From raghavan at ece.iisc.ernet.in Thu Jan 2 01:14:37 2014 From: raghavan at ece.iisc.ernet.in (raghavan) Date: Thu, 2 Jan 2014 11:44:37 +0530 Subject: [labnetwork] SU8 resist asher Message-ID: <01a701cf0781$ea189950$be49cbf0$@iisc.ernet.in> Dear Labnetwork members We are looking for an asher for our cleanroom with capabilities to ash up to 200microns of SU8. From the open web source I do have some information on various ashers in the market. Nevertheless, I would like some suggestions on vendors from experienced users. Thank you Best wishes Raghavan ************************************************* Dr.Vijayaraghavan Technology Manager National Nanofabrication Centre Centre for Nano Science and Engineering Indian institute of Science ( IISc) Bangalore - 560 012 India Ph: 09663304316 *************************************************** -- This message has been scanned for viruses and dangerous content by MailScanner, and is believed to be clean. -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Thu Jan 2 11:09:47 2014 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Thu, 2 Jan 2014 16:09:47 +0000 Subject: [labnetwork] Staff Consulting In-Reply-To: <6A848421F695C54A9210C1A873C96AC212F408C1@WPVEXCMBX04.purdue.lcl> References: <6A848421F695C54A9210C1A873C96AC212F408C1@WPVEXCMBX04.purdue.lcl> Message-ID: Our university has a painful program in place for staff members to use the facility for consulting work or for their personal usage. First, conflict of interest (COI) documents have to be signed. Once approval is garnered and an oversight program is established then the staff member is treated as an outside user during their processing. They have to sign a user laboratory agreement, carry insurance and are charged as an external user. I really hope there are simpler programs out there that maybe we could emulate. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Weaver, John R Sent: Tuesday, December 31, 2013 10:26 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Staff Consulting I know that a number of facilities allow their staff to do outside "consulting" or "processing" using lab equipment. If you have such a program, could you tell me how it works? We do some of that, but it is not an organized program and we would like to put a little more structure to it. Thanks, John John R. Weaver Facility Manager Birck Nanotechnology Center 1205 West State Street West Lafayette IN 47907 (765) 494-5494 jrweaver at purdue.edu nano.purdue.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From roberthamilton at berkeley.edu Thu Jan 2 13:47:48 2014 From: roberthamilton at berkeley.edu (Bob Hamilton) Date: Thu, 02 Jan 2014 10:47:48 -0800 Subject: [labnetwork] Staff Consulting In-Reply-To: <6A848421F695C54A9210C1A873C96AC212F408C1@WPVEXCMBX04.purdue.lcl> References: <6A848421F695C54A9210C1A873C96AC212F408C1@WPVEXCMBX04.purdue.lcl> Message-ID: <52C5B454.5080802@berkeley.edu> Re: the question of outside "consulting" using lab resources, I offer a broader reply: As a public organization, the University of California NanoLab staff is encouraged to share ideas and offer advice on a collegial, not-for-fee basis. We consider it our duty and mission to pass on information free of charge. This includes unique discoveries we've made in our lab which may have commercial value. Public universities are supported by tax dollars as well as corporate and private donations. Sharing our knowledge garners goodwill and offers benefit to both industry and society. The name of the organization the NanoLab umbrellas under is CITRIS, the Center for Information Technology Research in the Interest of Society, a University of California center funded through of efforts of California's Governor Grey Davis. More broadly, there is a precedent at the University of California Berkeley Campus, set by professor and Nobel Prize winner Ernesto Orlando Lawrence. Lawrence invented the cyclotron, the first tool capable of making radionuclides thus opening up developments in all the branches of science. He set this precedent by sharing his accelerators with other researchers and encouraging shared-research facilities. His efforts were the cornerstones of our National Labs and upset the self-interest often practiced in scientific research prior to his days. One could say he was noble and Nobel'd. On a pragmatic basis, the juggling of one's duties for an operation like the NanoLab leaves scant time for outside consulting. Bob Hamilton -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu Phone: 510-809-8600 Mobile: 510-325-7557 e-mail preferred On 12/31/2013 7:26 AM, Weaver, John R wrote: > I know that a number of facilities allow their staff to do outside > "consulting" or "processing" using lab equipment. If you have such a > program, could you tell me how it works? We do some of that, but it is > not an organized program and we would like to put a little more > structure to it. > Thanks, > John > */John R. Weaver/* > */Facility Manager/* > */Birck Nanotechnology Center/* > */1205 West State Street/* > */West Lafayette IN 47907/* > */(765) 494-5494/* > */_jrweaver at purdue.edu_/* > */nano.purdue.edu/* > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From bill at eecs.berkeley.edu Thu Jan 2 19:10:33 2014 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Thu, 02 Jan 2014 16:10:33 -0800 Subject: [labnetwork] Staff Consulting In-Reply-To: <52C5B454.5080802@berkeley.edu> References: <6A848421F695C54A9210C1A873C96AC212F408C1@WPVEXCMBX04.purdue.lcl> <52C5B454.5080802@berkeley.edu> Message-ID: <52C5FFF9.2000202@eecs.berkeley.edu> An HTML attachment was scrubbed... URL: From philippe.fluckiger at epfl.ch Fri Jan 3 05:19:28 2014 From: philippe.fluckiger at epfl.ch (=?iso-8859-1?Q?Fl=FCckiger_Philippe?=) Date: Fri, 3 Jan 2014 10:19:28 +0000 Subject: [labnetwork] Corrosive exhaust material of construction In-Reply-To: <52B88C8B.2050809@udel.edu> References: <52B3403C.3090105@udel.edu> <5863FB4055D90542A7A7DAE0CEF2ACB0092732EFE7@E2K7CCR1.netvigour.com> <52B88C8B.2050809@udel.edu> Message-ID: <4AA894F792D3D64085E82E89F3604131675F6930@REXMD.intranet.epfl.ch> Dear Iulian, EPFL-CMi uses polypropylene for its corrosive exhaust system since 16 years without any problem. We would do it identical if needed. Many pictures available on our website at this address: http://mediatheque.epfl.ch/cmi/modules.php?include=view_photo.php&file=index&name=gallery&op=modload&id=IMG0005&set_albumName=album03 With my very best regards, Philippe Dr Philippe Fl?ckiger Director of Operations http://cmi.epfl.ch/ Phone +41 21 693 6695 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: lundi 23 d?cembre 2013 20:19 To: Fab Network Subject: Re: [labnetwork] Corrosive exhaust material of construction Many thanks to those who have provided input! To summarize the input: - Three sites have teflon-coated SS and two designers strongly recommend it. I know of at least two other sites that have it. - Three sites have FRP - Two sites have coated galvanized steel (one with PVC, one with Plasite?) - One site reported polypropylene I wonder why polypropylene is not more commonly used. Abbie's comments about explosions seem to be a good reason. Any other reasons? Can anyone comment on its durability; in my mind "plastic" becomes brittle after a while although I saw decades-old polypropylene wet benches that seemed to be fine? Best regards, Iulian iulian Codreanu, Ph.D. Director of Operations, UD NanoFab University of Delaware 149 Evans Hall Newark, DE 19716 302-831-2784 On 12/21/2013 12:46 AM, Abbie Gregg wrote: > Thanks for the lead in Julia, > A few comments. The Teflon lined stainless steel which is flanged/gasketed/bolted or welded is especially important if you are combining potential effluents containing pyrophorics or hydrogen (eg CVD or LPCVD exhaust/purge) in the same duct as the wet hood (acid or base) effluent, because you have the risk of explosion, fire and corrosion in the same exhaust stream. > Also we have been able to modify the Teflon lined stainless in the field at many jobs, it just takes special skills and a kit from PSP to do a tap in the field for modifications. This material is a long lead item and also quite expensive, but it has been much safer than any other material. FM prefers it because it is "factory made" rather than wrapped or coated in the field. > We did use Plasite coated heavy gauge galvanized ductwork in the same application at a couple of Northern CA projects but this was not preferred because the plasite is coated at the fabrication shop and there can be voids, think areas or other quality control problems that are hard to find. It is also heavier. > If there is no risk of overheating, fire, or explosion and only corrosion resistance needed, the Fiberglass reinforced plastic "field fabricated" duct is good if made by talented fabricators, although any Fire in the facility will also destroy it, and it makes really awful destructive and corrosive smoke when it burns. PVC has similar characteristics, and neither of these materials meet the 25/50 flame and smoke spread requirements of some H-5 codes. (depending on IBC year, I believe). > Best regards, > > Abbie Gregg > President > Abbie Gregg, Inc. > 1130 East University Drive, Suite 105 > Tempe, Arizona 85281 > Phone 480 446-8000 x 107 > Cell 480-577-5083 > FAX 480-446-8001 > email agregg at abbiegregg.com > website www.abbiegregg.com > > CONFIDENTIALITY NOTICE: All information contained in or attached to this email constitutes confidential information belonging to Abbie Gregg, Inc., its affiliates and subsidiaries and/or its clients. This email and any attachments are proprietary and/or confidential and are intended for business use of the addressee(s) only. All other uses or disclosures are strictly prohibited. If the reader is not the intended recipient you are hereby notified that the perusal, copying or dissemination of this email is strictly prohibited. If you have received this communication in error, please notify the sender, and delete all copies of this message and its attachments immediately. > > > -----Original Message----- > From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Aebersold,Julia W. > Sent: Thursday, December 19, 2013 3:57 PM > To: Iulian Codreanu; Fab Network > Subject: Re: [labnetwork] Corrosive exhaust material of construction > > Teflon lined stainless steel was designed and implemented for our acid exhaust system. Our cleanroom has been in place since 2006 and was designed by Abbie Gregg. She would be a great source for this type of information. > > Cheers! > > Julia Aebersold, Ph.D. > MNTC Cleanroom Manager > Shumaker Research Building, Room 233 > 2210 South Brook Street > University of Louisville > Louisville, KY 40292 > > 502-852-1572 > http://louisville.edu/micronano/ > > -----Original Message----- > From: labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu > Sent: Thursday, December 19, 2013 1:52 PM > To: Fab Network > Subject: [labnetwork] Corrosive exhaust material of construction > > Dear Lab Network, > > I, once again, seek your wisdom. Could you please share with me the type of material used for your corrosive exhaust system, how long you had it in operation, if you had any problems with it, and what you would do differently of you were in a position to do so? > > Thank you very much for your help. > > Iulian > > -- > iulian Codreanu, Ph.D. > Director of Operations, UD NanoFab > University of Delaware > 149 Evans Hall > Newark, DE 19716 > 302-831-2784 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From dgrimard at umich.edu Fri Jan 3 09:54:50 2014 From: dgrimard at umich.edu (Dennis Grimard) Date: Fri, 3 Jan 2014 09:54:50 -0500 Subject: [labnetwork] Staff Consulting In-Reply-To: <52C5FFF9.2000202@eecs.berkeley.edu> References: <6A848421F695C54A9210C1A873C96AC212F408C1@WPVEXCMBX04.purdue.lcl> <52C5B454.5080802@berkeley.edu> <52C5FFF9.2000202@eecs.berkeley.edu> Message-ID: All: The University of Michigan's LNF has allowed consulting for many years with very good success (and some issues). It improves customer service, allows staff to expand their horizons, allows for lab staffing after hours (without cost to the lab), reduces the need for additional staff, and it provides for increased characterization and development of processes that would not have been otherwise possible (also at no cost to the lab). In addition, it has brought in hundreds of thousands of dollars of additional revenue, and allow us to retain and attract key staff who otherwise might not have come to UM or even stayed here. Staff retention is critical in MI since we have a difficult time attracting high-quality semiconductor and nanotechnology types. That said, there is a considerable challenge with conflict of interest, conflict of commitment, liability, workman's comp, and general perception by both other staff and users. To address this the LNF had an extensive management program in place to assure that the university's interests came first. Unfortunately, a resent college of engineering review of the LNF killed the program in its current form (that is another long story). However, we were instructed / allowed to create a replacement for it with all the benefits and with none of the pitfalls. The new program description is too long for this email so here are the basics: The UM LNF has a ticketing system that allows for all users to place service requests (tools, process, inquiries) formally. That is, if a tool is down or a process is acting up a user places a ticket into our tracking system. The ticket is, claimed and the issue addressed. The progress is tracked to its completion. To date we have completed more than 7800 tickets since 2011 with an average closure time of approximately 30 hours. The ticketing system is another story altogether but we decided to use it as the basis of our "after hours remote runs". That is, consulting requests now come into our lab as any remote run (process requests run by staff for users) would and is handled by management not the staff directly. Thus, consulting is now considered a remote run that is completed after hours based on a ticket. Management decides which runs we take and who does them. In addition LNF has an after hours on-call program that allows staff to pick-up tickets that occur after hours for tool repairs and process needs. We use this system to address issues that come up that cannot be addressed during normal hours. For example, if a tool goes down Christmas day, a user can create a ticket that can be picked up by a staff member. They are compensated for coming in to address the issue after hours (the program is voluntary). Another example is if a user comes to a staff person on Friday night because a tool just went down and they have a deadline on Monday. The user can put in a ticket to have the staff member come in over the weekend to fix the tool to meet the deadline. The ticketing system has been well received and has contributed to our significant growth rate (more than a 250% growth rate in users since 2008). By extending both these programs (ticketing and tool on-call) we are fashioning a new "consulting" program, that we hope retains all the advantages of the former program while eliminating the downside. BTW we have both exempt and non-exempt personnel participating. One significant advantage is that they are now considered employees working in the lab on lab issues (just after hours) so the issues of insurance, worker compensation, and liability are as they are during normal work hours. The staff are paid from lab funds and the remote runs are paid directly to the lab by the user. Thus, no money moves from the user to the staff member directly. I hope this helps ... On Thu, Jan 2, 2014 at 7:10 PM, Bill Flounders wrote: > All, > In addition to the broader comments below, > I would like to confirm that the Berkeley NanoLab > does not allow staff to use laboratory equipment or > any other university resources for any type of > outside consulting or processing. The appearance of, > as well as the potential for, genuine conflicts of interest associated > with such activities are glaring and considered irreconcilable > with well defined university policies and state law. > > Bill Flounders > UC Berkeley > Marvell NanoLab > > > > Bob Hamilton wrote: > > Re: the question of outside "consulting" using lab resources, I offer a > broader reply: > > > > As a public organization, the University of California NanoLab staff is > encouraged to share ideas and offer advice on a collegial, not-for-fee > basis. We consider it our duty and mission to pass on information free of > charge. This includes unique discoveries we?ve made in our lab which may > have commercial value. > > > > Public universities are supported by tax dollars as well as corporate and > private donations. Sharing our knowledge garners goodwill and offers > benefit to both industry and society. The name of the organization the > NanoLab umbrellas under is CITRIS, the Center for Information Technology > Research in the Interest of Society, a University of California center > funded through of efforts of California?s Governor Grey Davis. > > > > More broadly, there is a precedent at the University of California > Berkeley Campus, set by professor and Nobel Prize winner Ernesto Orlando > Lawrence. Lawrence invented the cyclotron, the first tool capable of making > radionuclides thus opening up developments in all the branches of science. > He set this precedent by sharing his accelerators with other > researchers and encouraging shared-research facilities. His efforts were > the cornerstones of our National Labs and upset the self-interest often > practiced in scientific research prior to his days. One could say he was > noble and Nobel?d. > > > > On a pragmatic basis, the juggling of one?s duties for an operation like > the NanoLab leaves scant time for outside consulting. > > > Bob Hamilton > > > -- > Robert Hamilton > University of California at Berkeley > Marvell NanoLab > Equipment Eng. Mgr. > Room 520 Sutardja Dai Hall > Berkeley, CA 94720-1754bob at eecs.berkeley.edu > Phone: 510-809-8600 > Mobile: 510-325-7557 > e-mail preferred > > > On 12/31/2013 7:26 AM, Weaver, John R wrote: > > I know that a number of facilities allow their staff to do outside > ?consulting? or ?processing? using lab equipment. If you have such a > program, could you tell me how it works? We do some of that, but it is not > an organized program and we would like to put a little more structure to it. > > Thanks, > John > > *John R. Weaver* > *Facility Manager* > *Birck Nanotechnology Center* > *1205 West State Street* > *West Lafayette IN 47907* > *(765) 494-5494 <%28765%29%20494-5494>* > *jrweaver at purdue.edu* > *nano.purdue.edu * > > > > > > _______________________________________________ > labnetwork mailing listlabnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > > _______________________________________________ > labnetwork mailing listlabnetwork at mtl.mit.eduhttps://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- Dennis S Grimard, Ph.D Managing Director, Lurie Nanofabrication Facility University of Michigan 1246D EECS Building 1301 Beal Avenue Ann Arbor, MI 48109-2122 (734) 368-7172 (Cell) (734) 647-1781 (Fax) http://www.lnf.umich.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From matthieu.nannini at mcgill.ca Fri Jan 3 13:28:45 2014 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Fri, 3 Jan 2014 18:28:45 +0000 Subject: [labnetwork] EVG620 lamp uniformity Message-ID: <5410C038-5540-472F-B675-AFB2302F48FB@mcgill.ca> Labnetwork, I wan't able to search the list archive this morning so maybe this question has already been answered. We are struggling in getting a good uniformity over 4 and 6" on our EVG620. The procedures we have are not that clear. Could anyone provide guide lines to deal with the sturdy X,Y,Z lamp adjustments and the fly-eye lens to obtain uniformity at tool's specs (2 and 4% over 4 and 6" resp.) Thanks in advance Matthieu From rathbun at cnf.cornell.edu Fri Jan 3 13:30:19 2014 From: rathbun at cnf.cornell.edu (Lynn Rathbun) Date: Fri, 03 Jan 2014 13:30:19 -0500 Subject: [labnetwork] Staff Consulting In-Reply-To: References: <6A848421F695C54A9210C1A873C96AC212F408C1@WPVEXCMBX04.purdue.lcl> <52C5B454.5080802@berkeley.edu> <52C5FFF9.2000202@eecs.berkeley.edu> Message-ID: As with most of our labs, most activity on behalf of users is done by the users themselves, with support from Staff. And , obviously, process development for the "general good" is done by staff as part of their duties. Requests for processing on behalf of a user are handled in several ways. Such requests range broadly from simple mask fabrication or single film deposition done in a few hours to complex product development and process integration over the course of many months or years. These result from cases where the user has neither the time, desire , or skill to do the processing themselves. In such cases: Small tasks are handled by staff through the CNF user program as part of their regular duties. These are generally straight forward, single step processes requiring less than 4 hours staff time. This covers simple single step processes (e.g. mask or cvd) or maybe even simple 2 step processes (litho and simple etch). This is not for complex projects requiring process integration. This is just regular staff activity as part of their employment. Large projects are generally referred to an array of "independent contractors", who are primarily ex-users who conduct this as their business. There are a few of these available in Ithaca. These are not Cornell staff. They are hired privately by the end user on a per hour or lump sum basis and act as independent users of the CNF facility. They require insurance, etc, and bill the end user directly for their time, while the equipment use is billed directly from CNF to the end user. The modality is more appropriate for major device development bordering on research. Those two modalities cover the vast majority of outside "remote" processing. CNF does allow staff to act as private independent contractors under limited circumstances. 