From Jacob.Trevino at asrc.cuny.edu Mon Mar 3 09:37:34 2014 From: Jacob.Trevino at asrc.cuny.edu (Jacob Trevino) Date: Mon, 3 Mar 2014 14:37:34 +0000 Subject: [labnetwork] Cleanroom Video Monitoring Message-ID: Good Day Everyone, I would like to get anyone's perspective on the effectiveness of cleanroom video monitoring systems. In our new cleanroom, we will have a few security cameras mounted high on the wall with a bird's eye view of the bays. What we are considering in addition to these are cameras directly mounted on each wet bench. This is something I remember being implemented at Harvard CNS back when I was a user of their facility. I do remember being told that adding these cameras to the wet benches reduced the number of incidents that occurred and improved how tidy the users kept the area. As most everyone here knows, wet benches in cleanrooms are typically a source of ongoing battles in cleanliness and as a result safety. I am curious what people's perspectives are on video monitoring in general, as well as monitoring targeted areas, like wet benches. Also, any recommendations on good camera monitoring systems are welcome. We want to insure the safety of the users and promote accountability in the lab, but also don't want make our users feel uncomfortable in the workspace. As always, any input is greatly appreciated. Best regards, Jacob --------------------------- Jacob Trevino, PhD Scientific Cleanroom Director The City University of New York (CUNY) Advanced Science Research Center (ASRC) Tel. (646) 664-8914 Fax. (646) 664-2965 Email: Jacob.Trevino at asrc.cuny.edu Web: http://asrc.cuny.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From gpl107 at psu.edu Mon Mar 3 10:03:47 2014 From: gpl107 at psu.edu (Lavallee, Guy P.) Date: Mon, 3 Mar 2014 15:03:47 +0000 Subject: [labnetwork] Question regarding Headphones / Earphones use Message-ID: Hi Everyone, We are in the process of reviewing our safety policy as it regards to the use of headphones / earphones in our facility. Our current policy restricts the use of headphones / earphones in the facility however we do allow cell phones use. This policy was mainly targeted to prevent users from listening to music while they are working as it can be a significant distraction and can lead to potential accidents. Since we allow cell phones and the earphones are used for talking on the phone users are asking us to allow them but if we do it would be difficult for the staff to oversee the policy without checking up on every user who is wearing the earphones for use with the cell phone to ensure they aren't listening to music. I would be interested in seeing what policies other facilities have in regards to this issue. Thanks, Guy Lavallee Penn State University's Nanofabrication Laboratory Lead Etch and Facilities Engineer Materials Research Institute N-105 Millennium Science Complex (MSC Bldg) University Park, PA 16802 Email: gpl107 at psu.edu Phone: 814-865-9339 Cell: 814-777-0719 -------------- next part -------------- An HTML attachment was scrubbed... URL: From gregg.cure at gmail.com Mon Mar 3 11:32:57 2014 From: gregg.cure at gmail.com (Gregg Cure) Date: Mon, 3 Mar 2014 09:32:57 -0700 Subject: [labnetwork] KLA/T P15 profiler video frame grabber Message-ID: Hello - We have a KLA-Tencor P15 profilometer, whose video capture hardware has failed. The frame grabber card itself is an Integral Technologies type 9400-00173, PCI frame grabber card. It has an install date of 2005. The card produces badly distorted video (the analog feed from the P15 into an external monitor is fine), such that measurements on substrates are impossible. I have made some inquiries, but so far, no joy. Does anyone here have a similar tool, and perhaps has a vendor who has acquired Integral Technologies products? (Integral itself seems to have gone away). I haven't approached KLA/T yet, and would do so only as a last resort. Thanks in advance, Gregg -- Gregg D. Cure` The University of Arizona Arizona Research Laboratories Nano Fabrication and Processing Center 1230 E. Speedway Blvd. P.O. Box 210104 Tucson, AZ 85721-0104 Office: 520.626.1987 Cell: 520.307.2760 Fax: 520.626.7877 Website: http://mfc.engr.arizona.edu Website: http://www.arl.arizona.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From len.olona at ou.edu Mon Mar 3 18:48:31 2014 From: len.olona at ou.edu (Olona, Leonard E.) Date: Mon, 3 Mar 2014 23:48:31 +0000 Subject: [labnetwork] Cleanroom Video Monitoring In-Reply-To: References: Message-ID: <689B9219-90A6-4E20-874F-72AF1CF00A81@ou.edu> Hi Jacob, Here at OU we use cameras throughout the CR. We have two ballroom style spaces that use multiple lenses on each camera. We can multiplex the images into a panoramic view. This also allows for a more economical approach toward the hardware aspect of video monitoring. Having them in key areas such at wet benches, high voltage, precious metal access and critical spots in my opinion is win win situation. The students have no problem with this system and we do have a direct patch with the University Police Dept. I have full access to all 15 views on my computer and phone. This system works excellent in the photo lab. (Our photo lab only has one way in and out) I can send you the hardware info if needed. The system is also monitored by our in house IT and card swipe group. Having video surveillance is an great tool that will pay off in safety, validation and peace of mind. Thank you, Len Leonard E. Olona University Cleanroom Manager University of Oklahoma 110 West Boyd Street Rm 550 Norman, Oklahoma 73019 D: +1- 405 325-4374 C: +1- 405 630-9068 F: +1- 405 325-7066 On Mar 3, 2014, at 2:58 PM, "Jacob Trevino" > wrote: Good Day Everyone, I would like to get anyone?s perspective on the effectiveness of cleanroom video monitoring systems. In our new cleanroom, we will have a few security cameras mounted high on the wall with a bird?s eye view of the bays. What we are considering in addition to these are cameras directly mounted on each wet bench. This is something I remember being implemented at Harvard CNS back when I was a user of their facility. I do remember being told that adding these cameras to the wet benches reduced the number of incidents that occurred and improved how tidy the users kept the area. As most everyone here knows, wet benches in cleanrooms are typically a source of ongoing battles in cleanliness and as a result safety. I am curious what people?s perspectives are on video monitoring in general, as well as monitoring targeted areas, like wet benches. Also, any recommendations on good camera monitoring systems are welcome. We want to insure the safety of the users and promote accountability in the lab, but also don?t want make our users feel uncomfortable in the workspace. As always, any input is greatly appreciated. Best regards, Jacob --------------------------- Jacob Trevino, PhD Scientific Cleanroom Director The City University of New York (CUNY) Advanced Science Research Center (ASRC) Tel. (646) 664-8914 Fax. (646) 664-2965 Email: Jacob.Trevino at asrc.cuny.edu Web: http://asrc.cuny.edu/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From len.olona at ou.edu Mon Mar 3 18:53:21 2014 From: len.olona at ou.edu (Olona, Leonard E.) Date: Mon, 3 Mar 2014 23:53:21 +0000 Subject: [labnetwork] KLA/T P15 profiler video frame grabber In-Reply-To: References: Message-ID: Gregg, Give Tom Norment from Brumley South a shout. http://www.brumleysouth.com He'a an excellent and trusted colleague that can guide you on your P15. Thank you, Len Leonard E. Olona University Cleanroom Manager University of Oklahoma 110 West Boyd Street Rm 550 Norman, Oklahoma 73019 D: +1- 405 325-4374 C: +1- 405 630-9068 F: +1- 405 325-7066 On Mar 3, 2014, at 3:08 PM, "Gregg Cure" > wrote: Hello - We have a KLA-Tencor P15 profilometer, whose video capture hardware has failed. The frame grabber card itself is an Integral Technologies type 9400-00173, PCI frame grabber card. It has an install date of 2005. The card produces badly distorted video (the analog feed from the P15 into an external monitor is fine), such that measurements on substrates are impossible. I have made some inquiries, but so far, no joy. Does anyone here have a similar tool, and perhaps has a vendor who has acquired Integral Technologies products? (Integral itself seems to have gone away). I haven't approached KLA/T yet, and would do so only as a last resort. Thanks in advance, Gregg -- Gregg D. Cure` The University of Arizona Arizona Research Laboratories Nano Fabrication and Processing Center 1230 E. Speedway Blvd. P.O. Box 210104 Tucson, AZ 85721-0104 Office: 520.626.1987 Cell: 520.307.2760 Fax: 520.626.7877 Website: http://mfc.engr.arizona.edu Website: http://www.arl.arizona.edu/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From hughes at illinois.edu Mon Mar 3 16:25:58 2014 From: hughes at illinois.edu (Hughes, John S) Date: Mon, 3 Mar 2014 21:25:58 +0000 Subject: [labnetwork] Question regarding Headphones / Earphones use In-Reply-To: References: Message-ID: Hi Guy, Here's the mass mail I sent out to all our cleanroom users not too long ago. We do allow cell phones, but not as music listening devices. Best regards, John Notice: The Use of Headphones While Working in the MNTL Cleanrooms is Prohibited Hello MNTL cleanroom users, At the most recent Cleanroom Operations and Safety Committee meeting, a number of people mentioned that they had safety concerns about people using headphones while working in the MNTL cleanrooms. A number of instances were cited where researchers had difficulty communicating with someone else who was using headphones. On at least one occasion, someone using headphones committed a serious equipment operation error, but the person who made the mistake was totally unaware of it, despite the fact that there were very clear audible indications that there was a major problem. As we all know, many of the fabrication processes being performed in the cleanrooms involve hazardous chemicals and/or equipment. It is vitally important that researchers minimize as much as possible any distractions that might occur while working in this environment. Thank you for your cooperation. ------------------------------------------------------------- John S. Hughes Office: (217) 333-4674 Associate Director FAX: (217) 244-6375 Laboratory Operations hughes at illinois.edu Micro and Nanotechnology Laboratory University of Illinois at Urbana-Champaign 2000E Micro and Nanotechnology Laboratory 208 North Wright Street Urbana, Illinois 61801 http://mntl.illinois.edu ------------------------------------------------------------- On Mar 3, 2014, at 9:03 AM, Lavallee, Guy P. > wrote: Hi Everyone, We are in the process of reviewing our safety policy as it regards to the use of headphones / earphones in our facility. Our current policy restricts the use of headphones / earphones in the facility however we do allow cell phones use. This policy was mainly targeted to prevent users from listening to music while they are working as it can be a significant distraction and can lead to potential accidents. Since we allow cell phones and the earphones are used for talking on the phone users are asking us to allow them but if we do it would be difficult for the staff to oversee the policy without checking up on every user who is wearing the earphones for use with the cell phone to ensure they aren?t listening to music. I would be interested in seeing what policies other facilities have in regards to this issue. Thanks, Guy Lavallee Penn State University?s Nanofabrication Laboratory Lead Etch and Facilities Engineer Materials Research Institute N-105 Millennium Science Complex (MSC Bldg) University Park, PA 16802 Email: gpl107 at psu.edu Phone: 814-865-9339 Cell: 814-777-0719 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From matthieu.nannini at mcgill.ca Mon Mar 3 16:31:02 2014 From: matthieu.nannini at mcgill.ca (Matthieu Nannini, Dr.) Date: Mon, 3 Mar 2014 21:31:02 +0000 Subject: [labnetwork] Question regarding Headphones / Earphones use In-Reply-To: References: Message-ID: <71A9D1BF-B93A-42AC-9D08-2C9A96FA3342@mcgill.ca> Cell phones conversations allowed only in gowning room. Cells phone usage allowed for process aid since some student are using them as a notebook. ----------------------------------- Matthieu Nannini McGill Nanotools Microfab Manager t: 514 398 3310 c: 514 758 3311 f: 514 398 8434 http://mnm.physics.mcgill.ca/ ------------------------------------ Le 2014-03-03 ? 