitted, it?s just a > matter of finding one. > > Thank you in advance. > > Steve Paolini > > Equipment Dood > > Harvard University Center for Nanoscale systems > > > > Steve Paolini > > Principal Equipment Engineer > > Harvard University Center for Nanoscale Systems > > 617- 496- 9816 > > spaolini at cns.fas.harvard.edu > > www.cns.fas.harvard.edu > > > ------------------------------ > Notice: This email and any attachments may contain proprietary (Draper > non-public) and/or export-controlled information of Draper Laboratory. If > you are not the intended recipient of this email, please immediately notify > the sender by replying to this email and immediately destroy all copies of > this email. > ------------------------------ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From bic at mtl.mit.edu Wed Dec 10 14:44:20 2014 From: bic at mtl.mit.edu (Bob Bicchieri) Date: Wed, 10 Dec 2014 14:44:20 -0500 Subject: [labnetwork] Looking for XeF2 In-Reply-To: References: Message-ID: <00c401d014b1$b1234530$1369cf90$@mtl.mit.edu> Hi, ~$100/gm through Sigma-Aldrich and $50/gm from Alfa Aesar. I buy it from Pelchem (South Africa) ~1,000/200gms and ~$1,000 for Hazardous shipping (and it has a higher purity) Regards, Bob ----------------------------------------------------------------- Robert J. Bicchieri Research Specialist Massachusetts Institute of Technology Microsystems Technology Laboratories 60 Vassar St. Bldg. 39-215 Cambridge, MA 02139 Phone 617.253.6418 Fax 617.258.8500 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of mark crain Sent: Wednesday, December 10, 2014 9:48 AM To: Morrison, Richard H., Jr. Cc: Fab Network (labnetwork at mtl.mit.edu) Subject: Re: [labnetwork] Looking for XeF2 I see that xenon difluoride can be purchased from Alfa Aesar. Has anyone consulted with the chemical supplier, their chemistry departments, or environmental health and safety to develop a protocol for reloading the canister with the crystals? Best Regards, Mark Mark Crain University of Louisville On Wed, Dec 10, 2014 at 9:11 AM, Morrison, Richard H., Jr. wrote: The material is only available from Pellchem in South Africa, we got the past bottle through Middlesex Gas (Draper supplier of gases). Rick From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven Sent: Tuesday, December 09, 2014 5:55 PM To: Fab Network (labnetwork at mtl.mit.edu) Subject: [labnetwork] Looking for XeF2 Dear colleagues, Just recently, my custom made Xenon Difluoride etcher has become popular with many of my users and I found myself in the horrible and embarrassing predicament of running out of etchant. Since this is somewhat of a specialty item, lead times are astronomical. Is there anybody out there that can lend me a sample cylinder? I will replace it with an identical new one. The cylinder is aluminum and is 2? diameter by 10.5? long measured from the bottom to the centerline of the male VCR fitting on the valve. Similar or not so similar cylinders can be fitted, it?s just a matter of finding one. Thank you in advance. Steve Paolini Equipment Dood Harvard University Center for Nanoscale systems Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu _____ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. _____ -------------- next part -------------- An HTML attachment was scrubbed... URL: From spaolini at cns.fas.harvard.edu Wed Dec 10 15:16:52 2014 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Wed, 10 Dec 2014 20:16:52 +0000 Subject: [labnetwork] XeF2 woes Message-ID: A mighty thanks to all the responses I received for my situation! I have a solution in place now. Labnetwork is a wonderful tool for communicating and reaching out to folks employed in our business. My appreciation for all of you is immense. Thanks again! Steve Paolini Equipment Dood Harvard University Center for Nanoscale systems Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From kakupcho at wisc.edu Wed Dec 10 16:33:23 2014 From: kakupcho at wisc.edu (Kurt Kupcho) Date: Wed, 10 Dec 2014 15:33:23 -0600 Subject: [labnetwork] Looking for XeF2 In-Reply-To: <00c401d014b1$b1234530$1369cf90$@mtl.mit.edu> References: <00c401d014b1$b1234530$1369cf90$@mtl.mit.edu> Message-ID: <000f01d014c0$ed153210$c73f9630$@wisc.edu> I get ours from Linde in Pennsylvania. $7.50/gram and it ships from Pelchem in South Africa. Took about 2 weeks to get here. The bottle the XeF2 was in was $280 and the air freight was $1800. - Kurt --------------------------------------------------- Kurt Kupcho WCAM Instrumentation/Process Engineer 3110 Engineering Centers Building 1550 Engineering Drive Madison, WI 53706 T: (608)262-2982 E: kakupcho at wisc.edu http://wcam.engr.wisc.edu/logos/pics/wcam420x80.png From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bob Bicchieri Sent: Wednesday, December 10, 2014 1:44 PM To: 'mark crain'; 'Morrison, Richard H., Jr.' Cc: 'Fab Network' Subject: Re: [labnetwork] Looking for XeF2 Hi, ~$100/gm through Sigma-Aldrich and $50/gm from Alfa Aesar. I buy it from Pelchem (South Africa) ~1,000/200gms and ~$1,000 for Hazardous shipping (and it has a higher purity) Regards, Bob ----------------------------------------------------------------- Robert J. Bicchieri Research Specialist Massachusetts Institute of Technology Microsystems Technology Laboratories 60 Vassar St. Bldg. 39-215 Cambridge, MA 02139 Phone 617.253.6418 Fax 617.258.8500 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of mark crain Sent: Wednesday, December 10, 2014 9:48 AM To: Morrison, Richard H., Jr. Cc: Fab Network (labnetwork at mtl.mit.edu) Subject: Re: [labnetwork] Looking for XeF2 I see that xenon difluoride can be purchased from Alfa Aesar. Has anyone consulted with the chemical supplier, their chemistry departments, or environmental health and safety to develop a protocol for reloading the canister with the crystals? Best Regards, Mark Mark Crain University of Louisville On Wed, Dec 10, 2014 at 9:11 AM, Morrison, Richard H., Jr. wrote: The material is only available from Pellchem in South Africa, we got the past bottle through Middlesex Gas (Draper supplier of gases). Rick From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven Sent: Tuesday, December 09, 2014 5:55 PM To: Fab Network (labnetwork at mtl.mit.edu) Subject: [labnetwork] Looking for XeF2 Dear colleagues, Just recently, my custom made Xenon Difluoride etcher has become popular with many of my users and I found myself in the horrible and embarrassing predicament of running out of etchant. Since this is somewhat of a specialty item, lead times are astronomical. Is there anybody out there that can lend me a sample cylinder? I will replace it with an identical new one. The cylinder is aluminum and is 2? diameter by 10.5? long measured from the bottom to the centerline of the male VCR fitting on the valve. Similar or not so similar cylinders can be fitted, it?s just a matter of finding one. Thank you in advance. Steve Paolini Equipment Dood Harvard University Center for Nanoscale systems Steve Paolini Principal Equipment Engineer Harvard University Center for Nanoscale Systems 617- 496- 9816 spaolini at cns.fas.harvard.edu www.cns.fas.harvard.edu _____ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. _____ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 23961 bytes Desc: not available URL: From rmorrison at draper.com Fri Dec 12 11:18:29 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Fri, 12 Dec 2014 16:18:29 +0000 Subject: [labnetwork] Silicon wafer etch Message-ID: Hi Everyone, We have a project here that needs to wet etch a 150mm wafer from 50um to 10um thick. Do any of you have a wet tool that we could try to use to get this done. We are looking at a SSEC tool but our equipment budget is exhausted until next year and we need to get some wafers etched. We want to use a Phosphoric/Nitric/HF mix. Thanks in advance Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Mon Dec 15 17:18:36 2014 From: julia.aebersold at louisville.edu (julia.aebersold at louisville.edu) Date: Mon, 15 Dec 2014 22:18:36 +0000 Subject: [labnetwork] Happy Holidays! Message-ID: Happy Holidays to my fellow cleanroom compadres! May you always have graduate students who clean up after themselves and respect equipment, a reduced amount of e-mail, funds your service contracts, an understanding administration and good relations with your faculty. :) Cheers! Julia Aebersold, Ph.D. Cleanroom Manager Micro/Nano Technology Center University of Louisville Shumaker Research Building, Room 233 2210 South Brook Street Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Paolini, Steven Sent: Thursday, December 4, 2014 4:37 PM To: Kolin Brown; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Piranha Bath Alternatives or Substitutes Kolin, I'm not sure what alternatives are as effective as piranha but I can suggest a couple of methods of safely disposing it, that's assuming you have electro-fusion welded polypropylene drain lines leading to a PH treatment hold. My first choice would be to have a dedicated disposal sink with a dilution drain valve. These valves use city water to mix with the waste at a rate that is much too water rich to enhance more exothermic heat from the sulfuric. Dilution rates vary for the