1) The project/task must be outside the scope or capacity of the user program (see above), 2) Prior management approval (written form) on a per project basis, 3) outside normal work hours , 4) less than the equivalent of 2 days per month ( 4 hours per week), 5) insurance, etc. Essentially they are acting as independent contractors, not staff, for that activity. This has not caused any difficulty, but it is a rather minor part of the overall activity. Lynn Rathbun >>On 12/31/2013 7:26 AM, Weaver, John R wrote: >>>I know that a number of facilities allow their staff to do outside >>>"consulting" or "processing" using lab equipment. If you have such >>>a program, could you tell me how it works? We do some of that, but >>>it is not an organized program and we would like to put a little >>>more structure to it. >>> >>>Thanks, >>>John >>> >>>John R. Weaver >>>Facility Manager >>>Birck Nanotechnology Center >>>1205 West State Street >>>West Lafayette IN 47907 >>>(765) 494-5494 >>>jrweaver at purdue.edu >>>nano.purdue.edu >>> >>> >>> >>> >>> >>> >>>_______________________________________________ >>> >>>labnetwork mailing list >>> >>>labnetwork at mtl.mit.edu >>> >>>https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> >> >> >>_______________________________________________ >> >>labnetwork mailing list >> >>labnetwork at mtl.mit.edu >> >>https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > >_______________________________________________ >labnetwork mailing list >labnetwork at mtl.mit.edu >https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > >-- >Dennis S Grimard, Ph.D >Managing Director, Lurie Nanofabrication Facility > >University of Michigan >1246D EECS Building >1301 Beal Avenue >Ann Arbor, MI 48109-2122 >(734) 368-7172 (Cell) >(734) 647-1781 (Fax) >http://www.lnf.umich.edu >_______________________________________________ >labnetwork mailing list >labnetwork at mtl.mit.edu >https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork ************************************************************** Dr. Lynn Rathbun Rathbun at cnf.cornell.edu NNIN Deputy Director (607)-254-4872 CNF Laboratory Manager Duffield Hall (607)-255-8601 Fax Cornell University (607)-592-1549 Work Cell Ithaca, New York 14853 (607)-342-1880 Personal Cell -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Mon Jan 6 14:49:25 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Mon, 06 Jan 2014 19:49:25 +0000 Subject: [labnetwork] Cleanroom cleaning Message-ID: Hi Folks, Wondering if anybody as a recommended clean routine for a Class 10 cleanroom? Rick Draper Laboratory Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 -------------- next part -------------- An HTML attachment was scrubbed... URL: From m.a.mohammad at ualberta.net Tue Jan 7 02:28:31 2014 From: m.a.mohammad at ualberta.net (Mohammad Ali Mohammad) Date: Tue, 7 Jan 2014 15:28:31 +0800 Subject: [labnetwork] LabNetwork Members in Beijing, China Message-ID: Hi, Out of curiosity, are there any LabNetwork members currently in Beijing, China? Best regards, Dr. Mohammad Ali Mohammad Tsinghua University, Beijing, China (ex-University of Alberta, Edmonton, Canada) -------------- next part -------------- An HTML attachment was scrubbed... URL: From matthieu.nannini at mcgill.ca Tue Jan 7 16:38:21 2014 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Tue, 7 Jan 2014 21:38:21 +0000 Subject: [labnetwork] Brand recommandation Message-ID: Dear colleagues, We received money to buy new tools in 2014 and, before you all get too busy in 2014, I would like to get your input (brand of choice) for the followings: - dicing saw - ICP for F processes - ALD - Laser direct writer - Developing station Thanks in advance Matthieu Nannini McGill Nanotools Microfab From Vincent.Luciani at nist.gov Tue Jan 7 22:47:10 2014 From: Vincent.Luciani at nist.gov (Luciani, Vincent) Date: Wed, 8 Jan 2014 03:47:10 +0000 Subject: [labnetwork] Seeking a Facility Engineer Message-ID: <3BD7212D-B748-4BF1-B2FE-1ECA04DDB807@NIST.GOV> Hello All, I hope everyone had a happy and safe New Year. The Center for Nanoscale Science and Technology (CNST) at NIST is looking for an experienced Facility Engineer that has ?the right stuff?. You know the kind I mean, a person that is at home with the complexities of the kind of operations we all run; cleanroom and general lab infrastructure, from HEPA filters to DI water?knows what orbital welding is etc. A longer more formal description is attached and is being advertised on many of the usual job sites. Please distribute as you see fit. If you have a specific recommendation feel free to send their resume directly to me. Thanks, Vince Vincent K. Luciani NanoFab Manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 [Description: CNST Horztl Color logo] [cid:D5D0C926-1745-4BF1-853C-D47654CE40E6] -------------- next part -------------- An HTML attachment was scrubbed... URL: From kuhn1 at purdue.edu Wed Jan 8 07:34:33 2014 From: kuhn1 at purdue.edu (Kuhn, Jeffrey G) Date: Wed, 8 Jan 2014 12:34:33 +0000 Subject: [labnetwork] Cleanroom cleaning In-Reply-To: References: Message-ID: <06C167B22748364D85BCA1AA812FDA1A5305E0C6@WPVEXCMBX02.purdue.lcl> Rick, The cleanroom at Birck is a bay-chase design with a central hallway. The bays are cleaned weekly using a microfiber mop system and UPW as the solvent. The chases are cleaned every two weeks using the same system plus hand cleaning of piping, etc. using cleanroom wipes. 90/10 UPW & IPA is used to spot clean more stubborn contamination as needed. The central hallway floor is cleaned daily (M-F) using the microfiber mops. The wipes are disposable, but the microfiber mops are laundered off-site. The mop system I mentioned replaced a three step method we formerly used. The old procedure involved using a HEPA vac, followed by a wiper/paddle system with 90/10 UPW & IPA as the solvent, followed by a second HEPA vacuuming. Both methods were approximately equal in their removal of contamination, but the microfiber system is faster since it involves only one step. That allowed us to reduce cleaning personnel by 1/3, which offset the increased cost of the microfiber mop system. Let me know if you would like more specific information on the mop system or the 3-step system and I'll send it to you. Regards, Jeff Kuhn Facility Engineer Birck Nanotechnology Center Purdue University 1205 W. State St. West Lafayette, IN 47907 Ph: (765) 496-8329 Fax: (765) 496-2018 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr. Sent: Monday, January 06, 2014 2:49 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cleanroom cleaning Hi Folks, Wondering if anybody as a recommended clean routine for a Class 10 cleanroom? Rick Draper Laboratory Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 -------------- next part -------------- An HTML attachment was scrubbed... URL: From laura at inti.gob.ar Wed Jan 8 07:44:38 2014 From: laura at inti.gob.ar (Laura Malatto) Date: Wed, 08 Jan 2014 09:44:38 -0300 Subject: [labnetwork] Cleanroom cleaning In-Reply-To: References: Message-ID: <52CD4836.9090308@inti.gob.ar> Hi, We have class 1000 and 100 cleanroom, and we use DI water with IPA (20:1 aprox). I will appreciate recommendations too! Thanks, Laura -- _____________________________________________ Ing. Laura Malatto Jefe de Laboratorio Procesos Microelectr?nicos INTI-Micro y Nanoelectr?nica del Bicentenario (CMNB) PTM - Ed. 42 Buenos Aires - Argentina TEL:(+5411) 4724 6430 FAX:(+5411) 4754 5194 laura at inti.gob.ar _____________________________________________ 0800 444 4004 | www.inti.gob.ar El 06/01/14 16:49, Morrison, Richard H., Jr. escribi?: > > Hi Folks, > > Wondering if anybody as a recommended clean routine for a Class 10 > cleanroom? > > > Rick > > Draper Laboratory > > Group Leader Microfabrication Operations > > 555 Technology Square > > Cambridge Ma, 02139-3563 > > www.draper.com > > rmorrison at draper.com > > W 617-258-3420 > > C 508-930-3461 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From Vincent.Luciani at nist.gov Wed Jan 8 13:42:15 2014 From: Vincent.Luciani at nist.gov (Luciani, Vincent) Date: Wed, 8 Jan 2014 18:42:15 +0000 Subject: [labnetwork] Seeking a Facility Engineer - Description attached Message-ID: <52f1ba58c26d422482db323ce78e7444@BLUPR09MB008.namprd09.prod.outlook.com> Repeat email. This time with the attachment. Vince ******************************************************************* Hello All, I hope everyone had a happy and safe New Year. The Center for Nanoscale Science and Technology (CNST) at NIST is looking for an experienced Facility Engineer that has "the right stuff". You know the kind I mean, a person that is at home with the complexities of the kind of operations we all run; cleanroom and general lab infrastructure, from HEPA filters to DI water...knows what orbital welding is etc. A longer more formal description is attached and is being advertised on many of the usual job sites. Please distribute as you see fit. If you have a specific recommendation feel free to send their resume directly to me. Thanks, Vince Vincent K. Luciani NanoFab Manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: CNST_Facility_Eng.docx Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Size: 21624 bytes Desc: CNST_Facility_Eng.docx URL: From julia.aebersold at louisville.edu Wed Jan 8 13:59:47 2014 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Wed, 8 Jan 2014 18:59:47 +0000 Subject: [labnetwork] Cleanroom cleaning In-Reply-To: <06C167B22748364D85BCA1AA812FDA1A5305E0C6@WPVEXCMBX02.purdue.lcl> References: <06C167B22748364D85BCA1AA812FDA1A5305E0C6@WPVEXCMBX02.purdue.lcl> Message-ID: Does anyone use a floor buffer specifically meant for cleanrooms on the occasional basis followed by microfiber mop cleanup? Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kuhn, Jeffrey G Sent: Wednesday, January 08, 2014 7:35 AM To: 'Morrison, Richard H., Jr.'; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Cleanroom cleaning Rick, The cleanroom at Birck is a bay-chase design with a central hallway. The bays are cleaned weekly using a microfiber mop system and UPW as the solvent. The chases are cleaned every two weeks using the same system plus hand cleaning of piping, etc. using cleanroom wipes. 90/10 UPW & IPA is used to spot clean more stubborn contamination as needed. The central hallway floor is cleaned daily (M-F) using the microfiber mops. The wipes are disposable, but the microfiber mops are laundered off-site. The mop system I mentioned replaced a three step method we formerly used. The old procedure involved using a HEPA vac, followed by a wiper/paddle system with 90/10 UPW & IPA as the solvent, followed by a second HEPA vacuuming. Both methods were approximately equal in their removal of contamination, but the microfiber system is faster since it involves only one step. That allowed us to reduce cleaning personnel by 1/3, which offset the increased cost of the microfiber mop system. Let me know if you would like more specific information on the mop system or the 3-step system and I'll send it to you. Regards, Jeff Kuhn Facility Engineer Birck Nanotechnology Center Purdue University 1205 W. State St. West Lafayette, IN 47907 Ph: (765) 496-8329 Fax: (765) 496-2018 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr. Sent: Monday, January 06, 2014 2:49 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cleanroom cleaning Hi Folks, Wondering if anybody as a recommended clean routine for a Class 10 cleanroom? Rick Draper Laboratory Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 -------------- next part -------------- An HTML attachment was scrubbed... URL: From donghaiz at usc.edu Thu Jan 9 14:07:49 2014 From: donghaiz at usc.edu (Donghai Zhu) Date: Thu, 9 Jan 2014 19:07:49 +0000 Subject: [labnetwork] house vacuum system In-Reply-To: <3BD7212D-B748-4BF1-B2FE-1ECA04DDB807@NIST.GOV> References: <3BD7212D-B748-4BF1-B2FE-1ECA04DDB807@NIST.GOV> Message-ID: <2dee7266e75d4b89b3781f0b3d56f461@BLUPR07MB498.namprd07.prod.outlook.com> Hello Colleagues, We have a house vacuum system for some process tools in clean room, such as aligner, spinner and vacuum container. We don?t use the vacuum for the cleaning of chambers and lab. The current vacuum system uses liquid ring vacuum pumps and it?s very old. We are going to replace it by a new vacuum system. Do you have any recommendation of the vendors and models of good vacuum system? Does it have to be a oil-less? Thank you very much! Donghai Zhu Lab manager Keck Photonics Lab, University of Southern California -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Fri Jan 10 07:24:39 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Fri, 10 Jan 2014 12:24:39 +0000 Subject: [labnetwork] Brand recommandation In-Reply-To: References: Message-ID: We purchased and have been operating a nice little R&D ALD tool from a company in Sudbury Mass called Arradiance unit is a GEMSTAR-8. A little caution here every 10um of deposition you have to clean the chamber by bead blasting and the source chemicals are expensive but overall it is 95% up time and the process is very stable. We have Disco