10:03, Lavallee, Guy P. a ?crit : > Hi Everyone, > We are in the process of reviewing our safety policy as it regards to the use of headphones / earphones in our facility. Our current policy restricts the use of headphones / earphones in the facility however we do allow cell phones use. This policy was mainly targeted to prevent users from listening to music while they are working as it can be a significant distraction and can lead to potential accidents. Since we allow cell phones and the earphones are used for talking on the phone users are asking us to allow them but if we do it would be difficult for the staff to oversee the policy without checking up on every user who is wearing the earphones for use with the cell phone to ensure they aren?t listening to music. I would be interested in seeing what policies other facilities have in regards to this issue. > > Thanks, > Guy Lavallee > > > Penn State University?s Nanofabrication Laboratory > Lead Etch and Facilities Engineer > Materials Research Institute > N-105 Millennium Science Complex (MSC Bldg) > University Park, PA 16802 > Email: gpl107 at psu.edu > Phone: 814-865-9339 > Cell: 814-777-0719 > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From darick at uw.edu Mon Mar 3 19:31:11 2014 From: darick at uw.edu (Darick Baker) Date: Mon, 3 Mar 2014 16:31:11 -0800 Subject: [labnetwork] KLA/T P15 profiler video frame grabber In-Reply-To: References: Message-ID: When I was at the Colorado School of Mines, we had the same problem on our Tencor P10. The video had lines across it on the computer monitor, but when attached to a TV, the image was crystal clear. The system could not be used in that state because the software overlay was required to make a measurement. We were told by a third party service company (I believe it was InSpec Services) that we would have to replace the camera. Because of the cost of that option, we first tried to replace the video card in the system. Luckily we were able to locate a replacement Video Blaster CT6042. This solved the problem. I realize this does not correlate exactly to the P15, but I hope it is of some help. Good luck. Darick Baker Research Engineer Washington Nanofabrication Facility University of Washington Fluke Hall 215, Box 352143 (206) 221-8265 On Mar 3, 2014, at 8:32 AM, Gregg Cure wrote: > Hello - > > We have a KLA-Tencor P15 profilometer, whose video capture hardware has failed. > > The frame grabber card itself is an Integral Technologies type 9400-00173, PCI frame grabber card. It has an install date of 2005. > The card produces badly distorted video (the analog feed from the P15 into an external monitor is fine), such that measurements on substrates are impossible. > I have made some inquiries, but so far, no joy. > Does anyone here have a similar tool, and perhaps has a vendor who has acquired Integral Technologies products? (Integral itself seems to have gone away). > I haven't approached KLA/T yet, and would do so only as a last resort. > > Thanks in advance, > Gregg > > -- > Gregg D. Cure` > The University of Arizona > Arizona Research Laboratories > Nano Fabrication and Processing Center > 1230 E. Speedway Blvd. > P.O. Box 210104 > Tucson, AZ 85721-0104 > Office: 520.626.1987 > Cell: 520.307.2760 > Fax: 520.626.7877 > Website: http://mfc.engr.arizona.edu > Website: http://www.arl.arizona.edu/ > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From lej at danchip.dtu.dk Tue Mar 4 04:56:11 2014 From: lej at danchip.dtu.dk (Leif Johansen) Date: Tue, 4 Mar 2014 09:56:11 +0000 Subject: [labnetwork] Cleanroom Video Monitoring In-Reply-To: References: Message-ID: <879AEF5002D70747B136D02BC86A9C982283D3@ait-pex02mbx05.win.dtu.dk> Hello Jacob, Here at DTU Danchip we installed a video surveillance system around two years ago. We have 48 cameras covering almost every corner of the cleanroom. Most cameras cover more than one piece of cleanroom equipment, but still have a sufficiently high resolution to give a fairly detailed view of what is going on at each tool. There are many benefits with such a system: ? Safety in case of evacuation alarms: We have two large wall-mounted screens hanging next to our alarm cupboard, providing a quick overview for the emergency response team and the fire brigade. ? Improvement of general safety and cleanroom behaviour: If we find tools left in an improper state, we can see who caused the mess and what he/she did wrong. It certainly has helped educate several people in proper fume hood and wet bench behaviour. ? Catching cheaters: Not all our equipment is equipped with hardware locks yet, and sometimes some users tend to "forget" to log their usage. A video surveillance system has a preventive effect and also helps catching cheaters. However, it takes quite a long time to go through hours of video recordings, even at 32 times normal speed, so we only resort to these measures in more serious cases. Apart from a few skeptics, most users had nothing against the introduction of the video surveillance system. In fact, most people welcomed it as a measure of improved safety. Best regards, Leif Leif S. Johansen Head of Operations DTU Danchip Technical University of Denmark [http://www.dtu.dk/images/DTU_email_logo_01.gif] Danchip ?rsteds Plads, Byg. 347 2800 Lyngby Direct +45 45255713 Mobile +45 25348992 lesjo at danchip.dtu.dk www.danchip.dtu.dk/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jacob Trevino Sent: 3. marts 2014 15:38 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cleanroom Video Monitoring Good Day Everyone, I would like to get anyone's perspective on the effectiveness of cleanroom video monitoring systems. In our new cleanroom, we will have a few security cameras mounted high on the wall with a bird's eye view of the bays. What we are considering in addition to these are cameras directly mounted on each wet bench. This is something I remember being implemented at Harvard CNS back when I was a user of their facility. I do remember being told that adding these cameras to the wet benches reduced the number of incidents that occurred and improved how tidy the users kept the area. As most everyone here knows, wet benches in cleanrooms are typically a source of ongoing battles in cleanliness and as a result safety. I am curious what people's perspectives are on video monitoring in general, as well as monitoring targeted areas, like wet benches. Also, any recommendations on good camera monitoring systems are welcome. We want to insure the safety of the users and promote accountability in the lab, but also don't want make our users feel uncomfortable in the workspace. As always, any input is greatly appreciated. Best regards, Jacob --------------------------- Jacob Trevino, PhD Scientific Cleanroom Director The City University of New York (CUNY) Advanced Science Research Center (ASRC) Tel. (646) 664-8914 Fax. (646) 664-2965 Email: Jacob.Trevino at asrc.cuny.edu Web: http://asrc.cuny.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.gif Type: image/gif Size: 1055 bytes Desc: image001.gif URL: From Vincent.Luciani at nist.gov Tue Mar 4 08:29:14 2014 From: Vincent.Luciani at nist.gov (Luciani, Vincent) Date: Tue, 4 Mar 2014 13:29:14 +0000 Subject: [labnetwork] Cleanroom Video Monitoring In-Reply-To: References: Message-ID: Good Morning Jacob, We utilize a CCTV monitoring system in all areas of the NanoFab including sub-fab. It is a key element of our safety and security plan and has demonstrated its usefulness to us in both aspects. Lessons I learned during the course of the project: * Use the latest, state-of-the-art, multifunction wire. The cameras and software are easily upgraded over time, running new wire is costly and time consuming. * Purchase HD Digital cameras: The image is so much better than the analog cameras and less sensitive to RF interference. * In support areas, consider pan & zoom. Useful for diagnostics in an evacuation situation. With the HD cameras you can read a gas cabinet display from your laptop or iPad. * Need an intercom capability? A good system can incorporate that also. Finally - I will reiterate the importance of the wiring. I now know that the software supports all the above functions and more and cameras can come with many additional features. It all depends if your wiring is up to the task. Good Luck, Vince Vincent K. Luciani NanoFab Manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jacob Trevino Sent: Monday, March 03, 2014 9:38 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cleanroom Video Monitoring Good Day Everyone, I would like to get anyone's perspective on the effectiveness of cleanroom video monitoring systems. In our new cleanroom, we will have a few security cameras mounted high on the wall with a bird's eye view of the bays. What we are considering in addition to these are cameras directly mounted on each wet bench. This is something I remember being implemented at Harvard CNS back when I was a user of their facility. I do remember being told that adding these cameras to the wet benches reduced the number of incidents that occurred and improved how tidy the users kept the area. As most everyone here knows, wet benches in cleanrooms are typically a source of ongoing battles in cleanliness and as a result safety. I am curious what people's perspectives are on video monitoring in general, as well as monitoring targeted areas, like wet benches. Also, any recommendations on good camera monitoring systems are welcome. We want to insure the safety of the users and promote accountability in the lab, but also don't want make our users feel uncomfortable in the workspace. As always, any input is greatly appreciated. Best regards, Jacob --------------------------- Jacob Trevino, PhD Scientific Cleanroom Director The City University of New York (CUNY) Advanced Science Research Center (ASRC) Tel. (646) 664-8914 Fax. (646) 664-2965 Email: Jacob.Trevino at asrc.cuny.edu Web: http://asrc.cuny.