intended purpose, in other words, ratios of 20:1 will ensure a much cooler and diluted waste stream but will drain twice as slow as 10:1. Generally, this type of piping will be OK at temperatures up to 120 Deg. C. and the 20:1 dilution will lessen the shock to the treatment tank. I am reluctant to suggest the second choice as it has a tendency to be less than perfectly safe and that would be the use of an aspirator. Aspirators have built in dilution as a result of the water needed to create the venturi effect. The reason I am reluctant to suggest their use is because of the Teflon "dip" tube used in submerging into the waste, the tube can spring out of the container and "fling" droplets of waste to an undesired place such as a person. I recall some meetings that I had with a particularly large industrial insurance company and how their representatives shunned the use of aspirators and I tend to agree with them. Best of luck, Steve Paolini Equipment Dood Harvard University Center for Nanoscale systems From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kolin Brown Sent: Thursday, December 04, 2014 1:03 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Piranha Bath Alternatives or Substitutes To all: Currently our Environmental Health and Safety office is creating new disposal procedures for Piranha Bath. They are also encouraging us to find alternative processes. In the past at WVU, we used SummaClean by Malinkrodt Baker as a substitute; however, this product was discontinued about a year ago. Does anyone know of any other Piranha bath substitutes? Kolin Brown -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: 20141215_154045.jpg Type: image/jpeg Size: 2475835 bytes Desc: 20141215_154045.jpg URL: From prnelson at csupomona.edu Mon Dec 15 17:36:07 2014 From: prnelson at csupomona.edu (Phyllis R. Nelson) Date: Mon, 15 Dec 2014 14:36:07 -0800 Subject: [labnetwork] Looking for a few FZ Si wafers Message-ID: <954E2EE4772C764984652F546722C8041167575E53@EXCH03.win.csupomona.edu> Hi all, We have an immediate need for a few 100 FZ Si wafers with as low a carbon content as possible. Two or three 6" or 8" diameter would meet our current need. Either n- or p-type with fairly high resistivity would be best, but those are secondary considerations. Any leads welcome. Happy Holidays! -Phyllis Phyllis R. Nelson, PhD Professor and Chair, Electrical and Computer Engineering Co-Director, Center for Macromolecular Modeling and Materials Design California State Polytechnic University, Pomona email: prnelson at cpp dot edu office: 9-407 phone: (909) 869-2649 Our university is changing domain names from csupomona to cpp. Please update my email address. From matthieu.nannini at mcgill.ca Tue Dec 16 23:33:03 2014 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Wed, 17 Dec 2014 04:33:03 +0000 Subject: [labnetwork] Bending coaxial References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> Message-ID: Dear colleagues, A local company is proposing to bend coaxial SS tubing to install a double containment gas line thus removing the need for welded 90? elbows. did you ever see that ? Any comment would be helpful ! Thanks Matthieu Nannini D?but du message r?exp?di? : De: "Matthieu Nannini, Dr." > Objet: Bending coaxial Date: 15 d?cembre 2014 15:31:10 UTC?5 ?: Tom Britton > Hi tom, A local company here can bend coaxial tubing. They quoted me 4800$ for the 2 lines BCl3 and SiCl4. What do you think of bending ? They told me the 1/4 wasn?t kinked at all. Matthieu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Coude plier avec bulkhead adaptateur.pdf Type: application/pdf Size: 423616 bytes Desc: Coude plier avec bulkhead adaptateur.pdf URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: coupe interieur.pdf Type: application/pdf Size: 389370 bytes Desc: coupe interieur.pdf URL: From olinx034 at umn.edu Wed Dec 17 08:30:16 2014 From: olinx034 at umn.edu (Gary Olin) Date: Wed, 17 Dec 2014 07:30:16 -0600 Subject: [labnetwork] Bending coaxial In-Reply-To: References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> Message-ID: Hi Matthieu, That is how double contained lines are commonly done. I have plenty of it in my facilities and had it done that way in the commercial semiconductor fab I used to work at. The 1/4 inch line is slipped inside the 1/2 inch line and they are bent together. I can go into more detail of how it is done if you want to contact me directly but I don't want to bore the rest of the community. The price you have listed isn't out of the ordinary either. Everyone have a happy holiday, Gary Gary Olin Maintenance Supervisor Minnesota Nano Center University of Minnesota olinx034 at umn.edu (612) 625-9780 On Tue, Dec 16, 2014 at 10:33 PM, Matthieu Nannini, Dr. < matthieu.nannini at mcgill.ca> wrote: > > Dear colleagues, > > A local company is proposing to bend coaxial SS tubing to install a > double containment gas line thus removing the need for welded 90? elbows. > did you ever see that ? Any comment would be helpful ! > > Thanks > > Matthieu Nannini > > D?but du message r?exp?di? : > > *De: *"Matthieu Nannini, Dr." > *Objet: **Bending coaxial* > *Date: *15 d?cembre 2014 15:31:10 UTC?5 > *?: *Tom Britton > > Hi tom, > > A local company here can bend coaxial tubing. They quoted me 4800$ for the > 2 lines BCl3 and SiCl4. > > What do you think of bending ? They told me the 1/4 wasn?t kinked at all. > > Matthieu > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Wed Dec 17 08:43:25 2014 From: schweig at umich.edu (Dennis Schweiger) Date: Wed, 17 Dec 2014 08:43:25 -0500 Subject: [labnetwork] Bending coaxial Message-ID: Matthieu, that's typical of the way we've installed it at UofM, and how I've done it on the outside (tens of thousands of feet of tubing). Just make sure they use a bender that yields a radius of 10 times the diameter of the carrier (inner) tube. Also make sure they use centering clips for the inner tubing at every weld joint on the external jacket. You don't want to weld the two tubes together....... I'd recommend that you look at some of their work (at other customers) for neatness, uniformity, as well as attention to detail. Make sure you have them generate weld coupons you can inspect for all of their work/sizes. You definitely don't want any "sugaring" on the inside of your carrier tube, especially with reactive gases. Dennis Schweiger University of Michigan/LNF 734.647.2055 Ofc On Tue, Dec 16, 2014 at 11:33 PM, Matthieu Nannini, Dr. < matthieu.nannini at mcgill.ca> wrote: > > Dear colleagues, > > A local company is proposing to bend coaxial SS tubing to install a > double containment gas line thus removing the need for welded 90? elbows. > did you ever see that ? Any comment would be helpful ! > > Thanks > > Matthieu Nannini > > D?but du message r?exp?di? : > > *De: *"Matthieu Nannini, Dr." > *Objet: **Bending coaxial* > *Date: *15 d?cembre 2014 15:31:10 UTC?5 > *?: *Tom Britton > > Hi tom, > > A local company here can bend coaxial tubing. They quoted me 4800$ for the > 2 lines BCl3 and SiCl4. > > What do you think of bending ? They told me the 1/4 wasn?t kinked at all. > > Matthieu > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrweaver at purdue.edu Wed Dec 17 09:00:47 2014 From: jrweaver at purdue.edu (Weaver, John R) Date: Wed, 17 Dec 2014 14:00:47 +0000 Subject: [labnetwork] Bending coaxial In-Reply-To: References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> Message-ID: <6A848421F695C54A9210C1A873C96AC2250F51DF@WPVEXCMBX04.purdue.lcl> Bending electropolished tubing can be acceptable as long as one is careful in the process, and keeps the bending radius to no less than 10x the tubing diameter. Electropolishing tubing leaves the internal surfaces of the tubing more brittle, and a hard bend of less than 10x the tubing diameter can cause microfractures in the surface. These microfractures can cause particles to break off the internal surfaces and become entrained in the gas stream. John R. Weaver Strategic Facilities Officer Birck Nanotechnology Center 1205 West State Street West Lafayette IN 47907 (765) 494-5494 jrweaver at purdue.edu nano.purdue.