[labnetwork] EVG620 lamp uniformity

[Matthieu Nannini, Dr.]

Labnetwork,

I wan't able to search the list archive this morning so maybe this question has already been answered.

We are struggling in getting a good uniformity over 4 and 6" on our EVG620. The procedures we have are not that clear. 
Could anyone provide guide lines to deal with the sturdy X,Y,Z lamp adjustments and the fly-eye lens to obtain uniformity at tool's specs (2 and 4% over 4 and 6" resp.)

Thanks in advance

Matthieu