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From Vincent.Luciani at nist.gov Tue Mar 4 08:52:51 2014 From: Vincent.Luciani at nist.gov (Luciani, Vincent) Date: Tue, 4 Mar 2014 13:52:51 +0000 Subject: [labnetwork] Question regarding Headphones / Earphones use In-Reply-To: References: Message-ID: Good Morning Guy, We used to see the same thing that John (Illinois) described. It was a problem. We pondered this issue quite a bit. We settled on allowing a single ear piece and you can use it for whatever you want. We have a few people that want to use noise cancellation headphones (with no piped in music of course) and, after testing, they are also allowed. Otherwise, no headphones or dual ear buds are allowed. Cheating is discouraged by the consequences of getting caught. The policy works for us and is well received by our users. Good Luck, Vince Vincent K. Luciani NanoFab Manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Lavallee, Guy P. Sent: Monday, March 03, 2014 10:04 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question regarding Headphones / Earphones use Hi Everyone, We are in the process of reviewing our safety policy as it regards to the use of headphones / earphones in our facility. Our current policy restricts the use of headphones / earphones in the facility however we do allow cell phones use. This policy was mainly targeted to prevent users from listening to music while they are working as it can be a significant distraction and can lead to potential accidents. Since we allow cell phones and the earphones are used for talking on the phone users are asking us to allow them but if we do it would be difficult for the staff to oversee the policy without checking up on every user who is wearing the earphones for use with the cell phone to ensure they aren't listening to music. I would be interested in seeing what policies other facilities have in regards to this issue. Thanks, Guy Lavallee Penn State University's Nanofabrication Laboratory Lead Etch and Facilities Engineer Materials Research Institute N-105 Millennium Science Complex (MSC Bldg) University Park, PA 16802 Email: gpl107 at psu.edu Phone: 814-865-9339 Cell: 814-777-0719 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Tue Mar 4 08:51:26 2014 From: mtang at stanford.edu (Mary Tang) Date: Tue, 04 Mar 2014 05:51:26 -0800 Subject: [labnetwork] Cleanroom Video Monitoring In-Reply-To: <879AEF5002D70747B136D02BC86A9C982283D3@ait-pex02mbx05.win.dtu.dk> References: <879AEF5002D70747B136D02BC86A9C982283D3@ait-pex02mbx05.win.dtu.dk> Message-ID: <5315DA5E.1020307@stanford.edu> Hi Jacob and Labnetwork members -- We just installed some 30 video cameras throughout our cleanroom and around the secured areas of our building (sub-fab and gas vaults.) We have yet to learn to use them, but they look promising for all the reasons everyone has listed. One question for the Labnetwork: what kind of policy is in place for video monitoring? Do you have a governing University or corporate policy? Do you have a local policy as well? How are issues of privacy and chain-of-custody of recordings handled? In this day and age, we can expect to be on camera from the time we step out of our homes so I think most people don't have a problem with video monitoring. The questions that have come up are whether the images are publicly available and under what circumstances will recorded data be made available to a requester. Working with our legal department and public safety, we've come up with a local policy that we trust addresses the University concerns as well as our local needs. But I am wondering how everyone else manages this balance. Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Bldg 141, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu On 3/4/2014 1:56 AM, Leif Johansen wrote: > > Hello Jacob, > > Here at DTU Danchip we installed a video surveillance system around > two years ago. We have 48 cameras covering almost every corner of the > cleanroom. Most cameras cover more than one piece of cleanroom > equipment, but still have a sufficiently high resolution to give a > fairly detailed view of what is going on at each tool. There are many > benefits with such a system: > > ?Safety in case of evacuation alarms: We have two large wall-mounted > screens hanging next to our alarm cupboard, providing a quick overview > for the emergency response team and the fire brigade. > > ?Improvement of general safety and cleanroom behaviour: If we find > tools left in an improper state, we can see who caused the mess and > what he/she did wrong. It certainly has helped educate several people > in proper fume hood and wet bench behaviour. > > ?Catching cheaters: Not all our equipment is equipped with hardware > locks yet, and sometimes some users tend to "forget" to log their > usage. A video surveillance system has a preventive effect and also > helps catching cheaters. > > However, it takes quite a long time to go through hours of video > recordings, even at 32 times normal speed, so we only resort to these > measures in more serious cases. > > Apart from a few skeptics, most users had nothing against the > introduction of the video surveillance system. In fact, most people > welcomed it as a measure of improved safety. > > Best regards, > > Leif > > *Leif S. Johansen * > > Head of Operations > > DTU Danchip > > *Technical University of Denmark* > > > > http://www.dtu.dk/images/DTU_email_logo_01.gif > > Danchip > > ?rsteds Plads, Byg. 347 > > 2800 Lyngby > > Direct +45 45255713 > > Mobile +45 25348992 > > lesjo at danchip.dtu.dk > > www.danchip.dtu.dk/ > > *From:*labnetwork-bounces at mtl.mit.edu > [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Jacob Trevino > *Sent:* 3. marts 2014 15:38 > *To:* labnetwork at mtl.mit.edu > *Subject:* [labnetwork] Cleanroom Video Monitoring > > Good Day Everyone, > > I would like to get anyone's perspective on the effectiveness of > cleanroom video monitoring systems. In our new cleanroom, we will > have a few security cameras mounted high on the wall with a bird's eye > view of the bays. What we are considering in addition to these are > cameras directly mounted on each wet bench. > > This is something I remember being implemented at Harvard CNS back > when I was a user of their facility. I do remember being told that > adding these cameras to the wet benches reduced the number of > incidents that occurred and improved how tidy the users kept the area. > As most everyone here knows, wet benches in cleanrooms are typically a > source of ongoing battles in cleanliness and as a result safety. > > I am curious what people's perspectives are on video monitoring in > general, as well as monitoring targeted areas, like wet benches. Also, > any recommendations on good camera monitoring systems are welcome. We > want to insure the safety of the users and promote accountability in > the lab, but also don't want make our users feel uncomfortable in the > workspace. > > As always, any input is greatly appreciated. > > Best regards, > > Jacob > > --------------------------- > > */Jacob Trevino, PhD/* > Scientific Cleanroom Director > The City University of New York (CUNY) > Advanced Science Research Center (ASRC) > Tel. (646) 664-8914 > > Fax. (646) 664-2965 > > Email: Jacob.Trevino at asrc.cuny.edu > > Web: http://asrc.cuny.edu/ > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 1055 bytes Desc: not available URL: From tony.olsen at utah.edu Tue Mar 4 11:03:32 2014 From: tony.olsen at utah.edu (Tony L Olsen) Date: Tue, 4 Mar 2014 16:03:32 +0000 Subject: [labnetwork] Question regarding Headphones / Earphones use In-Reply-To: References: Message-ID: <9269F95770688D4FA77843D0D2DA2ABD43C9D787@X-MB1.xds.umail.utah.edu> We recently updated our safety protocols, too, and this issue deserved some attention. We found it difficult to prohibit the use of cell phones in the lab - even Staff uses them for work-related issues. Our initial effort was to forbid all headphones and earbuds. We did allow a single-ear Bluetooth device for the purpose of cell phone usage. However, within weeks of this change, I had multiple users express their dislike for Bluetooth devices. So, it seemed prudent to allow a single earbud as another option for cell phone usage. The unused earbud must be inside the bunnysuit. We specifically forbid listening to music, although it is impossible to monitor and enforce. Regardless, there is still one ear free for conversation and communication needs. tonyO Tony Olsen Nanofab Cleanroom Supervisor/Process Engineer University of Utah 36 S Wasatch Dr, Suite 2500 SMBB Salt Lake City, UT 84112 801-587-0651 office 801-587-3077 fax www.nanofab.utah.edu From: Lavallee, Guy P. [mailto:gpl107 at psu.edu] Sent: Monday, March 03, 2014 8:04 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question regarding Headphones / Earphones use Hi Everyone, We are in the process of reviewing our safety policy as it regards to the use of headphones / earphones in our facility. Our current policy restricts the use of headphones / earphones in the facility however we do allow cell phones use. This policy was mainly targeted to prevent users from listening to music while they are working as it can be a significant distraction and can lead to potential accidents. Since we allow cell phones and the earphones are used for talking on the phone users are asking us to allow them but if we do it would be difficult for the staff to oversee the policy without checking up on every user who is wearing the earphones for use with the cell phone to ensure they aren't listening to music. I would be interested in seeing what policies other facilities have in regards to this issue. Thanks, Guy Lavallee Penn State University's Nanofabrication Laboratory Lead Etch and Facilities Engineer Materials Research Institute N-105 Millennium Science Complex (MSC Bldg) University Park, PA 16802 Email: gpl107 at psu.edu Phone: 814-865-9339 Cell: 814-777-0719 -------------- next part -------------- An HTML attachment was scrubbed... URL: From gregg.cure at gmail.com Tue Mar 4 08:42:47 2014 From: gregg.cure at gmail.com (Gregg Cure) Date: Tue, 4 Mar 2014 06:42:47 -0700 Subject: [labnetwork] KLA/T P15 profiler video frame grabber In-Reply-To: <007801cf375e$be3bd740$3ab385c0$@brumleysouth.com> References: <007801cf375e$be3bd740$3ab385c0$@brumleysouth.com> Message-ID: Hi Tom - Thank you! Yes, I have been checking eBay - I found a later rev card - I would expect I'd need to over write the existing driver set however, and I'm not sure that the P15's software would "behave". Here is a fairly detailed photo of our current frame-grabber. Thanks again, Gregg On Mon, Mar 3, 2014 at 9:03 PM, Tom Norment wrote: > We should be able to help you. > > > > Don't forget to check Ebay also. > > > > I need a picture of the PCI board showing the front. > > > > Let you know ASAP, after you get it to me. > > > > > > Best Regards, > > > > Tom Norment > > Specialist > > > > Brumley South, Inc. > > 422 North Broad Street > > Mooresville, NC 28115 > > Tel: 704-664-9251 > > Fax: 704-664-9246 > > tom at brumleysouth.com > > www.brumleysouth.com > > > -- Gregg D. Cure` The University of Arizona Arizona Research Laboratories Nano Fabrication and Processing Center 1230 E. Speedway Blvd. P.O. Box 210104 Tucson, AZ 85721-0104 Office: 520.626.1987 Cell: 520.307.2760 Fax: 520.626.7877 Website: http://mfc.engr.arizona.edu Website: http://www.arl.arizona.