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Tuesday, December 16, 2014 11:33 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Bending coaxial Dear colleagues, A local company is proposing to bend coaxial SS tubing to install a double containment gas line thus removing the need for welded 90? elbows. did you ever see that ? Any comment would be helpful ! Thanks Matthieu Nannini D?but du message r?exp?di? : De: "Matthieu Nannini, Dr." > Objet: Bending coaxial Date: 15 d?cembre 2014 15:31:10 UTC?5 ?: Tom Britton > Hi tom, A local company here can bend coaxial tubing. They quoted me 4800$ for the 2 lines BCl3 and SiCl4. What do you think of bending ? They told me the 1/4 wasn?t kinked at all. Matthieu -------------- next part -------------- An HTML attachment was scrubbed... URL: From myoung6 at nd.edu Wed Dec 17 09:20:08 2014 From: myoung6 at nd.edu (Mike Young) Date: Wed, 17 Dec 2014 09:20:08 -0500 Subject: [labnetwork] Bending coaxial In-Reply-To: References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> Message-ID: Matthieu, our piping contractor was able to do this, and apparently the double-wall tubing is designed for this, PROVIDED one uses the proper, larger, bending radius. Said radius is larger (by how much I am not sure) than the minimum for the outer-wall tube by itself. ?Mike > On Dec 16, 2014, at 11:33 PM, Matthieu Nannini, Dr. wrote: > > Dear colleagues, > > A local company is proposing to bend coaxial SS tubing to install a double containment gas line thus removing the need for welded 90? elbows. did you ever see that ? Any comment would be helpful ! > > Thanks > > Matthieu Nannini > > D?but du message r?exp?di? : > >> De: "Matthieu Nannini, Dr." > >> Objet: Bending coaxial >> Date: 15 d?cembre 2014 15:31:10 UTC?5 >> ?: Tom Britton > >> >> Hi tom, >> >> A local company here can bend coaxial tubing. They quoted me 4800$ for the 2 lines BCl3 and SiCl4. >> >> What do you think of bending ? They told me the 1/4 wasn?t kinked at all. >> >> Matthieu >> > > > > -- Michael P. Young (574) 631-3268 (office) Nanofabrication Specialist (574) 631-4393 (fax) Department of Electrical Engineering (765) 637-6302 (cell) University of Notre Dame mike.young at nd.edu B-38 Stinson-Remick Hall Notre Dame, IN 46556-5637 -------------- next part -------------- An HTML attachment was scrubbed... URL: From ccheney at infinityhps.com Wed Dec 17 10:21:06 2014 From: ccheney at infinityhps.com (Craig Cheney) Date: Wed, 17 Dec 2014 09:21:06 -0600 Subject: [labnetwork] Bending coaxial In-Reply-To: References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> Message-ID: <015f01d01a0d$17b661f0$472325d0$@infinityhps.com> Matthieu, We specialize in these types of systems and build them on a regular basis. When bending tubing the first question you have to ask is, what is the purity and/or reactivity of the gas that you going to be running through the gas lines, and what is the quality of the tubing (carrier tubing) that is going to be bent. If you are going to be using electro-polished tubing for the carrier tubing which I assume you are, given the two gases listed. Then you have to take into consideration what happens when you bend electro-polished tubing. Even with a low radius tube bender you will create defects in the electro-polish that can lead to problems down the road. It has been shown that even with a low radius tubing bender that you will induce micro defects into the plating on the interior of tubing that can create nucleation points that can lead to bigger problems down the road such as, particles, corrosion, and gas contamination. If you are starting out with a gas that is not very pure (99.9%) then you can probably live with some of the problems that will develop over time. But given the nature of the two gases listed you have to take into consideration the reactivity of those two gases. Given the nature of the two gases being highly corrosive that will cause the gas line to deteriorate over time, and cause bigger problems. We would highly suggest that you use high quality electro-polished tubing as well as high quality pre-manufactured electro-polished coaxial weld fittings with welded sleeves (which is code in the U.S. for those two gases) and not mechanical sleeves. I hope that helps and let me know if you have any further questions. Thank you, Craig Cheney Description: cid:image001.jpg at 01C7E19F.47FFBAE0 Desk: (608)834-4200 Fax: (608)834-4299 Cell: (608)438-8714 This e-mail transmission and any attachments to it are intended solely for the use of the individual or entity to whom it is addressed and may contain confidential and privileged information. If you are not the intended recipient, your use, forwarding, printing, storing, disseminating, distribution, or copying of this communication is prohibited. If you received this communication in error, please notify the sender immediately by replying to this message and delete it from your computer. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Tuesday, December 16, 2014 10:33 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Bending coaxial Dear colleagues, A local company is proposing to bend coaxial SS tubing to install a double containment gas line thus removing the need for welded 90? elbows. did you ever see that ? Any comment would be helpful ! Thanks Matthieu Nannini D?but du message r?exp?di? : De: "Matthieu Nannini, Dr." Objet: Bending coaxial Date: 15 d?cembre 2014 15:31:10 UTC?5 ?: Tom Britton Hi tom, A local company here can bend coaxial tubing. They quoted me 4800$ for the 2 lines BCl3 and SiCl4. What do you think of bending ? They told me the 1/4 wasn?t kinked at all. Matthieu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 5517 bytes Desc: not available URL: From shott at stanford.edu Wed Dec 17 10:21:37 2014 From: shott at stanford.edu (John Shott) Date: Wed, 17 Dec 2014 07:21:37 -0800 Subject: [labnetwork] Bending coaxial In-Reply-To: References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> Message-ID: <54919F81.6040405@stanford.edu> Matt: While our facility is older than most, we have lots of bent SS coaxial lines. We have a total of about 12 coaxial lines going from our bunkers into our clean room. My guess is that we have on the order of 100 coaxial 90 degree bends before our lines enter the building, another 100 as they are routed under our subfab, and probably another 25-50 once they are in the clean room. In the great majority of cases, these were bent on a 1 1/2" radius mandel ... even though I suspect that new facilities will have used a larger radius bender. Note: while we have a handful of welded tees, I don't believe that we have a single welded coaxial elbow. A simple test would be to bend a piece of 1/4" tubing (well, possibly the 6 mm ...) in a tubing bender with a 1/2" mandrel (or metric equivalent). I presume that you are worried about kinking, but I believe that you'll find that the 1/2" mandrel works fine on the smaller diameter tubing and that when you are bending coaxial tubing, the inner wall of the larger diameter tubing (which is typically 0.0.98" (over 2 mm) smaller than the 1/2" mandrel) serves as the mandrel for the inner tubing. At least that is our experience. Good luck, John On 12/16/2014 8:33 PM, Matthieu Nannini, Dr. wrote: > Dear colleagues, > > A local company is proposing to bend coaxial SS tubing to install a > double containment gas line thus removing the need for welded 90? > elbows. did you ever see that ? Any comment would be helpful ! > > Thanks > > Matthieu Nannini > > D?but du message r?exp?di? : > >> *De: *"Matthieu Nannini, Dr." > > >> *Objet: **Bending coaxial* >> *Date: *15 d?cembre 2014 15:31:10 UTC?5 >> *?: *Tom Britton > > >> >> Hi tom, >> >> A local company here can bend coaxial tubing. They quoted me 4800$ >> for the 2 lines BCl3 and SiCl4. >> >> What do you think of bending ? They told me the 1/4 wasn?t kinked at all. >> >> Matthieu >> > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From spaolini at cns.fas.harvard.edu Wed Dec 17 10:27:57 2014 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Wed, 17 Dec 2014 15:27:57 +0000 Subject: [labnetwork] Bending coaxial In-Reply-To: References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> Message-ID: Matthiew, Bending coaxial tubing is not only a standard procedure but the recommended one. Any method that reduces the amount of joints is preferred. Coaxial tubing is manufactured with ?spacers? every few inches to keep the inner tube centered in the jacket. These spacers pose no problem when bending provided the bends are of the long radius type. I have never seen an inner tube pinch from bending the outer. Steve Paolini Equipment dood Harvard University Center for Nanoscale Systems From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Tuesday, December 16, 2014 11:33 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Bending coaxial Dear colleagues, A local company is proposing to bend coaxial SS tubing to install a double containment gas line thus removing the need for welded 90? elbows. did you ever see that ? Any comment would be helpful ! Thanks Matthieu Nannini D?but du message r?exp?di? : De: "Matthieu Nannini, Dr." > Objet: Bending coaxial Date: 15 d?cembre 2014 15:31:10 UTC?5 ?: Tom Britton > Hi tom, A local company here can bend coaxial tubing. They quoted me 4800$ for the 2 lines BCl3 and SiCl4. What do you think of bending ? They told me the 1/4 wasn?t kinked at all. Matthieu -------------- next part -------------- An HTML attachment was scrubbed... URL: From bordonaro at cnf.cornell.edu Wed Dec 17 12:05:20 2014 From: bordonaro at cnf.cornell.edu (Garry J. Bordonaro) Date: Wed, 17 Dec 2014 12:05:20 -0500 Subject: [labnetwork] Bending coaxial In-Reply-To: References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> Message-ID: <023801d01a1b$a400f630$ec02e290$@cnf.cornell.edu> >From a knowledgeable piping person: ?Bending is the best way to go. Less welds, less chance for particulate contamination and virtual leaks, quicker installation, cheaper to install.? Garry J. Bordonaro Microlithographic Engineer Cornell NanoScale Facility 250 Duffield Hall Cornell University Ithaca, NY 14853-2700 (607) 254-4936 bordonaro at cnf.cornell.edu http://www.cnf.cornell.edu/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Tuesday, December 