[labnetwork] "Dirty" LPCVD tube?

[Michael Khbeis]

Does anyone offer a tube for LPCVD nitride that can be used with Pt and Mo coated/exposed layers.  Customer is not worried about silicide formation. 


Dr. Michael Khbeis
Acting Director, Washington Nanofabrication Facility (WNF) (formerly MFF)
National Nanotechnology Infrastructure Network (NNIN)
University of Washington
Fluke Hall, Box 352143
(O) 206.543.5101
(F) 206.221.1681
(C) 443.254.5192
khbeis at uw.edu
www.wnf.washington.edu/