dice saw the latest model and it is very good, model is DAD 3240 very good for our MEMS operation. Our MCM line uses ADT-7100. Both saws have >95% uptime with good service from both companies. Rick Draper Laboratory Principle Memeber of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Tuesday, January 07, 2014 4:38 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Brand recommandation Dear colleagues, We received money to buy new tools in 2014 and, before you all get too busy in 2014, I would like to get your input (brand of choice) for the followings: - dicing saw - ICP for F processes - ALD - Laser direct writer - Developing station Thanks in advance Matthieu Nannini McGill Nanotools Microfab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From kuhn1 at purdue.edu Fri Jan 10 07:41:14 2014 From: kuhn1 at purdue.edu (Kuhn, Jeffrey G) Date: Fri, 10 Jan 2014 12:41:14 +0000 Subject: [labnetwork] house vacuum system In-Reply-To: <2dee7266e75d4b89b3781f0b3d56f461@BLUPR07MB498.namprd07.prod.outlook.com> References: <3BD7212D-B748-4BF1-B2FE-1ECA04DDB807@NIST.GOV> <2dee7266e75d4b89b3781f0b3d56f461@BLUPR07MB498.namprd07.prod.outlook.com> Message-ID: <06C167B22748364D85BCA1AA812FDA1A53060460@WPVEXCMBX02.purdue.lcl> Good Morning Donghai, The answers to your questions depend on the vacuum demand of your facility as well as the type(s) of gases the system would be seeing. If you are supplying vacuum to a large number of users, your best choice may be another liquid ring vacuum pump system since they can generate high cfm and therefore support a high demand. At Birck, our system comprises two Sterling (SIHI) liquid ring pumps rated at 500 cfm each. Only one pump is required to handle our demand, but they alternate duty cycles and the off-line pump serves as backup to eliminate single point failure. There are some considerations when designing a liquid ring vacuum system: 1. What level of vacuum is required? Typically, around -29? is as good as you can get from a liquid ring pump. That?s adequate for most non-process applications. 2. Along with the level of vacuum, you must consider the service liquid (water) inside the pump. The higher the vacuum requirement, the cooler the service liquid needs to be. To achieve high vacuum, you may need a heat exchanger to cool the service liquid to the proper level. Keep in mind that if the service liquid gets too warm the pump will cavitate and ultimately destroy itself. I?ve seen that happen and it?s an expensive repair. 3. The gases that the pump will be ingesting will determine its material of construction. If there are corrosive gases present you may need a stainless steel pump and internals. In my career, I?ve dealt with SIHI, Gast, and Dekker systems. They are essentially the same in design and performance. That makes cost a major consideration, so I would consider sending it out for bid and specifying the performance parameters in the bid documents. Others on this forum may have different opinions and I too would be interested in hearing them. Of course, if your vacuum demand is low, you may be able to go with a non-liquid ring design ? perhaps even splitting the load between several. Regards, Jeff Kuhn Facility Engineer Birck Nanotechnology Center Purdue University 1205 W. State St. West Lafayette, IN 47907 Ph: (765) 496-8329 Fax: (765) 496-2018 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Donghai Zhu Sent: Thursday, January 09, 2014 2:08 PM To: labnetwork Subject: [labnetwork] house vacuum system Hello Colleagues, We have a house vacuum system for some process tools in clean room, such as aligner, spinner and vacuum container. We don?t use the vacuum for the cleaning of chambers and lab. The current vacuum system uses liquid ring vacuum pumps and it?s very old. We are going to replace it by a new vacuum system. Do you have any recommendation of the vendors and models of good vacuum system? Does it have to be a oil-less? Thank you very much! Donghai Zhu Lab manager Keck Photonics Lab, University of Southern California -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Fri Jan 10 15:50:14 2014 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Fri, 10 Jan 2014 20:50:14 +0000 Subject: [labnetwork] Brand recommandation In-Reply-To: References: Message-ID: We have a lovely Beneq ALD that is very nice and a Disco Dicing Saw. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr. Sent: Friday, January 10, 2014 7:25 AM To: Matthieu Nannini, Dr.; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Brand recommandation We purchased and have been operating a nice little R&D ALD tool from a company in Sudbury Mass called Arradiance unit is a GEMSTAR-8. A little caution here every 10um of deposition you have to clean the chamber by bead blasting and the source chemicals are expensive but overall it is 95% up time and the process is very stable. We have Disco dice saw the latest model and it is very good, model is DAD 3240 very good for our MEMS operation. Our MCM line uses ADT-7100. Both saws have >95% uptime with good service from both companies. Rick Draper Laboratory Principle Memeber of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. Sent: Tuesday, January 07, 2014 4:38 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Brand recommandation Dear colleagues, We received money to buy new tools in 2014 and, before you all get too busy in 2014, I would like to get your input (brand of choice) for the followings: - dicing saw - ICP for F processes - ALD - Laser direct writer - Developing station Thanks in advance Matthieu Nannini McGill Nanotools Microfab _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From gimtgkyy at ihmgl.com Mon Jan 13 18:38:38 2014 From: gimtgkyy at ihmgl.com (gcyaamd) Date: Tue, 14 Jan 2014 07:38:38 +0800 Subject: [labnetwork] =?utf-8?b?5b6ud+S/oei/jumUgOahiOS+i++8mueyieS4nQ==?= =?utf-8?b?5LiA5pyI5pq05aKeOTDkuIfnmoTnp5jlr4ZnY3lhYW1k?= Message-ID: <6F0BD7A40DF0FCADDFC01A8909C865B8@jxeir> labnetwork??? gcyaamd 2014-1-14 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: ????????????????????.xls Type: application/vnd.ms-excel Size: 22528 bytes Desc: not available URL: From jprovine at stanford.edu Mon Jan 13 10:30:26 2014 From: jprovine at stanford.edu (J Provine) Date: Mon, 13 Jan 2014 07:30:26 -0800 Subject: [labnetwork] Brand recommandation In-Reply-To: References: Message-ID: Hello, at stanford's snf we have multiple systems from cambridge nanotech (now a division of ultratech). we've had a thermal ald system (Savannah) for several years. it is low maintenance and high uptime with great metal oxide performance. we also have their plasma assisted system (Fiji) which is able to do much more and delivers amazing nitride and pure metal films in addition to metal oxides. it is also high up time, although it is by nature a little more complicated. fall 2013, cambridge nanotech released a second generation of the savannah and the fiji with some changes that (in my opinion) make them nicer for shared use labs. these are very popular tools at snf, and we've gotten great support from cambridge nanotech. i could not recommend our brand of wafer saw. j On Fri, Jan 10, 2014 at 12:50 PM, Aebersold,Julia W. < julia.aebersold at louisville.edu> wrote: > We have a lovely Beneq ALD that is very nice and a Disco Dicing Saw. > > Cheers! > > Julia Aebersold, Ph.D. > MNTC Cleanroom Manager > Shumaker Research Building, Room 233 > 2210 South Brook Street > University of Louisville > Louisville, KY 40292 > > 502-852-1572 > http://louisville.edu/micronano/ > > -----Original Message----- > From: labnetwork-bounces at mtl.mit.edu [mailto: > labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr. > Sent: Friday, January 10, 2014 7:25 AM > To: Matthieu Nannini, Dr.; labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Brand recommandation > > We purchased and have been operating a nice little R&D ALD tool from a > company in Sudbury Mass called Arradiance unit is a GEMSTAR-8. > > A little caution here every 10um of deposition you have to clean the > chamber by bead blasting and the source chemicals are expensive but overall > it is 95% up time and the process is very stable. > > We have Disco dice saw the latest model and it is very good, model is DAD > 3240 very good for our MEMS operation. Our MCM line uses ADT-7100. Both > saws have >95% uptime with good service from both companies. > > > Rick > > > Draper Laboratory > Principle Memeber of the Technical Staff Group Leader Microfabrication > Operations > 555 Technology Square > Cambridge Ma, 02139-3563 > > www.draper.com > rmorrison at draper.com > W 617-258-3420 > C 508-930-3461 > > > > > -----Original Message----- > From: labnetwork-bounces at mtl.mit.edu [mailto: > labnetwork-bounces at mtl.mit.edu] On Behalf Of Matthieu Nannini, Dr. > Sent: Tuesday, January 07, 2014 4:38 PM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Brand recommandation > > Dear colleagues, > > We received money to buy new tools in 2014 and, before you all get too > busy in 2014, I would like to get your input (brand of choice) for the > followings: > - dicing saw > - ICP for F processes > - ALD > - Laser direct writer > - Developing station > > Thanks in advance > > Matthieu Nannini > McGill Nanotools Microfab > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From donghaiz at usc.edu Mon Jan 13 11:58:47 2014 From: donghaiz at usc.edu (Donghai Zhu) Date: Mon, 13 Jan 2014 16:58:47 +0000 Subject: [labnetwork] house vacuum system In-Reply-To: <06C167B22748364D85BCA1AA812FDA1A53060460@WPVEXCMBX02.purdue.lcl> References: <3BD7212D-B748-4BF1-B2FE-1ECA04DDB807@NIST.GOV> <2dee7266e75d4b89b3781f0b3d56f461@BLUPR07MB498.namprd07.prod.outlook.com> <06C167B22748364D85BCA1AA812FDA1A53060460@WPVEXCMBX02.purdue.lcl> Message-ID: Hello Jeff, Thank you very much for the very detail explanation. The house vacuum system we have is reliable and requires less routine maintenance. I notice that there are other kinds of system available on market. Some use oil lubricated pumps. It?s claimed that 99% oil can be removed with the filter. But the filter has to be changed frequently. Some system are oil less. In terms of maintenance and reliability, I would like to know if others on the forum have the experience on different system. Best Regards, Donghai Zhu Lab manager Keck Photonics Lab, University of Southern California From: Kuhn, Jeffrey G [mailto:kuhn1 at purdue.edu] Sent: Friday, January 10, 2014 4:41 AM To: Donghai Zhu Cc: labnetwork at mtl.mit.edu Subject: RE: house vacuum system Good Morning Donghai, The answers to your questions depend on the vacuum demand of your facility as well as the type(s) of gases the system would be seeing. If you are supplying vacuum to a large number of users, your best choice may be another liquid ring vacuum pump system since they can generate high cfm and therefore support a high demand. At Birck, our system comprises two Sterling (SIHI) liquid ring pumps rated at 500 cfm each. Only one pump is required to handle our demand, but they alternate duty cycles and the off-line pump serves as backup to eliminate single point failure. There are some considerations when designing a liquid ring vacuum system: 1. What level of vacuum is required? Typically, around -29? is as good as you can get from a liquid ring pump. That?s adequate for most non-process applications. 2. Along with the level of vacuum, you must consider the service liquid (water) inside the pump. The higher the vacuum requirement, the cooler the service liquid needs to be. To achieve high vacuum, you may need a heat exchanger to cool the service liquid to the proper level. Keep in mind that if the service liquid gets too warm the pump will cavitate and ultimately destroy itself. I?ve seen that happen and it?s an expensive repair. 