[labnetwork] Piranha & HF no rinse protocols

[Luciani, Vincent]

Hello Errol,

I could be wrong but I have never heard of, or would recommend skipping, the water rinse between the piranha and the 10:1 HF dip.

Skipping the water rinse after the final HF dip is a technique I and may other have used for very special applications.  It is a trick used by some epi growers to get their wafers into an inert environment without growing a native oxide.  However, as others have alluded, the technique requires special handling and training to maintain safety throughout the process.  Even though the wafer will de-wet and look dry, it can burn you, etch glass, emit HF vapor fumes etc.

Bottom line:  There are special cases where this technique may be applicable but you must be prepared.  I would not let anyone in our lab do this unless they can demonstrate to me the need for it and the experience to do it safely.

Good Luck,
Vince


Vincent K. Luciani
NanoFab Manager
Center for Nanoscale Science and Technology<http://www.cnst.nist.gov/>
National Institute of Standards and Technology
100 Bureau Drive, MS 6201
Gaithersburg, MD 20899-6200 USA
+1-301-975-2886





From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Errol V. Porter
Sent: Wednesday, February 26, 2014 5:44 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Piranha & HF no rinse protocols

Greetings,

I am trying to get a consensus and feedback from the group on a wet etch process using 1st H2SO4:H2O2 (1:1) and 2nd HF:H2O (10:1) where the water rinse is omitted. If this is an acceptable practice in some special circumstances, what safeguards to you put in place to protect the users.

Regards,

Errol Porter
University of Arkansas / HiDEC
700 W. Research Center Blvd
Fayetteville, AR 72701
Tel. (479) 575-2519
Mobile: (479) 236-0693
Fax (479) 575-2719
email: evporte at uark.edu<mailto:evporte at uark.edu>
http://www.hidec.uark.edu<http://www.hidec.uark.edu/>

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20140227/ec6f6b55/attachment.html>