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: IntTech 9400-00173.jpg Type: image/jpeg Size: 515975 bytes Desc: not available URL: From hughes at illinois.edu Tue Mar 4 12:23:11 2014 From: hughes at illinois.edu (Hughes, John S) Date: Tue, 4 Mar 2014 17:23:11 +0000 Subject: [labnetwork] Cleanroom Video Monitoring In-Reply-To: <5315DA5E.1020307@stanford.edu> References: <879AEF5002D70747B136D02BC86A9C982283D3@ait-pex02mbx05.win.dtu.dk> <5315DA5E.1020307@stanford.edu> Message-ID: <20EF7DC2-5C1E-480A-835E-7F8042D4DD94@illinois.edu> Hi Mary, I'd have to check to be sure of the period, but I think all video recordings we make must (by law) be deleted within 45 days of their being recorded. Our video images are managed internally and are not publicly available, although the police department can ask for a copy if there's an incident they are investigating where our video images might be helpful. Some campus buildings feed video directly to the police. Best regards, John ------------------------------------------------------------- John S. Hughes Office: (217) 333-4674 Associate Director FAX: (217) 244-6375 Laboratory Operations hughes at illinois.edu Micro and Nanotechnology Laboratory University of Illinois at Urbana-Champaign 2000E Micro and Nanotechnology Laboratory 208 North Wright Street Urbana, Illinois 61801 http://mntl.illinois.edu ------------------------------------------------------------- On Mar 4, 2014, at 7:51 AM, Mary Tang > wrote: Hi Jacob and Labnetwork members -- We just installed some 30 video cameras throughout our cleanroom and around the secured areas of our building (sub-fab and gas vaults.) We have yet to learn to use them, but they look promising for all the reasons everyone has listed. One question for the Labnetwork: what kind of policy is in place for video monitoring? Do you have a governing University or corporate policy? Do you have a local policy as well? How are issues of privacy and chain-of-custody of recordings handled? In this day and age, we can expect to be on camera from the time we step out of our homes so I think most people don't have a problem with video monitoring. The questions that have come up are whether the images are publicly available and under what circumstances will recorded data be made available to a requester. Working with our legal department and public safety, we've come up with a local policy that we trust addresses the University concerns as well as our local needs. But I am wondering how everyone else manages this balance. Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Bldg 141, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu On 3/4/2014 1:56 AM, Leif Johansen wrote: Hello Jacob, Here at DTU Danchip we installed a video surveillance system around two years ago. We have 48 cameras covering almost every corner of the cleanroom. Most cameras cover more than one piece of cleanroom equipment, but still have a sufficiently high resolution to give a fairly detailed view of what is going on at each tool. There are many benefits with such a system: ? Safety in case of evacuation alarms: We have two large wall-mounted screens hanging next to our alarm cupboard, providing a quick overview for the emergency response team and the fire brigade. ? Improvement of general safety and cleanroom behaviour: If we find tools left in an improper state, we can see who caused the mess and what he/she did wrong. It certainly has helped educate several people in proper fume hood and wet bench behaviour. ? Catching cheaters: Not all our equipment is equipped with hardware locks yet, and sometimes some users tend to ?forget? to log their usage. A video surveillance system has a preventive effect and also helps catching cheaters. However, it takes quite a long time to go through hours of video recordings, even at 32 times normal speed, so we only resort to these measures in more serious cases. Apart from a few skeptics, most users had nothing against the introduction of the video surveillance system. In fact, most people welcomed it as a measure of improved safety. Best regards, Leif Leif S. Johansen Head of Operations DTU Danchip Technical University of Denmark Danchip ?rsteds Plads, Byg. 347 2800 Lyngby Direct +45 45255713 Mobile +45 25348992 lesjo at danchip.dtu.dk www.danchip.dtu.dk/ From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jacob Trevino Sent: 3. marts 2014 15:38 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Cleanroom Video Monitoring Good Day Everyone, I would like to get anyone?s perspective on the effectiveness of cleanroom video monitoring systems. In our new cleanroom, we will have a few security cameras mounted high on the wall with a bird?s eye view of the bays. What we are considering in addition to these are cameras directly mounted on each wet bench. This is something I remember being implemented at Harvard CNS back when I was a user of their facility. I do remember being told that adding these cameras to the wet benches reduced the number of incidents that occurred and improved how tidy the users kept the area. As most everyone here knows, wet benches in cleanrooms are typically a source of ongoing battles in cleanliness and as a result safety. I am curious what people?s perspectives are on video monitoring in general, as well as monitoring targeted areas, like wet benches. Also, any recommendations on good camera monitoring systems are welcome. We want to insure the safety of the users and promote accountability in the lab, but also don?t want make our users feel uncomfortable in the workspace. As always, any input is greatly appreciated. Best regards, Jacob --------------------------- Jacob Trevino, PhD Scientific Cleanroom Director The City University of New York (CUNY) Advanced Science Research Center (ASRC) Tel. (646) 664-8914 Fax. (646) 664-2965 Email: Jacob.Trevino at asrc.cuny.edu Web: http://asrc.cuny.edu/ _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From tony.olsen at utah.edu Tue Mar 4 19:15:11 2014 From: tony.olsen at utah.edu (Tony L Olsen) Date: Wed, 5 Mar 2014 00:15:11 +0000 Subject: [labnetwork] Evaporation of Gadolinium Message-ID: <9269F95770688D4FA77843D0D2DA2ABD43C9DBAA@X-MB1.xds.umail.utah.edu> All We have received a request to evaporate gadolinium. The request presents several handling and safety concerns, including contamination of the process chamber and vacuum pump. The toxic nature of gadolinium seems to be poorly studied, resulting in some debate. We are uncertain if there is an appropriate approach to successfully and safely allow this material in an e-beam system. Does anyone have any experience, comments, or suggestions? Thanks, tonyO Tony Olsen Nanofab Cleanroom Supervisor/Process Engineer University of Utah 36 S Wasatch Dr, Suite 2500 SMBB Salt Lake City, UT 84112 801-587-0651 office 801-587-3077 fax www.nanofab.utah.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From Vincent.Luciani at nist.gov Wed Mar 5 07:41:44 2014 From: Vincent.Luciani at nist.gov (Luciani, Vincent) Date: Wed, 5 Mar 2014 12:41:44 +0000 Subject: [labnetwork] Evaporation of Gadolinium In-Reply-To: <9269F95770688D4FA77843D0D2DA2ABD43C9DBAA@X-MB1.xds.umail.utah.edu> References: <9269F95770688D4FA77843D0D2DA2ABD43C9DBAA@X-MB1.xds.umail.utah.edu> Message-ID: <0e3b49f7209c41aa89ce8d8efcc26780@BL2PR09MB002.namprd09.prod.outlook.com> Good Morning Tony, We use a disposable "chimney" inside or e-beam evaporator to contain the Gd. More: Here at CNST we have many users that build test structures for use at NCNR (NIST Center for Neutron Research). Gd is very popular for its neutron absorption qualities. We are incrementally improving our technique and still need to improve it further. For now we evaporate Gd in our e-beam system. We built a substrate holder that stand on stilts, strategically positioned to avoid the obstacles and rest on the baseplate. The stilts also provide a skeleton that we wrap with foil. A fresh piece for each deposition. The foil chimney is capped with the substrate holder. We performed timed depositions at first but since this works for us we are adding a crystal monitor inside the chimney. I don't have any pictures handy but can get a couple next time we use it. Gd flakes and particles are very flammable in air (maybe toxic) so we carefully fold up the Gd coated foil and package it for pick up. We worked with our Safety folks and waste removal company for the right way to package it. I can get you details of that if you like. Vince Vincent K. Luciani NanoFab Manager Center for Nanoscale Science and Technology National Institute of Standards and Technology 100 Bureau Drive, MS 6201 Gaithersburg, MD 20899-6200 USA +1-301-975-2886 From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Tony L Olsen Sent: Tuesday, March 04, 2014 7:15 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Evaporation of Gadolinium All We have received a request to evaporate gadolinium. The request presents several handling and safety concerns, including contamination of the process chamber and vacuum pump. The toxic nature of gadolinium seems to be poorly studied, resulting in some debate. We are uncertain if there is an appropriate approach to successfully and safely allow this material in an e-beam system. Does anyone have any experience, comments, or suggestions? Thanks, tonyO Tony Olsen Nanofab Cleanroom Supervisor/Process Engineer University of Utah 36 S Wasatch Dr, Suite 2500 SMBB Salt Lake City, UT 84112 801-587-0651 office 801-587-3077 fax www.nanofab.utah.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From len.olona at ou.edu Wed Mar 5 10:26:41 2014 From: len.olona at ou.edu (Olona, Leonard E.) Date: Wed, 5 Mar 2014 15:26:41 +0000 Subject: [labnetwork] Evaporation of Gadolinium Message-ID: Tony, At a very high level? We would suggest the following. 1. Perform a through clean of the chamber and associated internals. Scrape and scrub to bare metal. 2. Line the inside of the bell jar with UHV Foil. 3. Use a new Al2O3 Crucible. 4. Make a note on your cryo maintenance log that you are running the system with Gadolinium. 5. Perform a mechanical pump oil change prior to deposition and after. Following these suggestions should lower the variables in your process. I agree with you about the poor studies in regard to the presentation of this element. I did see some papers where folks are using MBE for deposition. I wonder how that maintenance campaign is performed! Cant be any worse than cleaning up a HgCdTe system!!! Good luck. -Len Leonard E. Olona University Cleanroom Manager University of Oklahoma 110 West Boyd Street Rm 550 Norman, Oklahoma 73019 D: +1- 405 325-4374 C: +1- 405 630-9068 F: +1- 405 325-7066 From: Tony L Olsen > Date: Tuesday, March 4, 2014 6:15 PM To: "labnetwork at mtl.mit.edu" > Subject: [labnetwork] Evaporation of Gadolinium All We have received a request to evaporate gadolinium. The request presents several handling and safety concerns, including contamination of the process chamber and vacuum pump. The toxic nature of gadolinium seems to be poorly studied, resulting in some debate. We are uncertain if there is an appropriate approach to successfully and safely allow this material in an e-beam system. Does anyone have any experience, comments, or suggestions? Thanks, tonyO Tony Olsen Nanofab Cleanroom Supervisor/Process Engineer University of Utah 36 S Wasatch Dr, Suite 2500 SMBB Salt Lake City, UT 84112 801-587-0651 office 801-587-3077 fax www.nanofab.utah.