3. The gases that the pump will be ingesting will determine its material of construction. If there are corrosive gases present you may need a stainless steel pump and internals. In my career, I?ve dealt with SIHI, Gast, and Dekker systems. They are essentially the same in design and performance. That makes cost a major consideration, so I would consider sending it out for bid and specifying the performance parameters in the bid documents. Others on this forum may have different opinions and I too would be interested in hearing them. Of course, if your vacuum demand is low, you may be able to go with a non-liquid ring design ? perhaps even splitting the load between several. Regards, Jeff Kuhn Facility Engineer Birck Nanotechnology Center Purdue University 1205 W. State St. West Lafayette, IN 47907 Ph: (765) 496-8329 Fax: (765) 496-2018 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Donghai Zhu Sent: Thursday, January 09, 2014 2:08 PM To: labnetwork Subject: [labnetwork] house vacuum system Hello Colleagues, We have a house vacuum system for some process tools in clean room, such as aligner, spinner and vacuum container. We don?t use the vacuum for the cleaning of chambers and lab. The current vacuum system uses liquid ring vacuum pumps and it?s very old. We are going to replace it by a new vacuum system. Do you have any recommendation of the vendors and models of good vacuum system? Does it have to be a oil-less? Thank you very much! Donghai Zhu Lab manager Keck Photonics Lab, University of Southern California -------------- next part -------------- An HTML attachment was scrubbed... URL: From vito.logiudice at uwaterloo.ca Mon Jan 13 15:04:58 2014 From: vito.logiudice at uwaterloo.ca (Vito Logiudice) Date: Mon, 13 Jan 2014 20:04:58 +0000 Subject: [labnetwork] Corrosive exhaust material of construction In-Reply-To: <4AA894F792D3D64085E82E89F3604131675F6930@REXMD.intranet.epfl.ch> Message-ID: Hi Iulian and Colleagues, UWaterloo's nanofab uses FRP for much the same reasons listed by Jeff Kuhn at Birck: meets FM 4922 standard and no duct detectors needed. I am not aware if alternate options were evaluated by the original facility design team. Best regards, Vito -- Vito Logiudice M.A.Sc., P.Eng. Director of Operations, Quantum NanoFab University of Waterloo 200 University Avenue West Waterloo, ON Canada N2L 3G1 Tel: 1-519-888-4567 ext. 38703 Email: vlogiudi at uwaterloo.ca Website: https://qncfab.uwaterloo.ca/ From: Fl?ckiger Philippe > Date: Friday, 3 January, 2014 5:19 AM To: Iulian Codreanu >, Fab Network > Cc: Voirol Jean-Marie > Subject: Re: [labnetwork] Corrosive exhaust material of construction Dear Iulian, EPFL-CMi uses polypropylene for its corrosive exhaust system since 16 years without any problem. We would do it identical if needed. Many pictures available on our website at this address: http://mediatheque.epfl.ch/cmi/modules.php?include=view_photo.php&file=index&name=gallery&op=modload&id=IMG0005&set_albumName=album03 With my very best regards, Philippe Dr Philippe Fl?ckiger Director of Operations http://cmi.epfl.ch/ Phone +41 21 693 6695 -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu Sent: lundi 23 d?cembre 2013 20:19 To: Fab Network Subject: Re: [labnetwork] Corrosive exhaust material of construction Many thanks to those who have provided input! To summarize the input: - Three sites have teflon-coated SS and two designers strongly recommend it. I know of at least two other sites that have it. - Three sites have FRP - Two sites have coated galvanized steel (one with PVC, one with Plasite?) - One site reported polypropylene I wonder why polypropylene is not more commonly used. Abbie's comments about explosions seem to be a good reason. Any other reasons? Can anyone comment on its durability; in my mind "plastic" becomes brittle after a while although I saw decades-old polypropylene wet benches that seemed to be fine? Best regards, Iulian iulian Codreanu, Ph.D. Director of Operations, UD NanoFab University of Delaware 149 Evans Hall Newark, DE 19716 302-831-2784 On 12/21/2013 12:46 AM, Abbie Gregg wrote: > Thanks for the lead in Julia, > A few comments. The Teflon lined stainless steel which is flanged/gasketed/bolted or welded is especially important if you are combining potential effluents containing pyrophorics or hydrogen (eg CVD or LPCVD exhaust/purge) in the same duct as the wet hood (acid or base) effluent, because you have the risk of explosion, fire and corrosion in the same exhaust stream. > Also we have been able to modify the Teflon lined stainless in the field at many jobs, it just takes special skills and a kit from PSP to do a tap in the field for modifications. This material is a long lead item and also quite expensive, but it has been much safer than any other material. FM prefers it because it is "factory made" rather than wrapped or coated in the field. > We did use Plasite coated heavy gauge galvanized ductwork in the same application at a couple of Northern CA projects but this was not preferred because the plasite is coated at the fabrication shop and there can be voids, think areas or other quality control problems that are hard to find. It is also heavier. > If there is no risk of overheating, fire, or explosion and only corrosion resistance needed, the Fiberglass reinforced plastic "field fabricated" duct is good if made by talented fabricators, although any Fire in the facility will also destroy it, and it makes really awful destructive and corrosive smoke when it burns. PVC has similar characteristics, and neither of these materials meet the 25/50 flame and smoke spread requirements of some H-5 codes. (depending on IBC year, I believe). > Best regards, > > Abbie Gregg > President > Abbie Gregg, Inc. > 1130 East University Drive, Suite 105 > Tempe, Arizona 85281 > Phone 480 446-8000 x 107 > Cell 480-577-5083 > FAX 480-446-8001 > email agregg at abbiegregg.com > website www.abbiegregg.com > > CONFIDENTIALITY NOTICE: All information contained in or attached to this email constitutes confidential information belonging to Abbie Gregg, Inc., its affiliates and subsidiaries and/or its clients. This email and any attachments are proprietary and/or confidential and are intended for business use of the addressee(s) only. All other uses or disclosures are strictly prohibited. If the reader is not the intended recipient you are hereby notified that the perusal, copying or dissemination of this email is strictly prohibited. If you have received this communication in error, please notify the sender, and delete all copies of this message and its attachments immediately. > > > -----Original Message----- > From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Aebersold,Julia W. > Sent: Thursday, December 19, 2013 3:57 PM > To: Iulian Codreanu; Fab Network > Subject: Re: [labnetwork] Corrosive exhaust material of construction > > Teflon lined stainless steel was designed and implemented for our acid exhaust system. Our cleanroom has been in place since 2006 and was designed by Abbie Gregg. She would be a great source for this type of information. > > Cheers! > > Julia Aebersold, Ph.D. > MNTC Cleanroom Manager > Shumaker Research Building, Room 233 > 2210 South Brook Street > University of Louisville > Louisville, KY 40292 > > 502-852-1572 > http://louisville.edu/micronano/ > > -----Original Message----- > From: labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Iulian Codreanu > Sent: Thursday, December 19, 2013 1:52 PM > To: Fab Network > Subject: [labnetwork] Corrosive exhaust material of construction > > Dear Lab Network, > > I, once again, seek your wisdom. Could you please share with me the type of material used for your corrosive exhaust system, how long you had it in operation, if you had any problems with it, and what you would do differently of you were in a position to do so? > > Thank you very much for your help. > > Iulian > > -- > iulian Codreanu, Ph.D. > Director of Operations, UD NanoFab > University of Delaware > 149 Evans Hall > Newark, DE 19716 > 302-831-2784 > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From Jianchao.Li at unt.edu Mon Jan 13 16:58:59 2014 From: Jianchao.Li at unt.edu (Li, Jianchao) Date: Mon, 13 Jan 2014 21:58:59 +0000 Subject: [labnetwork] giving away Used LPCVD system Message-ID: Dear colleagues, We are getting rid of a used LPCVD system from our facility. It was bought few years ago as used system. It has never been used at our facility. We don't have budget to finish up the utility connection. If buyer takes care of disconnection and crating and shipping, the system itself will be given away. Basic info: BRUCE BTl BDF41 Complete Four Stack LPCVD Upgraded Dura Drive BoatLoaders If interested, please contact me and I can send you more info about it. Thanks! J.C. Jianchao (J.C.) Li Ph.D. Nanofabrication Facilities Manager UNT Discovery Park 3940 North Elm, Suite A-101N Denton, TX 76207-7102 Office: (940) 369-5318 e-mail: jianchao.li at unt.edu Cleanroom #: 940-369-5352 http://research.unt.edu/nanofabrication/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From Thomas_Ferraguto at uml.edu Tue Jan 14 11:25:54 2014 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas) Date: Tue, 14 Jan 2014 16:25:54 +0000 Subject: [labnetwork] experience with Germanium Message-ID: Colleagues, We have a new CHA E-Beam / Thermal evaporator and there has been a some interest in depositing Germanium. What (if any) are the risks for allowing Germanium deposition in a system that does largely gold, titanium, aluminum and nickel? Thank you Thomas S. Ferraguto ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell 1 University Avenue Lowell MA 01854-5120 978-934-1809 land 617-755-0910 mobile 978-934-1014 fax [cid:image001.png at 01CF111B.632C71C0] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 57996 bytes Desc: image001.png URL: From jprovine at stanford.edu Tue Jan 14 13:37:06 2014 From: jprovine at stanford.edu (J Provine) Date: Tue, 14 Jan 2014 10:37:06 -0800 Subject: [labnetwork] experience with Germanium In-Reply-To: References: Message-ID: there is not much in the way of cross-contamination concern. Ge will cool much slower than the metals you mention, and if cool-ed rapidly can "explode" in the vacuum making a real mess (and using up a lot of your source). establish an extra long cool down procedure for the users (5-10 minutes to ramp the temperature down) to avoid this. then everything should be fine. j On Tue, Jan 14, 2014 at 8:25 AM, Ferraguto, Thomas wrote: > Colleagues, > > > > We have a new CHA E-Beam / Thermal evaporator and there has been a some > interest in depositing Germanium. > > > > What (if any) are the risks for allowing Germanium deposition in a system > that does largely gold, titanium, aluminum and nickel? > > > > Thank you > > > > Thomas S. Ferraguto > > ETIC Nanofabrication Laboratory Director > > University of Massachusetts Lowell > > 1 University Avenue > > Lowell MA 01854-5120 > > 978-934-1809 land > > 617-755-0910 mobile > > 978-934-1014 fax > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 57996 bytes Desc: not available URL: From mark.walters at duke.edu Fri Jan 17 14:35:59 2014 From: mark.walters at duke.edu (Mark Walters) Date: Fri, 17 Jan 2014 14:35:59 -0500 Subject: [labnetwork] Cleanroom baseline processes and monitoring Message-ID: <000701cf13bb$596d4860$0c47d920$@duke.edu> I imagine that like most of you, we offer some standard baseline cleanroom processes for our users to implement. For example, there is a standard positive resist process and negative resist process, standard RIE etch recipes, etc. We've done some characterization of these processes in the past, especially when they were first set up, but we now want to be more intentional