16, 2014 11:33 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Bending coaxial Dear colleagues, A local company is proposing to bend coaxial SS tubing to install a double containment gas line thus removing the need for welded 90? elbows. did you ever see that ? Any comment would be helpful ! Thanks Matthieu Nannini D?but du message r?exp?di? : De: "Matthieu Nannini, Dr." Objet: Bending coaxial Date: 15 d?cembre 2014 15:31:10 UTC?5 ?: Tom Britton Hi tom, A local company here can bend coaxial tubing. They quoted me 4800$ for the 2 lines BCl3 and SiCl4. What do you think of bending ? They told me the 1/4 wasn?t kinked at all. Matthieu -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrweaver at purdue.edu Wed Dec 17 12:55:57 2014 From: jrweaver at purdue.edu (Weaver, John R) Date: Wed, 17 Dec 2014 17:55:57 +0000 Subject: [labnetwork] Bending coaxial In-Reply-To: <015f01d01a0d$17b661f0$472325d0$@infinityhps.com> References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> <015f01d01a0d$17b661f0$472325d0$@infinityhps.com> Message-ID: <6A848421F695C54A9210C1A873C96AC2250F532D@WPVEXCMBX04.purdue.lcl> Matthieu ? While I am in complete agreement with most of Craig?s points, the main issue in too small a radius bend in your tubing is cleanliness rather than purity (particle count rather than ?how many 9s?). If you are using a corrosive gas, purity can be affected but even more serious is the possibility of moisture entrainment that can cause catastrophic failure. As all the responses have said, use a large-radius tube bender and you?ll be fine. John John R. Weaver Strategic Facilities Officer Birck Nanotechnology Center 1205 West State Street West Lafayette IN 47907 (765) 494-5494 jrweaver at purdue.edu nano.purdue.edu From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Craig Cheney Sent: Wednesday, December 17, 2014 10:21 AM To: 'Matthieu Nannini, Dr.'; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Bending coaxial Matthieu, We specialize in these types of systems and build them on a regular basis. When bending tubing the first question you have to ask is, what is the purity and/or reactivity of the gas that you going to be running through the gas lines, and what is the quality of the tubing (carrier tubing) that is going to be bent. If you are going to be using electro-polished tubing for the carrier tubing which I assume you are, given the two gases listed. Then you have to take into consideration what happens when you bend electro-polished tubing. Even with a low radius tube bender you will create defects in the electro-polish that can lead to problems down the road. It has been shown that even with a low radius tubing bender that you will induce micro defects into the plating on the interior of tubing that can create nucleation points that can lead to bigger problems down the road such as, particles, corrosion, and gas contamination. If you are starting out with a gas that is not very pure (99.9%) then you can probably live with some of the problems that will develop over time. But given the nature of the two gases listed you have to take into consideration the reactivity of those two gases. Given the nature of the two gases being highly corrosive that will cause the gas line to deteriorate over time, and cause bigger problems. We would highly suggest that you use high quality electro-polished tubing as well as high quality pre-manufactured electro-polished coaxial weld fittings with welded sleeves (which is code in the U.S. for those two gases) and not mechanical sleeves. I hope that helps and let me know if you have any further questions. Thank you, Craig Cheney [Description: cid:image001.jpg at 01C7E19F.47FFBAE0] Desk: (608)834-4200 Fax: (608)834-4299 Cell: (608)438-8714 This e-mail transmission and any attachments to it are intended solely for the use of the individual or entity to whom it is addressed and may contain confidential and privileged information. If you are not the intended recipient, your use, forwarding, printing, storing, disseminating, distribution, or copying of this communication is prohibited. If you received this communication in error, please notify the sender immediately by replying to this message and delete it from your computer. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Tuesday, December 16, 2014 10:33 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Bending coaxial Dear colleagues, A local company is proposing to bend coaxial SS tubing to install a double containment gas line thus removing the need for welded 90? elbows. did you ever see that ? Any comment would be helpful ! Thanks Matthieu Nannini D?but du message r?exp?di? : De: "Matthieu Nannini, Dr." > Objet: Bending coaxial Date: 15 d?cembre 2014 15:31:10 UTC?5 ?: Tom Britton > Hi tom, A local company here can bend coaxial tubing. They quoted me 4800$ for the 2 lines BCl3 and SiCl4. What do you think of bending ? They told me the 1/4 wasn?t kinked at all. Matthieu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 5517 bytes Desc: image001.jpg URL: From matthieu.nannini at mcgill.ca Wed Dec 17 13:48:57 2014 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Wed, 17 Dec 2014 18:48:57 +0000 Subject: [labnetwork] Reading ventilation/exhaust In-Reply-To: <28200_1418838969_5491C3B9_28200_123_1_6A848421F695C54A9210C1A873C96AC2250F532D@WPVEXCMBX04.purdue.lcl> References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> <015f01d01a0d$17b661f0$472325d0$@infinityhps.com> <28200_1418838969_5491C3B9_28200_123_1_6A848421F695C54A9210C1A873C96AC2250F532D@WPVEXCMBX04.purdue.lcl> Message-ID: <2D63C893-A74A-4A9B-9A40-0E0A430D7A13@mcgill.ca> Colleagues, First, thank you for the handful of information about bending coax tubing. Now, facilities services here at McGill want to assess our ventilation/exhaust capacity. To measure exhaust they want to drill 3/8'' holes into each duct leading to a tool, take a reading and plug it back. They show me the plugs they want to use and I?m not convinced at all especially for the gas cabinet exhaust. They don?t want to un-connect the tool and measure directly as they want to make its resistance is taken into account. Any body has experience regarding that matter ? Thanks in advance Matthieu ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------ -------------- next part -------------- An HTML attachment was scrubbed... URL: From yuyingtang at mail.pse.umass.edu Wed Dec 17 14:09:29 2014 From: yuyingtang at mail.pse.umass.edu (YuYing Tang) Date: Wed, 17 Dec 2014 14:09:29 -0500 Subject: [labnetwork] Instrument Relocation During Warranty Period - Best Way Message-ID: <86ef25be8b681fcf4b25e7362db5e0f9.squirrel@data.pse.umass.edu> Any advice is appreciated. We applied and got a large instrumentation grant a year ago, but the new building wouldn't be ready for a while, so we started to bring equipment in the current building to get researches started. We purchased some relocation service on a few instrument, but most of them we didn't buy relocation and we only bought extended warranty. Do any of you have experience relocating any one of these machines during warranty period? Any advice? 1. Novacentrix Pulseforge 1300: a photonic curing and sintering machine 2. Dimatix Material Printer DMP-2831: A piezoelectric inkjet printer 3. Optomec AJ300 Printer: An Aerosol Jet Printer 4. J.A. Woolam RC2 Ellipsometer: an ellipsometer with vertical base 5. Zygo Nextview 3D Optical Profiler Thanks very much. YuYing Tang, Ph.D. Director, R2R Processing Lab Center for Hierarchical Manufacturing Department of Polymer Science and Engineering University of Massachusetts at Amherst Amherst, MA 01003 http://r2rnano.org/r2rlab/ From vito.logiudice at uwaterloo.ca Wed Dec 17 14:18:43 2014 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Wed, 17 Dec 2014 19:18:43 +0000 Subject: [labnetwork] Bending coaxial In-Reply-To: Message-ID: Hi Matt, Excellent comments to date from our colleagues on the network, as usual. FYI, this is the approach we took here as well for all of our toxics. As already mentioned, special attention was paid to the radius of the bends to minimize the impact on the interior electropolished finish and coupons were also made at the start of each shift daily to confirm the quality/calibration of the welding apparatus and procedure before proceeding. In our case, we did use a few mechanical connections for the 1/2 outer lines, so called "dogbones", examples of which can be seen in the attached photo. Cheers, Vito -- Vito Logiudice MASc, PEng Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca From: "", Matthieu Nannini > Date: Tuesday, 16 December, 2014 11:33 PM To: "labnetwork at mtl.mit.edu" > Subject: [labnetwork] Bending coaxial Dear colleagues, A local company is proposing to bend coaxial SS tubing to install a double containment gas line thus removing the need for welded 90? elbows. did you ever see that ? Any comment would be helpful ! Thanks Matthieu Nannini D?but du message r?exp?di? : De: "Matthieu Nannini, Dr." > Objet: Bending coaxial Date: 15 d?cembre 2014 15:31:10 UTC-5 ?: Tom Britton > Hi tom, A local company here can bend coaxial tubing. They quoted me 4800$ for the 2 lines BCl3 and SiCl4. What do you think of bending ? They