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From vanaparthy at ee.iitb.ac.in Mon Mar 10 06:54:54 2014 From: vanaparthy at ee.iitb.ac.in (vanaparthy at ee.iitb.ac.in) Date: Mon, 10 Mar 2014 16:24:54 +0530 (IST) Subject: [labnetwork] Query regarding quartz tube cleaning station Message-ID: Hello, We are planning to install a new quartz tube cleaning station / bench for Furnace tubes in our lab at IIT Bombay. Do you have such tube cleaning station at your facility. If yes or if you could let us know following: Quartz tube cleaning requires HF & HNO3. 1. Does such tube cleaning require a clean room? or is semi-clean area is also OK? 2.Is the Quartz tube cleaning station kept in the same room / area where furnaces are there. 3.If furnaces are in different area, how do you transport quartz tubes from Quartz tube cleaning station to furnace area. The following are the process tubes at present in IITB: A. Dry oxidation B. Pyrogenic Oxidation C. Nitride deposition D. Poly Deposition (doped & undoped), E. Solid source diffusion furnaces -- Thanks & Regards, V.RAJENDRA PRASAD Lab Manager, CEN,IITBNF, Electrical Engg Dept, Annexe, IIT Bombay, Mumbai, Powai- 400076 Tel No.+91 9930621667 From jrweaver at purdue.edu Mon Mar 10 08:57:26 2014 From: jrweaver at purdue.edu (Weaver, John R) Date: Mon, 10 Mar 2014 12:57:26 +0000 Subject: [labnetwork] Query regarding quartz tube cleaning station In-Reply-To: References: Message-ID: <6A848421F695C54A9210C1A873C96AC212F9DD83@WPVEXCMBX04.purdue.lcl> Yes, we have a custom-designed tube cleaning station. It is located in the chase behind the furnaces, so it is very convenient to move the tubes to the furnaces. We are currently under construction, but when complete we expect the area to perform slightly worse than Class 100. The furnace bay itself operates at Class 1 (ISO 3). This is a recent change - in fact, we are currently in transition. We had a separate Class 100 cleanroom area where the tube-cleaning station was located, but we have turned that into active laboratory space. We transported the tubes from that location through the main cleanroom aisle on a polypropylene card designed for that purpose. John John R. Weaver Facility Manager Birck Nanotechnology Center 1205 West State Street West Lafayette IN 47907 (765) 494-5494 jrweaver at purdue.edu nano.purdue.edu -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of vanaparthy at ee.iitb.ac.in Sent: Monday, March 10, 2014 6:55 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Query regarding quartz tube cleaning station Hello, We are planning to install a new quartz tube cleaning station / bench for Furnace tubes in our lab at IIT Bombay. Do you have such tube cleaning station at your facility. If yes or if you could let us know following: Quartz tube cleaning requires HF & HNO3. 1. Does such tube cleaning require a clean room? or is semi-clean area is also OK? 2.Is the Quartz tube cleaning station kept in the same room / area where furnaces are there. 3.If furnaces are in different area, how do you transport quartz tubes from Quartz tube cleaning station to furnace area. The following are the process tubes at present in IITB: A. Dry oxidation B. Pyrogenic Oxidation C. Nitride deposition D. Poly Deposition (doped & undoped), E. Solid source diffusion furnaces -- Thanks & Regards, V.RAJENDRA PRASAD Lab Manager, CEN,IITBNF, Electrical Engg Dept, Annexe, IIT Bombay, Mumbai, Powai- 400076 Tel No.+91 9930621667 _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From xiaojin.wang at louisville.edu Mon Mar 10 10:08:27 2014 From: xiaojin.wang at louisville.edu (Wang,Xiaojin) Date: Mon, 10 Mar 2014 14:08:27 +0000 Subject: [labnetwork] cryopump Message-ID: Dear colleagues: We have purchased a refurbished cryopump from bay technologies. It's been working very well. I appreciated your recommendations and inputs. Best wishes Xiaojin Wang Senior process engineer Micro/nano technology center University of Louisville From roberthamilton at berkeley.edu Tue Mar 11 11:37:45 2014 From: roberthamilton at berkeley.edu (Bob Hamilton) Date: Tue, 11 Mar 2014 08:37:45 -0700 Subject: [labnetwork] Query regarding quartz tube cleaning station In-Reply-To: References: Message-ID: <531F2DC9.70703@berkeley.edu> The University of California Microlab made a decision to obviate the use of a tube wash circa 1987. We have not regretted that decision. Having said this we do have a provision in one of our wetsinks to remove the decking and do horizontal cleaning of fused silica tubes in the plenum area of that sink. We fabricated vee-shaped supports to hold a furnace tube, if needed. Our decision to obviate cleans was based on our proximity to our quartz vendor, inspection and a high confidence factor in their post-fabrication cleaning facility, their use of polyethylene bags when packing and shipping quartzware and our experience with process. Your choice of HF and HNO3 infers, amongst other things, you will be removing polysilicon from fused silica LPCVD tubes. In the Microlab and now the Marvell NanoLab, which supersedes the Microlab, we do not clean poly from our tubes. We have chosen to run out tubes to failure, i.e. "run-to-failure" This means poly tube replacements at somewhere between 350 - 500 u's of deposition. We do not see dep-thickness tube failures in LTO or SiN dep processes. I'll explain how we pull this off. Cleaning poly tubes requires cooling them off. To prevent stress-cracking from cooldoan this means tubes must be pulled at ~50-100 u's of deposition. The benefits of cleaning are supposed to be lower particle counts and longer tube life. Given our MEMS polysilicon needs this would mean pulling tubes every 25-50 runs. Cleaning a tube requires downtime, handling and a fair amount of acid. In lieu of cleans we created "liners", i.e. sacrificial fused silica cylinders designed to take most of the deposition. We also use a split-liner to lay over our thermocouple. Liners crack from deposition; however, the cracking of liners does not result in tube (vacuum) failures. We have not noticed significant increases in particle counts when running beyond 50-100 u's in our poly tubes (note, we have dedicated MOS, MEMS, SiC, SiGe-MOS and SiGe-MEMS tubes). In addition to these LPCVD tubes we run LPCVD LTO and SiN. In terms of cleaning we install and treat these tubes the same way, from the vendors polyethylene bagging directly to use. These tubes do not break from deposition stress; therefore, we do not use liners. We do clean the rear transitions of the nitride and LTO tubes as this area occludes from depositions. A wet cleanroom towel placed in a cooled SIN rear transition overnight loosens the NH4Cl deposit enough to clean it out. How did our decision affect the quality of our films, particularly atmospheric-oxide? Significant process monitoring confirms our furnaces produce high quality films. Like LPCVD tubes atmospheric tubes are placed right into service and then cleaned in situ using a classic Trichloroethane bubbler and O2. We produce superb gate-ox. In terms of particle management, cleaning quartzboats, dummy wafers and pump forelines has been more important for particle control than tube cleaning. A final comment, if you use a free standing tube wash make sure it is sited within secondary containment to prevent an acid spill. When these things leak you have a frightful mess to clean up which may cause future, serious damage. An anecdote; we had such an experience with a set of cryopump line which ran across a floor that experienced a dilute HCl spill. In spite of spill cleanup and HCl being a volatile acid the lines corroded and began to leak about a year after exposure. Regards, Bob Hamilton -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu Phone: 510-809-8600 Mobile: 510-325-7557 e-mail preferred On 3/10/2014 3:54 AM, vanaparthy at ee.iitb.ac.in wrote: > Hello, > > We are planning to install a new quartz tube cleaning station / bench for > Furnace tubes in our lab at IIT Bombay. Do you have such tube cleaning > station at your facility. If yes or if you could let us know following: > > Quartz tube cleaning requires HF & HNO3. > > 1. Does such tube cleaning require a clean room? or is semi-clean area is > also OK? > > 2.Is the Quartz tube cleaning station kept in the same room / area where > furnaces are there. > > 3.If furnaces are in different area, how do you transport quartz tubes > from Quartz tube cleaning station to furnace area. > > The following are the process tubes at present in IITB: > > A. Dry oxidation > B. Pyrogenic Oxidation > C. Nitride deposition > D. Poly Deposition (doped & undoped), > E. Solid source diffusion furnaces > > From sandrine at umich.edu Tue Mar 11 13:57:29 2014 From: sandrine at umich.edu (Sandrine Martin) Date: Tue, 11 Mar 2014 13:57:29 -0400 Subject: [labnetwork] Question about tool charges Message-ID: Hello, As we continue our analysis of costs and charges at the University of Michigan LNF, we would like to know a couple of things at other facilities that also charge for tool time: - do you charge for reserved time or time actually used? - what is your policy for tool reservations that are not used? Thanks Sandrine -- Sandrine Martin, Ph.D. University of Michigan LNF/NNIN 1239 EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu www.NNIN.org -------------- next part -------------- An HTML attachment was scrubbed... URL: From bill at eecs.berkeley.edu Tue Mar 11 16:37:10 2014 From: bill at eecs.berkeley.edu (Bill Flounders) Date: Tue, 11 Mar 2014 13:37:10 -0700 Subject: [labnetwork] Question about tool charges In-Reply-To: References: Message-ID: <531F73F6.2040804@eecs.berkeley.edu> An HTML attachment was scrubbed... URL: From fouad.karouta at anu.edu.au Tue Mar 11 18:24:45 2014 From: fouad.karouta at anu.edu.au (Fouad Karouta) Date: Tue, 11 Mar 2014 22:24:45 +0000 Subject: [labnetwork] Question about tool charges In-Reply-To: References: Message-ID: Dear Sandrine, Here at ACT Node we do charge the effective usage time whether it is longer or shorter. Cancellations are accepted for equipment not heavily used (10-15 h/week). For heavy used systems like FIB or e-beam lithography: - We still charge effective usage time (if not used time is reasonable as compared to booking) and for after hours bookings. - In case of a booking cancellation, we do not charge if the cancellation is made prior to the booking start, otherwise we charge the elapsed time e.g. if booking is made from 1:00 to 5:00pm and we get the cancellation notification at 3 pm we charge 2 hours. Upon booking cancellation of heavily used systems we send an email to our users informing them of the tool availability. Hope this helps, Regards, Fouad ********************************* Manager ANFF ACT Node Australian National Fabrication Facility Research School of Physics and Engineering Australian National University ACT 0200, Canberra, Australia Tel: + 61 2 6125 7174 Mob: + 61 451 046 412 Email: fouad.karouta at anu.edu.au http://anff-act.anu.edu.au/index.htm From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Sandrine Martin Sent: Wednesday, 12 March 2014 4:57 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Question about tool charges Hello, As we continue our analysis of costs and charges at the University of Michigan LNF, we would like to know a couple of things at other facilities that also charge for tool time: - do you charge for reserved time or time actually used? - what is your policy for tool reservations that are not used? Thanks Sandrine -- Sandrine Martin, Ph.D. University of Michigan LNF/NNIN 1239 EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu www.NNIN.org -------------- next part -------------- An HTML attachment was scrubbed... URL: From emartin at cns.fas.harvard.edu Wed Mar 12 12:43:10 2014 From: emartin at cns.fas.harvard.edu (Martin, Eric) Date: Wed, 12 Mar 2014 16:43:10 +0000 Subject: [labnetwork] UGIM 2014 Registration and Lodging OPEN Message-ID: <2DF767B0ED5BB84FAF02C966FDAC8E95B0296681@HARVANDMBX02.fasmail.priv> Dear Colleagues The 2014 University/Government/Industry/Micro-Nano Symposium will be held on the campus Harvard University June 15-17, 2014. Event information, registration link, and lodging information can be found at: http://www.cns.fas.harvard.edu/UGIM2014/ The meeting focus will be the operations aspects of research cleanrooms with topics including (but not limited to) operations, EHS, energy, lab design, and computer lab control. Event will include: * Keynote talks by SEMATECH and NSF/NNI leadership * Discussion Panels * Working Lunch * Expanded Exhibit area * Optional "New Lab Bootie Camp" half day tutorial on operations and safety. * Optional post-meeting trip to a Red Sox game at Fenway Park We look forward to seeing you here this June. Eric Martin and Vicky Diadiuk Co-Chairs, UGIM 2014 Eric Martin, Ph.D. | UGIM2014 co-Chair Technical Director Harvard Center for Nanoscale Systems | Harvard University 11 Oxford Street | Cambridge, MA 02138 | 617-495-3161 -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Thu Mar 13 10:19:32 2014 From: shott at stanford.edu (John Shott) Date: Thu, 13 Mar 2014 07:19:32 -0700 Subject: [labnetwork] Question about tool charges In-Reply-To: References: Message-ID: <5321BE74.806@stanford.edu> Sandrine: To add to comments by others: At Stanford, we charge for tool time. We ask that our lab members send out email to the tool-specific mailing list when they cancel a reservation on a high-demand tool. If we receive complaints that there is too much reserved-but-not-used time on a tool, we take it up individually with the offending parties. While there is always the temptation to charge folks for unused reservations, I've found that to be something that is easy to say and hard to implement. Even automatically identifying a reservation that did not result in matching equipment use is not trivial. Plus, what do you do if someone failed to use a reservation because their progress was stopped by problems with an upstream tool? Like Berkeley, we have tool-specific reservation limits that can be fine-tuned for our high-demand tools. We have also learned that it's important to have software that allows you to track the details of when reservations were made and deleted. That is often useful to find folks who are trying to "game" the reservation system in some way. For example, people that have reached their reservation limit on a tool will often get someone else to reserve a tool. Then that second person cancels the reservation at the last minute (thinking that they have covered their tracks ...) and then the first person magically walks up to the tool and begins to use it. Good luck, John On 3/11/2014 10:57 AM, Sandrine Martin wrote: > Hello, > > As we continue our analysis of costs and charges at the University of > Michigan LNF, we would like to know a couple of things at other > facilities that also charge for tool time: > - do you charge for reserved time or time actually used? > - what is your policy for tool reservations that are not used? > > Thanks > Sandrine From julia.aebersold at louisville.edu Thu Mar 13 13:27:45 2014 From: julia.aebersold at louisville.edu (Aebersold,Julia W.) Date: Thu, 13 Mar 2014 17:27:45 +0000 Subject: [labnetwork] Question about tool charges In-Reply-To: <5321BE74.806@stanford.edu> References: <5321BE74.806@stanford.edu> Message-ID: Sandrine, we only charge for tool usage. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of John Shott Sent: Thursday, March 13, 2014 10:20 AM To: Sandrine Martin Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about tool charges Sandrine: To add to comments by others: At Stanford, we charge for tool time. We ask that our lab members send out email to the tool-specific mailing list when they cancel a reservation on a high-demand tool. If we receive complaints that there is too much reserved-but-not-used time on a tool, we take it up individually with the offending parties. While there is always the temptation to charge folks for unused reservations, I've found that to be something that is easy to say and hard to implement. Even automatically identifying a reservation that did not result in matching equipment use is not trivial. Plus, what do you do if someone failed to use a reservation because their progress was stopped by problems with an upstream tool? Like Berkeley, we have tool-specific reservation limits that can be fine-tuned for our high-demand tools. We have also learned that it's important to have software that allows you to track the details of when reservations were made and deleted. That is often useful to find folks who are trying to "game" the reservation system in some way. For example, people that have reached their reservation limit on a tool will often get someone else to reserve a tool. Then that second person cancels the reservation at the last minute (thinking that they have covered their tracks ...) and then the first person magically walks up to the tool and begins to use it. Good luck, John On 3/11/2014 10:57 AM, Sandrine Martin wrote: > Hello, > > As we continue our analysis of costs and charges at the University of > Michigan LNF, we would like to know a couple of things at other > facilities that also charge for tool time: > - do you charge for reserved time or time actually used? > - what is your policy for tool reservations that are not used? > > Thanks > Sandrine _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From sandrine at umich.edu Thu Mar 13 14:03:48 2014 From: sandrine at umich.edu (Sandrine Martin) Date: Thu, 13 Mar 2014 14:03:48 -0400 Subject: [labnetwork] Question about tool charges In-Reply-To: References: <5321BE74.806@stanford.edu> Message-ID: Thanks everybody for your feedback on this. As usual, it's very helpful to see what others are doing! Regards Sandrine On Thu, Mar 13, 2014 at 1:27 PM, Aebersold,Julia W. < julia.aebersold at louisville.edu> wrote: > Sandrine, we only charge for tool usage. > > Cheers! > > Julia Aebersold, Ph.D. > MNTC Cleanroom Manager > Shumaker Research Building, Room 233 > 2210 South Brook Street > University of Louisville > Louisville, KY 40292 > > 502-852-1572 > http://louisville.edu/micronano/ > > -----Original Message----- > From: labnetwork-bounces at mtl.mit.edu [mailto: > labnetwork-bounces at mtl.mit.edu] On Behalf Of John Shott > Sent: Thursday, March 13, 2014 10:20 AM > To: Sandrine Martin > Cc: labnetwork at mtl.mit.edu > Subject: Re: [labnetwork] Question about tool charges > > Sandrine: > > To add to comments by others: At Stanford, we charge for tool time. We > ask that our lab members send out email to the tool-specific mailing list > when they cancel a reservation on a high-demand tool. If we receive > complaints that there is too much reserved-but-not-used time on a tool, we > take it up individually with the offending parties. While there is always > the temptation to charge folks for unused reservations, I've found that to > be something that is easy to say and hard to implement. Even automatically > identifying a reservation that did not result in matching equipment use is > not trivial. Plus, what do you do if someone failed to use a reservation > because their progress was stopped by problems with an upstream tool? > > Like Berkeley, we have tool-specific reservation limits that can be > fine-tuned for our high-demand tools. We have also learned that it's > important to have software that allows you to track the details of when > reservations were made and deleted. That is often useful to find folks who > are trying to "game" the reservation system in some way. For example, > people that have reached their reservation limit on a tool will often get > someone else to reserve a tool. Then that second person cancels the > reservation at the last minute (thinking that they have covered their > tracks ...) and then the first person magically walks up to the tool and > begins to use it. > > Good luck, > > John > > > On 3/11/2014 10:57 AM, Sandrine Martin wrote: > > Hello, > > > > As we continue our analysis of costs and charges at the University of > > Michigan LNF, we would like to know a couple of things at other > > facilities that also charge for tool time: > > - do you charge for reserved time or time actually used? > > - what is your policy for tool reservations that are not used? > > > > Thanks > > Sandrine > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > -- Sandrine Martin, Ph.D. University of Michigan LNF/NNIN 1239 EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu www.NNIN.org -------------- next part -------------- An HTML attachment was scrubbed... URL: From sgupta at eng.ua.edu Thu Mar 13 17:53:42 2014 From: sgupta at eng.ua.edu (Gupta, Su) Date: Thu, 13 Mar 2014 16:53:42 -0500 Subject: [labnetwork] Question about tool charges In-Reply-To: References: <5321BE74.806@stanford.edu> , Message-ID: <1B53C0DED5D00E40A81DF47DBF6A3DCB040CBABAFDB0@MAIL1.ua-net.ua.edu> Sandrine: We also charge only for tool usage at the University of Alabama Micro-Fabrication Facility. Best, Su Gupta Dr. Subhadra Gupta Director, UA Micro-Fabrication Facility University of Alabama Tuscaloosa, AL 35487 ________________________________ From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] On Behalf Of Sandrine Martin [sandrine at umich.edu] Sent: Thursday, March 13, 2014 1:03 PM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about tool charges Thanks everybody for your feedback on this. As usual, it's very helpful to see what others are doing! Regards Sandrine On Thu, Mar 13, 2014 at 1:27 PM, Aebersold,Julia W. > wrote: Sandrine, we only charge for tool usage. Cheers! Julia Aebersold, Ph.D. MNTC Cleanroom Manager Shumaker Research Building, Room 233 2210 South Brook Street University of Louisville Louisville, KY 40292 502-852-1572 http://louisville.edu/micronano/ -----Original Message----- From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of John Shott Sent: Thursday, March 13, 2014 10:20 AM To: Sandrine Martin Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Question about tool charges Sandrine: To add to comments by others: At Stanford, we charge for tool time. We ask that our lab members send out email to the tool-specific mailing list when they cancel a reservation on a high-demand tool. If we receive complaints that there is too much reserved-but-not-used time on a tool, we take it up individually with the offending parties. While there is always the temptation to charge folks for unused reservations, I've found that to be something that is easy to say and hard to implement. Even automatically identifying a reservation that did not result in matching equipment use is not trivial. Plus, what do you do if someone failed to use a reservation because their progress was stopped by problems with an upstream tool? Like Berkeley, we have tool-specific reservation limits that can be fine-tuned for our high-demand tools. We have also learned that it's important to have software that allows you to track the details of when