on monitoring these processes over time to be able to notice trends or problems before they affect our users. I was wondering if other university cleanrooms do periodic process monitoring, and if so, what types of processes and monitoring have you found to be most useful for you and your users. Do you look at single isolated processes (e.g., evaporation thickness uniformity) or build devices that test the integration of multiple processes (e.g., MOS devices or TLM resistance structures) or a combination of both? Thanks, Mark D. Walters, Ph.D. Director, Shared Materials Instrumentation Facility (SMIF) Duke University Box 90271 Durham, NC 27708-0271 http://smif.lab.duke.edu Phone: (919) 660-5486 Fax: (919) 660-5491 -------------- next part -------------- An HTML attachment was scrubbed... URL: From sburkett at eng.ua.edu Fri Jan 17 16:53:15 2014 From: sburkett at eng.ua.edu (Burkett, Susan) Date: Fri, 17 Jan 2014 15:53:15 -0600 Subject: [labnetwork] AVS New Technical Specialist Category Message-ID: Dear LabNetwork Members, I just want to say how much I learn from your postings in response to questions from the list members because they are so thorough and thoughtful. I am on the American Vacuum Society Membership Committee and want to let you know about a new membership category entitled Technical Specialist. Membership dues are $45 annually and gives you many benefits. Please consider joining AVS. AVS-61 will be held in Baltimore this year, Nov. 9-14. Thank you for your time! Susan -- Susan Burkett The University of Alabama Alabama Power Foundation Endowed Professor 101 Houser Hall Tuscaloosa, AL 35487-0286 (205) 348-4378 SBurkett at eng.ua.edu Having trouble viewing this email? Click here [http://ih.constantcontact.com/fs113/1101176060676/img/614.jpg] [http://ih.constantcontact.com/fs113/1101176060676/img/615.jpg] Click Here to Join Great Science, No Pressure Have you heard about the American Vacuum Society (AVS)? As an interdisciplinary professional Society, AVS offers the opportunity for unique collaborations in many areas of science and technology related to materials, interfaces, and processing. Our new Technical Specialist Category ($45) is for any person who has a minimum of two years full-time employment or experience as a technical specialist within fields of interest to AVS or a minimum of a Bachelor's Degree or equivalent in a relevant science or engineering field. Typically, this person will carry out work that assists in the advancement and development of the related sciences or may also work in a teaching laboratory where support is given to science teachers, lecturers and students. In addition, work in areas such as processing and process control in fields of interest to the Society are also appropriate.The technical specialist provides all the required support needed for a lab to function effectively while adhering to correct procedures and health and safety guidelines. Please review the list of AVS benefits below or visit our website at www.avs.org. [http://ih.constantcontact.com/fs113/1101176060676/img/609.jpg] [https://imgssl.constantcontact.com/ui/images1/btn_fbk_160_a.png] [https://imgssl.constantcontact.com/ui/images1/btn_lkdin_160.png] [https://imgssl.constantcontact.com/ui/images1/btn_twit_160.png] Contact Angela Klink, Membership Services Administrator: membership at avs.org, 212-248-0200, www.avs.org Forward email [http://img.constantcontact.com/letters/images/SafeUnsubscribe_Footer_Logo_New.png] [http://img.constantcontact.com/letters/images/CC_Footer_Logo_New.png] This email was sent to della at avs.org by membership at avs.org | Update Profile/Email Address | Instant removal with SafeUnsubscribe? | Privacy Policy. AVS | 125 Maiden Lane | 15th Floor | New York | NY | 10038 From bill at eecs.berkeley.edu Sat Jan 18 13:57:24 2014 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Sat, 18 Jan 2014 10:57:24 -0800 Subject: [labnetwork] Cleanroom baseline processes and monitoring In-Reply-To: <000701cf13bb$596d4860$0c47d920$@duke.edu> References: <000701cf13bb$596d4860$0c47d920$@duke.edu> Message-ID: <52DACE94.3050707@eecs.berkeley.edu> An HTML attachment was scrubbed... URL: From kevin.walsh at louisville.edu Sat Jan 18 18:35:10 2014 From: kevin.walsh at louisville.edu (Walsh,Kevin M.) Date: Sat, 18 Jan 2014 23:35:10 +0000 Subject: [labnetwork] advice please Message-ID: <0D1ABD6DF2541B42A05BD6E6D3695411F63CA812@EXMBX03.ad.louisville.edu> I have an outstanding US citizen student who will complete his MENG degree in EE this summer. He has just recently decided he wishes to pursue his PHD in the area of MEMS or micro/nanoelectronics. Since it's a bit late to apply to PhD programs, he is looking for something to do for a year. He has 2 years of cleanroom experience making a variety of MEMS devices. He has much experience with a wide collection of processing, packaging and characterization tools. He is simply an outstanding "fabber". Does anyone have any suggestions which I could pass onto him. Thanks in advance, Kevin Dr. Kevin M. Walsh Ky nanoNET Director Samuel T. Fife Professor of Electrical and Computer Engineering Founding Director of the UofL Micro/Nanotechnology Center 2210 South Brook St Shumaker Research Building, Room 234 Louisville, KY 40292 Office # (502) 852-0826 Fax # (502) 852-8128 http://kynanonet.org/ [Description: Capture for email signature] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 14485 bytes Desc: image001.jpg URL: From raghavan at ece.iisc.ernet.in Sun Jan 19 23:22:26 2014 From: raghavan at ece.iisc.ernet.in (raghavan) Date: Mon, 20 Jan 2014 09:52:26 +0530 Subject: [labnetwork] advice please In-Reply-To: <0D1ABD6DF2541B42A05BD6E6D3695411F63CA812@EXMBX03.ad.louisville.edu> References: <0D1ABD6DF2541B42A05BD6E6D3695411F63CA812@EXMBX03.ad.louisville.edu> Message-ID: <002a01cf1597$3a0ae030$ae20a090$@iisc.ernet.in> Dear Kevin Good to see a faculty encouraging a good student. If this guy likes travelling and would like to explore India, he is welcome to work in our cleanroom (http://sindhu.ece.iisc.ernet.in/nanofab/twikii/bin/view/Main/WebHome) In Indian Institute of Science, Bangalore. I am not sure if he can get a funding, though! Best wishes Raghavan ************************************************* Dr.Vijayaraghavan Technology Manager National Nanofabrication Centre Centre for Nano Science and Engineering Indian institute of Science ( IISc) Bangalore - 560 012 India Ph: 09663304316 *************************************************** From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Walsh,Kevin M. Sent: 19 January 2014 05:05 To: labnetwork at mtl.mit.edu Cc: Walsh,Kevin M. Subject: [labnetwork] advice please I have an outstanding US citizen student who will complete his MENG degree in EE this summer. He has just recently decided he wishes to pursue his PHD in the area of MEMS or micro/nanoelectronics. Since it's a bit late to apply to PhD programs, he is looking for something to do for a year. He has 2 years of cleanroom experience making a variety of MEMS devices. He has much experience with a wide collection of processing, packaging and characterization tools. He is simply an outstanding "fabber". Does anyone have any suggestions which I could pass onto him. Thanks in advance, Kevin Dr. Kevin M. Walsh Ky nanoNET Director Samuel T. Fife Professor of Electrical and Computer Engineering Founding Director of the UofL Micro/Nanotechnology Center 2210 South Brook St Shumaker Research Building, Room 234 Louisville, KY 40292 Office # (502) 852-0826 Fax # (502) 852-8128 http://kynanonet.org/ Description: Capture for email signature -- This message has been scanned for viruses and dangerous content by MailScanner, and is believed to be clean. -- This message has been scanned for viruses and dangerous content by MailScanner, and is believed to be clean. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 14485 bytes Desc: not available URL: From diadiuk at MIT.EDU Wed Jan 22 10:16:42 2014 From: diadiuk at MIT.EDU (Vicky Diadiuk) Date: Wed, 22 Jan 2014 10:16:42 -0500 Subject: [labnetwork] UGIM2014 Call for Presentations Message-ID: Hi, The deadline is approaching quickly, so here's a reminder of the UGIM2014 Call for Presentations. Looking forward to receiving your submission. Vicky PS Pls circulate this among your colleagues in case they are not in Labnetwork. UGIM2014 Call for Presentations The goal of this symposium is to bring together educators and researchers involved in micro/nanotechnology management around the world and to provide a forum for exchanging information and presenting new lab operations and educational concepts. Representatives of micro/nano fabrication facilities, ranging from new labs to nationally recognized facilities, have found this symposium an excellent forum for exchanging information. Industry/university interactions, including technology transfer, collaborative research, and training efforts are included. Abstract Submission Deadline: 14 February 2014 Submission and Registration information at: http://www.cns.fas.harvard.edu/UGIM2014/ Symposium on Operations and Management of Nanotechnology Research Facilities Submissions on all topics involving management of nanotechnology research facilities and academic laboratories will be considered. Papers are requested with a focus on one of the session topics listed below. Since this two-day symposium is dedicated to shared laboratory management, research papers are not appropriate. Presentations Solicited on the Following Topics 1. Multi-User Facility Operations 2. Laboratory Safety and discipline 3. Anti-Contamination Policies 4. Supporting Numerous Wafer Materials and Sizes 5. Lab Control Systems, Instrument Interlocks, Electronic Records 6. Emerging Processes 7. Staffing Strategies including use (or not) of student ?Super Users? 8. Financing for Core Facilities, Capital Planning, and lab accounting Also at UGIM2014 Discussion Panel Topics: In addition to the Oral Paper Sessions, there will be 4-6 Discussion Panels on topics of cleanroom operations. Topical Lunch: Networking and topic discussion will continue during lunch at topic-assigned tables. Exhibits: Meet leading cleanroom and equipment vendors in a relaxed environment. New This Year: Optional ?New Lab Bootie Camp?: Sunday preceding the start of UGIM there will be a half-day tutorial session on new laboratory startup including presentations on safety, tool maintenance options, and electronic tool management (interlocking and reservations). -------------- next part -------------- An HTML attachment was scrubbed... URL: From fouad.karouta at anu.edu.au Thu Jan 23 01:32:06 2014 From: fouad.karouta at anu.edu.au (Fouad Karouta) Date: Thu, 23 Jan 2014 06:32:06 +0000 Subject: [labnetwork] Niobium and Hafnium Message-ID: <6ab51817774c4fa69091e27fb784c78e@HKNPR06MB308.apcprd06.prod.outlook.com> Dear all, We have an e-beam evaporator dedicated for contacting III-V semiconductors (Au, Ni, Ge, Ti, Pt, Al, Cr, Pd) and I wonder if there is any experience in the network of these two metals in conjunction with metals cited above. Alternatively is there any facility that offers services for deposition of Niobium and/or Hafnium in an e-beam evaporator? Thanks, Fouad Karouta ********************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics and Engineering Australian National University ACT 0200, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/index.htm -------------- next part -------------- An HTML attachment was scrubbed... URL: From Jacob.Trevino at asrc.cuny.edu Thu Jan 23 10:47:53 2014 From: Jacob.Trevino at asrc.cuny.edu (Jacob Trevino) Date: Thu, 23 Jan 2014 15:47:53 +0000 Subject: [labnetwork] Providing User Lab Supplies and Storage Space Message-ID: Happy New Year everyone. I was curious to hear your opinions on supplying cleanroom users materials, such as tweezers, containers, glassware, timers, notebooks, etc., verses having them provide these items themselves. I have seen several variations on this in my travels. I am curious what you might implement at your own facility. Additionally and related, what kind of storage do you provide your users (boxes, racks, containers)? I know this is can become a logistical issue quickly as users store and forget items over time, leading to the consumption of valuable cleanroom space. What kind of restrictions do you place on storage? As always, thank you for any insight you might be able to provide. Best regards, Jacob --------------------------- Jacob Trevino, PhD Scientific Cleanroom Director The City University of New York (CUNY) Advanced Science Research Center (ASRC) Tel. (646) 664-8914 Fax. (646) 664-2965 Email: Jacob.Trevino at asrc.cuny.edu Web: http://asrc.cuny.