told me the 1/4 wasn?t kinked at all. Matthieu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: IMG_20141217_140118[1].jpg Type: image/jpeg Size: 1497837 bytes Desc: IMG_20141217_140118[1].jpg URL: From spaolini at cns.fas.harvard.edu Wed Dec 17 16:36:36 2014 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Wed, 17 Dec 2014 21:36:36 +0000 Subject: [labnetwork] Reading ventilation/exhaust In-Reply-To: <2D63C893-A74A-4A9B-9A40-0E0A430D7A13@mcgill.ca> References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> <015f01d01a0d$17b661f0$472325d0$@infinityhps.com> <28200_1418838969_5491C3B9_28200_123_1_6A848421F695C54A9210C1A873C96AC2250F532D@WPVEXCMBX04.purdue.lcl> <2D63C893-A74A-4A9B-9A40-0E0A430D7A13@mcgill.ca> Message-ID: Matthieu, These "test holes" are not uncommon and usually plugged with a rubber stopper. My question is why 3/8" when ?" is sufficient to allow the anemometer probe through. If you can plan it up front, you can strategically place these test holes where a toxic gas sniffer will reside and simply pull the tube when it's certification time. There are a lot of different tricky pass through fittings on the market which fasten via a couple of "zip" screws and have a push on or feed through fitting for the tube. I would emphasize that if the exhaust duct is for a gas cabinet or VMB, the toxic gas detection point should be in the furthest point upstream. By placing it there, you will avoid tripping the alarms when using the venturi for cylinder changes or any other activities that may result in a controlled release within the cabinet. I will respectfully refrain from explaining how I know this :). Of course the venturi exhaust should be located at least 16" downstream of the detection. Again, this is a standard procedure and necessary for balancing the exhaust. Steve Paolini Equipment Dood Harvard University Center for Nanoscale systems. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Wednesday, December 17, 2014 1:49 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Reading ventilation/exhaust Colleagues, First, thank you for the handful of information about bending coax tubing. Now, facilities services here at McGill want to assess our ventilation/exhaust capacity. To measure exhaust they want to drill 3/8'' holes into each duct leading to a tool, take a reading and plug it back. They show me the plugs they want to use and I'm not convinced at all especially for the gas cabinet exhaust. They don't want to un-connect the tool and measure directly as they want to make its resistance is taken into account. Any body has experience regarding that matter ? Thanks in advance Matthieu ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------ -------------- next part -------------- An HTML attachment was scrubbed... URL: From Simon.Doe at unisa.edu.au Wed Dec 17 16:47:16 2014 From: Simon.Doe at unisa.edu.au (Simon Doe) Date: Wed, 17 Dec 2014 21:47:16 +0000 Subject: [labnetwork] Bending coaxial In-Reply-To: <023801d01a1b$a400f630$ec02e290$@cnf.cornell.edu> References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> <023801d01a1b$a400f630$ec02e290$@cnf.cornell.edu> Message-ID: Hi all First time posting but been doing lots of reading. It?s a good forum. For once I can add a comment. I?m a qualified welding engineer and I always start with a statement that if you can avoid welding something then do so. Its as stated before, whilst welding is almost always 100% suitable ? and all the welds should be inspected according to the fabrication standard requirements ? they do add the potential for contamination, and there will always be the internal part of the weld that can cause issues through corrosion or similar. Having no welds and pipes bent to an appropriate radius would always be my recommendation ? but obviously you do need to join pipes together. Just minimise the number of welds. regards Simon Simon Doe Facility Manager, Australian National Fabrication Facility-SA Node Ian Wark Research Institute | University of South Australia | Mawson Lakes SA 5095 ': +61 8 8302 5226 | 6: +61 8 8302 3755 | ?: simon.doe at unisa.edu.au http://www.anff.org.au/south-australian-node.html Follow us on Linkedin From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Garry J. Bordonaro Sent: Thursday, 18 December 2014 3:35 AM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Bending coaxial From a knowledgeable piping person: ?Bending is the best way to go. Less welds, less chance for particulate contamination and virtual leaks, quicker installation, cheaper to install.? Garry J. Bordonaro Microlithographic Engineer Cornell NanoScale Facility 250 Duffield Hall Cornell University Ithaca, NY 14853-2700 (607) 254-4936 bordonaro at cnf.cornell.edu http://www.cnf.cornell.edu/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Tuesday, December 16, 2014 11:33 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Bending coaxial Dear colleagues, A local company is proposing to bend coaxial SS tubing to install a double containment gas line thus removing the need for welded 90? elbows. did you ever see that ? Any comment would be helpful ! Thanks Matthieu Nannini D?but du message r?exp?di? : De: "Matthieu Nannini, Dr." > Objet: Bending coaxial Date: 15 d?cembre 2014 15:31:10 UTC?5 ?: Tom Britton > Hi tom, A local company here can bend coaxial tubing. They quoted me 4800$ for the 2 lines BCl3 and SiCl4. What do you think of bending ? They told me the 1/4 wasn?t kinked at all. Matthieu -------------- next part -------------- An HTML attachment was scrubbed... URL: From e.grondin at usherbrooke.ca Wed Dec 17 17:00:35 2014 From: e.grondin at usherbrooke.ca (Etienne Grondin) Date: Wed, 17 Dec 2014 17:00:35 -0500 Subject: [labnetwork] Reading ventilation/exhaust In-Reply-To: <2D63C893-A74A-4A9B-9A40-0E0A430D7A13@mcgill.ca> References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> <015f01d01a0d$17b661f0$472325d0$@infinityhps.com> <28200_1418838969_5491C3B9_28200_123_1_6A848421F695C54A9210C1A873C96AC2250F532D@WPVEXCMBX04.purdue.lcl> <2D63C893-A74A-4A9B-9A40-0E0A430D7A13@mcgill.ca> Message-ID: <5491FD03.5050405@usherbrooke.ca> Dear Matthieu, Best way is to drill a hole in the duct with the equipment connected to the exhaust. Then you will have a correct reading of the exhaust. You can ask for the use of duct putty to properly clug the drilled holes on toxic exhaust. Good luck ! Best regards, ____________________________ ?tienne Grondin Lab manager CRN? - www.crn2.ca coordonnateur-crn2 at usherbrooke.ca phone : 819-821-8000 x61941 Le 2014-12-17 13:48, Matthieu Nannini, Dr. a ?crit : > Colleagues, > > First, thank you for the handful of information about bending coax > tubing. > > Now, facilities services here at McGill want to assess our > ventilation/exhaust capacity. To measure exhaust they want to drill > 3/8'' holes into each duct leading to a tool, take a reading and plug > it back. They show me the plugs they want to use and I?m not convinced > at all especially for the gas cabinet exhaust. They don?t want to > un-connect the tool and measure directly as they want to make its > resistance is taken into account. > > Any body has experience regarding that matter ? > > Thanks in advance > > Matthieu > > ----------------------------------- > Matthieu Nannini > McGill Nanotools Microfab > Manager > t: 514 398 3310 > c: 514 758 3311 > f: 514 398 8434 > http://mnm.physics.mcgill.ca/ > ------------------------------------ > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Wed Dec 17 17:29:10 2014 From: shott at stanford.edu (John Shott) Date: Wed, 17 Dec 2014 14:29:10 -0800 Subject: [labnetwork] Reading ventilation/exhaust In-Reply-To: <2D63C893-A74A-4A9B-9A40-0E0A430D7A13@mcgill.ca> References: <1F635BBD-7E41-42CD-9CD9-DFD46227D6B0@mcgill.ca> <015f01d01a0d$17b661f0$472325d0$@infinityhps.com> <28200_1418838969_5491C3B9_28200_123_1_6A848421F695C54A9210C1A873C96AC2250F532D@WPVEXCMBX04.purdue.lcl> <2D63C893-A74A-4A9B-9A40-0E0A430D7A13@mcgill.ca> Message-ID: <549203B6.1030005@stanford.edu> Matt: I think that it is common, but probably not universal, to drill a hole in a duct and then to use a hot-wire anemometer to create a velocity profile of the exhaust duct in use. I've attached a photo of one of our exhaust lines coming out of a HBr cabinet. In the upper portion of this photo, you'll see a cheap little red plastic plug that was used for this type of velocity profiling. Nothing special ... and if the exhaust were off, which it never is, the little red plug is barely held in the duct. Also, you can also see in this photo the 1/4" diameter hole that is used for the return of our extraction-type gas detector. If you are using or plan to use extraction-style gas detectors, you may have a hole that could be used for velocity profiling with a small-diameter anemometer. Note: if this photo gets rotated, the duct should be running vertically with the red plug above the white plastic detector return line. Note: not all of our exhausts have been for this purpose. Wet benches, for example, are typically balanced based on face velocity measurements rather than total exhaust flow. Good luck, John On 12/17/2014 10:48 AM, Matthieu Nannini, Dr. wrote: > Colleagues, > > First, thank you for