reservations were made and deleted. That is often useful to find folks who are trying to "game" the reservation system in some way. For example, people that have reached their reservation limit on a tool will often get someone else to reserve a tool. Then that second person cancels the reservation at the last minute (thinking that they have covered their tracks ...) and then the first person magically walks up to the tool and begins to use it. Good luck, John On 3/11/2014 10:57 AM, Sandrine Martin wrote: > Hello, > > As we continue our analysis of costs and charges at the University of > Michigan LNF, we would like to know a couple of things at other > facilities that also charge for tool time: > - do you charge for reserved time or time actually used? > - what is your policy for tool reservations that are not used? > > Thanks > Sandrine _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Sandrine Martin, Ph.D. University of Michigan LNF/NNIN 1239 EECS, 1301 Beal Ave Ann Arbor, MI 48109 Cell 734-277-2365 Fax 734-647-1781 www.LNF.umich.edu www.NNIN.org From Thomas_Ferraguto at uml.edu Mon Mar 17 08:38:30 2014 From: Thomas_Ferraguto at uml.edu (Ferraguto, Thomas) Date: Mon, 17 Mar 2014 12:38:30 +0000 Subject: [labnetwork] RTA's Message-ID: Colleagues We're looking for a table top RTA. We found Jipelec Jetfirst 200 circa 2008 on the used market. We're a little concerned about an aging operating system (it's probably has Windows 95 or 98) If you have any opinions on the Jipelec unit or any other table top you may have an opinion on your input would be welcome. Best Regards P.S> Don't forget to Sign up for UGIM http://www.cns.fas.harvard.edu/UGIM2014/ Thomas S. Ferraguto ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell 1 University Avenue Lowell MA 01854-5120 978-934-1809 land 617-755-0910 mobile 978-934-1014 fax [cid:image002.png at 01CF41BC.45A4A970] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 57996 bytes Desc: image002.png URL: From spaolini at cns.fas.harvard.edu Mon Mar 17 11:51:01 2014 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Mon, 17 Mar 2014 15:51:01 +0000 Subject: [labnetwork] RTA's In-Reply-To: References: Message-ID: Tom, I have owned a few in the past and currently have one in my clean room. The unit is well made and not very troublesome. Parts availability, (always a concern) is sketchy and slow since the machine is made in France and represented by a third party (Semco Engineering) In Texas. I share your concern about the operating system but have received good service with software issues in the past. The software itself is quite intuitive and easy to train people on. The graphical "real time" feature is a big plus for troubleshooting. You are welcome to come here as my guest and look it over. Best of luck, Steve Paolini Equipment Dood Harvard University Center for Nanoscale systems. From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Ferraguto, Thomas Sent: Monday, March 17, 2014 8:39 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] RTA's Colleagues We're looking for a table top RTA. We found Jipelec Jetfirst 200 circa 2008 on the used market. We're a little concerned about an aging operating system (it's probably has Windows 95 or 98) If you have any opinions on the Jipelec unit or any other table top you may have an opinion on your input would be welcome. Best Regards P.S> Don't forget to Sign up for UGIM http://www.cns.fas.harvard.edu/UGIM2014/ Thomas S. Ferraguto ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell 1 University Avenue Lowell MA 01854-5120 978-934-1809 land 617-755-0910 mobile 978-934-1014 fax [cid:image001.png at 01CF41D6.A4411850] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 57996 bytes Desc: image001.png URL: From len.olona at ou.edu Mon Mar 17 12:33:12 2014 From: len.olona at ou.edu (Olona, Leonard E.) Date: Mon, 17 Mar 2014 16:33:12 +0000 Subject: [labnetwork] RTA's In-Reply-To: References: Message-ID: http://www.mtixtl.com/compactrtpfurnace4quartzdigitalvacuumgauge-otf-1200x-4-rtp.aspx Check this site out. We purchased one for our CR. It's worked out okay. The supplied orings need to be swapped out with a higher grade silicon (US MADE). And the vacuum pump is slightly anemic. Don't let run nonstop. The unit is not high dollar. Good luck! Leonard E. Olona University Cleanroom Manager University of Oklahoma 110 West Boyd Street Rm 550 Norman, Oklahoma 73019 D: +1- 405 325-4374 C: +1- 405 630-9068 F: +1- 405 325-7066 On Mar 17, 2014, at 11:39 AM, "Ferraguto, Thomas" > wrote: Colleagues We?re looking for a table top RTA. We found Jipelec Jetfirst 200 circa 2008 on the used market. We?re a little concerned about an aging operating system (it?s probably has Windows 95 or 98) If you have any opinions on the Jipelec unit or any other table top you may have an opinion on your input would be welcome. Best Regards P.S> Don?t forget to Sign up for UGIM http://www.cns.fas.harvard.edu/UGIM2014/ Thomas S. Ferraguto ETIC Nanofabrication Laboratory Director University of Massachusetts Lowell 1 University Avenue Lowell MA 01854-5120 978-934-1809 land 617-755-0910 mobile 978-934-1014 fax _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 57996 bytes Desc: image002.png URL: From roberthamilton at berkeley.edu Mon Mar 17 12:41:42 2014 From: roberthamilton at berkeley.edu (Bob Hamilton) Date: Mon, 17 Mar 2014 09:41:42 -0700 Subject: [labnetwork] RTA's In-Reply-To: References: Message-ID: <532725C6.8040002@berkeley.edu> Re: RTP's The UC Berkeley Marvell NanoLab has five AllWin21 RTP's. Four of them are 610's with extended range pyrometry and one is an 810 ERP. We are pleased with their operation, reliability as well as good support from AllWin. Bob Hamilton -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu Phone: 510-809-8600 Mobile: 510-325-7557 e-mail preferred On 3/17/2014 5:38 AM, Ferraguto, Thomas wrote: > > Colleagues > > We're looking for a table top RTA. We found *Jipelec Jetfirst 200 > circa 2008* on the used market. > > We're a little concerned about an aging operating system (it's > probably has Windows 95 or 98) > > If you have any opinions on the Jipelec unit or any other table top > you may have an opinion on your input would be welcome. > > Best Regards > > */P.S> Don't forget to Sign up for UGIM /* > > *//* > > */http://www.cns.fas.harvard.edu/UGIM2014//* > > *//* > > Thomas S. Ferraguto > > ETIC Nanofabrication Laboratory Director > > University of Massachusetts Lowell > > 1 University Avenue > > Lowell MA 01854-5120 > > 978-934-1809 land > > 617-755-0910 mobile > > 978-934-1014 fax > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Robert Hamilton University of California at Berkeley Marvell NanoLab Equipment Eng. Mgr. Room 520 Sutardja Dai Hall Berkeley, CA 94720-1754 bob at eecs.berkeley.edu Phone: 510-809-8600 Mobile: 510-325-7557 e-mail preferred -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/png Size: 57996 bytes Desc: not available URL: From nwang at umich.edu Wed Mar 19 11:59:38 2014 From: nwang at umich.edu (Nadine Wang) Date: Wed, 19 Mar 2014 11:59:38 -0400 Subject: [labnetwork] sputtering zinc Message-ID: Hello everyone, We have a new lab member who needs sputtered Zn for his project. Do any of your labs have experience with sputtering Zn? We know that Zn sublimes easily in vacuum and thus poses a cross-contamination risk. I'd greatly appreciate any advice or comments on the advisability of introducing Zn into a sputterer shared with other materials, and/or suggestions for techniques to avoid cross-contamination. Thanks so much for your help, Nadine -- Nadine Wang, Ph.D. Lead Engineer in Research Lurie Nanofabrication Facility University of Michigan 1246A EECS 1301 Beal Avenue Ann Arbor, MI 48109 734-936-8239 -------------- next part -------------- An HTML attachment was scrubbed... URL: From vanaparthy at ee.iitb.ac.in Mon Mar 24 11:40:57 2014 From: vanaparthy at ee.iitb.ac.in (vanaparthy at ee.iitb.ac.in) Date: Mon, 24 Mar 2014 21:10:57 +0530 (IST) Subject: [labnetwork] Query on safety concern Message-ID: <73a2058355e25cb0f567e96b7fbe6710.squirrel@sandesh.ee.iitb.ac.in> Hello, We have a indigenous Plasma Immersion Ion Implantation system in our lab which is capable to P(B2H6) and n(PH3) type of implantation. We are not using the load lock for loading/Unloading the sample, Execute this by venting the process chamber to atmosphere. Before unloading the sample we do the pump purge with N2 gas for five times. Is the above procedure followed by us is a standard procedure or do we need to follow some more safety precautions before opening the chamber. Please advise. -- Thanks & Regards, V.RAJENDRA PRASAD Lab Manager, CEN,IITBNF, Electrical Engg Dept, Annexe, IIT Bombay, Mumbai, Powai- 400076 Tel No.+91 9930621667 From len.olona at ou.edu Mon Mar 24 17:02:49 2014 From: len.olona at ou.edu (Olona, Leonard E.) Date: Mon, 24 Mar 2014 21:02:49 +0000 Subject: [labnetwork] Query on safety concern In-Reply-To: <73a2058355e25cb0f567e96b7fbe6710.squirrel@sandesh.ee.iitb.ac.in> References: <73a2058355e25cb0f567e96b7fbe6710.squirrel@sandesh.ee.iitb.ac.in> Message-ID: V, Diborane and Phosphine gases are very toxic and deadly... I'm not sure why you are not using the ll's for sample transfer. It would appear that an SOP would employ the use of load locks to create a barrier between the reaction chamber and the outside world. I would be concerned about a failure in your gas delivery system or even outgassing during the opening of the process chamber. 5X N2 pump purges in my opinion is not nearly enough. A typical pump purge for toxic gas cylinder changes is at least 25x. Are you using a Nederman style snorkel exhaust or any fume exhaust abatement whilst unloading your samples? Are you using any PPE or supplied air masks? You may want to consider keeping your process chamber under vacuum to keep its integrity. Ambient moisture from atmosphere upon opening the chamber will surely create unwanted fumes and contaminates. How large is chamber? Thank you, -Len Leonard E. Olona University Cleanroom Manager University of Oklahoma 110 West Boyd Street Rm 550 Norman, Oklahoma 73019 D: +1- 405 325-4374 C: +1- 405 630-9068 F: +1- 405 325-7066 On 3/24/14 10:40 AM, "vanaparthy at ee.iitb.ac.in" wrote: >Hello, > > >We have a indigenous Plasma Immersion Ion Implantation system in our lab >which is capable to P(B2H6) and n(PH3) type of implantation. We are not >using the load lock for loading/Unloading the sample, Execute this by >venting the process chamber to atmosphere. Before unloading the sample we >do the pump purge with N2 gas for five times. > >Is the above procedure followed by us is a standard procedure or do we >need to follow some more safety precautions before opening the chamber. > >Please advise. > > > >-- >Thanks & Regards, >V.RAJENDRA PRASAD > Lab Manager, > CEN,IITBNF, Electrical Engg Dept, Annexe, > IIT Bombay, Mumbai, Powai- 400076 > Tel No.