[labnetwork] cryopump for e-beam
Olona, Leonard E.
len.olona at ou.edu
Fri Feb 7 12:09:53 EST 2014
Austin scientific.
Leonard E. Olona
University Cleanroom Manager
University of Oklahoma
110 West Boyd Street Rm<x-apple-data-detectors://2> 550
Norman, Oklahoma 73019<x-apple-data-detectors://3/0>
D: +1- 405 325-4374<tel:%2B1-%20405%20325-4374>
C: +1- 405 630-9068<tel:%2B1-%20405%20630-9068>
F: +1- 405 325-7066<tel:%2B1-%20405%20325-7066>
On Feb 7, 2014, at 10:59 AM, "Wang,Xiaojin" <xiaojin.wang at louisville.edu<mailto:xiaojin.wang at louisville.edu>> wrote:
Dear all:
We are looking for a refurbished cryopump on e-beam evaporator. Could you recommend me a company that can provide good refurbished cryopump with a reasonable price ($2000~$3000). Thank you.
Best wishes
Xiaojin Wang
Senior process engineer
Micro/nano technology center
University of Louisville
From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice
Sent: Wednesday, February 05, 2014 8:44 AM
To: Bill Flounders
Cc: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Monitoring quality of CDA
Bill,
Thank you much for this. Might you be able to share some info as to the make and model of the dew point sensor in use at your facility? I'd like to stick with a tried and true unit if at all possible. Thank you.
Best regards,
Vito
From: Bill Flounders <bill at eecs.berkeley.edu<mailto:bill at eecs.berkeley.edu>>
Date: Tuesday, 4 February, 2014 8:19 PM
To: Vito Logiudice <vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>>, "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: Re: [labnetwork] Monitoring quality of CDA
Install dew point sensor on outlet side of air dryer with 4-20mA output signal
Common set points are -100 F, -75 F and - 40 F
corresponding to approx 1ppm, 10ppm and 100ppm H2O content.
We deliver at 1-10ppm; system alarms at 100ppm (-40 F)
Useful reference: http://www.asge-online.com/pdf/ASGEpg185.pdf
Bill Flounders
UC Berkeley
Vito Logiudice wrote:
Dear Colleagues,
We are in the process of implementing a standalone system for monitoring cleanroom environmental parameters such as temperature, humidity, differential pressures, etc. An additional variable we would like to monitor is moisture content of our clean, dry air (compressed air) supply.
I would be grateful for any insights on how to best monitor this variable in a reliable fashion. Thank you.
Regards,
Vito Logiudice
--
Vito Logiudice M.A.Sc., P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
200 University Avenue West
Waterloo, ON Canada N2L 3G1
Tel: 1-519-888-4567 ext. 38703
Email: vlogiudi at uwaterloo.ca<mailto:vlogiudi at uwaterloo.ca>
Website: https://qncfab.uwaterloo.ca/
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