[labnetwork] question about spin rinse dryer

[Paolini, Steven]

Xiaojin,
  You could try OEM group east. They used to be Rhetech which is a second source for Semitool service and parts. Another option would be the used equipment houses (capovanni bros., Bid service, E Magrath, etc...) and sometimes you can get lucky on E-bay.  Good luck!!
Steve Paolini
Equipment Dood
Harvard University center for Nanoscale systems

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Wang,Xiaojin
Sent: Thursday, July 31, 2014 3:20 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] question about spin rinse dryer

Dear colleagues:

We have a spin rinse dryer from semitool that has been down lately. After I discussed with technical support several times, the problem boil down to the motor controller whose part number is 60710-27. The picture is attached. Does anyone know where to repair this part besides OEM? Or does anyone have an old working one that we can purchase? Thank you.

Xiaojin Wang
Senior micro/nano process engineer
Micro/nano technology center
University of Louisville


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