+91 9930621667 > > > > > > > > > > > > > > > > > > > > > > > > > > > > > >_______________________________________________ >labnetwork mailing list >labnetwork at mtl.mit.edu >https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork From vanaparthy at ee.iitb.ac.in Mon Mar 24 20:43:03 2014 From: vanaparthy at ee.iitb.ac.in (vanaparthy at ee.iitb.ac.in) Date: Tue, 25 Mar 2014 06:13:03 +0530 (IST) Subject: [labnetwork] Query on safety concern In-Reply-To: References: <73a2058355e25cb0f567e96b7fbe6710.squirrel@sandesh.ee.iitb.ac.in> Message-ID: Hi Leonard , Thanks,We installed Gas detection system in loading area to take care of any issue with toxic gas is detected,appropriate alarms and evacuations will be initiated. -- Thanks & Regards, V.RAJENDRA PRASAD > V, > > Diborane and Phosphine gases are very toxic and deadly... > > I'm not sure why you are not using the ll's for sample transfer. It would > appear that an SOP would employ the use of load locks to create a barrier > between the reaction chamber and the outside world. I would be concerned > about a failure in your gas delivery system or even outgassing during the > opening of the process chamber. > > 5X N2 pump purges in my opinion is not nearly enough. A typical pump > purge for toxic gas cylinder changes is at least 25x. Are you using a > Nederman style snorkel exhaust or any fume exhaust abatement whilst > unloading your samples? Are you using any PPE or supplied air masks? > > You may want to consider keeping your process chamber under vacuum to keep > its integrity. Ambient moisture from atmosphere upon opening the chamber > will surely create unwanted fumes and contaminates. > > How large is chamber? > > Thank you, > > -Len > > Leonard E. Olona > University Cleanroom Manager > University of Oklahoma > 110 West Boyd Street Rm 550 > Norman, Oklahoma 73019 > D: +1- 405 325-4374 > C: +1- 405 630-9068 > F: +1- 405 325-7066 > > > > > > > > > > > On 3/24/14 10:40 AM, "vanaparthy at ee.iitb.ac.in" > wrote: > >>Hello, >> >> >>We have a indigenous Plasma Immersion Ion Implantation system in our lab >>which is capable to P(B2H6) and n(PH3) type of implantation. We are not >>using the load lock for loading/Unloading the sample, Execute this by >>venting the process chamber to atmosphere. Before unloading the sample we >>do the pump purge with N2 gas for five times. >> >>Is the above procedure followed by us is a standard procedure or do we >>need to follow some more safety precautions before opening the chamber. >> >>Please advise. >> >> >> >>-- >>Thanks & Regards, >>V.RAJENDRA PRASAD >> Lab Manager, >> CEN,IITBNF, Electrical Engg Dept, Annexe, >> IIT Bombay, Mumbai, Powai- 400076 >> Tel No.+91 9930621667 >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >> >>_______________________________________________ >>labnetwork mailing list >>labnetwork at mtl.mit.edu >>https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > -- Thanks & Regards, V.RAJENDRA PRASAD Lab Manager, CEN,IITBNF, Electrical Engg Dept, Annexe, IIT Bombay, Mumbai, Powai- 400076 Tel No. 9930621667 From hathaway at cns.fas.harvard.edu Tue Mar 25 11:59:31 2014 From: hathaway at cns.fas.harvard.edu (Mac Hathaway) Date: Tue, 25 Mar 2014 10:59:31 -0500 Subject: [labnetwork] Query on safety concern In-Reply-To: References: <73a2058355e25cb0f567e96b7fbe6710.squirrel@sandesh.ee.iitb.ac.in> Message-ID: <5331A7E3.6000308@cns.fas.harvard.edu> Hi V, So, I'm sure others here have more direct experience with diborane and phosphine systems than I have, but just to clarify a couple of points: Do you /have/ a load-lock on this system? When you say indigenous, you mean more or less "home-built", yes? If you have a load-lock, why do you prefer not to use it? If this unit is home-built, perhaps it does not have some of the more advanced features of a commercial unit, such as gas-flow interlocks, to prevent flow of gases into the chamber when the chamber is open. If it does not have such interlocks, you have a very dangerous system on your hands, which perhaps could be retrofitted with these features. To re-emphasize what Len said, I would venture to say diborane and phosphine are among the most deadly gases in most cleanrooms. You really want to consider this when coming up with your operating procedures. Opening phospine/diborane process chambers, for whatever reason, is typically a very involved procedure, which very carefully defined steps to maximize safety and minimize exposure to the gases involved (including lingering chamber fumes). I haven't found any particular ones in discussions here, but there may be some plasma post treatment that would de-activate the phosphine/diborane before opening the reactor each time. Otherwise, just lots of pump/purge cycles. For regular sample loading, a load-lock would be best. If you can forward more details about this system, I think it will be easier to give you some better suggestions. Mac Hathaway Process Engineer and Safety Officer Center for Nanoscale Systems Harvard University On 3/24/2014 7:43 PM, vanaparthy at ee.iitb.ac.in wrote: > Hi Leonard , > Thanks,We installed Gas detection system in loading > area to take care of any issue with toxic gas is detected,appropriate > alarms and evacuations will be initiated. > > V, Diborane and Phosphine gases are very toxic and deadly... I'm not sure why you are not using the ll's for sample transfer. It would appear that an SOP would employ the use of load locks to create a barrier between the reaction chamber and the outside world. I would be concerned about a failure in your gas delivery system or even outgassing during the opening of the process chamber. 5X N2 pump purges in my opinion is not nearly enough. A typical pump purge for toxic gas cylinder changes is at least 25x. Are you using a Nederman style snorkel exhaust or any fume exhaust abatement whilst unloading your samples? Are you using any PPE or supplied air masks? You may want to consider keeping your process chamber under vacuum to keep its integrity. Ambient moisture from atmosphere upon opening the chamber will surely create unwanted fumes and contaminates. How large is chamber? Thank you, -Len Leonard E. Olona University Cleanroom Manager University of Oklahoma 110 West Boyd Street Rm 550 Norman, Oklahoma 73019 D: +1- 405 325-4374 C: +1- 405 630-9068 F: +1- 405 325-7066 On 3/24/14 10:40 AM,"vanaparthy at ee.iitb.ac.in" wrote: Hello, We have a indigenous Plasma Immersion Ion Implantation system in our lab which is capable to P(B2H6) and n(PH3) type of implantation. We are not using the load lock for loading/Unloading the sample, Execute this by venting the process chamber to atmosphere. Before unloading the sample we do the pump purge with N2 gas for five times. Is the above procedure followed by us is a standard procedure or do we need to follow some more safety precautions before opening the chamber. Please advise. -- Thanks& Regards, V.RAJENDRA PRASAD Lab Manager, CEN,IITBNF, Electrical Engg Dept, Annexe, IIT Bombay, Mumbai, Powai- 400076 Tel No.+91 9930621667 -------------- next part -------------- An HTML attachment was scrubbed... URL: From vanaparthy at ee.iitb.ac.in Tue Mar 25 21:46:50 2014 From: vanaparthy at ee.iitb.ac.in (vanaparthy at ee.iitb.ac.in) Date: Wed, 26 Mar 2014 07:16:50 +0530 (IST) Subject: [labnetwork] Query on safety concern In-Reply-To: <5331A7E3.6000308@cns.fas.harvard.edu> References: <73a2058355e25cb0f567e96b7fbe6710.squirrel@sandesh.ee.iitb.ac.in> <5331A7E3.6000308@cns.fas.harvard.edu> Message-ID: <5fb0a2d27604817a58386152629c10cf.squirrel@sandesh.ee.iitb.ac.in> Hi Mac, Thanks. Can some one suggest, 1.For plasma post treatment that would de-activate the phosphine/diborane before opening the reactor each time with out effecting samples. 2. Is there any best known procedure is there for number of pump/purge cycles before opening the reactor each time. -- Thanks & Regards, V.RAJENDRA PRASAD Lab Manager, CEN,IITBNF, Electrical Engg Dept, Annexe, IIT Bombay, Mumbai, Powai- 400076 Tel No. 9930621667 > Hi V, > > So, I'm sure others here have more direct experience with diborane and > phosphine systems than I have, but just to clarify a couple of points: > > Do you /have/ a load-lock on this system? When you say indigenous, you > mean more or less "home-built", yes? > > If you have a load-lock, why do you prefer not to use it? If this unit > is home-built, perhaps it does not have some of the more advanced > features of a commercial unit, such as gas-flow interlocks, to prevent > flow of gases into the chamber when the chamber is open. If it does not > have such interlocks, you have a very dangerous system on your hands, > which perhaps could be retrofitted with these features. > > To re-emphasize what Len said, I would venture to say diborane and > phosphine are among the most deadly gases in most cleanrooms. You > really want to consider this when coming up with your operating > procedures. Opening phospine/diborane process chambers, for whatever > reason, is typically a very involved procedure, which very carefully > defined steps to maximize safety and minimize exposure to the gases > involved (including lingering chamber fumes). > > I haven't found any particular ones in discussions here, but there may > be some plasma post treatment that would de-activate the > phosphine/diborane before opening the reactor each time. Otherwise, > just lots of pump/purge cycles. For regular sample loading, a load-lock > would be best. > > If you can forward more details about this system, I think it will be > easier to give you some better suggestions. > > > Mac Hathaway > Process Engineer and Safety Officer > Center for Nanoscale Systems > Harvard University > > > > On 3/24/2014 7:43 PM, vanaparthy at ee.iitb.ac.in wrote: >> Hi Leonard , >> Thanks,We installed Gas detection system in loading >> area to take care of any issue with toxic gas is detected,appropriate >> alarms and evacuations will be initiated. >> >> > V, > > Diborane and Phosphine gases are very toxic and deadly... > > I'm not sure why you are not using the ll's for sample transfer. It would > appear that an SOP would employ the use of load locks to create a barrier > between the reaction chamber and the outside world. I would be concerned > about a failure in your gas delivery system or even outgassing during the > opening of the process chamber. > > 5X N2 pump purges in my opinion is not nearly enough. A typical pump > purge for toxic gas cylinder changes is at least 25x. Are you using a > Nederman style snorkel exhaust or any fume exhaust abatement whilst > unloading your samples? Are you using any PPE or supplied air masks? > > You may want to consider keeping your process chamber under vacuum to keep > its integrity. Ambient moisture from atmosphere upon opening the chamber > will surely create unwanted fumes and contaminates. > > How large is chamber? > > Thank you, > > -Len > > Leonard E. Olona > University Cleanroom Manager > University of Oklahoma > 110 West Boyd Street Rm 550 > Norman, Oklahoma 73019 > D: +1- 405 325-4374 > C: +1- 405 630-9068 > F: +1- 405 325-7066 > > > > > > > > > > > On 3/24/14 10:40 AM,"vanaparthy at ee.iitb.ac.in" > wrote: > > > Hello, > > > We have a indigenous Plasma Immersion Ion Implantation system in our lab > which is capable to P(B2H6) and n(PH3) type of implantation. We are not > using the load lock for loading/Unloading the sample, Execute this by > venting the process chamber to atmosphere. Before unloading the sample we > do the pump purge with N2 gas for five times. > > Is the above procedure followed by us is a standard procedure or do we > need to follow some more safety precautions before opening the chamber. > > Please advise. > > > > -- > Thanks& Regards, > V.RAJENDRA PRASAD > Lab Manager, > CEN,IITBNF, Electrical Engg Dept, Annexe, > IIT Bombay, Mumbai, Powai- 400076 > Tel No.+91 9930621667 > > > > > > >