the handful of information about bending coax > tubing. > > Now, facilities services here at McGill want to assess our > ventilation/exhaust capacity. To measure exhaust they want to drill > 3/8'' holes into each duct leading to a tool, take a reading and plug > it back. They show me the plugs they want to use and I?m not convinced > at all especially for the gas cabinet exhaust. They don?t want to > un-connect the tool and measure directly as they want to make its > resistance is taken into account. > > Any body has experience regarding that matter ? > > Thanks in advance > > Matthieu > > ----------------------------------- > Matthieu Nannini > McGill Nanotools Microfab > Manager > t: 514 398 3310 > c: 514 758 3311 > f: 514 398 8434 > http://mnm.physics.mcgill.ca/ > ------------------------------------ > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 118751 bytes Desc: not available URL: From vamsinittala at gmail.com Wed Dec 17 23:31:56 2014 From: vamsinittala at gmail.com (N P VAMSI KRISHNA) Date: Thu, 18 Dec 2014 10:01:56 +0530 Subject: [labnetwork] Instrument Relocation During Warranty Period - Best Way In-Reply-To: <86ef25be8b681fcf4b25e7362db5e0f9.squirrel@data.pse.umass.edu> References: <86ef25be8b681fcf4b25e7362db5e0f9.squirrel@data.pse.umass.edu> Message-ID: Dear Tang, While we were moving from our old clean room to new clean room we shifted our J.A. Woolam - M 2000U Ellipsometer which is very similar to RC2 Ellipsometer. During that time we don't have the original wooden packages which we got with the tool, so we moved it in much larger open box (which we got for some other litho tool). We took care of the following things: 1. Decommissioning: Removed the connections and separated the tool, controller and spectrometer. (we took photos of the connections before hand) 2. Remove focusing probes and camera. 3. Remove the optical fiber cable and carry it safe separately. 4. Moved to the new location and commissioned the tool. 5. Reconnect the optical fiber 6. Do the calibration. You may think of removing the bulbs as well. Thanks & Best regards, vamsi On Thu, Dec 18, 2014 at 12:39 AM, YuYing Tang wrote: > > Any advice is appreciated. > > We applied and got a large instrumentation grant a year ago, but the new > building wouldn't be ready for a while, so we started to bring equipment > in the current building to get researches started. We purchased some > relocation service on a few instrument, but most of them we didn't buy > relocation and we only bought extended warranty. > > Do any of you have experience relocating any one of these machines during > warranty period? Any advice? > > 1. Novacentrix Pulseforge 1300: a photonic curing and sintering machine > 2. Dimatix Material Printer DMP-2831: A piezoelectric inkjet printer > 3. Optomec AJ300 Printer: An Aerosol Jet Printer > 4. J.A. Woolam RC2 Ellipsometer: an ellipsometer with vertical base > 5. Zygo Nextview 3D Optical Profiler > > Thanks very much. > > YuYing Tang, Ph.D. > Director, R2R Processing Lab > Center for Hierarchical Manufacturing > Department of Polymer Science and Engineering > University of Massachusetts at Amherst > Amherst, MA 01003 > > http://r2rnano.org/r2rlab/ > > > > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- -- Thanks & Best Regards, ----------------- *N.P.Vamsi Krishna* Ph.D. Student Room No:FF-08, Center for Nano Science and Engineering (CeNSE), Indian Institute of Science(IISc), Bangalore. INDIA-560012 *A bird sitting on the branch of a tree is not afraid of the branch shaking or breaking, because it trusts not the branches but its OWN WINGS.* -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Thu Dec 18 08:22:05 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Thu, 18 Dec 2014 13:22:05 +0000 Subject: [labnetwork] Instrument Relocation During Warranty Period - Best Way In-Reply-To: <86ef25be8b681fcf4b25e7362db5e0f9.squirrel@data.pse.umass.edu> References: <86ef25be8b681fcf4b25e7362db5e0f9.squirrel@data.pse.umass.edu> Message-ID: Hi, When we moved the Draper MEMS fab into the new space back in 2012 we did the following: Photos of all facility connections, recorded part numbers of all connections, gas, water, electrical. When me moved the tool we moved plugs, regulators and other connections. Labeled all connections. Recorded all gas pressures, voltages and exhaust values. Created a notebook with all the information on each tool. Performed a qualification on each tool and created a report. Read the manual to place the tool in a safe mode. Move the tool and connect it back up. Ran the qualification test and compared it to the pre move test. Hope this helps. Call if you need help or need clarification. Rick Draper Laboratory Principal Member of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of YuYing Tang Sent: Wednesday, December 17, 2014 2:09 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Instrument Relocation During Warranty Period - Best Way Any advice is appreciated. We applied and got a large instrumentation grant a year ago, but the new building wouldn't be ready for a while, so we started to bring equipment in the current building to get researches started. We purchased some relocation service on a few instrument, but most of them we didn't buy relocation and we only bought extended warranty. Do any of you have experience relocating any one of these machines during warranty period? Any advice? 1. Novacentrix Pulseforge 1300: a photonic curing and sintering machine 2. Dimatix Material Printer DMP-2831: A piezoelectric inkjet printer 3. Optomec AJ300 Printer: An Aerosol Jet Printer 4. J.A. Woolam RC2 Ellipsometer: an ellipsometer with vertical base 5. Zygo Nextview 3D Optical Profiler Thanks very much. YuYing Tang, Ph.D. Director, R2R Processing Lab Center for Hierarchical Manufacturing Department of Polymer Science and Engineering University of Massachusetts at Amherst Amherst, MA 01003 http://r2rnano.org/r2rlab/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork ________________________________ Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email. ________________________________ From mcrain3 at gmail.com Thu Dec 18 09:40:39 2014 From: mcrain3 at gmail.com (mark crain) Date: Thu, 18 Dec 2014 09:40:39 -0500 Subject: [labnetwork] Instrument Relocation During Warranty Period - Best Way In-Reply-To: References: <86ef25be8b681fcf4b25e7362db5e0f9.squirrel@data.pse.umass.edu> Message-ID: Hi Tang, Some of these initial comments may seem obvious but I wanted to keep them in the list. 1. Look at the manuals for the equipment and review the installation section. This will give you an idea of what needs to be done to package the equipment for moving. Many times there are ?locking blocks? or small regions that need to be bolted together for transit. You may still have the parts. I have walked in to labs that have had equipment for many years and the shipping tooling is still on the floor next to the equipment. 2. Take into consideration any chemical contamination that the equipment may have encountered during use. Some pieces of equipment require considerable care after chemical contamination. Vacuum systems of deposition and etch systems come to mind. My priorities are safety for people first and safety for property second. 3. Recall what parts of your equipment require the most maintenance. What do you never what to need to fix again?... take good care of it. 4. Label all connectors, cables,, hoses etc. It all seems obvious while taking the system down but you may forget. Photos and excel sheets are very useful. I did this for an STS DRIE a few years ago and I have no regrets. 5. Decommission and re-commission only one or two pieces of equipment at a time if possible. We got better with each piece moved. It also boosts your confidence as you continue. The time required for the move of each piece of equipment drops quickly. 6. Ask for help. You are already doing this with your post, but you may consider contacting the equipment suppliers and asking them for advice. You have some good equipment listed from good companies, you are their customer and they do want you to be happy. 