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrweaver at purdue.edu Thu Jan 23 16:36:25 2014 From: jrweaver at purdue.edu (Weaver, John R) Date: Thu, 23 Jan 2014 21:36:25 +0000 Subject: [labnetwork] Providing User Lab Supplies and Storage Space In-Reply-To: References: Message-ID: <6A848421F695C54A9210C1A873C96AC212F67A15@WPVEXCMBX04.purdue.lcl> Jacob - We sell the user materials to the users - they charge them to their account. We have found that they take better care of them when they have to buy them. We require that they buy them through us and we give them pass-through (no markup) pricing. Because we buy in quantity, they get the materials for less than if they bought them on their own. By requiring that they buy from us, we know that only proper cleanroom-compatible materials are being used. We have had great faculty acceptance. As for storage, each user gets a tote that is stored on wire racks along the main aisle of the cleanroom. Larger groups get a double-size tote as a "group tote" in addition to the individual totes for the users. If totes are left out (not put back on rack), the user has two choices: Perform lab cleanup operations for four weeks; or suffer a one-week suspension from the lab. Since we instituted this program, totes are put away properly. John From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jacob Trevino Sent: Thursday, January 23, 2014 10:48 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Providing User Lab Supplies and Storage Space Happy New Year everyone. I was curious to hear your opinions on supplying cleanroom users materials, such as tweezers, containers, glassware, timers, notebooks, etc., verses having them provide these items themselves. I have seen several variations on this in my travels. I am curious what you might implement at your own facility. Additionally and related, what kind of storage do you provide your users (boxes, racks, containers)? I know this is can become a logistical issue quickly as users store and forget items over time, leading to the consumption of valuable cleanroom space. What kind of restrictions do you place on storage? As always, thank you for any insight you might be able to provide. Best regards, Jacob --------------------------- Jacob Trevino, PhD Scientific Cleanroom Director The City University of New York (CUNY) Advanced Science Research Center (ASRC) Tel. (646) 664-8914 Fax. (646) 664-2965 Email: Jacob.Trevino at asrc.cuny.edu Web: http://asrc.cuny.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Thu Jan 23 17:31:51 2014 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Thu, 23 Jan 2014 22:31:51 +0000 Subject: [labnetwork] Providing User Lab Supplies and Storage Space In-Reply-To: References: Message-ID: We provide wafers, cleanroom notebooks, tweezers, etc., but they are not free and have to be purchased by the users. We have dedicated beakers for chemicals that are used by all users if we do not have designated baths. However, if they choose not to use what is supplied then they must purchase it themselves. For storage we provide boxes that are in racks that are not glove boxes. If they are gone for a year then the contents are removed and the container is made available for the next person. For restrictions users are not allowed to store chemicals in their boxes and have to provide an MSDS for any new material brought into our cleanroom. Storage locations are based upon the material's pH and/or characteristics and have to be dated with the user's name. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jacob Trevino Sent: Thursday, January 23, 2014 10:48 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Providing User Lab Supplies and Storage Space Happy New Year everyone. I was curious to hear your opinions on supplying cleanroom users materials, such as tweezers, containers, glassware, timers, notebooks, etc., verses having them provide these items themselves. I have seen several variations on this in my travels. I am curious what you might implement at your own facility. Additionally and related, what kind of storage do you provide your users (boxes, racks, containers)? I know this is can become a logistical issue quickly as users store and forget items over time, leading to the consumption of valuable cleanroom space. What kind of restrictions do you place on storage? As always, thank you for any insight you might be able to provide. Best regards, Jacob --------------------------- Jacob Trevino, PhD Scientific Cleanroom Director The City University of New York (CUNY) Advanced Science Research Center (ASRC) Tel. (646) 664-8914 Fax. (646) 664-2965 Email: Jacob.Trevino at asrc.cuny.edu Web: http://asrc.cuny.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Thu Jan 23 20:07:14 2014 From: shott at stanford.edu (John Shott) Date: Thu, 23 Jan 2014 17:07:14 -0800 Subject: [labnetwork] Providing User Lab Supplies and Storage Space In-Reply-To: References: Message-ID: <52E1BCC2.80203@stanford.edu> Jacob: We maintain a stockroom that is not a campus-wide stockroom but should be for the use of our lab members. We tend to charge for things are more or less our cost that would be abused rather than used if we didn't charge for them. So, we charge for test and prime wafers (that includes a variety of n- and p-type wafers in vary background concentrations, some double polished wafers, quartz wafers, and Pyrex 7740). We charge for tweezers, scribers, clean room notebooks, individual wafer containers, anti-static chip containers, dicing saw blades, AFM tips ... and probably a few things that I'm forgetting. We also charge for precious metal use (in our case, gold, platinum, palladium, and iridium). We tend to charge approximately what we pay for things with a modest "rounding error" in our favor to cover our cost of ordering and receiving these things. In other words, we don't make money on any of this ... but we try also not to subsidize them too heavily. In terms of storage, we also charge for either small, medium, or large storage containers at the rate of $5, $10, and $15 per month, respectively. That isn't terribly expensive, but is enough that folks release them when they are done and don't sign up for more than they need. Because we only have a finite number of racks for storage we do have an upper limit on the the total in-lab storage we can offer. Let me know if you have any further questions, John On 1/23/2014 7:47 AM, Jacob Trevino wrote: > > Happy New Year everyone. > > I was curious to hear your opinions on supplying cleanroom users > materials, such as tweezers, containers, glassware, timers, notebooks, > etc., verses having them provide these items themselves. I have seen > several variations on this in my travels. I am curious what you might > implement at your own facility. > > Additionally and related, what kind of storage do you provide your > users (boxes, racks, containers)? I know this is can become a > logistical issue quickly as users store and forget items over time, > leading to the consumption of valuable cleanroom space. What kind of > restrictions do you place on storage? As always, thank you for any > insight you might be able to provide. > > Best regards, > > Jacob > > --------------------------- > > */Jacob Trevino, PhD/* > Scientific Cleanroom Director > The City University of New York (CUNY) > Advanced Science Research Center (ASRC) > Tel. (646) 664-8914 > > Fax. (646) 664-2965 > > Email: Jacob.Trevino at asrc.cuny.edu > > Web: http://asrc.cuny.edu/ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Fri Jan 24 07:46:12 2014 From: rmorrison at draper.com (Morrison, Richard H., Jr.) Date: Fri, 24 Jan 2014 12:46:12 +0000 Subject: [labnetwork] Providing User Lab Supplies and Storage Space In-Reply-To: References: Message-ID: HI, At Draper we provide all cleanroom consumables for all users, this includes wafers, chemicals, gases, boxes, tweezers, paper, glassware, timers, pens and garments. We do this so that we can control what goes into the cleanroom. With that said chemicals, wafers and gases we stock standard material only, for general use. If a project needs to use non-standard material then they purchase it and label it for their project only. I do have one comment on consumables we do all the tweezers and pens go? We buy these constantly any ideas? With regards to storage large projects have storage cabinets, with smaller projects using totes on a rack. After 1 year material is vacuum sealed and sent to storage. Hope this helps. Rick Draper Laboratory Principle Memeber of the Technical Staff Group Leader Microfabrication Operations 555 Technology Square Cambridge Ma, 02139-3563 www.draper.com rmorrison at draper.com W 617-258-3420 C 508-930-3461 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jacob Trevino Sent: Thursday, January 23, 2014 10:48 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Providing User Lab Supplies and Storage Space Happy New Year everyone. I was curious to hear your opinions on supplying cleanroom users materials, such as tweezers, containers, glassware, timers, notebooks, etc., verses having them provide these items themselves. I have seen several variations on this in my travels. I am curious what you might implement at your own facility. Additionally and related, what kind of storage do you provide your users (boxes, racks, containers)? I know this is can become a logistical issue quickly as users store and forget items over time, leading to the consumption of valuable cleanroom space. What kind of restrictions do you place on storage? As always, thank you for any insight you might be able to provide. Best regards, Jacob --------------------------- Jacob Trevino, PhD Scientific Cleanroom Director The City University of New York (CUNY) Advanced Science Research Center (ASRC) Tel. (646) 664-8914 Fax. (646) 664-2965 Email: Jacob.Trevino at asrc.cuny.edu Web: http://asrc.cuny.