[labnetwork] house vacuum system

[Donghai Zhu]

Hello Colleagues,

We have a  house vacuum system for some process tools in clean room, such as aligner, spinner and vacuum container. We don’t use the vacuum for the cleaning of chambers and lab. The current vacuum system uses liquid ring vacuum pumps and it’s very old. We are going to replace it by a new vacuum system. Do you have any recommendation of the vendors and models of good vacuum system? Does it have to be a oil-less?

Thank you very much!

Donghai Zhu

Lab manager
Keck Photonics Lab,
University of Southern California
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