7. I would think that you would want to test every feature of the warrantied equipment before moving it and have your warrantied maintenance visit just before the move. You can then test all of the features again after the move. I am not sure, but if you only have your maintenance visit after the move and there is something not working, will they still want to fix it as part of the warranty? If you find something isn?t right before you move the equipment, they must fix it as part of the warranty. You are also likely to get some friendly advice on moving the equipment from the service personnel during their visit. I had managed the University of Louisville cleanroom as we moved from a 1,000 sq ft facility to a 7,500 sq ft facility. These are only my initial thoughts on your "Any advice?" part of the question. Best Regards Mark Mark Crain University of Louisville On Wed, Dec 17, 2014 at 11:31 PM, N P VAMSI KRISHNA wrote: > > Dear Tang, > While we were moving from our old clean room to new clean room we shifted > our J.A. Woolam - M 2000U Ellipsometer which is very similar to RC2 > Ellipsometer. > > During that time we don't have the original wooden packages which we got > with the tool, so we moved it in much larger open box (which we got for > some other litho tool). > We took care of the following things: > 1. Decommissioning: Removed the connections and separated the tool, > controller and spectrometer. (we took photos of the connections before hand) > 2. Remove focusing probes and camera. > 3. Remove the optical fiber cable and carry it safe separately. > 4. Moved to the new location and commissioned the tool. > 5. Reconnect the optical fiber > 6. Do the calibration. > > You may think of removing the bulbs as well. > > Thanks & Best regards, > vamsi > > > On Thu, Dec 18, 2014 at 12:39 AM, YuYing Tang < > yuyingtang at mail.pse.umass.edu> wrote: > >> Any advice is appreciated. >> >> We applied and got a large instrumentation grant a year ago, but the new >> building wouldn't be ready for a while, so we started to bring equipment >> in the current building to get researches started. We purchased some >> relocation service on a few instrument, but most of them we didn't buy >> relocation and we only bought extended warranty. >> >> Do any of you have experience relocating any one of these machines during >> warranty period? Any advice? >> >> 1. Novacentrix Pulseforge 1300: a photonic curing and sintering machine >> 2. Dimatix Material Printer DMP-2831: A piezoelectric inkjet printer >> 3. Optomec AJ300 Printer: An Aerosol Jet Printer >> 4. J.A. Woolam RC2 Ellipsometer: an ellipsometer with vertical base >> 5. Zygo Nextview 3D Optical Profiler >> >> Thanks very much. >> >> YuYing Tang, Ph.D. >> Director, R2R Processing Lab >> Center for Hierarchical Manufacturing >> Department of Polymer Science and Engineering >> University of Massachusetts at Amherst >> Amherst, MA 01003 >> >> http://r2rnano.org/r2rlab/ >> >> >> >> >> >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> > > > -- > -- > Thanks & Best Regards, > ----------------- > *N.P.Vamsi Krishna* > Ph.D. Student > Room No:FF-08, > Center for Nano Science and Engineering (CeNSE), > Indian Institute of Science(IISc), Bangalore. > INDIA-560012 > > *A bird sitting on the branch of a tree is not afraid of the branch > shaking or breaking, because it trusts not the branches but its OWN WINGS.* > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From yuyingtang at mail.pse.umass.edu Thu Dec 18 15:41:33 2014 From: yuyingtang at mail.pse.umass.edu (YuYing Tang) Date: Thu, 18 Dec 2014 15:41:33 -0500 Subject: [labnetwork] Instrument Relocation During Warranty Period - Best Way In-Reply-To: References: <86ef25be8b681fcf4b25e7362db5e0f9.squirrel@data.pse.umass.edu> Message-ID: Dear Vampi, Rick, Mark, Your advice are very helpful! Thanks a lot. I think that we will generate an action list based on your suggestions, instrument manuals, and the suppliers' suggestions. We will be moving these instrument 1/4 mile down the road in 10-12 months, and we'll keep learning and adding/modifying the list. Best, YuYing Tang, Ph.D. Director, R2R Processing Lab Center for Hierarchical Manufacturing Department of Polymer Science and Engineering University of Massachusetts at Amherst Amherst, MA 01003 http://r2rnano.org/r2rlab/ > Dear Tang, > While we were moving from our old clean room to new clean room we shifted > our J.A. Woolam - M 2000U Ellipsometer which is very similar to RC2 > Ellipsometer. > > During that time we don't have the original wooden packages which we got > with the tool, so we moved it in much larger open box (which we got for > some other litho tool). > We took care of the following things: > 1. Decommissioning: Removed the connections and separated the tool, > controller and spectrometer. (we took photos of the connections before > hand) > 2. Remove focusing probes and camera. > 3. Remove the optical fiber cable and carry it safe separately. > 4. Moved to the new location and commissioned the tool. > 5. Reconnect the optical fiber > 6. Do the calibration. > > You may think of removing the bulbs as well. > > Thanks & Best regards, > vamsi > > > On Thu, Dec 18, 2014 at 12:39 AM, YuYing Tang > > wrote: >> >> Any advice is appreciated. >> >> We applied and got a large instrumentation grant a year ago, but the new >> building wouldn't be ready for a while, so we started to bring equipment >> in the current building to get researches started. We purchased some >> relocation service on a few instrument, but most of them we didn't buy >> relocation and we only bought extended warranty. >> >> Do any of you have experience relocating any one of these machines >> during >> warranty period? Any advice? >> >> 1. Novacentrix Pulseforge 1300: a photonic curing and sintering machine >> 2. Dimatix Material Printer DMP-2831: A piezoelectric inkjet printer >> 3. Optomec AJ300 Printer: An Aerosol Jet Printer >> 4. J.A. Woolam RC2 Ellipsometer: an ellipsometer with vertical base >> 5. Zygo Nextview 3D Optical Profiler >> >> Thanks very much. >> >> YuYing Tang, Ph.D. >> Director, R2R Processing Lab >> Center for Hierarchical Manufacturing >> Department of Polymer Science and Engineering >> University of Massachusetts at Amherst >> Amherst, MA 01003 >> >> http://r2rnano.org/r2rlab/ >> >> >> >> >> >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> > > > -- > -- > Thanks & Best Regards, > ----------------- > *N.P.Vamsi Krishna* > Ph.D. Student > Room No:FF-08, > Center for Nano Science and Engineering (CeNSE), > Indian Institute of Science(IISc), Bangalore. > INDIA-560012 > > *A bird sitting on the branch of a tree is not afraid of the branch > shaking > or breaking, because it trusts not the branches but its OWN WINGS.* > From vito.logiudice at uwaterloo.ca Fri Dec 19 09:18:55 2014 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Fri, 19 Dec 2014 14:18:55 +0000 Subject: [labnetwork] Instrument Relocation During Warranty Period - Best Way In-Reply-To: Message-ID: Dear YuYing Tang, We recently went through a similar exercise. Since we had multiple tools to move from our old facility to our new one, we created a "Tool traveller checklist" for each of our systems. The checklist was kept in a plastic sleeve taped to the side of a given tool at all stages of its relocation sequence. The checklist estimates the duration of each major activity and thus also helped us plan the the various stages of the physical move and recommissioning activities. I've attached a sample in case you or anyone else in our community finds it helpful. Best regards, Vito -- Vito Logiudice MASc, PEng Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -----Original Message----- From: YuYing Tang Date: Thursday, 18 December, 2014 3:41 PM To: N P VAMSI KRISHNA Cc: Labnetwork Subject: Re: [labnetwork] Instrument Relocation During Warranty Period - Best Way >Dear Vampi, Rick, Mark, > >Your advice are very helpful! Thanks a lot. > >I think that we will generate an action list based on your suggestions, >instrument manuals, and the suppliers' suggestions. We will be moving >these instrument 1/4 mile down the road in 10-12 months, and we'll keep >learning and adding/modifying the list. > >Best, > >YuYing Tang, Ph.D. >Director, R2R Processing Lab >Center for Hierarchical Manufacturing >Department of Polymer Science and Engineering >University of Massachusetts at Amherst >Amherst, MA 01003 > >http://r2rnano.org/r2rlab/ > > >> Dear Tang, >> While we were moving from our old clean room to new clean room we >>shifted >> our J.A. Woolam - M 2000U Ellipsometer which is very similar to RC2 >> Ellipsometer. >> >> During that time we don't have the original wooden packages which we got >> with the tool, so we moved it in much larger open box (which we got for >> some other litho tool). >> We took care of the following things: >> 1. Decommissioning: Removed the connections and separated the tool, >> controller and spectrometer. (we took photos of the connections before >> hand) >> 2. Remove focusing probes and camera. >> 3. Remove the optical fiber cable and carry it safe separately. >> 4. Moved to the new location and commissioned the tool. >> 5. Reconnect the optical fiber >> 6. Do the calibration. >> >> You may think of removing the bulbs as well. >> >> Thanks & Best regards, >> vamsi >> >> >> On Thu, Dec 18, 2014 at 12:39 AM, YuYing Tang >> >> wrote: >>> >>> Any advice is appreciated. >>> >>> We applied and got a large instrumentation grant a year ago, but the >>>new >>> building wouldn't be ready for a while, so we started to bring >>>equipment >>> in the current building to get researches started. We purchased some >>> relocation service on a few instrument, but most of them we didn't buy >>> relocation and we only bought extended warranty. >>> >>> Do any of you have experience relocating any one of these machines >>> during >>> warranty period? Any advice? >>> >>> 1. Novacentrix Pulseforge 1300: a photonic curing and sintering >>>machine >>> 2. Dimatix Material Printer DMP-2831: A piezoelectric inkjet printer >>> 3. Optomec AJ300 Printer: An Aerosol Jet Printer >>> 4. J.A. Woolam RC2 Ellipsometer: an ellipsometer with vertical base >>> 5. Zygo Nextview 3D Optical Profiler >>> >>> Thanks very much. >>> >>> YuYing Tang, Ph.D. >>> Director, R2R Processing Lab >>> Center for Hierarchical Manufacturing >>> Department of Polymer Science and Engineering >>> University of Massachusetts at Amherst >>> Amherst, MA 01003 >>> >>> http://r2rnano.org/r2rlab/ >>> >>> >>> >>> >>> >>> >>> >>> _______________________________________________ >>> labnetwork mailing list >>> labnetwork at mtl.mit.edu >>> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >>> >> >> >> -- >> -- >> Thanks & Best Regards, >> ----------------- >> *N.P.Vamsi Krishna* >> Ph.D. Student >> Room No:FF-08, >> Center for Nano Science and Engineering (CeNSE), >> Indian Institute of Science(IISc), Bangalore. >> INDIA-560012 >> >> *A bird sitting on the branch of a tree is not afraid of the branch >> shaking >> or breaking, because it trusts not the branches but its OWN WINGS.