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From Vincent.Luciani at nist.gov Fri Jan 24 08:39:37 2014 From: Vincent.Luciani at nist.gov (Luciani, Vincent) Date: Fri, 24 Jan 2014 13:39:37 +0000 Subject: [labnetwork] Providing User Lab Supplies and Storage Space In-Reply-To: References: Message-ID: Good Morning Jacob, We sell popular supply items like tweezers, lab notebooks, single wafer carriers etc. Users get one large size tote for storage. We assign slots for the tote in wall all of shelves. We have general use labware that gets cycled through our lab glassware dishwasher as a back-up to the rinse the user performs. Our lessons learned you may find helpful: * We maintain a listing of who owns what slot and regularly purge the inactive projects from the storage racks. * If the totes don't have lids, users WILL create unstable works of art from precariously stacked materials that rise as high they can get away with. We are switching to boxes with lids. * Perform random inspections to make sure hazardous materials are not being stored. This was a problem at first but has since been eliminated. If we find chemicals being stored, the user loses their storage privileges. Vince Vincent K. Luciani NanoFab Manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jacob Trevino Sent: Thursday, January 23, 2014 10:48 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Providing User Lab Supplies and Storage Space Happy New Year everyone. I was curious to hear your opinions on supplying cleanroom users materials, such as tweezers, containers, glassware, timers, notebooks, etc., verses having them provide these items themselves. I have seen several variations on this in my travels. I am curious what you might implement at your own facility. Additionally and related, what kind of storage do you provide your users (boxes, racks, containers)? I know this is can become a logistical issue quickly as users store and forget items over time, leading to the consumption of valuable cleanroom space. What kind of restrictions do you place on storage? As always, thank you for any insight you might be able to provide. Best regards, Jacob --------------------------- Jacob Trevino, PhD Scientific Cleanroom Director The City University of New York (CUNY) Advanced Science Research Center (ASRC) Tel. (646) 664-8914 Fax. (646) 664-2965 Email: Jacob.Trevino at asrc.cuny.edu Web: http://asrc.cuny.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From khbeis at uw.edu Fri Jan 24 09:58:35 2014 From: khbeis at uw.edu (Michael Khbeis) Date: Fri, 24 Jan 2014 06:58:35 -0800 Subject: [labnetwork] Providing User Lab Supplies and Storage Space In-Reply-To: References: Message-ID: Jacob, We too sell units at cost plus 20% to cover the use tax (9.5%) and university purchasing overhead. That prompts another question, we are not getting ANY support from our state, but they are charging us use taxes on every purchase (regardless of origin), so we pay "sales" tax on things ordered on-line or from overseas. The only tax exemption is capital equipment, so I effectively pay the state/city 9.5% of my materials and supplies budgets. I do not wish to hijack this thread, but I am curious if other sites, especially public institutions, are also paying their local and state governments to operate vs. receiving subsidies. Regarding storage, we provide user groups a 2' W x 1.5' D x 1' H (3 cu ft) desiccator cabinet slot. Users within the group share a cabinet with additional cabinets for rent (to cover N2 purge costs) if needed. Rick @ Draper, check your users' desks for the missing tweezers/pens/scribes. I know I would hoard uncontaminated/undamaged ones when working in a lab where everything was free. When there is no cost associated, people don't take care of the resources. Best regards, Dr. Michael Khbeis Acting Director, Washington Nanofabrication Facility (WNF) (formerly MFF) National Nanotechnology Infrastructure Network (NNIN) University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (F) 206.221.1681 (C) 443.254.5192 khbeis at uw.edu www.wnf.washington.edu/ On Jan 23, 2014, at 7:47 AM, Jacob Trevino wrote: > Happy New Year everyone. > > I was curious to hear your opinions on supplying cleanroom users materials, such as tweezers, containers, glassware, timers, notebooks, etc., verses having them provide these items themselves. I have seen several variations on this in my travels. I am curious what you might implement at your own facility. > > Additionally and related, what kind of storage do you provide your users (boxes, racks, containers)? I know this is can become a logistical issue quickly as users store and forget items over time, leading to the consumption of valuable cleanroom space. What kind of restrictions do you place on storage? As always, thank you for any insight you might be able to provide. > > Best regards, > > Jacob > > > --------------------------- > Jacob Trevino, PhD > Scientific Cleanroom Director > The City University of New York (CUNY) > Advanced Science Research Center (ASRC) > Tel. (646) 664-8914 > Fax. (646) 664-2965 > Email: Jacob.Trevino at asrc.cuny.edu > Web: http://asrc.cuny.edu/ > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From bill at eecs.berkeley.edu Fri Jan 24 14:34:09 2014 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Fri, 24 Jan 2014 11:34:09 -0800 Subject: [labnetwork] Providing User Lab Supplies and Storage Space In-Reply-To: References: Message-ID: <52E2C031.5050005@eecs.berkeley.edu> All, 1. We provide the usual stuff (tweezers, notebooks, wafers etc) and a lot more (chip carriers, wafer dippers etc etc.) Our stock room provides over 150 items at fully loaded cost (shipping and receiving plus state and local tax) plus 5%. Our annual inventory valuation is approx $140,000. This does not include stock chemicals used at wet benches and resists and developers whose cost is built into equipment charge rates. 2. We provide one drawer or 'cubby' per researcher (~1.5' x 1.5' x1.5' cube) We track who is in each space, purge regularly (Operation Clean Sweep) and suspend if any hazardous chemicals found in storage. No storage fees. Modest rental fee for storage is creative and a good incentive. 3. The University of California pays all local (1.25%) and state (8%) taxes (9.25% total) on all purchases including capital equipment. I have never understood why the state taxes its state universities. State support to the University of CA is less than 15% of operations. I question if the University now generates more ue tax to the State of CA than it receives in state support. Bill Flounders Berkeley NanoLab Michael Khbeis wrote: > Jacob, > > We too sell units at cost plus 20% to cover the use tax (9.5%) and university purchasing overhead. That prompts another question, we are not getting ANY support from our state, but they are charging us use taxes on every purchase (regardless of origin), so we pay "sales" tax on things ordered on-line or from overseas. The only tax exemption is capital equipment, so I effectively pay the state/city 9.5% of my materials and supplies budgets. I do not wish to hijack this thread, but I am curious if other sites, especially public institutions, are also paying their local and state governments to operate vs. receiving subsidies. > > Regarding storage, we provide user groups a 2' W x 1.5' D x 1' H (3 cu ft) desiccator cabinet slot. Users within the group share a cabinet with additional cabinets for rent (to cover N2 purge costs) if needed. > > Rick @ Draper, check your users' desks for the missing tweezers/pens/scribes. I know I would hoard uncontaminated/undamaged ones when working in a lab where everything was free. When there is no cost associated, people don't take care of the resources. > > Best regards, > > Dr. Michael Khbeis > Acting Director, Washington Nanofabrication Facility (WNF) (formerly MFF) > National Nanotechnology Infrastructure Network (NNIN) > University of Washington > Fluke Hall, Box 352143 > (O) 206.543.5101 > (F) 206.221.1681 > (C) 443.254.5192 > khbeis at uw.edu > www.wnf.washington.edu/ > > > > On Jan 23, 2014, at 7:47 AM, Jacob Trevino wrote: > >> Happy New Year everyone. >> >> I was curious to hear your opinions on supplying cleanroom users materials, such as tweezers, containers, glassware, timers, notebooks, etc., verses having them provide these items themselves. I have seen several variations on this in my travels. I am curious what you might implement at your own facility. >> >> Additionally and related, what kind of storage do you provide your users (boxes, racks, containers)? I know this is can become a logistical issue quickly as users store and forget items over time, leading to the consumption of valuable cleanroom space. What kind of restrictions do you place on storage? As always, thank you for any insight you might be able to provide. >> >> Best regards, >> >> Jacob >> >> >> --------------------------- >> Jacob Trevino, PhD >> Scientific Cleanroom Director >> The City University of New York (CUNY) >> Advanced Science Research Center (ASRC) >> Tel. (646) 664-8914 >> Fax. (646) 664-2965 >> Email: Jacob.Trevino at asrc.cuny.edu >> Web: http://asrc.cuny.edu/ >> >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From matthieu.nannini at mcgill.ca Fri Jan 24 16:05:02 2014 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Fri, 24 Jan 2014 21:05:02 +0000 Subject: [labnetwork] Equipment review website Message-ID: <578F51D8-EEBF-4EB7-B4AF-FA0AFDCF9606@mcgill.ca> Colleagues, In the web 2.0 era, when you want to buy a new TV, zillions of websites, online reviews to make up your mind. When looking at purchasing new equipment for your lab, there is no such thing (as far as I know). Would you think it would be useful to have a website that centralize reviews of R&D equipments, suppliers, services support, etc ? Wish you all a great week-end ! ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------ From khbeis at uw.edu Tue Jan 28 15:43:33 2014 From: khbeis at uw.edu (Michael Khbeis) Date: Tue, 28 Jan 2014 12:43:33 -0800 Subject: [labnetwork] "Dirty" LPCVD tube? Message-ID: Does anyone offer a tube for LPCVD nitride that can be used with Pt and Mo coated/exposed layers. Customer is not worried about silicide formation. Dr. Michael Khbeis Acting Director, Washington Nanofabrication Facility (WNF) (formerly MFF) National Nanotechnology Infrastructure Network (NNIN) University of Washington Fluke Hall, Box 352143 (O) 206.543.5101 (F) 206.221.1681 (C) 443.254.5192 khbeis at uw.edu www.wnf.washington.edu/ From bill at eecs.berkeley.edu Tue Jan 28 19:22:03 2014 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Tue, 28 Jan 2014 16:22:03 -0800 Subject: [labnetwork] non-MOS LPCVD tube? In-Reply-To: References: Message-ID: <52E849AB.3080608@eecs.berkeley.edu> We offer most of our LPCVD processes in 2 separate tubes: non-MOS restricted and MOS restricted. We like to call them clean and cleaner instead of clean and dirty. Though the term MOS is becoming less well defined - the essence is active electronic devices requiring highest quality gate oxides and best carrier mobilities and lifetimes. Low volatility metals and other non-standard materials are approved on a case by case basis in the non-MOS (clean) tubes. We have approved Pt and W in our non-MOS silicon nitride tube. Ti and Mo have also been approved in other non-MOS deposition tubes. Bill Flounders UC Berkeley Michael Khbeis wrote: > Does anyone offer a tube for LPCVD nitride that can be used with Pt and Mo coated/exposed layers. Customer is not worried about silicide formation. > > > Dr. Michael Khbeis > Acting Director, Washington Nanofabrication Facility (WNF) (formerly MFF) > National Nanotechnology Infrastructure Network (NNIN) > University of Washington > Fluke Hall, Box 352143 > (O) 206.543.5101 > (F) 206.221.1681 > (C) 443.254.5192 > khbeis at uw.edu > www.wnf.washington.edu/ > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From matthieu.nannini at mcgill.ca Fri Jan 31 10:18:37 2014 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Fri, 31 Jan 2014 15:18:37 +0000 Subject: [labnetwork] EVG501 Message-ID: <6D39F463-FD55-4AEC-990A-86DA7369D0DE@mcgill.ca> To EVG510 owners We have been questioning the real force applied by the piston on the sample for a long time and recents bonding failure led us to investigate. We bought 3 load-cells and measure the force when the piston was actuated. 300 N when 1000 was set. After playing with the config file (config.ini) "UPOffset" parameter, nothing obvious happened. Anybody has experience with calibrating the piston force on a EVG bonder ? Thanks a lot ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------