[labnetwork] Labnetwork - Process?

Shivakumar Bhaskaran sbhas at uchicago.edu
Thu Jul 3 10:36:20 EDT 2014


In the past years of my work experience in the University set up cleanroom, we always tend to create new process model for various different research group and due to that the new equipment's or the old equipment's has capability of doing various kinds of process which some might not know, it will be really helpful how other Cleanroom design their process.

I have been in different forum and groups related to process, which I tend to receive lots of email and its overwhelming, so there is also downside of the issue related to create separate process list.

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr.
Sent: Thursday, July 03, 2014 8:14 AM
To: Mac Hathaway; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Labnetwork - Process?

I vote that we keep just one Labnet list. It will just make more work for the person whom moderates the list today. I suggest that we can ask any questions related to fab work including process questions.

Rick


From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mac Hathaway
Sent: Wednesday, July 02, 2014 9:56 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Labnetwork - Process?

Hey All,

As there is still occasional uncertainty regarding the main thrust of Labnetwork (i.e. general questions about cleanroom operation and administration vs. more specific questions of more narrow interest), I'm guessing that some Labnetworkers sometimes don't ask certain question, out of deference to others...

If this is the case, does it make sense to create a parallel list, for instance "Labnetwork - Process" or "Labnetwork - Equipment", where much more specific questions can be aired without guilt(!), such as "Has anyone seen a difference between 5x9s purity and 98% purity TMA in their ALD aluminum oxide?"  Or do folks feel it's fine as it is?  I'm thinking a specific process or equipment list might bring in other folks for whom the general questions have not been sufficiently relevant to merit their attention.

Just a thought that came up during the UGIM...


Mac Hathaway
Harvard CNS
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