* >> > > > >_______________________________________________ >labnetwork mailing list >labnetwork at mtl.mit.edu >https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- A non-text attachment was scrubbed... Name: Tools_traveller_checklist_sample.xlsx Type: application/vnd.openxmlformats-officedocument.spreadsheetml.sheet Size: 57555 bytes Desc: Tools_traveller_checklist_sample.xlsx URL: From rvanduse at doe.carleton.ca Fri Dec 19 12:48:45 2014 From: rvanduse at doe.carleton.ca (Rob Vandusen) Date: Fri, 19 Dec 2014 12:48:45 -0500 Subject: [labnetwork] TMB (trimethyl borate supplier source needed. Message-ID: <00f201d01bb4$09879c90$1c96d5b0$@doe.carleton.ca> Hi everyone. I am hoping to find a supplier for TMB (trimethyl borate). We currently use a small (500cc) container of liquid TMB for our boron source on our LPCVD furnace for BPSG films. Product name: Extrema, TMBE300SSN, BK500SSN (300 CC of 99.9999% TMB in a BK500 SS container). The last time I ordered this was over ten years ago now from Schumacher/Air products. The minimum size container Air Products now sell is a 19 liter - which is way too big for our setup. If I can't find a supplier I will have to look into alternative dopant source. Any leads or advice would be appreciated. Thanks Robert Vandusen Technical Officer, Microfabrication Lab Electronics Department Carleton University room: 4184 Mackenzie Building 613-520-5761 rvanduse at doe.carleton.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Mon Dec 22 09:42:59 2014 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Mon, 22 Dec 2014 14:42:59 +0000 Subject: [labnetwork] Precious metal targets: how to charge for and keep track of use Message-ID: <20141222144259.6574229.60907.59158@uwaterloo.ca> Dear Colleagues, I would be curious to know your thoughts on the following questions regarding precious metal sputter targets: 1. Who pays for the initial purchase of the target: end user(s) or fab operations? 2. If the fab owns the target how do you keep track of the amount used per user? 3. If the user owns the target, is it installed/removed for each run? If it is kept in the chamber, how do you keep non-owners of the target from using it? 4. Any suggestions on how to minimize errors/abuses would be appreciated. Thank you Vito -- Vito Logiudice MASc, PEng Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From fouad.karouta at anu.edu.au Mon Dec 22 18:09:11 2014 From: fouad.karouta at anu.edu.au (Fouad Karouta) Date: Mon, 22 Dec 2014 23:09:11 +0000 Subject: [labnetwork] Precious metal targets: how to charge for and keep track of use In-Reply-To: <20141222144259.6574229.60907.59158@uwaterloo.ca> References: <20141222144259.6574229.60907.59158@uwaterloo.ca> Message-ID: Hi Vito, Here at ANU ANFF Labs we use the following rules with respect to precious metals: 1- All targets (sputter) or precious metals (e-beam evaporator) are owned/purchased by the facility and are accessible to all users. 2- We have calibrated the processes with respect to material usage in both equipment (sputter and e-beam evaporator) and we are charging Pt and Au in the sputter system 1 AUD/nm and in the e-beam evaporator we started at AUD 1.50/nm and recently reduced it to AUD 1.20/nm as we try to match the generated income from precious metals to their purchase. Btw our e-beam evaporator is a Temescal BJD-2000 with an extended chamber). Some other facilities are weighing the precious metal before and after every usage and charging the effectively used precious metal. However this adds complexity of changing target that requires venting the sputter chamber. Also with a sputter system you end with an unusable part of the gold as it erodes unevenly and you end up with a significant amount of scrap. Hope this is helpful, Fouad Karouta ANFF ACT Node Manager ANU-Canberra-Australia From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice Sent: Tuesday, 23 December 2014 1:43 AM To: Labnetwork Subject: [labnetwork] Precious metal targets: how to charge for and keep track of use Dear Colleagues, I would be curious to know your thoughts on the following questions regarding precious metal sputter targets: 1. Who pays for the initial purchase of the target: end user(s) or fab operations? 2. If the fab owns the target how do you keep track of the amount used per user? 3. If the user owns the target, is it installed/removed for each run? If it is kept in the chamber, how do you keep non-owners of the target from using it? 4. Any suggestions on how to minimize errors/abuses would be appreciated. Thank you Vito -- Vito Logiudice MASc, PEng Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca -------------- next part -------------- An HTML attachment was scrubbed... URL: From matthieu.nannini at mcgill.ca Tue Dec 23 11:46:01 2014 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Tue, 23 Dec 2014 16:46:01 +0000 Subject: [labnetwork] Precious metal targets: how to charge for and keep track of use In-Reply-To: References: <20141222144259.6574229.60907.59158@uwaterloo.ca> Message-ID: Same here at McGill. Coral registers the amount of nm deposited and charges it back to the user at a rate around 1.5CAD/nm. Weighting before and after is too complex as Fouad mentioned. Dealing with user-owned target or material is also something we don?T want to get into. Matthieu Le 2014-12-22 ? 18:09, Fouad Karouta > a ?crit : Hi Vito, Here at ANU ANFF Labs we use the following rules with respect to precious metals: 1- All targets (sputter) or precious metals (e-beam evaporator) are owned/purchased by the facility and are accessible to all users. 2- We have calibrated the processes with respect to material usage in both equipment (sputter and e-beam evaporator) and we are charging Pt and Au in the sputter system 1 AUD/nm and in the e-beam evaporator we started at AUD 1.50/nm and recently reduced it to AUD 1.20/nm as we try to match the generated income from precious metals to their purchase. Btw our e-beam evaporator is a Temescal BJD-2000 with an extended chamber). Some other facilities are weighing the precious metal before and after every usage and charging the effectively used precious metal. However this adds complexity of changing target that requires venting the sputter chamber. Also with a sputter system you end with an unusable part of the gold as it erodes unevenly and you end up with a significant amount of scrap. Hope this is helpful, Fouad Karouta ANFF ACT Node Manager ANU-Canberra-Australia From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice Sent: Tuesday, 23 December 2014 1:43 AM To: Labnetwork Subject: [labnetwork] Precious metal targets: how to charge for and keep track of use Dear Colleagues, I would be curious to know your thoughts on the following questions regarding precious metal sputter targets: 1. Who pays for the initial purchase of the target: end user(s) or fab operations? 2. If the fab owns the target how do you keep track of the amount used per user? 3. If the user owns the target, is it installed/removed for each run? If it is kept in the chamber, how do you keep non-owners of the target from using it? 4. Any suggestions on how to minimize errors/abuses would be appreciated. Thank you Vito -- Vito Logiudice MASc, PEng Director of Operations, Quantum NanoFab University of Waterloo Lazaridis QNC 1207 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel.: (519) 888-4567 ext. 38703 Email: vito.logiudice at uwaterloo.ca Website: https://fab.qnc.uwaterloo.ca _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Wed Dec 24 11:00:59 2014 From: codreanu at udel.edu (Iulian Codreanu) Date: Wed, 24 Dec 2014 11:00:59 -0500 Subject: [labnetwork] Process Specialist opportunity at Delaware Message-ID: <549AE33B.7070105@udel.edu> Dear Colleagues, I am writing to ask for your help in distributing the attached career opportunity. This position is similar to the Process Engineer position I sent along a while ago but with relaxed formal education requirements. I would be happy to answer any questions related to the position. More details can be found by following the link below. http://www.udel.edu/002420 Thank you very much and Happy Holidays! Iulian -- iulian Codreanu, Ph.D. Director of Operations, UD NanoFab 163 ISE Lab 221 Academy Street Newark, DE 19716 302-831-2784 http://udnf.udel.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: Nanofab_Process_specialist.pdf Type: application/pdf Size: 1239713 bytes Desc: not available URL: